JP2005539375A5 - - Google Patents

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Publication number
JP2005539375A5
JP2005539375A5 JP2004531639A JP2004531639A JP2005539375A5 JP 2005539375 A5 JP2005539375 A5 JP 2005539375A5 JP 2004531639 A JP2004531639 A JP 2004531639A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2005539375 A5 JP2005539375 A5 JP 2005539375A5
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JP
Japan
Prior art keywords
manifold
substrate
port
channel
ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004531639A
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English (en)
Japanese (ja)
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JP2005539375A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2003/026979 external-priority patent/WO2004021412A2/en
Publication of JP2005539375A publication Critical patent/JP2005539375A/ja
Publication of JP2005539375A5 publication Critical patent/JP2005539375A5/ja
Pending legal-status Critical Current

Links

JP2004531639A 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Pending JP2005539375A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
PCT/US2003/026979 WO2004021412A2 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Publications (2)

Publication Number Publication Date
JP2005539375A JP2005539375A (ja) 2005-12-22
JP2005539375A5 true JP2005539375A5 (enExample) 2006-10-12

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004531639A Pending JP2005539375A (ja) 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル

Country Status (8)

Country Link
US (2) US7334605B2 (enExample)
EP (1) EP1543544A2 (enExample)
JP (1) JP2005539375A (enExample)
KR (1) KR20060017577A (enExample)
CN (1) CN100396980C (enExample)
AU (1) AU2003262953A1 (enExample)
TW (1) TWI244669B (enExample)
WO (1) WO2004021412A2 (enExample)

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JP2015201646A (ja) 2014-04-07 2015-11-12 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 構成独立型のガス供給システム
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
KR20190116372A (ko) * 2017-03-15 2019-10-14 가부시키가이샤 후지킨 조인트 및 유체 제어 장치
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
TW202138950A (zh) * 2020-04-09 2021-10-16 日商堀場Ｓｔｅｃ股份有限公司 流體控制裝置

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