JP2006005176A5 - - Google Patents
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- Publication number
- JP2006005176A5 JP2006005176A5 JP2004180245A JP2004180245A JP2006005176A5 JP 2006005176 A5 JP2006005176 A5 JP 2006005176A5 JP 2004180245 A JP2004180245 A JP 2004180245A JP 2004180245 A JP2004180245 A JP 2004180245A JP 2006005176 A5 JP2006005176 A5 JP 2006005176A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- insulating layer
- layer
- sputtering
- wiring circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims 38
- 239000002184 metal Substances 0.000 claims 38
- 239000000758 substrate Substances 0.000 claims 8
- 238000004544 sputter deposition Methods 0.000 claims 7
- 150000002739 metals Chemical class 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910000599 Cr alloy Inorganic materials 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 239000000788 chromium alloy Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004180245A JP3962039B2 (ja) | 2004-06-17 | 2004-06-17 | 配線回路形成用基板、配線回路基板および金属薄層の形成方法 |
| EP05010861A EP1608211A3 (en) | 2004-06-17 | 2005-05-19 | Wired circuit forming board, wired circuit board and thin metal layer forming method |
| US11/147,345 US7417316B2 (en) | 2004-06-17 | 2005-06-08 | Wired circuit forming board, wired circuit board, and thin metal layer forming method |
| TW094119239A TWI350721B (en) | 2004-06-17 | 2005-06-10 | Substrate for forming printed circuit, printed circuit board and method of forming metallic thin layer thereon |
| KR1020050051930A KR101120526B1 (ko) | 2004-06-17 | 2005-06-16 | 배선 회로 형성용 기판, 배선 회로 기판 및 금속박층의형성 방법 |
| CN2005100811017A CN1725933B (zh) | 2004-06-17 | 2005-06-17 | 布线电路形成用基板、布线电路基板以及金属薄层的形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004180245A JP3962039B2 (ja) | 2004-06-17 | 2004-06-17 | 配線回路形成用基板、配線回路基板および金属薄層の形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006005176A JP2006005176A (ja) | 2006-01-05 |
| JP2006005176A5 true JP2006005176A5 (https=) | 2006-06-15 |
| JP3962039B2 JP3962039B2 (ja) | 2007-08-22 |
Family
ID=34936692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004180245A Expired - Fee Related JP3962039B2 (ja) | 2004-06-17 | 2004-06-17 | 配線回路形成用基板、配線回路基板および金属薄層の形成方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7417316B2 (https=) |
| EP (1) | EP1608211A3 (https=) |
| JP (1) | JP3962039B2 (https=) |
| KR (1) | KR101120526B1 (https=) |
| CN (1) | CN1725933B (https=) |
| TW (1) | TWI350721B (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7804172B2 (en) * | 2006-01-10 | 2010-09-28 | Halliburton Energy Services, Inc. | Electrical connections made with dissimilar metals |
| CN101489346B (zh) * | 2008-01-15 | 2011-11-16 | 欣兴电子股份有限公司 | 线路板的图案化结构 |
| TWI398933B (zh) * | 2008-03-05 | 2013-06-11 | 榮創能源科技股份有限公司 | 積體電路元件之封裝結構及其製造方法 |
| FR2943072B1 (fr) * | 2009-03-12 | 2019-08-16 | Centre National De La Recherche Scientifique Cnrs | Decoration par pulverisation plasma magnetron sur des contenants en verre pour les secteurs de la cosmetique. |
| CN101840988A (zh) * | 2010-04-22 | 2010-09-22 | 傲迪特半导体(南京)有限公司 | 汽车前大灯发热pcb基台及其制作方法 |
| EP3030061B1 (en) * | 2013-07-29 | 2021-01-06 | Kyocera Corporation | Wiring substrate, wiring substrate with lead, and electronic device |
| TWI488549B (zh) * | 2014-03-07 | 2015-06-11 | Azotek Co Ltd | 金屬基板及其製作方法 |
| JP2015133167A (ja) * | 2015-04-22 | 2015-07-23 | 大日本印刷株式会社 | サスペンション用基板、サスペンション、素子付サスペンション、およびハードディスクドライブ |
| US10180708B2 (en) | 2016-05-24 | 2019-01-15 | Microsoft Technology Licensing, Llc | Curved circuit board |
| KR20180058626A (ko) * | 2016-11-24 | 2018-06-01 | 주식회사 아모그린텍 | 평판 케이블 제조 방법 |
| CN108055790B (zh) * | 2017-12-06 | 2019-10-18 | 深圳市和美源电子有限公司 | 一种电路板及其制作方法和应用 |
| KR102847046B1 (ko) * | 2019-05-08 | 2025-08-18 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1097234B (de) * | 1958-06-26 | 1961-01-12 | Bosch Gmbh Robert | Verfahren zum UEberziehen von Gegenstaenden mit Silber durch Aufdampfen im Vakuum unter Verwendung einer hafterhoehenden Chromzwischenschicht |
| LU46411A1 (https=) * | 1964-06-27 | 1972-01-01 | ||
| US3881884A (en) * | 1973-10-12 | 1975-05-06 | Ibm | Method for the formation of corrosion resistant electronic interconnections |
| US4917963A (en) * | 1988-10-28 | 1990-04-17 | Andus Corporation | Graded composition primer layer |
| JPH0382188A (ja) * | 1989-08-25 | 1991-04-08 | Kyocera Corp | セラミック配線基板の製造方法 |
| JPH04235272A (ja) | 1991-01-11 | 1992-08-24 | Kobe Steel Ltd | 耐食性及び加工性に優れた蒸着Al−Mn系合金めっき材およびその製造方法 |
| JP3422371B2 (ja) | 1993-01-13 | 2003-06-30 | 石川島播磨重工業株式会社 | 連続真空蒸着方法 |
| US5874174A (en) * | 1995-08-09 | 1999-02-23 | Matsushita Electric Industrial Co., Ltd. | Conductor film and its forming method |
| JPH1192579A (ja) | 1997-09-19 | 1999-04-06 | Nitto Denko Corp | 有機基材のプラズマ処理方法及び有機基材への金属層形成方法 |
| JPH11158613A (ja) | 1997-12-01 | 1999-06-15 | Canon Inc | 電極基板、及び該電極基板の製造方法 |
| US6328858B1 (en) * | 1998-10-01 | 2001-12-11 | Nexx Systems Packaging, Llc | Multi-layer sputter deposition apparatus |
| JP4430165B2 (ja) | 1999-09-02 | 2010-03-10 | 日東電工株式会社 | 真空薄膜形成装置および真空薄膜形成方法 |
| JP2003318533A (ja) | 2002-04-24 | 2003-11-07 | Toyo Metallizing Co Ltd | フレキシブルプリント配線用基板 |
| TW587322B (en) * | 2002-12-31 | 2004-05-11 | Phoenix Prec Technology Corp | Substrate with stacked via and fine circuit thereon, and method for fabricating the same |
-
2004
- 2004-06-17 JP JP2004180245A patent/JP3962039B2/ja not_active Expired - Fee Related
-
2005
- 2005-05-19 EP EP05010861A patent/EP1608211A3/en not_active Withdrawn
- 2005-06-08 US US11/147,345 patent/US7417316B2/en not_active Expired - Fee Related
- 2005-06-10 TW TW094119239A patent/TWI350721B/zh not_active IP Right Cessation
- 2005-06-16 KR KR1020050051930A patent/KR101120526B1/ko not_active Expired - Fee Related
- 2005-06-17 CN CN2005100811017A patent/CN1725933B/zh not_active Expired - Fee Related
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