KR101120526B1 - 배선 회로 형성용 기판, 배선 회로 기판 및 금속박층의형성 방법 - Google Patents

배선 회로 형성용 기판, 배선 회로 기판 및 금속박층의형성 방법 Download PDF

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Publication number
KR101120526B1
KR101120526B1 KR1020050051930A KR20050051930A KR101120526B1 KR 101120526 B1 KR101120526 B1 KR 101120526B1 KR 1020050051930 A KR1020050051930 A KR 1020050051930A KR 20050051930 A KR20050051930 A KR 20050051930A KR 101120526 B1 KR101120526 B1 KR 101120526B1
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KR
South Korea
Prior art keywords
metal
layer
copper
chromium
metal foil
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Expired - Fee Related
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KR1020050051930A
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English (en)
Korean (ko)
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KR20060049235A (ko
Inventor
도시키 나이토
히로시 야마자키
Original Assignee
닛토덴코 가부시키가이샤
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0338—Layered conductor, e.g. layered metal substrate, layered finish layer or layered thin film adhesion layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Physical Vapour Deposition (AREA)
  • Structure Of Printed Boards (AREA)
KR1020050051930A 2004-06-17 2005-06-16 배선 회로 형성용 기판, 배선 회로 기판 및 금속박층의형성 방법 Expired - Fee Related KR101120526B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00180245 2004-06-17
JP2004180245A JP3962039B2 (ja) 2004-06-17 2004-06-17 配線回路形成用基板、配線回路基板および金属薄層の形成方法

Publications (2)

Publication Number Publication Date
KR20060049235A KR20060049235A (ko) 2006-05-18
KR101120526B1 true KR101120526B1 (ko) 2012-02-24

Family

ID=34936692

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050051930A Expired - Fee Related KR101120526B1 (ko) 2004-06-17 2005-06-16 배선 회로 형성용 기판, 배선 회로 기판 및 금속박층의형성 방법

Country Status (6)

Country Link
US (1) US7417316B2 (https=)
EP (1) EP1608211A3 (https=)
JP (1) JP3962039B2 (https=)
KR (1) KR101120526B1 (https=)
CN (1) CN1725933B (https=)
TW (1) TWI350721B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7804172B2 (en) * 2006-01-10 2010-09-28 Halliburton Energy Services, Inc. Electrical connections made with dissimilar metals
CN101489346B (zh) * 2008-01-15 2011-11-16 欣兴电子股份有限公司 线路板的图案化结构
TWI398933B (zh) * 2008-03-05 2013-06-11 榮創能源科技股份有限公司 積體電路元件之封裝結構及其製造方法
FR2943072B1 (fr) * 2009-03-12 2019-08-16 Centre National De La Recherche Scientifique Cnrs Decoration par pulverisation plasma magnetron sur des contenants en verre pour les secteurs de la cosmetique.
CN101840988A (zh) * 2010-04-22 2010-09-22 傲迪特半导体(南京)有限公司 汽车前大灯发热pcb基台及其制作方法
EP3030061B1 (en) * 2013-07-29 2021-01-06 Kyocera Corporation Wiring substrate, wiring substrate with lead, and electronic device
TWI488549B (zh) * 2014-03-07 2015-06-11 Azotek Co Ltd 金屬基板及其製作方法
JP2015133167A (ja) * 2015-04-22 2015-07-23 大日本印刷株式会社 サスペンション用基板、サスペンション、素子付サスペンション、およびハードディスクドライブ
US10180708B2 (en) 2016-05-24 2019-01-15 Microsoft Technology Licensing, Llc Curved circuit board
KR20180058626A (ko) * 2016-11-24 2018-06-01 주식회사 아모그린텍 평판 케이블 제조 방법
CN108055790B (zh) * 2017-12-06 2019-10-18 深圳市和美源电子有限公司 一种电路板及其制作方法和应用
KR102847046B1 (ko) * 2019-05-08 2025-08-18 삼성디스플레이 주식회사 표시 장치 및 표시 장치의 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04235272A (ja) * 1991-01-11 1992-08-24 Kobe Steel Ltd 耐食性及び加工性に優れた蒸着Ａｌ−Ｍｎ系合金めっき材およびその製造方法
JPH06212410A (ja) * 1993-01-13 1994-08-02 Ishikawajima Harima Heavy Ind Co Ltd 連続真空蒸着方法
JPH11158613A (ja) * 1997-12-01 1999-06-15 Canon Inc 電極基板、及び該電極基板の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1097234B (de) * 1958-06-26 1961-01-12 Bosch Gmbh Robert Verfahren zum UEberziehen von Gegenstaenden mit Silber durch Aufdampfen im Vakuum unter Verwendung einer hafterhoehenden Chromzwischenschicht
LU46411A1 (https=) * 1964-06-27 1972-01-01
US3881884A (en) * 1973-10-12 1975-05-06 Ibm Method for the formation of corrosion resistant electronic interconnections
US4917963A (en) * 1988-10-28 1990-04-17 Andus Corporation Graded composition primer layer
JPH0382188A (ja) * 1989-08-25 1991-04-08 Kyocera Corp セラミック配線基板の製造方法
US5874174A (en) * 1995-08-09 1999-02-23 Matsushita Electric Industrial Co., Ltd. Conductor film and its forming method
JPH1192579A (ja) 1997-09-19 1999-04-06 Nitto Denko Corp 有機基材のプラズマ処理方法及び有機基材への金属層形成方法
US6328858B1 (en) * 1998-10-01 2001-12-11 Nexx Systems Packaging, Llc Multi-layer sputter deposition apparatus
JP4430165B2 (ja) 1999-09-02 2010-03-10 日東電工株式会社 真空薄膜形成装置および真空薄膜形成方法
JP2003318533A (ja) 2002-04-24 2003-11-07 Toyo Metallizing Co Ltd フレキシブルプリント配線用基板
TW587322B (en) * 2002-12-31 2004-05-11 Phoenix Prec Technology Corp Substrate with stacked via and fine circuit thereon, and method for fabricating the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04235272A (ja) * 1991-01-11 1992-08-24 Kobe Steel Ltd 耐食性及び加工性に優れた蒸着Ａｌ−Ｍｎ系合金めっき材およびその製造方法
JPH06212410A (ja) * 1993-01-13 1994-08-02 Ishikawajima Harima Heavy Ind Co Ltd 連続真空蒸着方法
JPH11158613A (ja) * 1997-12-01 1999-06-15 Canon Inc 電極基板、及び該電極基板の製造方法

Also Published As

Publication number Publication date
EP1608211A2 (en) 2005-12-21
US7417316B2 (en) 2008-08-26
TW200601921A (en) 2006-01-01
CN1725933A (zh) 2006-01-25
JP3962039B2 (ja) 2007-08-22
CN1725933B (zh) 2010-10-06
EP1608211A3 (en) 2007-10-17
KR20060049235A (ko) 2006-05-18
TWI350721B (en) 2011-10-11
JP2006005176A (ja) 2006-01-05
US20050280153A1 (en) 2005-12-22

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