TWI244669B - System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate - Google Patents
System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate Download PDFInfo
- Publication number
- TWI244669B TWI244669B TW92123545A TW92123545A TWI244669B TW I244669 B TWI244669 B TW I244669B TW 92123545 A TW92123545 A TW 92123545A TW 92123545 A TW92123545 A TW 92123545A TW I244669 B TWI244669 B TW I244669B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- manifold
- port
- groove
- item
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims description 428
- 239000007789 gas Substances 0.000 title claims description 178
- 239000012530 fluid Substances 0.000 title claims description 134
- 238000009826 distribution Methods 0.000 title claims description 44
- 238000000034 method Methods 0.000 title claims description 32
- 238000009434 installation Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- 238000010926 purge Methods 0.000 claims description 14
- 238000004891 communication Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 12
- 239000002689 soil Substances 0.000 claims description 12
- 230000009471 action Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 4
- 241001674048 Phthiraptera Species 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 210000000988 bone and bone Anatomy 0.000 claims description 2
- 238000005755 formation reaction Methods 0.000 claims 2
- 235000004936 Bromus mango Nutrition 0.000 claims 1
- 240000007228 Mangifera indica Species 0.000 claims 1
- 235000014826 Mangifera indica Nutrition 0.000 claims 1
- 241000282320 Panthera leo Species 0.000 claims 1
- 244000046052 Phaseolus vulgaris Species 0.000 claims 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 claims 1
- 235000009184 Spondias indica Nutrition 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 230000003796 beauty Effects 0.000 claims 1
- 239000008280 blood Substances 0.000 claims 1
- 210000004369 blood Anatomy 0.000 claims 1
- 210000000481 breast Anatomy 0.000 claims 1
- 230000019771 cognition Effects 0.000 claims 1
- 235000020243 first infant milk formula Nutrition 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000001568 sexual effect Effects 0.000 claims 1
- 210000000952 spleen Anatomy 0.000 claims 1
- 238000012545 processing Methods 0.000 description 59
- 238000007667 floating Methods 0.000 description 21
- 238000002156 mixing Methods 0.000 description 11
- 238000007789 sealing Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 210000002445 nipple Anatomy 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 3
- 230000013011 mating Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910000856 hastalloy Inorganic materials 0.000 description 2
- 239000011499 joint compound Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000008267 milk Substances 0.000 description 2
- 210000004080 milk Anatomy 0.000 description 2
- 235000013336 milk Nutrition 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
- -1 316) Inorganic materials 0.000 description 1
- 241000283690 Bos taurus Species 0.000 description 1
- 241001122767 Theaceae Species 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000009717 reactive processing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
- 239000008832 zhongfu Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Valve Housings (AREA)
- Fluid-Pressure Circuits (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US40613202P | 2002-08-27 | 2002-08-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200419630A TW200419630A (en) | 2004-10-01 |
| TWI244669B true TWI244669B (en) | 2005-12-01 |
Family
ID=31978264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW92123545A TWI244669B (en) | 2002-08-27 | 2003-08-27 | System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7334605B2 (enExample) |
| EP (1) | EP1543544A2 (enExample) |
| JP (1) | JP2005539375A (enExample) |
| KR (1) | KR20060017577A (enExample) |
| CN (1) | CN100396980C (enExample) |
| AU (1) | AU2003262953A1 (enExample) |
| TW (1) | TWI244669B (enExample) |
| WO (1) | WO2004021412A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8555460B2 (en) | 2008-12-26 | 2013-10-15 | Lg Display Co., Ltd. | Apparatus for cleaning substrate |
| TWI476341B (zh) * | 2007-06-11 | 2015-03-11 | Lam Res Corp | 整合之氣體系統氣體控制盤用之變通性歧管 |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100396980C (zh) * | 2002-08-27 | 2008-06-25 | 迅捷公司 | 在公共平面中有歧管连接的模块式衬底配气板 |
| CA2507589A1 (en) * | 2002-11-26 | 2004-06-10 | Swagelok Company | Modular surface mount fluid system |
| US6874538B2 (en) * | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
| US7178556B2 (en) * | 2003-08-07 | 2007-02-20 | Parker-Hannifin Corporation | Modular component connector substrate assembly system |
| CN1887029A (zh) * | 2003-11-07 | 2006-12-27 | 迅捷公司 | 表面安装的加热器 |
| EP1744131A1 (en) * | 2005-07-15 | 2007-01-17 | Indufil B.V. | Module for a gas system |
| JP4780555B2 (ja) * | 2005-09-12 | 2011-09-28 | 株式会社フジキン | 流体制御装置 |
| JP4780558B2 (ja) * | 2005-12-09 | 2011-09-28 | 株式会社フジキン | 流体制御装置用継手およびそれを用いた流体制御装置 |
| JP4755498B2 (ja) * | 2006-01-06 | 2011-08-24 | 東京エレクトロン株式会社 | 加熱装置及び加熱方法 |
| US7575616B2 (en) | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
| US7784497B2 (en) * | 2007-07-12 | 2010-08-31 | Eriksson Mark L | MSM component and associated gas panel assembly |
| JP5000469B2 (ja) * | 2007-12-05 | 2012-08-15 | 株式会社キッツエスシーティー | 容器用ブロックバルブ |
| US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
| TWI534922B (zh) * | 2009-06-10 | 2016-05-21 | 威士塔戴爾泰克有限責任公司 | 極端流量和／或高溫流體輸送基板 |
| KR101097509B1 (ko) * | 2009-07-17 | 2011-12-22 | 주식회사 엠엠티 | 기판 세정장치 |
| US8336573B2 (en) | 2010-03-10 | 2012-12-25 | Coast Pneumatics, Inc. | Modular manifold with quick disconnect valve fittings |
| WO2011112515A2 (en) * | 2010-03-10 | 2011-09-15 | Coast Pneumatics, Inc. | Modular manifold with quick disconnect valve fittings |
| US8327879B2 (en) | 2010-03-10 | 2012-12-11 | Coast Pneumatics, Inc. | Modular manifold with quick disconnect valve fittings |
| US8333214B2 (en) | 2010-03-10 | 2012-12-18 | Coast Pneumatics, Inc. | Modular manifold with quick disconnect valve fittings |
| US9074686B2 (en) | 2010-12-06 | 2015-07-07 | Microflex Technologies Llc | Ring seal retainer assembly and methods |
| US9114788B2 (en) * | 2011-01-27 | 2015-08-25 | Wabtec Holding Corp. | Manifold joint seal |
| JP5277278B2 (ja) * | 2011-03-29 | 2013-08-28 | 株式会社フジキン | 流体制御装置用継手 |
| WO2012151292A2 (en) | 2011-05-02 | 2012-11-08 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
| US9188990B2 (en) * | 2011-10-05 | 2015-11-17 | Horiba Stec, Co., Ltd. | Fluid mechanism, support member constituting fluid mechanism and fluid control system |
| US9091397B2 (en) | 2012-03-27 | 2015-07-28 | Lam Research Corporation | Shared gas panels in plasma processing chambers employing multi-zone gas feeds |
| US8851113B2 (en) * | 2012-03-27 | 2014-10-07 | Lam Research Coporation | Shared gas panels in plasma processing systems |
| JP6175300B2 (ja) * | 2013-07-17 | 2017-08-02 | 株式会社フジキン | 流体制御装置用継手部材および流体制御装置 |
| KR102544885B1 (ko) | 2014-04-07 | 2023-06-16 | 램 리써치 코포레이션 | 구성 독립된 가스 전달 시스템 |
| US10557197B2 (en) | 2014-10-17 | 2020-02-11 | Lam Research Corporation | Monolithic gas distribution manifold and various construction techniques and use cases therefor |
| US10022689B2 (en) | 2015-07-24 | 2018-07-17 | Lam Research Corporation | Fluid mixing hub for semiconductor processing tool |
| US10118263B2 (en) | 2015-09-02 | 2018-11-06 | Lam Researech Corporation | Monolithic manifold mask and substrate concepts |
| US9879795B2 (en) | 2016-01-15 | 2018-01-30 | Lam Research Corporation | Additively manufactured gas distribution manifold |
| US10215317B2 (en) | 2016-01-15 | 2019-02-26 | Lam Research Corporation | Additively manufactured gas distribution manifold |
| WO2018079288A1 (ja) * | 2016-10-24 | 2018-05-03 | 株式会社フジキン | 流体制御装置およびこの流体制御装置を用いた製品製造方法 |
| WO2018168559A1 (ja) * | 2017-03-15 | 2018-09-20 | 株式会社フジキン | 継手および流体制御装置 |
| CN120473408A (zh) * | 2019-04-15 | 2025-08-12 | 朗姆研究公司 | 用于气体输送的模块部件系统 |
| JP7333944B2 (ja) * | 2019-06-27 | 2023-08-28 | 株式会社フジキン | 流体制御装置 |
| US11537150B2 (en) * | 2020-04-09 | 2022-12-27 | Horiba Stec, Co., Ltd. | Fluid control apparatus |
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| US20050005981A1 (en) | 2003-03-26 | 2005-01-13 | Paul Eidsmore | Modular fluid components and assembly |
| US6874538B2 (en) | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
| US7178556B2 (en) | 2003-08-07 | 2007-02-20 | Parker-Hannifin Corporation | Modular component connector substrate assembly system |
-
2003
- 2003-08-26 CN CNB03822366XA patent/CN100396980C/zh not_active Expired - Fee Related
- 2003-08-26 EP EP20030791902 patent/EP1543544A2/en not_active Withdrawn
- 2003-08-26 US US10/650,102 patent/US7334605B2/en not_active Expired - Fee Related
- 2003-08-26 WO PCT/US2003/026979 patent/WO2004021412A2/en not_active Ceased
- 2003-08-26 AU AU2003262953A patent/AU2003262953A1/en not_active Abandoned
- 2003-08-26 KR KR1020057003181A patent/KR20060017577A/ko not_active Withdrawn
- 2003-08-26 JP JP2004531639A patent/JP2005539375A/ja active Pending
- 2003-08-27 TW TW92123545A patent/TWI244669B/zh not_active IP Right Cessation
-
2005
- 2005-09-21 US US11/232,031 patent/US7225835B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI476341B (zh) * | 2007-06-11 | 2015-03-11 | Lam Res Corp | 整合之氣體系統氣體控制盤用之變通性歧管 |
| US8555460B2 (en) | 2008-12-26 | 2013-10-15 | Lg Display Co., Ltd. | Apparatus for cleaning substrate |
| TWI415693B (zh) * | 2008-12-26 | 2013-11-21 | Lg Display Co Ltd | 清潔基板之裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003262953A8 (en) | 2004-03-19 |
| WO2004021412A3 (en) | 2004-09-02 |
| TW200419630A (en) | 2004-10-01 |
| US7334605B2 (en) | 2008-02-26 |
| CN1682054A (zh) | 2005-10-12 |
| CN100396980C (zh) | 2008-06-25 |
| US20040129324A1 (en) | 2004-07-08 |
| US7225835B2 (en) | 2007-06-05 |
| AU2003262953A1 (en) | 2004-03-19 |
| WO2004021412A2 (en) | 2004-03-11 |
| KR20060017577A (ko) | 2006-02-24 |
| EP1543544A2 (en) | 2005-06-22 |
| JP2005539375A (ja) | 2005-12-22 |
| US20060011247A1 (en) | 2006-01-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |