AU6620600A - Layered block fluid delivery system - Google Patents

Layered block fluid delivery system

Info

Publication number
AU6620600A
AU6620600A AU66206/00A AU6620600A AU6620600A AU 6620600 A AU6620600 A AU 6620600A AU 66206/00 A AU66206/00 A AU 66206/00A AU 6620600 A AU6620600 A AU 6620600A AU 6620600 A AU6620600 A AU 6620600A
Authority
AU
Australia
Prior art keywords
delivery system
fluid delivery
block fluid
layered block
layered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU66206/00A
Inventor
Nhan V. Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML US Inc
Original Assignee
ASML US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML US Inc filed Critical ASML US Inc
Publication of AU6620600A publication Critical patent/AU6620600A/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Coating Apparatus (AREA)
AU66206/00A 1999-09-01 2000-08-03 Layered block fluid delivery system Abandoned AU6620600A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US38821699A 1999-09-01 1999-09-01
US09388216 1999-09-01
PCT/US2000/021227 WO2001016512A1 (en) 1999-09-01 2000-08-03 Layered block fluid delivery system

Publications (1)

Publication Number Publication Date
AU6620600A true AU6620600A (en) 2001-03-26

Family

ID=23533173

Family Applications (1)

Application Number Title Priority Date Filing Date
AU66206/00A Abandoned AU6620600A (en) 1999-09-01 2000-08-03 Layered block fluid delivery system

Country Status (3)

Country Link
AU (1) AU6620600A (en)
TW (1) TW451040B (en)
WO (1) WO2001016512A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10204250A1 (en) * 2002-02-02 2003-08-14 Bosch Gmbh Robert Multiple valve arrangement for flowing media
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
JP2004183771A (en) * 2002-12-03 2004-07-02 Fujikin Inc Fluid control device
JP5096696B2 (en) 2006-03-02 2012-12-12 サーパス工業株式会社 Fluid equipment unit structure
JP2007327542A (en) * 2006-06-07 2007-12-20 Surpass Kogyo Kk Fluid apparatus unit structure
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4022696B2 (en) * 1996-11-20 2007-12-19 忠弘 大見 Circuit breaker

Also Published As

Publication number Publication date
TW451040B (en) 2001-08-21
WO2001016512A1 (en) 2001-03-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase