TW451040B - Layered block fluid delivery system - Google Patents
Layered block fluid delivery system Download PDFInfo
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- TW451040B TW451040B TW89116370A TW89116370A TW451040B TW 451040 B TW451040 B TW 451040B TW 89116370 A TW89116370 A TW 89116370A TW 89116370 A TW89116370 A TW 89116370A TW 451040 B TW451040 B TW 451040B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
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45104 0 a? __B7 五、發明說明（1 ) 發明背景發明領域 <請先閱讀背面之注意事項再填寫本頁) 本發明係關於一種用以將流體输送至一工具機之系統 ，尤其係關於一種用以將流體輸送至一工具機之模組化系 統。 相關技術之說明 用以將流體輸送至工具機之系統係具有各種不同的應 用。舉例來說，使用在某些半導體製程中之化學蒸氣鍍覆 技術便需要將流體輸送至一R T P反應器中。該流體係必 須在非常特定之條件下可以被輸送至R τ P反應器。這些 特定流體條件係可以藉由使用流體输送系統來達成’其中 該流體輸送系統係將流體在输送至R τ p反應器之前先輸 送至數個流體處理元件中°這些流體處理元件通常係可測 量或調整在流體輸送系統中之流體的特性。 典型之流體輸送系統係需要經常修改及校正a許多這 些修改係需要將該流體輸送系統加以拆解’然後再重新組 裝成不同的造型。因此，此流體輸送系統係必須具有高度 可改造性。 經濟部智慧財產局貝工消费合作社印製 流體輸送系統係已經加以模組化以增加其可改造性。 模組化流體輸送系統通常係包括複數個獨立的模組’其係 可以彼此連結在一起，且具有流體處理元件。該模組及流 體處理元件係皆包括一個或以上之通道’其係在該流體_ 送系統組裝之後才彼此對齊。對齊之通道便構成一延伸通 過該流體输送系統之槽道β該延伸槽道係在該流體被输送 -4 - 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公* ) 451 〇4 0 A7 B7 經濟邾智慧財產局貝工浦费合作社印製 五、發明說明（2 ) 至工具機之前，先將流體傳送至流體處理元件。 許多模組化流體輸送系統係需要相當多的模組以維持 其可改造性。該大量的模組通常係會增加該流體輸送系統 在維修上之複雜性。再者，大量的模組亦會增加儲存成本 ，因爲備用的模組通常係需要加以儲存，以做爲該流體輸 送系統之維修保養之用。 另一個與該模組流體輸送系統有關的問題係在於其必 須防止在相鄰模組之間或在模組與流體處理元件之間產生 滲漏《這些滲漏係可以藉由在相鄰模組及/或在模組與相 鄰流體處理元件之間形成一密封件來加以防止。這些密封 件已知係會隨著長久使用時間而破損。在流體輸送系統中 之模組係必須經常地暫時拆除或更換，以童新構成該密封 件。 當一模組需要移除或更換時•習知的流體輸送系統便 會面臨相當大的挑戰。舉例來說，許多流體_送系統在更 換單一模組之前係必須先移開大部分的模組•且/或在移 開單一模組之前，整個流體输送系統係必須先加以拆解。 因此，在這些模組化流體输送系統中，簡單的更換操'作係 相當耗費時間的，且因而需花費相當多的成本β此外’必 須移動之模組數量以及用以進行修改所需花費的長時間’ 係可能會造成該流體輸送系統之污染。 基於上述理由，目前便有需要發展一種模組化流體輸 送系統，其可以輕易地接近、移除及/或更換該模組。亦 有需要發展一種模組化流體輸送系統’其可以降低系統污 (請先鬩讀背面之注意事項再填寫本頁) 裝-------- 訂---1---·!^ν-c L· 本紙張尺度適用國家標率（CNS)A4規格（210 * 297公釐） A7 B7 45104 0 五、發明說明（3 ) 損之機會。此外’亦有需要一種模組化流體輸送系統’其 能以較少的模組數量來保持其可改造性。 發明摘要 本發明係關於一種將流體輸送至一工具機之組件。該 組件係包括一具有兩個或更多上方通道之上方模組。該上 方模組係設計成可以與該流體處理元件相連結’使得該兩 個或更多上方通道之至少其中一通道係與該流體處理元件 形成流體連通°該組件亦包括兩個或更多之下方模組’每 一下方模組皆具有至少一下方通道。該兩個或更多之下方 模組係設計成可以同時與該上方模組相連結’使得由每一 下方模組延伸出之下方通道可以與上方模組之不同的上方 通道形成流體連通。 該組件之另一實施例係包括兩個或更多之上方模組1 每一上方模組係具有雨個或更多之上方通道。每一上方模 組係設計成可以與不同的流體處理元件相連結’使得每一 上方模組之兩個或更多上方通道之至少其中一通道係與該 流體處理元件形成流體連通。一具有一下方通道之下方模 組係設計成可以同時與該兩個或更多上方模組之每—上方 模組相連結，使得一上方模組之其中一通道係經由該下方 模組之下方通道而與另一上方模組形成流體連通。 本發明亦關於一種將流體输送至兩流體處理元件之組 件》該組件係包括兩個或以上之上方模組，每一模組係具 有兩個或以上之上方通道。每一上方模組係設計成可以與 本紙張尺度適用困家標準（CNS)A4規格（210 * 297公« ) 請 先 Μ 讀 背 之 注 填 寫 本 頁 經濟部智慧財產局興工消费合作社印製 經濟邨智慧財產局興工消费合作社印製 4510^0 a? _B7 五、發明說明（4 ) 兩流體處理元件之至少其中之一相連結，使得由每一上方 模組延伸出之兩個或以上之上方通道的至少其中之一可以 與該流體處理元件形成流體連通。該組件亦包括一下方模 組，其係具有一下方通道。該下方模組係設計成可以同時 與該兩個或以上之上方模組相連結，使得由第一上方模組 延伸出之上方通道係可以與第二上方模組延伸出之上方通 道經由下方模組之下方通道而形成流體連通。 圖式簡單說明 圖1係本發明之流體输送系統之側視圔。 圖2係本發明之流體输送系統的截面視圖。 圖3係包括一側邊輸送模組與一嘖嘴模組相連結之流 體輸送系統的截面視圖。 圖4係顯示具有一彎曲形狀之流體输送系統的截面視 圖。 圚5 A係顯示一使用在該流體輸送系統中之彎曲模組 〇 圖5 B係圖5 A所示之流體輸送系統的截面視圖。 圖6 A係使用在一流體輸送系統中之彎曲模組之另一 實施例。 圖6 B係圖6 A所示之流體輸送系統的截面視圖。 圖7 A係顯示本發明之一分支模組。 圖7 B係顯示圖7A所示之分支模組使用在流體输送 系統中。 本紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公蹵） ----Γ I I κ I I I illllll^illn--- (請先《讀背面之注$項再瑱寫本頁) 451 〇4 0 A7 B7_ 五、發明說明（5 ) 圖7 C係顯示圖7 B之流體輸送系統的截面視圖。 圖8係顯示一分支模組，其係設計成可以形成一 X形 流體输送系統。 圖9 A係顯示一種用以將流體輸送系統之模組相互連 結在一起之方法。 > 圖9 B係顯示圖9 A之上方模組的上表面。 經濟部智慧財產局興工消费合作社印製 主要元件對照表 1 0 流體输送裝置 1 2 流體處理元件 1 4 流體輸送系統 1 6 基部層體 1 8 下方模組 2 0 平坦表面 2 2 上方模組 2 4 第一中間層體 2 6 第二中間層體上表面 2 8 上表面 3 0 下表面 3 2 平坦部分 3 3 側表面 3 4 通道 3 6 流體孔口 3 8 伸長槽道 <婧先《讀背®之沒意事項再填*本頁) 本紙張尺度適用+國國家標準（CNS>A4现格（210 X 297公爱〉 d51 Ο 4 Ο Α7 五、發明說明（6 ) 經濟部智慧財產局員工消费合作社印製 4 0 A 伸 長 模 組 4 0 B 結 合 模 組 4 0 C 結 α 模 組 4 0 D 終 端 模 組 4 〇 E 整 合 模 組 4 0 F 整 合 模 組 4 0 G 噴 嘴 模 組 4 0 Η 噴 嘴 模 組 4 0 I 橫 向 輸 送 模 組 4 0 J 彎 曲 模 組 4 0 K 轉 變 模 組 4 0 L 分 隔 模 組 4 0 Μ 分 支 模 組 4 0 N 分 支 模 組 4 0 P 分 支 模 組 4 4 扣 件 4 6 未 具 螺 紋 之 穿孔 4 8 螺 孔 5 0 墊 圈 5 2 密封裝置 5 4 墊圈凹部 詳細說明 本發明係關於一種用以將流體輸送至一工具機之裝置 本紙張尺度適用+國國家樣準（CNS)A4规格（210 x 297公* ) <請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局具工消费合作社印製 45 104 0 A7 _B7_ 五、發明說明（7 ) ，組件以及方法。該組件係包括複數個下方模組，其係在 一表面上構成一基部層體。該組件亦包括複數上方模組， 其係可以與下方模組結合在一起而構成一個或多個位在該 基部層體上方之中間層體。該上方模組之至少一部分係可 以與諸如混合閥之流體處理元件相連結=該上方模組、下 方模組以及流體處理元件係可以連結在一起而組裝成一流 體輸送系統。 上方模組、下方模組以及流體處理元件係包括有通道 ，其係可以在系統組裝完成之後彼此相互對齊。這些通道 對齊之後便可形成一個或多個延伸通過該下方層體、一個 或多個中間層體以及流體處理元件之槽道。在流體輸送系 統運轉期間，一流體便可以通過該長形槽道而在被輸送至 工具機之前先經過每一流體處理元件。 在上方及下方模組中之通道係終結在模組水平側之流 體孔口處，尤其係在模組之上表面及/或下表面。在模組 上表面及下表面所配置之流體孔口係可以避免在模組側表 面上開設孔口。因此，相鄰上方模組之側表面及/或相鄰 下方模組之側表面彼此便不會產生實際之接觸，然而其亦 可以形成接觸。由於相鄰模組並未有實際接觸，因此一模 組便可以由基部層體或由中間層體中移出，而不需要將相 鄰之模組由同一層體中移出0 爲了在兩個彼此相鄰而位在同一層體中之下方模組之 間提供流體流通，一上方模組便跨置在兩個下方模組上。 在兩下方模組中之通道便可以經由在上方模組中之通道而 本紙張尺度適用令國國家標準（CNS)A4規格（210 X 297公笼） <靖先閲讀背面之注意事項再填寫本頁)45104 0 a? __B7 V. Description of the invention (1) Background of the invention < Please read the notes on the back before filling out this page) The present invention relates to a system for conveying fluid to a machine tool, especially about A modular system for delivering fluid to a machine tool. Description of the Related Art The systems used to deliver fluids to machine tools have a variety of different applications. For example, chemical vapor plating techniques used in some semiconductor processes require the fluid to be delivered to an RT reactor. The stream system must be able to be transported to the R τ P reactor under very specific conditions. These specific fluid conditions can be achieved through the use of a fluid delivery system where the fluid delivery system delivers the fluid to several fluid processing elements prior to the R τ p reactor. These fluid processing elements are usually measurable Or adjust the characteristics of the fluid in the fluid delivery system. A typical fluid delivery system requires frequent modifications and corrections. Many of these modifications require disassembly of the fluid delivery system and then reassembly to a different shape. Therefore, this fluid delivery system must be highly transformable. Printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economics The fluid delivery system has been modularized to increase its transformability. A modular fluid delivery system usually includes a plurality of independent modules' which can be connected to each other and have a fluid processing element. The module and the fluid processing element each include one or more channels ’which are aligned with each other after the fluid delivery system is assembled. The aligned channels constitute a channel extending through the fluid delivery system β. The extended channel is where the fluid is transported-4-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm *) 451 〇 4 0 A7 B7 Printed by the Economic and Intellectual Property Bureau Bei Gongpu Fei Cooperative V. Invention Description (2) Before transferring to the machine tool, first transfer the fluid to the fluid processing element. Many modular fluid delivery systems require a considerable number of modules to maintain their modifiability. The large number of modules usually increases the complexity of maintenance of the fluid delivery system. In addition, a large number of modules will increase storage costs, because spare modules usually need to be stored for the maintenance of the fluid delivery system. Another problem associated with this module's fluid delivery system is that it must prevent leaks between adjacent modules or between modules and fluid handling elements. And / or prevent it by forming a seal between the module and an adjacent fluid handling element. These seals are known to break over time. Modules in fluid delivery systems must often be temporarily removed or replaced to form the seal in a new form. When a module needs to be removed or replaced • Conventional fluid delivery systems face considerable challenges. For example, many fluid delivery systems must remove most of the modules before replacing a single module • and / or the entire fluid delivery system must be disassembled before removing a single module. Therefore, in these modular fluid delivery systems, the simple replacement operation is time-consuming and therefore requires considerable costs. In addition, the number of modules that must be moved and the cost of modification Prolonged periods of time may cause contamination of the fluid delivery system. Based on the above reasons, there is currently a need to develop a modular fluid delivery system that can easily access, remove, and / or replace the module. There is also a need to develop a modular fluid delivery system that can reduce system fouling (please read the precautions on the back before filling this page). -------- Order --- 1 --- !! ^ ν-c L · This paper size applies the national standard (CNS) A4 specification (210 * 297 mm) A7 B7 45104 0 5. Description of the invention (3) Opportunities for damage. In addition, 'there is also a need for a modular fluid delivery system' which can maintain its modifiability with a small number of modules. SUMMARY OF THE INVENTION The present invention relates to a component for delivering fluid to a machine tool. The module includes an upper module having two or more upper channels. The upper module is designed to be connected to the fluid processing element so that at least one of the two or more upper channels is in fluid communication with the fluid processing element. The assembly also includes two or more Lower module 'Each lower module has at least one lower channel. The two or more lower modules are designed to be connected to the upper module at the same time 'so that the lower channels extending from each lower module can be in fluid communication with the different upper channels of the upper module. Another embodiment of the assembly includes two or more upper modules 1 and each upper module has one or more upper channels. Each upper module is designed to be connected to a different fluid processing element 'so that at least one of the two or more upper channels of each upper module is in fluid communication with the fluid processing element. A lower module with a lower channel is designed to be connected to each of the two or more upper modules at the same time, so that one channel of an upper module passes through the lower module. The channel is in fluid communication with another upper module. The present invention also relates to an assembly for transferring fluid to two fluid processing elements. The assembly includes two or more upper modules, and each module has two or more upper channels. Each upper module is designed to be compatible with this paper standard (CNS) A4 specification (210 * 297) «Please read the memorandum of this page and fill out this page. 4510 ^ 0 a? _B7 printed by the Village Intellectual Property Bureau, Industrial Cooperative Cooperative V. 5. Description of the invention (4) At least one of the two fluid processing elements is connected so that two or more of the above modules extend from each upper module At least one of the channels may be in fluid communication with the fluid processing element. The assembly also includes a lower module which has a lower channel. The lower module is designed to be connected to the two or more upper modules at the same time, so that the upper channel extending from the first upper module and the upper channel extending from the second upper module can pass through the lower module. Channels below the group form fluid communication. Brief Description of the Drawings Figure 1 is a side view of a fluid delivery system of the present invention. Figure 2 is a cross-sectional view of a fluid delivery system of the present invention. Fig. 3 is a cross-sectional view of a fluid transport system including a side transport module and a mouthpiece module. Fig. 4 is a cross-sectional view showing a fluid delivery system having a curved shape.圚 5 A shows a bending module used in the fluid delivery system. 〇 FIG. 5 B is a cross-sectional view of the fluid delivery system shown in FIG. 5A. Fig. 6A shows another embodiment of a bending module used in a fluid delivery system. Fig. 6B is a cross-sectional view of the fluid delivery system shown in Fig. 6A. FIG. 7A shows a branch module of the present invention. Fig. 7B shows that the branch module shown in Fig. 7A is used in a fluid delivery system. This paper size applies to China National Standard (CNS) A4 specification (210 * 297 cm) ---- Γ II κ III illllll ^ illn --- (Please read the “$” on the back before writing this page) 451 〇 4 0 A7 B7_ 5. Description of the invention (5) Fig. 7C is a cross-sectional view showing the fluid delivery system of Fig. 7B. Figure 8 shows a branch module designed to form an X-shaped fluid delivery system. Figure 9A shows a method for interconnecting the modules of a fluid delivery system. > Fig. 9B shows the upper surface of the module above Fig. 9A. Comparison table of the main components printed by the Industrial and Commercial Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 0 Fluid transfer device 1 2 Fluid treatment component 1 4 Fluid transfer system 1 6 Base layer 1 8 Lower module 2 0 Flat surface 2 2 Upper module 2 4 First intermediate layer body 2 6 Second intermediate layer body upper surface 2 8 upper surface 3 0 lower surface 3 2 flat portion 3 3 side surface 3 4 channel 3 6 fluid orifice 3 8 elongated channel < jingxian ® Please fill in the unintended matters * This page) The paper size applies to the national standard of China (CNS > A4 now (210 X 297 public love) d51 Ο 4 Ο Α7 V. Description of the invention (6) Employees of Intellectual Property Bureau Printed by a consumer cooperative 4 0 A extension module 4 0 B combined module 4 0 C junction α module 4 0 D terminal module 4 〇E integrated module 4 0 F integrated module 4 0 G nozzle module 4 0 Η Nozzle module 4 0 I Horizontal conveying module 4 0 J Bending module 4 0 K Conversion module 4 0 L Separation module 4 0 Μ Branch module 4 0 N Branch module 4 0 P Branch module 4 4 Buckle Pieces 4 6 unthreaded perforations 4 8 screw holes 5 0 washer 5 2 sealing device 5 4 washer recess detailed description The present invention relates to a device for conveying fluid to a machine tool. The paper size is applicable + national standards (CNS) A4 specification (210 x 297 male *) < Please read the notes on the back before filling this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Industrial Cooperatives 45 104 0 A7 _B7_ V. Description of the invention (7), Component and method. The component includes a plurality of lower modules, which constitute a base layer on a surface. The component also includes a plurality of upper modules, which can be combined with the lower modules to form one or more modules. An intermediate layer above the base layer. At least a part of the upper module can be connected with a fluid processing element such as a mixing valve = the upper module, the lower module and the fluid processing element can be connected together And assembled into a fluid delivery system. The upper module, the lower module, and the fluid processing element include channels, which can be connected to each other after the system is assembled. These channels are aligned with each other. After the channels are aligned, one or more channels extending through the lower layer, one or more intermediate layers, and the fluid processing element are formed. During the operation of the fluid transfer system, a fluid can pass through the elongated channel and pass through each fluid handling element before being transferred to the machine tool. The channels in the upper and lower modules are terminated at the fluid orifices on the horizontal side of the module, especially on the upper and / or lower surface of the module. The fluid orifices on the upper and lower surfaces of the module can avoid openings on the side surface of the module. Therefore, the side surfaces of adjacent upper modules and / or the side surfaces of adjacent lower modules do not make actual contact with each other, but they can also make contact. Because the adjacent modules have no actual contact, one module can be removed from the base layer or the middle layer, without the need to remove adjacent modules from the same layer. The adjacent modules located in the same layer provide fluid circulation between the lower modules, and an upper module is placed across the two lower modules. The channels in the two lower modules can pass through the channels in the upper module and the paper size applies the national standard (CNS) A4 specification (210 X 297 male cage) < Jing first read the precautions on the back before filling (This page)
經濟部智慧財產局霣工消費合作社印製 451 04 0 a? ____B7五、發明說明（8 ) 彼此形成流體連通。 跨置在兩個或以上之下方模組上之上方模組便可以輕 易更換及修復由這些模組所構成之流體輸送系統。舉例來 說，當位在一中間層體之上方模組需要加以更換或移除時 •便可僅藉由移開該與上方模組相連結之流體處理元件而 輕易地取出該上方模組。如上所述，該上方模組接著便可 以由中間層體取出而不會干擾到相鄰之上方模組。此外， 當下方模組需要更換或移除時*該下方模組通常係可以藉 由將與該下方模組相連結之兩個上方模組移除而取得》該 下方模組接著便可以由基部層體取出而不會干擾到相鄰之 下方模組。因此，本發明係提供一種組件，其可以組裝成 一易於修改之流體输送系統。 該流體輸送系統易於修改之特性亦可以降低系統污染 之機會。詳言之，本發明之流體輸送系統係可以迅速地修 理或修改》在修改過程中所減少之時間係可以降低該系統 污染發生之機會。此外，本發明之流體输送系統之修改通 常亦牽涉到較少數量之模組。在修改過程中牽涉較少數量 之模組，係可以降低污染源之數量’且因而降低整體污染 之機會。 圖1係顯示一流體輸送裝置1 〇，其係與流體處理元 件1 2相連結而構成一流體輸送系統1 4。該流體輸送裝 置10係包括一由複數個下方模組18所構成之基部層體 1 6 «該下方模組1 8係相鄰定位在一平坦表面2 0，並 且可以選擇性地以該平坦表面2 0來加以穩固地固定，以 — — — f - I I I Ϊ I I i^eJ«— — — — — I— r、 /1^ <諝先閱讀背面之注項再填寫本I ) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公« ) 4 510 4 0 A7 87 經濟部智慧財產局員工消f合作社印製 五、發明說明（9 ) 使該基部層體1.6可以穩定地位在該平坦表面2 0上。該 平坦表面2 0之例子係包括桌面及加工機器表面，諸如使 用在半導體製造中之加工機器表面，但不僅侷限於此。 基部層體1 6之下方模組1 8係鄰靠該構成一第一中 間層體2 4之上方模組2 2。該上方模組2 2係可以選擇 性地與該下方模組1 8穩定地連結在一起，以將該第一中 間層體24定位在該基部層體16上。在第一中間層體 2 4中之上方模組2 2係鄰靠該構成一第二中間層體2 6 之上方模組2 2。在第二中間層體2 6中之上方模組2 2 係可以選擇性地與該第一中間層體2 4中之上方模組2 2 穩定地連結在一起，以將第二中間層體2 6穩定地定位在 第一中間層體2 4上。雖然圖上未顯示，然而該流體輸送 裝置10係可以包括額外之中間層體。 第一中間層體2 4及第二中間層體2 6之上方模組 2 2係與流體處理元件1 2相連結。適當之流體處理元件 12係包括噴嘴、注入口、壓力規、壓力調節器、壓力傳 導器、過濾器、淨化器、混合閥、氣動閥、永動閥、逆止 閥、流量計及質量流控制器，以及其他的控制及測量元件 ，但不僅侷限於此。在操作上，該流體输送裝置1 0係將 該流體處理元件12運轉所需之流體傳送至流體處理元件 1 2，及/或由流體處理元件1 2中傳送出來。 該下方模組1 8以及上方模組2 2係具有塊體形狀， 以提供該裝置可以穩定地位在該平坦表面2 0上》該塊體 形狀係由一上表面2 8以及一下表面3 0所構成。該下方Printed by the Consumer Goods Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 451 04 0 a? ____B7 V. Description of the invention (8) Form fluid communication with each other. The upper modules straddling two or more lower modules can easily replace and repair the fluid delivery system composed of these modules. For example, when a module above an intermediate layer needs to be replaced or removed • The upper module can be easily removed by simply removing the fluid processing element connected to the upper module. As mentioned above, the upper module can then be taken out of the middle layer without disturbing the adjacent upper module. In addition, when the lower module needs to be replaced or removed * The lower module can usually be obtained by removing the two upper modules connected to the lower module. The layer is removed without disturbing the adjacent modules below. Accordingly, the present invention provides an assembly that can be assembled into an easily modified fluid delivery system. The ease of modification of the fluid delivery system also reduces the chance of system contamination. In detail, the fluid delivery system of the present invention can be quickly repaired or modified. The time reduced during the modification process can reduce the chance of contamination of the system. In addition, modifications to the fluid delivery system of the present invention often involve a smaller number of modules. The relatively small number of modules involved in the modification process can reduce the number of pollution sources ’and thus reduce the chance of overall pollution. Fig. 1 shows a fluid conveying device 10, which is connected to the fluid processing element 12 to constitute a fluid conveying system 14. The fluid conveying device 10 includes a base layer body 16 composed of a plurality of lower modules 18 «The lower modules 18 are adjacently positioned on a flat surface 20, and the flat surface can be selectively used. 2 0 to be firmly fixed to — — — f-III Ϊ II i ^ eJ «— — — — — I — r, / 1 ^ < 谞 read the notes on the back before filling in I) Applicable to China National Standard (CNS) A4 specification (210 X 297 male «) 4 510 4 0 A7 87 Printed by the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the cooperative V. Invention description (9) Make the base layer 1.6 stable position in the On the flat surface 20. Examples of the flat surface 20 include, but are not limited to, table tops and processing machine surfaces such as those used in semiconductor manufacturing. The lower module 18 of the base layer 16 is adjacent to the upper module 22 of the first intermediate layer 24. The upper module 22 can be selectively and stably connected to the lower module 18 to position the first intermediate layer body 24 on the base layer body 16. The upper module 2 2 in the first intermediate layer body 24 is adjacent to the upper module 22 that constitutes a second intermediate layer body 2 6. The upper module 2 2 in the second intermediate layer body 26 can selectively and stably be connected with the upper module 2 2 in the first intermediate layer body 2 4 to connect the second intermediate layer body 2 6 is stably positioned on the first intermediate layer body 2 4. Although not shown in the drawings, the fluid delivery device 10 may include an additional intermediate layer. The upper module 2 2 of the first intermediate layer body 2 4 and the second intermediate layer body 26 is connected to the fluid processing element 12. Appropriate fluid handling elements 12 include nozzles, injection ports, pressure gauges, pressure regulators, pressure transmitters, filters, purifiers, mixing valves, pneumatic valves, check valves, check valves, flow meters and mass flow control And other control and measurement components, but not limited to this. In operation, the fluid transfer device 10 transfers the fluid required for the operation of the fluid treatment element 12 to the fluid treatment element 12 and / or transmits the fluid from the fluid treatment element 12. The lower module 18 and the upper module 22 have a block shape to provide the device with a stable position on the flat surface 20. The block shape is composed of an upper surface 28 and a lower surface 30. Make up. The below
(請先閱蜻背面之注意亊項再填寫本荑J d -裝(Please read the note on the back of the dragon before filling in this section J d -install
/IV 本紙張尺度適用中國困家標準（CNS>A4規格（210 κ 297公釐） A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明說明（1G) 模組1 8之下表面3 0係定位成與該平坦表面2 0齊平》 同樣地，該上方模組2 2之下表面3 0最好係具有一平坦 部分3 2 ’以與該下方模組1 8之上表面2 8上的平坦部 分3 2緊靠在~起>此外，上方模組2 2之上表面2 8最 好係具有一平坦部分3 2，其係設計成可以緊靠在另一模 組之下表面3 0上之平坦部分3 2。最後，上方模組2 2 之上表面2 8最好係具有一平坦部分3 2，其係設計成可 以緊貼靠在流體處理元件1 2之基部上的平坦部分3 2。 雖然上方及下方模組1 8之上表面2 8及下表面3 0 最好係具有平坦部分3 2 ’然而，其可以視情況而具有特 定造型、輪廓及/或紋理。舉例來說，下方模組1 8之上 表面2 8係可以具有與該上方模組2 2之下表面3 0互補 之輪廓。該輪廓係可以相互扣鎖而在下方及上方模組2 2 之間提供穩固的固持力。 瑰狀模組亦可以具有一個或以上之側表面3 3。舉例 來說，在圚柱形模組中，該模組係可具有一個側表面3 3 ，然而在較佳的正方形模組中，該模組係可具有四個側表 面33 〇該側表面33最好係具有平坦部分32，其係可 使模組鄰靠於同一層體中之其他模組。然而，側表面3 3 亦可以具有特定造型、輪廓及/或紋理。舉例來說，該側 表面3 3係可具有一輪廓，其係可使在同一層體中之相鄰 模組可以彼此相互扣合在~起* 圖2係提供流體輸送系統1 4之截面視圖。該上方及 下方模組1 8係包括至少一通道3 4，其中該通道係終結 請 先 閱 讀 背 面 之 ϋ/ IV This paper standard applies to Chinese standards (CNS > A4 size (210 κ 297 mm) A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (1G) Module 1 8 Lower surface 3 0 It is positioned to be flush with the flat surface 20. Similarly, the lower surface 3 0 of the upper module 2 2 preferably has a flat portion 3 2 ′ on the upper surface 2 8 of the lower module 1 8. The flat part 3 2 abuts on ~> In addition, the upper surface 2 8 of the upper module 2 2 preferably has a flat part 3 2 which is designed to be able to abut the lower surface 3 of another module Flat part 3 on 0. Finally, the upper surface 2 8 of the upper module 2 2 preferably has a flat part 3 2 which is designed to be able to abut a flat part on the base of the fluid processing element 12 3 2. Although the upper and lower modules 1 8 above the upper surface 2 8 and the lower surface 3 0 preferably have flat portions 3 2 ′, however, they may have specific shapes, contours and / or textures as the case may be. For example The upper surface 2 8 of the lower module 1 8 may have a contour complementary to the lower surface 3 0 of the upper module 2 2 The profile can be locked to each other to provide a stable holding force between the lower and upper modules 2 2. The rose module can also have one or more side surfaces 3 3. For example, in a stern column mold In the group, the module system may have one side surface 3 3. However, in the preferred square module, the module system may have four side surfaces 33. The side surface 33 is preferably provided with a flat portion 32. It can make the module abut other modules in the same layer. However, the side surface 3 3 can also have a specific shape, contour and / or texture. For example, the side surface 3 3 series can have a contour, It allows adjacent modules in the same layer to be fastened to each other ~ Figure 2 is a cross-sectional view of the fluid delivery system 14. The upper and lower modules 18 and 8 include at least one channel 3 4, where the channel is the end, please read the back of the first
填 · %裝 套 頁I ν I I I I I 1 訂 (> 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） =ΎΤ^ 經濟部智悉財產局員工消费合作社印製 A 5 1 CU Ο A7 _____^B7_____五、發明說明（11) 在上方及下方模組1 8之上表面2 8及/或下表面3 Q之 至少一流體孔口3 6。每一上方模組2 2係結合兩個下方 模組1 8，使得由下方模組1 8之流體孔口 3 6係與上方 模組之不同流體孔口 3 6相對準。這些對齊之流體孔口 3 6係在每一上方模組及其相連結之下方模組1 8之間提 供流體連通》 每一流體處理元件1 2係包括一個或多個流體孔口 3 6與位在上方模組之上表面2 8上之流體孔口 3 6對齊 。此一對齊係可在流體處理元件12與該上方模組之至少 一通道3 4之間形成流體連通。該下方模組1 8、上方模 組2 2以及流體處理元件1 2之結合係可形成一貫穿流體 輸送裝置1 0以及流體處理元件1 2之伸長槽道3 8。一 流體便可以經由該伸長槽道3 8而輸送至每一沿著該伸長 槽道3 8而配置之流體處理元件1 2。在伸長槽道3 8中 之適當流體係一種可流動性材料，諸如氣體、液體及/或 氣/液混合體。 該流體输送系統14係可以組裝成各種不同的形狀。 由於可以使用各種不同之上方及下方模組1 8，因此該流 體輸送系統之造型種類亦隨之增加。舉例來說，數種長形 模組4 0A係顯示在圖2中。該長形模組係包括一單一通 道3 4 |其係終結在該長形模組之上表面2 8或長形模組 之下表面3 0上之兩流體孔口 3 6。長形模組係可以伸長 該伸長槽道3 8之長度，並且可以視情況而設計成該上方 及下方模組可以互換使用。當一系列之長形模組係彼此鄰 請 先 η 讀 背 之 it 意 事Fill in the set of cover sheets I ν IIIII 1 (> This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) = ΎΤ ^ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs) CU Ο A7 _____ ^ B7_____ V. Description of the invention (11) At least one fluid orifice 36 on the upper and lower modules 1 8 above the surface 2 8 and / or the lower surface 3 Q. Each upper module 2 2 The two lower modules 18 are combined so that the fluid ports 36 of the lower module 18 are aligned with the different fluid ports 36 of the upper module. These aligned fluid ports 36 are at each Provides fluid communication between the upper module and the connected lower module 1 8 "Each fluid processing element 12 includes one or more fluid orifices 36 and the upper surface 2 8 of the upper module The fluid orifices 36 are aligned. This alignment can form fluid communication between the fluid processing element 12 and at least one channel 34 of the upper module. The lower module 18, the upper module 22, and the fluid processing element The combination of 12 can form an elongated channel 3 through the fluid transport device 10 and the fluid treatment element 12 8. A fluid can be transported through the elongated channel 38 to each fluid treatment element 12 arranged along the elongated channel 38. A proper flow system in the elongated channel 38 is a kind of flowability Materials, such as gas, liquid and / or gas / liquid mixtures. The fluid delivery system 14 can be assembled into a variety of different shapes. Since various different upper and lower modules 18 can be used, the shape of the fluid delivery system The variety also increases. For example, several long module 40A series are shown in Figure 2. The long module system includes a single channel 3 4 | which ends on the upper surface of the long module 2 8 or two fluid orifices 36 on the lower surface 30 of the elongated module 3. The elongated module can extend the length of the elongated channel 38, and can be designed as the upper and lower modules as the case may be Can be used interchangeably. When a series of long modules are next to each other, please read it first.
JC % 本 頁 本纸張尺度適用令囲國家楳準（CNS)A4規格（21〇χ 297公釐） 經濟部智慧財產局員工消费合作社印製 A51 04 0 a? _____Β7五、發明說明（12 ) 置在一基部層體1 6時，該系列長形模組便能以一單一基 部模組來加以取代’且其中該基部模組係將每一長形模組 整合爲一單一塊體。 圖2亦顯示一連結模組40 Β，其係包含有三個通道 3 4彼此結合在該連結模組4 0 Β中。其中一通道3 4係 終結在該連結模組4 0 Β之上表面2 8的流體孔口 3 6， 而其他兩個通道3 4則係終結在連結模組4 0 Β之下表面 3 0之流體孔口 3 6 »連結模組係可以與具有一單一流體 孔口 3 6之流體處理元件1 2相連結。圚2亦顯示該連結 模組4 0 C之第二實施例。該連結模組4 0 C係包括兩個 通道3 4，每一通道係終結在該連結模組4 0 C之上表面 2 8之一共用流體孔口 3 6 Α。每一通道3 4亦終結在該 連結模組4 0 C之下表面3 0的不同流體孔口 3 6 » 在圖2中亦顯示一終端模組4 0 D。該終端模組 4 0 D係包括一通道3 4，其在末端處係封閉的。該終端 模組亦可用以形成伸長槽道3 8之端部。 圖2亦顯示一整合模組4 0 E。該整合模組4 0 E係 包括兩個獨立的通道3 4。每一通道3 4係終在該整合模 組4 0 E之上表面2 8上的流體孔口 3 6以及整合模組 40E之下表面30之流體孔口 36。如圖所示，一整合 模組4 0 E亦可用以输送流體通過該具有兩個流體孔口 36之流體處理元件12- · 匾2亦顯示一整合模組4 0 F之第二實施例，其係具 有兩個獨立的流體孔口 3 6。其中一通道3 4係終結在該 <請先閲讀背面之注意事項再瑱寫本買) □· 裝 訂JC% This page applies to the standard of the national standard (CNS) A4 (21〇χ 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A51 04 0 a? _____ Β7 V. Description of the invention (12) When placed on a base layer 16, the series of long modules can be replaced by a single base module ', and the base module integrates each long module into a single block. FIG. 2 also shows a link module 40B, which includes three channels 3 4 combined with each other in the link module 40B. One of the channels 3 4 terminates at the fluid port 3 6 of the surface 2 8 above the connection module 40 B, while the other two channels 3 4 terminate at the surface 3 0 of the connection module 40 0 B. Fluid port 36 »The connection module can be connected to a fluid processing element 12 having a single fluid port 36.圚 2 also shows the second embodiment of the link module 40C. The connection module 4 0C includes two channels 3 4, and each channel terminates in one of the common fluid ports 3 6 Α on the upper surface 2 8 of the connection module 4 0 C. Each channel 3 4 also terminates at a different fluid orifice 3 6 of the surface 3 0 below the connection module 4 0 C. A terminal module 4 0 D is also shown in FIG. 2. The terminal module 40D includes a channel 34, which is closed at the end. The terminal module can also be used to form the ends of the elongated channels 38. Figure 2 also shows an integrated module 40E. The integrated module 40 E series includes two independent channels 3 4. Each channel 34 is a fluid orifice 36 on the upper surface 28 of the integrated module 40E and a fluid orifice 36 on the lower surface 30 of the integrated module 40E. As shown in the figure, an integrated module 40 E can also be used to transport fluid through the fluid processing element 12 with two fluid orifices 36-. The plaque 2 also shows a second embodiment of an integrated module 40F, It has two independent fluid orifices 36. One of the channels 3 and 4 ends at the < please read the notes on the back before buying from the copybook) Binding
/V 本紙張尺度適用中國0家標準（CNS)A4規格（210 X 297公釐） 451 04 0 a? Β7 經濟部智慧財產局貝工消费合作社印裂 五、發明說明（13) 整合模組4 0 F之上表面2 8之流體孔口 3 6以及終結在 整合模組4 0 F之下表面3 0之流體孔口 3 6。其他通道 3 4係終結在該整合模組3 4 F之上表面2 8之兩個不同 流體孔口 3 6。此一類型之整合模組4 0 F係可以與需要 一流體注入口與一流體排出口之流體處理元件1 2配合使 用。然而，此一整合模組4 0 F係具有將流體輸送至額外 之流體處理元件12或額外模組而不會使該流體回到位於 整合模組4 0 F下方之層體的附加優點》舉例來說，如圖 2所示，該輸送係可以被輸送至一噴嘴模組4 0 G而不會 被輸送至第一中間層體2 4 »該噴嘴模組4 0 G係包括一 通道34，其係終結在該噴嘴模組40G之上表面28的 流體孔口 3 6以及噴嘴模組4 0 G之下表面3 0的流體孔 口 36 *該噴嘴模組40G之上表面28之流體孔口 36 係設計成可以與一諸如軟管之流體導管相連結。該與流體 導管之連結在焊接的例子中可以係一種永久性連結，而在 快速連接附件之例如中則可以係一種可分離式連結。由導 管流出之流體係可以經由噴嘴模組4 0 G而被輸送至流體 輸送裝置1 0 =同樣地，流體亦可以由該流體輸送裝置 10之伸長槽道38輸送至該流體導管。 該噴嘴模組4 0Η之另一實施例係顯示在圖3中。該 噴嘴模組4 0 Η係包括一通道34，其係終結在該噴嘴模 組40Η之上表面2 8之流體孔口 36，且其係終結在該 噴嘴模組40Η之側表面3 3的流體孔口 36。圖示之噴 嘴模組4 0 Η係可以與一分支流體導管相連結。每一流體 琦先閱讀背面之注意事κ填窝本μ 本紙張尺度適用令國國家標準（CNS>A4規格<210 X 297公« ) 45104 0 A7 經濟部智慧財產局R工消费合作社印襄 37 __五、發明說明（14) 導管之分支係可以與不同設備相連結。舉例來說，一分支 係可以與一流體源相連結，而另一分支則係可以與另一流 體輸送裝置10相連結· 圖3亦顯示一橫向輸送模組之側表面3 3。該橫向輪 送模組4 0 I係包括通道3 4，其係終結在橫向輸送模組 4 0 I之上表面2 8，且其係終結在橫向輸送模組40 I 之下表面30的流體孔口 36。該橫向輸送模組40 I亦 包括其他通道3 4，其係終結在該橫向输送模組之上表面 2 8上的流體孔口 3 6以及終結在橫向輸送模組4 0 I之 側表面3 3的流體孔口 36上。該橫向輸送模組40 I之 側表面3 3係與噴嘴模組4 0 Η之側表面3 3相連結，使 得該橫向輸送模組之通道3 4係與噴嘴模組之通道3 4相 連通。因此，橫向輸送模組4 0 I係可使流體連通通過該 模組之側表面33。 該流體輸送系統14亦可以包括橫向輸送模組之其他 實施例。舉例來說，一實施例係包括一單一通道3 4，其 係終結在該橫向輸送模組之側表面3 3的流體孔口 3 6。 另一實施例亦可以包括一通道3 4，其係終結橫向輸送模 組之不同側表面3 3上的流體孔口 3 6或者係終結在橫向 輸送裝置之同一橫向側表面3 3上的流體孔口 3 6。 圖4係提供~具有彎曲模組4 0 J之L形流體輸送裝 置1 0之截面形狀。在流體輸送裝置1 0中提供一彎曲部 係可以降低該流體輸送裝置1 0所需要的空間•該彎曲模 組4 0 J係包括一通道3 4 *其係終結在該彎曲模組之上 (靖先閱讀背面之沒意事項再填寫本頁) d -裝 本紙張尺度適用t國國家標準（CNS>A4規格（210 X 297公爱〉 Α7 4 5 彳 Ο 4 Ο Β7 ^^--- 玉、發明說明（15) 表面2 8上的兩個流體孔口 3 6。該彎曲模組40 J係具 有一標示爲L之伸長長度。當該模組具有一正方形形狀時 ，該彎曲模組4 0 J係可以具有該正方形模組之長度或寬 度的1 . 5倍。 圖4亦顯示一轉變模組4 0K，其係與該彎曲模組 相連結。該轉變模組40K係包括一通道34，其 係終結在該轉變模組4 0 K之上表面2 8的流體孔口 3 6 ，且其亦終結在轉變模組4 0 K之下表面3 0的流體孔口 3 6。如圖所示，該轉變模組4 0K係設計成可以與一伸 長模組相結合，其中該伸長模組係相對於該彎曲模組 4 0 J之長度而彎折一角度。 在圖4中亦顯示一分隔模組4 0 L。該分隔模組 4 0 L並未包括一通道3 4，其係與該伸長槽道3 8相結 合，但其係用以做爲一分隔件。舉例來說，圖4所示之分 隔模組4 0 L係用以支撐第一中間層體2 4及第二中間層 體2 6。 圖5 Α係顯示兩個彎曲模組4 0 J ，其係彼此結合在 一起以在該流體輸送裝置1 0中提供一彎曲部。圖5 B係 提供圖5 A所示之流體輸送裝置1 0之一部分的截面。該 兩彎曲模組4 0 J係構成該伸長槽道3 8之一部分，其係 可以藉由使流體流經伸長槽道3 8而以9 0度角度來改變 流動方向'圖5 B所示之弯曲模組之配置係可以避免使用 該轉變模組4 0 K之需要》/ V This paper size is applicable to 0 Chinese standards (CNS) A4 specifications (210 X 297 mm) 451 04 0 a? Β7 Printed by the Bayer Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (13) Integration module 4 The fluid orifice 36 on the upper surface 28 of 0 F and the fluid orifice 36 on the surface 30 ending in the integrated module 40 F. The other channels 3 4 are two different fluid orifices 36 which terminate on the surface 2 8 of the integrated module 3 4 F. This type of integrated module 40F can be used in conjunction with a fluid processing element 12 that requires a fluid injection port and a fluid discharge port. However, this integrated module 40 F has the additional advantage of delivering fluid to an additional fluid processing element 12 or additional module without returning the fluid to the layer below the integrated module 40 F. For example, as shown in FIG. 2, the conveying system can be conveyed to a nozzle module 40 G without being conveyed to the first intermediate layer 2 4 »The nozzle module 40 G system includes a channel 34, It is the fluid orifice 36 which ends on the upper surface 28 of the nozzle module 40G and the fluid orifice 36 on the upper surface 30 of the nozzle module 40G. * The fluid orifice on the upper surface 28 of the nozzle module 40G. The 36 series is designed to be connected to a fluid conduit such as a hose. The connection to the fluid conduit may be a permanent connection in the case of welding, and may be a detachable connection in the example of a quick-connect attachment. The flow system flowing out of the guide pipe can be transferred to the fluid transfer device 10 through the nozzle module 40 G. Similarly, the fluid can also be transferred to the fluid conduit from the elongated channel 38 of the fluid transfer device 10. Another embodiment of the nozzle module 40Η is shown in FIG. The nozzle module 40 0 includes a channel 34, which is a fluid orifice 36 ending in the upper surface 28 of the nozzle module 40Η, and it is a fluid ending in a side surface 3 3 of the nozzle module 40Η. Orifice 36. The nozzle module 40 shown in the figure can be connected to a branch fluid conduit. Please read the notes on the back of each fluid. Κ Fill the book. Μ This paper size applies the national standard of the country (CNS > A4 size < 210 X 297). 37 __V. Description of the invention (14) The branch system of the catheter can be connected with different equipment. For example, one branch system can be connected to a fluid source, and the other branch system can be connected to another fluid transport device 10. Figure 3 also shows the lateral surface 33 of a lateral transport module. The transverse carousel module 40 I comprises a channel 34, which is terminated on the upper surface 28 of the transverse transport module 40I, and it is a fluid hole terminated on the lower surface 30 of the transverse transport module 40I. Mouth 36. The lateral conveying module 40 I also includes other channels 3 4, which are fluid orifices 3 6 terminated on the upper surface 2 8 of the lateral conveying module and the lateral surfaces 3 3 terminating on the lateral conveying module 4 0 I. On the fluid orifice 36. The lateral surface 3 3 of the lateral conveying module 40 I is connected to the lateral surface 3 3 of the nozzle module 40 0, so that the channel 3 4 of the lateral conveying module is in communication with the channel 3 4 of the nozzle module. Therefore, the transverse conveying module 40 I can make fluid communication through the side surface 33 of the module. The fluid delivery system 14 may also include other embodiments of a lateral delivery module. For example, an embodiment includes a single channel 34, which is a fluid orifice 36 that terminates in a lateral surface 33 of the lateral transport module. Another embodiment may also include a channel 34 which terminates the fluid orifices 36 on different side surfaces 3 3 of the lateral conveying module or the fluid orifices which terminate on the same lateral side surface 33 of the lateral conveying device. Mouth 3 6. Fig. 4 provides a cross-sectional shape of an L-shaped fluid conveying device 10 having a bending module 40J. Providing a curved section in the fluid conveying device 10 can reduce the space required for the fluid conveying device 10. The curved module 40 J series includes a channel 3 4 * which ends on the curved module ( Jing first read the unintentional matter on the back and then fill out this page) d-The paper size of the paper is applicable to the national standard of the country (CNS > A4 specification (210 X 297 public love) Α7 4 5 彳 Ο 4 Ο Β7 ^^ --- Jade 2. Description of the invention (15) Two fluid orifices 36 on the surface 2 8. The curved module 40 J has an elongated length marked L. When the module has a square shape, the curved module 4 0 J series can have 1.5 times the length or width of the square module. Figure 4 also shows a transformation module 4 0K, which is connected to the curved module. The 40K series of transformation modules includes a channel 34 , Which is terminated at the fluid orifice 36 of the surface 2 8 above the transformation module 40 K, and it is also terminated at the fluid orifice 36 of the surface 30 below the transformation module 40 K. As shown in the figure As shown, the transformation module 4 0K is designed to be combined with an extension module, wherein the extension module is opposite to the bending module 4 The length of 0 J is bent at an angle. A partition module 40 L is also shown in Fig. 4. The partition module 40 L does not include a channel 3 4 which is combined with the elongated channel 38. However, it is used as a separator. For example, the separation module 40L shown in FIG. 4 is used to support the first intermediate layer body 24 and the second intermediate layer body 26. Figure 5 Α FIG. 5 shows two bending modules 40J, which are combined with each other to provide a bent portion in the fluid conveying device 10. FIG. 5B shows a part of the fluid conveying device 10 shown in FIG. 5A. Section. The two bending modules 40 J constitute a part of the elongated channel 38, which can change the flow direction at an angle of 90 degrees by passing fluid through the elongated channel 38. Figure 5B The configuration of the bending module shown is to avoid the need for the conversion module 40 K. "
圖6 A係顯示一分支模組4 0M，其係可以形成一 T 本紙張尺度適用$國國家標準（CNS)A4規格（21〇 X 297公釐） --------；--裝! 請先閱讀背面之注意^填寫本頁： 訂.. ά· 經濟部智慧財產局貝工消费合作社印製 45104 0 A7 經濟部智慧財產局員工消费合作社印製 B7五、發明說明（16) 形流體輸送裝置1 0。該T形流體輸送裝置1 〇之每一分 支係可以與不同的流體處理元件1 2相結合，以提供在每 一分支中之流體具有不同的特性。因此，在不同伸長槽道 3 8中之流體係可以被輸送至不同部位或由不同部位接收 該流體。 圖6 B係圖6 A所示之流體輸送裝置1 〇由箭頭a之 方向向下看之截面形狀。該分支模組4 0M係包括兩個通 道3 4，每一通道係與一共用之流體孔口 3 6相連結*且 每一通道亦與一獨立的流體孔口 3 6相連結。再者，當該 模組具有正方形之形狀時，該分支模組之長度最好係大約 兩倍於該正方形模組之長度或寬度。 圖7 A係顯示一分支模組4 0 N之另一實施例，其係 可以產生一諸如圖7 B所示之流體輸送裝置1 〇之T形流 體輸送裝置1 0。該分支模組4 0 N係包括三個通道3 4 ，其係可以彼此結合在該分支模組4 0 N內部。每一通道 3 4亦可以與一位在分支模組4 0 N之上表面2 8上之不 同流體孔口 3 6相結合。 圖7 C係提供圖7 B之流體輸送裝置1 〇沿著箭頭B 向下看之截面視圖'每一位在分支模組4 0 N上之流體孔 口 3 6係與一不同的伸長模組結合，以在流體輸送裝置 1 〇中形成三個不同的伸長槽道3 8。 圖8係顯示一分支模組4 0 P之另一實施例’其係可 用以形成X形流體輸送裝置1 〇 °該分支模組4 0 P係包 括四個通道3 4 ’其係彼此結合在該模組中。每一通道 (锖先《讚背面之迮$項再填寫本頁)Figure 6 A series shows a branch module 4 0M, which can form a T paper size applicable to the national standard (CNS) A4 specifications (21 × 297 mm) --------; --- Install! Please read the note on the back ^ Fill in this page: Order .. ά · Printed by Shellfish Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 45104 0 A7 Printed by B7 Employee Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (16)形 fluid conveying device 10. Each branch of the T-shaped fluid conveying device 10 can be combined with a different fluid processing element 12 to provide different characteristics of the fluid in each branch. Therefore, the flow systems in different elongated channels 38 can be transported to or receive the fluid at different locations. Fig. 6B is a cross-sectional shape of the fluid transport device 10 shown in Fig. 6A as viewed from the direction of arrow a. The branch module 400M includes two channels 34, each channel is connected to a common fluid orifice 36, and each channel is also connected to an independent fluid orifice 36. Furthermore, when the module has a square shape, the length of the branch module is preferably about twice the length or width of the square module. Fig. 7A shows another embodiment of a branch module 40N, which can produce a T-shaped fluid delivery device 10 such as the fluid delivery device 10 shown in Fig. 7B. The branch module 4 0 N system includes three channels 3 4, which can be combined with each other inside the branch module 4 0 N. Each channel 34 can also be combined with a different fluid orifice 36 on the surface 28 of the branch module 40N. Fig. 7C is a cross-sectional view of the fluid conveying device 10 provided in Fig. 7B. 〇 A downward view taken along arrow B. 'Each fluid orifice 36 on the branch module 40N is a different extension module. Combined to form three different elongated channels 38 in the fluid delivery device 10. FIG. 8 shows another embodiment of a branch module 40 P, which can be used to form an X-shaped fluid transport device 10 °. The branch module 40 P includes four channels 3 4 ', which are combined with each other. The module. Each channel (first "$$ on the back of the like, then fill out this page)
CV 裝 訂· 張-尺度適用巾國國家標準（CNS)A4規格（210 X 297公« ) -- 經濟部智慧財產局員工消费合作社印製 45104 0 A7 ____87五、發明說明（17) 3 4亦可以與分支模組4 0 P之上表面2 8上的不同流體 孔口 3 6相連結。相同於圖7A - 7 C所示之分支模組 4 ON ’每一通道3 4亦可以與一不同的伸長模組相連結 ，以獲得四個不同的伸長槽道3 8。 雖然以上係針對相對於流體輸送裝置1〇而具有特定 方向之不同模組來加以說明及討論，然而每一模組亦能以 相反之位置而包含在該流體輸送裝置1 0中。舉例來說， 圖示之結合模組在其上表面2 8上係具有一單一流體孔口 3 6，然而其亦可以反置使得該單一流體孔口 3 6係定位 在該結合模組之下表面3 0 此外，許多模組亦可設計成 在任何方向上來加以互換。 上述圖示之模組係定位在該流體輸送裝置1〇之特定 層體中。然而*許多模組亦可以定位在該流體輸送裝置 1 0之任何層體中。舉例來說，圖5 A — 5 Β所示之兩彎 曲模組係位在一基部層體1 6以及第一中間層體2 4上， 但其亦可以使用在任何兩相鄰層體中，諸如與第二中間層 體2 6相鄰之第一中間層體2 4 » 如上所述，該流體輸送裝置1 0係可以拆解並重新組 合以提供具有不同造型之流體輸送裝置1 0 *或者係改變 與該流體輸送裝置1 0配合使用之流體處理元件1 2。圖 9 Α係顯示一種用以將該流體輸送裝置1 0組裝在一平坦 表面2 0上之技術。該下方模組1 8係連接至具有四個扣 件4 4之平坦表面2 0。適當之扣件4 4係包括諸如螺絲 及螺栓之螺合扣件4 4，但不僅侷限於此。爲了加以說明 (請先閲讀背面之注意事^再瑱窝本買) 本紙張尺度適用中困國家標準（CNS)A4規格（210 X 297公釐） 45104 0 A7 t5/ 五、發明說明（18) ’以下係假設該扣件4 4爲螺合扣件=每一扣件4 4係貫 穿一位在下方模組1 8之未具螺紋之穿孔4 6 ，然後被收 納在平坦表面2 0之螺孔4 8中，如圖中箭頭C所示。一 旦該扣件4 4係被收納在該螺孔4 8中，該扣件4 4便可 以轉動以旋緊或旋鬆該位在平坦表面2 0上之下方模組 1 8。該未具螺紋之穿孔4 6係孔眼，使得當下方模組 1 8旋緊在平坦表面2 0上時，該扣件4 4之上表面係與 該下方模組1 8之上表面2 8齊平或位在上表面2 8下方 。該扣件4 4相對於下方模組1 8之位置係可使得一上方 模組之下表面3 0可以與下方模組1 8之上表面2 8齊平 請 先 閲 讀 背 面 之 注 寫 本 頁 經濟部智慧財產局8工消费合作杜印製 在將該下方模組18適當定位在平坦表面 每一上方模組便藉由四個扣件4 4來加以固定 4 4係貫穿位在上方模組之λ具螺紋之穿孔4 一位在下方模組1 8上之螺孔4 8所收納*如 示。該扣件4 4便可以轉動，以將該上方模組 方模組1 8。同樣地，該未具螺紋之穿孔4 6 計。 一旦該上方模組2 2固定後，該流體處理 可以藉由四個扣件4 4來適當地結合。該扣件 —位在流體處理元件12中之未具螺紋之穿孔 著由位在上方模組之螺孔4 8所收納•如圖之 。該扣件4 4接著便可加以轉動’以旋緊或旋 方模組上之流體處理元件1 2 ° 2 0之後， 。每一扣件 6 ，然後由 圖箭頭D所 緊固在該下 係採孔眼設 元件1 2便 4 4係貫穿 4 6 ，且接 箭頭Ε所示 鬆該位在上 本紙張尺度適用中國國家標準<CNS)A4規格（210 * 297公釐〉 Τ2Τ 451 04 Ο Α7 Β7 經濟部智慧財產局員工消费合作社印製 五、發明說明（19) 在該流體處理元件1 2與上方模組結合之前，一墊圏 5 0係定位在流體處理元件1 2與上方模組之間》該墊圈 5 0係可以由複數材料所製成，包括諸如金屬3 1 6 L， 但不僅侷限於此。該墊圈5 0係可包括兩個密封裝置5 2 ，諸如0形環圈。此外，該密封裝置5 2係可以獨立於該 墊圈5 0。圖9 B係顯示一上方模組之上表面2 8。該上 表面2 8係包括一鄰近該流體孔口 3 6之墊圈凹部5 4 « 該墊圈凹部5 4係具有一用以收納該密封裝置5 2之形狀 當流體處理元件1 2更加地旋緊於上方模組時，該密 封裝置便會被壓縮。該密封裝置5 2被壓縮後便會在該流 體處理元件12之流體孔口36與上方模組之流體孔口 3 6之間形成密封作用，以降低流體漏失。圖上所示者僅 係做爲說明之用，在上方模組2 2與下方模組1 8之間或 者係在兩上方模組2 2之間亦可以配置該墊圈5 0。 該上方模組2 2並不需要螺孔4 8。舉例來說，流體 處理元件1 2及上方模組2 2係可包括未具螺紋之穿孔 4 6，當該流體输送裝置1 0組裝完成時，其係可以彼此 對齊。在組裝過程中，這些穿孔亦可以與位在下方模組 1 8上之螺孔48對齊。因此，一單一扣件44便可以貫 穿該位在流體處理元件12與上方模組之未具螺紋之穿孔 4 6而進入至下方模組1 8中之螺孔4 8 ，其係已經固定 至平坦表面2 0。該扣件4 4接著便可以旋緊在螺孔4 8 中，以確保該流體處理元件1 2及上方模組位在定位上。 -----·----1-裝--- ί晴先閲讀背面之注意事填寫本頁) ;.» 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公« ) 45104 0 A7 經濟部智慧財產局員工消费合作杜印製 _____ B7五、發明說明（2G) 因此，在更換流體處理元件1 2及/或上方模組時必須移 除之扣件4 4數量便可以減少，且使得在該流體處理元件 1 2及上方模組2 2更換的同時，該下方模組1 8仍可以 保持在定位上。由於流體輸送裝置1 〇係可以由許多中間 層體所組成’ 一單一流體輸送裝置1 〇便需要數個具有不 同長度之扣件4 4來加以組合。此外，該下方模組1 8並 不需要螺孔48。舉例來說，該流體處理元件1 2、上方 模組2 2以及下方模組1 8係可包括未具螺紋之穿孔4 6 ，當該流體輸送裝置1 0組裝完成時，該未具螺紋之穿孔 4 6便可以彼此對齊。一扣件4 4接著便可以貫穿位在流 體處理元件1 2、上方模組以及下方模組1 8上之對齊的 未具螺紋之穿孔4 6而進入至平坦表面2 0之螺孔4 8中 圖9 A之說明僅係用以做爲示例性說明之用。舉例來 說，每一模組之扣件4 4數量並未侷限於四個，其數量亦 可以減少到只有一個。再者，流體輸送裝置1 0係可以利 用不同於上述之技術來加以組裝。 製造該模組之適當材料係包括諸如3 1 6 L V I Μ /VAR之不銹鋼。該下方模組1 8通常係具有大約1 一 2英吋之長度，1一2英吋之寬度以及0.25— 〇 . 75英时之高度。該上方模組2 2通常係具有大約 1 一 2英吋之長度，1 一 2英吋之寬度以及大約0 · 2 5 _〇.75英吋之高度。然而，不同模組之尺寸係可以有 相當大的變化。舉例來說，上方模組2 2之長度係可加以 (锖先閱讀背面之注意事項再瘓寫本買) 本纸張尺度適用中國钃家標準（CNS)A4規格（210 X 297公麓） 451040 A7 B7 五、發明說明（21) 變化以配合該具有不常見之幾何形狀之基部或者隔開相當 遠之流體孔口 3 6的流體處理元件1 2 u針對通道3 4之 適當寬度係包括0 . 1 8英吋’但不僅侷限於此。流體孔 口 3 6可以係標準的c形密封件，其係可以配置在一上方 模組與一流體處理元件之間’且一 1 / 4英吋之v C R係 可以定位在相鄰的流體處理元件之間。 雖然本發明已經藉由以上較丨圭實施例來^加以·說明’然 而可以瞭解的是，這些實例僅係用以做爲示例性說明之用 而不具有任何限制之意涵，對於這些實施例之修飾及組合 乃係習於此技者可以輕易思及而爲之，而這些修飾及組合 係涵蓋在後附申請專利範圍之精神及範圍內。 經濟部智慧財產局異工消费合作社印製 (請先閱讀背面之注*事項再填寫本頁)CV Binding · Zhang-size Applicable National Standard (CNS) A4 (210 X 297) «-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 45104 0 A7 ____87 V. Description of Invention (17) 3 4 It is connected with different fluid orifices 36 on the upper surface 28 of the branch module 40P. The branch modules 4 ON ′ shown in FIGS. 7A to 7C are each connected to a different extension module to obtain four different extension channels 38. Although the above is described and discussed with respect to different modules having a specific orientation with respect to the fluid transporting device 10, each module can also be included in the fluid transporting device 10 in the opposite position. For example, the bonding module shown in the figure has a single fluid port 36 on its upper surface 28, but it can also be inverted so that the single fluid port 36 is positioned below the bonding module. Surface 3 0 In addition, many modules can be designed to be interchanged in any direction. The module shown above is positioned in a specific layer of the fluid transport device 10. However * many modules can also be positioned in any layer of the fluid delivery device 10. For example, the two bending modules shown in FIGS. 5A-5B are located on a base layer 16 and a first intermediate layer 24, but they can also be used in any two adjacent layers. Such as the first intermediate layer body 2 4 adjacent to the second intermediate layer body 2 6 »As mentioned above, the fluid delivery device 10 can be disassembled and reassembled to provide a fluid delivery device 1 0 with a different shape * or The fluid treatment element 12 used in conjunction with the fluid delivery device 10 is changed. FIG. 9A shows a technique for assembling the fluid transport device 10 on a flat surface 20. The lower module 18 is connected to a flat surface 20 having four fasteners 44. Suitable fasteners 4 4 include but are not limited to screw fasteners 4 4 such as screws and bolts. For the sake of explanation (please read the notes on the back ^ before buying this book) The paper size is applicable to the national standard (CNS) A4 (210 X 297 mm) 45104 0 A7 t5 / V. Description of the invention (18) 'The following is assuming that the fastener 4 4 is a screw-fastening fastener = each fastener 4 4 penetrates a non-threaded perforation 4 6 in the module 18 below, and is then stored on a flat surface 2 0 screw In holes 48, as shown by arrow C in the figure. Once the fastener 44 is received in the screw hole 48, the fastener 44 can be rotated to tighten or loosen the lower module 18 on the flat surface 20. The unthreaded perforations 4 6 series of eyelets allow the upper surface of the fastener 4 4 to be flush with the upper surface 2 8 of the lower module 18 when the lower module 18 is screwed onto the flat surface 20. Flat or under the upper surface 2 8. The position of the fastener 4 4 relative to the lower module 18 can make a lower surface 30 of the upper module can be flush with the upper surface 2 8 of the lower module 18. Please read the note on the back first to write this page. Economy The Ministry of Intellectual Property Bureau's 8-industry consumer cooperation Du printed the proper positioning of the lower module 18 on a flat surface. Each upper module is fixed by four fasteners 4 4. 4 4 runs through the upper module λ Threaded perforations 4 A screw hole 4 8 in the lower module 1 8 is accommodated * as shown. The fastener 4 4 can be rotated to place the upper module 18 18. Similarly, the number of unthreaded perforations is 4 6. Once the upper module 22 is fixed, the fluid treatment can be appropriately combined by four fasteners 4 4. The fastener—the unthreaded perforation in the fluid processing element 12 is housed by the screw hole 4 8 located in the upper module as shown in the figure. The fastener 4 4 can then be rotated ’to tighten or rotate the fluid treatment element on the square module 12 ° 2 0. Each fastener 6 is then fastened by the arrow D in the figure below. The eye-opening element 1 2 4 4 penetrates 4 6, and the position shown by the arrow E is loose. The standard on the paper applies the Chinese national standard. < CNS) A4 specification (210 * 297 mm) Τ2Τ 451 04 〇 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (19) Before the fluid processing element 12 is combined with the upper module, A pad 50 is positioned between the fluid processing element 12 and the upper module. The washer 50 may be made of a plurality of materials, including, but not limited to, metal 3 1 6 L. The washer 5 The 0 series can include two sealing devices 5 2, such as 0-rings. In addition, the sealing device 5 2 series can be independent of the gasket 50 0. Figure 9 B shows an upper surface of the upper module 28. The upper Surface 2 8 includes a gasket recess 5 4 adjacent to the fluid orifice 36 6 «The gasket recess 5 4 has a shape for receiving the sealing device 5 2 when the fluid processing element 12 is further screwed onto the upper mold During assembly, the sealing device is compressed. After the sealing device 5 2 is compressed, A sealing effect will be formed between the fluid orifice 36 of the fluid processing element 12 and the fluid orifice 36 of the upper module to reduce fluid leakage. The ones shown in the figure are for illustration only, and the upper module The gasket 50 can also be arranged between 2 2 and the lower module 1 8 or between the two upper modules 2 2. The upper module 2 2 does not need a screw hole 4 8. For example, a fluid processing element 1 2 and the upper module 2 2 can include perforations 4 6 without threads. When the fluid delivery device 10 is assembled, the lines can be aligned with each other. During the assembly process, these perforations can also be aligned with the lower mold. The screw holes 48 on the group 18 are aligned. Therefore, a single fastener 44 can pass through the unthreaded perforations 4 6 of the fluid processing element 12 and the upper module and enter the screw in the lower module 18 The hole 4 8 is fixed to the flat surface 20. The fastener 4 4 can then be screwed into the screw hole 4 8 to ensure that the fluid processing element 12 and the upper module are positioned.- --- · ---- 1-pack --- ί Qing first read the notes on the back and fill out this page);. »This paper size is applicable National Standard (CNS) A4 Specification (210 X 297 public «) 45104 0 A7 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs for consumer cooperation Du printed ___ B7 V. Description of the invention (2G) Therefore, the replacement of fluid processing elements 1 2 and / Or the number of fasteners 4 and 4 that must be removed during the upper module can be reduced, and the lower module 18 can still be maintained in position while the fluid processing element 12 and the upper module 22 are replaced. Since the fluid transport device 10 can be composed of many intermediate layers', a single fluid transport device 10 requires several fasteners 4 4 of different lengths to be combined. In addition, the lower module 18 does not need a screw hole 48. For example, the fluid processing element 1 2, the upper module 2 2 and the lower module 18 may include unthreaded perforations 4 6. When the fluid transport device 10 is assembled, the unthreaded perforations 4 4 6 can be aligned with each other. A fastener 4 4 can then pass through the aligned unthreaded perforations 4 6 on the fluid processing element 1 2, the upper module and the lower module 18, and enter the screw holes 4 8 of the flat surface 20. The description of FIG. 9A is for illustrative purposes only. For example, the number of fasteners of each module is not limited to four, and the number can be reduced to only one. Furthermore, the fluid delivery device 10 can be assembled using a technique other than the above. Suitable materials for making the module include stainless steel such as 3 16 L VI M / VAR. The lower module 18 usually has a length of about 1 to 2 inches, a width of 1 to 2 inches, and a height of 0.25 to 0.75 inches. The upper module 2 2 usually has a length of about 1 to 2 inches, a width of 1 to 2 inches, and a height of about 0.25 to 0.75 inches. However, the size of different modules can vary considerably. For example, the length of the upper module 2 2 can be added (read the precautions on the back first, and then buy the paper). This paper size is applicable to the Chinese Standard (CNS) A4 (210 X 297 feet) 451040 A7 B7 V. Description of the invention (21) The fluid treatment element 1 2 u which is changed to match the base with an unusual geometry or the fluid orifices 36 which are quite far apart 1 2 u The appropriate width for the channel 3 4 includes 0.1 8 inches' but not limited to this. The fluid orifice 36 can be a standard c-shaped seal, which can be arranged between an upper module and a fluid processing element ', and a 1/4 inch v CR system can be positioned adjacent to the fluid processing Between components. Although the present invention has been described and illustrated by the above comparative examples, it can be understood that these examples are only used for illustrative purposes and are not intended to have any limitation. For these examples, Modifications and combinations can be easily considered by those skilled in the art, and these modifications and combinations are covered within the spirit and scope of the appended patent application scope. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, a different industry consumer cooperative (please read the note on the back before filling in this page)
本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公« )This paper size applies to China National Standard (CNS) A4 (210 X 297 male «)
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38821699A | 1999-09-01 | 1999-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW451040B true TW451040B (en) | 2001-08-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW89116370A TW451040B (en) | 1999-09-01 | 2000-08-14 | Layered block fluid delivery system |
Country Status (3)
| Country | Link |
|---|---|
| AU (1) | AU6620600A (en) |
| TW (1) | TW451040B (en) |
| WO (1) | WO2001016512A1 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10204250A1 (en) * | 2002-02-02 | 2003-08-14 | Bosch Gmbh Robert | Multiple valve arrangement for flowing media |
| CN100396980C (en) * | 2002-08-27 | 2008-06-25 | 迅捷公司 | Modular substrate gas panel having manifold connections in a common plane |
| JP2004183771A (en) * | 2002-12-03 | 2004-07-02 | Fujikin Inc | Fluid control device |
| JP5096696B2 (en) | 2006-03-02 | 2012-12-12 | サーパス工業株式会社 | Fluid equipment unit structure |
| JP2007327542A (en) | 2006-06-07 | 2007-12-20 | Surpass Kogyo Kk | Fluid apparatus unit structure |
| US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
| TWI534922B (en) | 2009-06-10 | 2016-05-21 | 威士塔戴爾泰克有限責任公司 | Extreme flow rate and/or high temperature fluid delivery substrates |
| US8950433B2 (en) | 2011-05-02 | 2015-02-10 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4022696B2 (en) * | 1996-11-20 | 2007-12-19 | 忠弘 大見 | Circuit breaker |
-
2000
- 2000-08-03 WO PCT/US2000/021227 patent/WO2001016512A1/en active Application Filing
- 2000-08-03 AU AU66206/00A patent/AU6620600A/en not_active Abandoned
- 2000-08-14 TW TW89116370A patent/TW451040B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001016512A1 (en) | 2001-03-08 |
| AU6620600A (en) | 2001-03-26 |
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| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |