CN101107536A - 电路图案检查装置及其方法 - Google Patents

电路图案检查装置及其方法 Download PDF

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Publication number
CN101107536A
CN101107536A CNA200680002739XA CN200680002739A CN101107536A CN 101107536 A CN101107536 A CN 101107536A CN A200680002739X A CNA200680002739X A CN A200680002739XA CN 200680002739 A CN200680002739 A CN 200680002739A CN 101107536 A CN101107536 A CN 101107536A
Authority
CN
China
Prior art keywords
mentioned
conductive pattern
signal
pattern
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA200680002739XA
Other languages
English (en)
Chinese (zh)
Inventor
羽森宽
山冈秀嗣
石冈圣悟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OHT Inc
Original Assignee
OHT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OHT Inc filed Critical OHT Inc
Publication of CN101107536A publication Critical patent/CN101107536A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/30—Structural combination of electric measuring instruments with basic electronic circuits, e.g. with amplifier
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
    • G01R17/02—Arrangements in which the value to be measured is automatically compared with a reference value
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/145—Indicating the presence of current or voltage
    • G01R19/15—Indicating the presence of current
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2829—Testing of circuits in sensor or actuator systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/52—Testing for short-circuits, leakage current or ground faults
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/312—Contactless testing by capacitive methods

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
CNA200680002739XA 2005-01-19 2006-01-18 电路图案检查装置及其方法 Pending CN101107536A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005012007A JP2006200993A (ja) 2005-01-19 2005-01-19 回路パターン検査装置およびその方法
JP012007/2005 2005-01-19

Publications (1)

Publication Number Publication Date
CN101107536A true CN101107536A (zh) 2008-01-16

Family

ID=36692412

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA200680002739XA Pending CN101107536A (zh) 2005-01-19 2006-01-18 电路图案检查装置及其方法

Country Status (5)

Country Link
JP (1) JP2006200993A (fr)
KR (1) KR20070104418A (fr)
CN (1) CN101107536A (fr)
TW (2) TW200632338A (fr)
WO (1) WO2006078043A1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101109782B (zh) * 2006-07-20 2011-08-17 微探测株式会社 非接触型单面探测设备及测试开路或短路的装置和方法
CN102261886A (zh) * 2011-04-21 2011-11-30 广州市香港科大霍英东研究院 一种电容式塑料制品扫描检测系统
CN102759679A (zh) * 2011-04-27 2012-10-31 株式会社联箭技术 导电图案检查装置
CN102788924A (zh) * 2011-05-20 2012-11-21 株式会社联箭技术 导电图案检查装置
CN105259463A (zh) * 2015-11-06 2016-01-20 天津普林电路股份有限公司 一种高密度积层板覆铜线路层短路点和断路点测试方法
WO2016015300A1 (fr) * 2014-07-29 2016-02-04 深圳市华星光电技术有限公司 Dispositif de test et procédé de test associé
CN106102441A (zh) * 2016-08-09 2016-11-09 深圳翠涛自动化设备股份有限公司 一种焊线机的断线检测系统及方法
CN104237720B (zh) * 2013-06-07 2017-05-17 英飞凌科技股份有限公司 用于半导体封装的电容测试方法、装置和系统
CN108226695A (zh) * 2018-01-02 2018-06-29 京东方科技集团股份有限公司 邻近金属线短路的检测及定位装置和方法
CN110118817A (zh) * 2019-05-31 2019-08-13 云谷（固安）科技有限公司 导线检测装置及其检测方法
WO2021057143A1 (fr) * 2019-09-29 2021-04-01 云谷（固安）科技有限公司 Dispositif et système d'inspection d'écran à effleurement

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009080042A (ja) * 2007-09-26 2009-04-16 Oht Inc 回路パターン検査装置
JP4723664B2 (ja) * 2009-08-17 2011-07-13 株式会社エフカム 導電パターン検査装置及び検査方法
KR101300465B1 (ko) * 2012-02-06 2013-08-27 로체 시스템즈(주) 비접촉식 전극패턴 검사장치
KR101316537B1 (ko) * 2012-02-06 2013-10-15 로체 시스템즈(주) 비접촉식 어레이형 전극패턴 검사장치
CN105548752B (zh) * 2015-12-09 2018-06-26 上海华岭集成电路技术股份有限公司 可提高激励信号信噪比的测试系统
TWI712317B (zh) * 2019-02-22 2020-12-01 興城科技股份有限公司 用於檢查玻璃基板的開路/短路檢查機及其檢查方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4246987B2 (ja) * 2002-11-27 2009-04-02 日本電産リード株式会社 基板検査装置および基板検査方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101109782B (zh) * 2006-07-20 2011-08-17 微探测株式会社 非接触型单面探测设备及测试开路或短路的装置和方法
CN102261886A (zh) * 2011-04-21 2011-11-30 广州市香港科大霍英东研究院 一种电容式塑料制品扫描检测系统
CN102759679A (zh) * 2011-04-27 2012-10-31 株式会社联箭技术 导电图案检查装置
CN102759679B (zh) * 2011-04-27 2014-08-06 株式会社联箭技术 导电图案检查装置
CN102788924A (zh) * 2011-05-20 2012-11-21 株式会社联箭技术 导电图案检查装置
CN102788924B (zh) * 2011-05-20 2014-09-17 株式会社联箭技术 导电图案检查装置
CN104237720B (zh) * 2013-06-07 2017-05-17 英飞凌科技股份有限公司 用于半导体封装的电容测试方法、装置和系统
WO2016015300A1 (fr) * 2014-07-29 2016-02-04 深圳市华星光电技术有限公司 Dispositif de test et procédé de test associé
CN105259463A (zh) * 2015-11-06 2016-01-20 天津普林电路股份有限公司 一种高密度积层板覆铜线路层短路点和断路点测试方法
CN106102441A (zh) * 2016-08-09 2016-11-09 深圳翠涛自动化设备股份有限公司 一种焊线机的断线检测系统及方法
CN108226695A (zh) * 2018-01-02 2018-06-29 京东方科技集团股份有限公司 邻近金属线短路的检测及定位装置和方法
CN110118817A (zh) * 2019-05-31 2019-08-13 云谷（固安）科技有限公司 导线检测装置及其检测方法
WO2021057143A1 (fr) * 2019-09-29 2021-04-01 云谷（固安）科技有限公司 Dispositif et système d'inspection d'écran à effleurement
US11860219B2 (en) 2019-09-29 2024-01-02 Yungu (Gu'an) Technology Co., Ltd. Device and system for detecting touch panel

Also Published As

Publication number Publication date
KR20070104418A (ko) 2007-10-25
TW200632338A (en) 2006-09-16
TWI429924B (zh) 2014-03-11
WO2006078043A1 (fr) 2006-07-27
TW201321770A (zh) 2013-06-01
JP2006200993A (ja) 2006-08-03

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Open date: 20080116