CN217816228U - Ultrapure water delivery pipeline - Google Patents
Ultrapure water delivery pipeline Download PDFInfo
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- CN217816228U CN217816228U CN202221469376.3U CN202221469376U CN217816228U CN 217816228 U CN217816228 U CN 217816228U CN 202221469376 U CN202221469376 U CN 202221469376U CN 217816228 U CN217816228 U CN 217816228U
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Abstract
The application relates to an ultrapure water supply line comprising: the system comprises an ultra-pure water tank, a CLEAN PVC pipeline and a first delivery pump. The ultrapure water tank is suitable for storing ultrapure water, is provided with a water inlet and a water outlet, and the water inlet is suitable for being communicated with the pure water output device and leading in ultrapure water. The CLEAN PVC pipelines are more than two, and the two CLEAN PVC pipelines are communicated through welding. One end of one CLEAN PVC pipeline is communicated with the water outlet, and one end of the other CLEAN PVC pipeline is communicated with the first delivery pump. Through setting up ultrapure water tank, carry out the buffer memory to the ultrapure water of ultrapure water output device production, the ultrapure water user equipment in the ultrapure water tank is carried out with CLEAN PVC pipeline to the rethread first delivery pump, wherein, CLEAN PVC pipeline is equipped with more than two, compares in sticky connected mode, and the CLEAN PVC pipeline after the welding can not exert an influence to the quality of ultrapure water at the ultrapure water in-process of carrying.
Description
Technical Field
The application relates to the technical field of ultrapure water conveying, in particular to an ultrapure water conveying pipeline.
Background
The PVDF-HP pipeline is commonly used for conveying ultrapure water in electronic industries such as chips, semiconductors and the like, has extremely high chemical stability and can ensure that dissolved substances in the pipeline meet the water quality requirement of the ultrapure water. The PVDF-HP pipe is severely under-supplied due to the tension in supply of PVDF feedstock, making the pipe, which also has very high chemical stability, a replacement for the PVDF-HP pipe.
In the bonding process used for connecting the pipelines with extremely high chemical stability, an adhesive is used, and the adhesive can pollute the ultrapure water conveyed in the pipelines, so that how to construct a conveying pipeline meeting the requirement of conveying the ultrapure water instead of a PVDF-HP pipeline becomes a problem to be solved urgently by the technical personnel in the field.
Disclosure of Invention
In view of the above, the present application provides an ultrapure water delivery pipeline, which can replace a PVDF-HP pipeline to construct a delivery pipeline satisfying the requirement of delivering ultrapure water.
According to an aspect of the present application, there is provided an ultrapure water supply line characterized by comprising:
the system comprises an ultra-pure water tank, a CLEAN PVC pipeline and a first delivery pump;
the ultrapure water tank is suitable for storing ultrapure water, is provided with a water inlet and a water outlet, and the water inlet is suitable for being communicated with the pure water generating device and introducing ultrapure water;
the number of the CLEAN PVC pipelines is more than two, and the CLEAN PVC pipelines are communicated through welding;
one end of one CLEAN PVC pipeline is communicated with the water outlet, and one end of the other CLEAN PVC pipeline is communicated with the first delivery pump.
In one possible implementation, the CLEAN PVC conduit includes an inlet conduit and an outlet conduit;
one end of the water inlet pipeline is suitable for being communicated with the ultrapure water production device, the other end of the water inlet pipeline is communicated with one end of the water outlet pipeline in a welding mode, and a water inlet of the ultrapure water tank is communicated with the water inlet pipeline through a tee joint;
the other end of the water outlet pipeline is suitable for being communicated with ultrapure water using equipment.
In a possible implementation manner, the device further comprises a circulating valve;
the circulating valve is arranged at the joint of the water inlet pipeline and the water outlet pipeline.
In one possible implementation, the CLEAN PVC conduit further comprises a first conduit;
one end of the first pipeline is communicated with the water outlet end of the first conveying pump, and the other end of the first pipeline is communicated with the water outlet pipeline through a tee joint.
In a possible implementation manner, the device further comprises a second delivery pump, and the clear PVC pipeline further comprises a second pipeline;
one end of the second pipeline is communicated with the water outlet end of the second delivery pump, and the other end of the second pipeline is communicated with the water outlet pipeline through a tee joint.
In a possible implementation manner, the CLEAN PVC pipe further comprises a third transfer pump, and the CLEAN PVC pipe further comprises a third pipe;
one end of the third pipeline is communicated with the water outlet end of the third delivery pump, and the other end of the third pipeline is communicated with the water outlet pipeline through a tee joint.
In one possible implementation, the CLEAN PVC conduit further comprises a fourth conduit;
the water outlet of the ultrapure water tank is respectively communicated with the first delivery pump, the second delivery pump and the third delivery pump through the fourth pipeline.
In a possible implementation manner, the device further comprises a first delivery valve;
the first delivery valve is arranged on the first pipeline.
In a possible implementation manner, the ultrapure water tank is also provided with an ultraviolet germicidal lamp;
the ultraviolet germicidal lamp is located in the inner cavity of the ultra-pure water tank and is close to the water inlet.
In a possible implementation manner, the ultrapure water tank is also provided with a pressure detection device;
the detection section of the pressure detection device is positioned in the inner cavity of the ultrapure water tank.
The ultrapure water supply device is suitable for conveying ultrapure water between an ultrapure water output device and an ultrapure water using device. Through setting up the ultrapure water jar, carry out the buffer memory to the ultrapure water of ultrapure water output device production, through CLEAN PVC pipeline and the ultrapure water user equipment of first delivery pump in with the ultrapure water jar, wherein, CLEAN PVC pipeline is equipped with more than two, and the user can carry out nimble settlement to the CLEAN PVC pipeline more than two according to individual hobby and/or practical application scene completely, only need make between two adjacent CLEAN PVC pipelines through the welding intercommunication can. Because the existing CLEAN PVC pipeline bonding process is mature and convenient to operate, the CLEAN PVC pipeline is usually connected in an adhesive mode, but the adhesive can pollute ultrapure water in the CLEAN PVC pipeline. Compared with an adhesive connection mode, the CLEAN PVC pipeline is welded, so that new substances cannot be generated to influence the quality of ultrapure water in conveying, the resistivity of the ultrapure water conveyed by the device is larger than or equal to 18 MOmega-cm, and the requirement of ultrapure water quality conveying in industries such as microelectronics, semiconductors and panel display is met.
Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the application and, together with the description, serve to explain the principles of the application.
FIG. 1 is a view showing the configuration of the main body of an ultrapure water supply line according to an embodiment of the present invention.
Detailed Description
Various exemplary embodiments, features and aspects of the present application will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the invention or for simplicity in description, and do not indicate or imply that the device or element so indicated must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present application. It will be understood by those skilled in the art that the present application may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present application. FIG. 1 is a view showing the configuration of the main body of an ultrapure water supply line according to an embodiment of the present application. As shown in FIG. 1, the ultrapure water supply line comprises: ultra-pure water tank 100, CLEAN PVC piping, and first transfer pump 310. The ultrapure water tank 100 is adapted to store ultrapure water, and the ultrapure water tank 100 is provided with a water inlet and a water outlet, the water inlet being adapted to communicate with a pure water producing device for introducing ultrapure water. The clear PVC pipelines are more than two, and the clear PVC pipelines are communicated through welding. One end of one CLEAN PVC pipeline is communicated with the water outlet, and one end of the other CLEAN PVC pipeline is communicated with the first delivery pump 310.
The present application is applicable to the delivery of ultrapure water between ultrapure water production device 400 and ultrapure water use device. Through setting up ultrapure water jar 100, carry out the buffer memory to the ultrapure water of ultrapure water output device 400 production, through CLEAN PVC pipeline and the ultrapure water user equipment of first delivery pump 310 in with the ultrapure water jar, wherein, CLEAN PVC pipeline is equipped with more than two, and the user can carry out nimble settlement to the CLEAN PVC pipeline more than two according to individual hobby and/or practical application scene completely, only need make between two adjacent CLEAN PVC pipelines through the welding intercommunication can. Because the existing CLEAN PVC pipeline bonding process is mature and convenient to operate, the CLEAN PVC pipeline is usually connected in an adhesive manner, but the adhesive can pollute ultrapure water in the CLEAN PVC pipeline. Compared with an adhesive connection mode, the CLEAN PVC pipeline is welded, so that new substances cannot be generated to influence the quality of ultrapure water in conveying, the resistivity of the ultrapure water conveyed by the device is larger than or equal to 18 MOmega-cm, and the requirement of ultrapure water quality conveying in industries such as microelectronics, semiconductors and panel display is met.
It should be noted that the welding method between CLEAN PVC pipes is thermal fusion welding, which is the same as the thermal fusion connecting method of the traditional PVC pipes, and belongs to the prior art, and the details are not repeated here.
Here, it should be noted that the CLEAN PVC pipeline can be applied to an 18M Ω ultrapure water pipeline system, and compared with the PVDF-HP pipeline, the CLEAN PVC pipeline has the same extremely high chemical stability, and the CLEAN PVC pipeline has a low price, so that the production cost is effectively reduced, and the pipelines are communicated by a hot-melt welding method, so that compared with the conventional adhesive bonding method, the quality of the transported ultrapure water is further ensured.
In one possible implementation, the CLEAN PVC conduit includes an inlet conduit 210 and an outlet conduit 220. One end of the water inlet pipe 210 is adapted to communicate with the ultrapure water production device 400, the other end of the water inlet pipe 210 is in welded communication with one end of the water outlet pipe 220, and a water inlet of the ultrapure water tank 100 is communicated with the water inlet pipe 210 through a tee. The other end of the water outlet pipe 220 is adapted to communicate with an ultrapure water usage device. Make inlet channel 210 can communicate with ultrapure water tank 100 and outlet conduit 220 respectively through setting up the tee bend, make the ultrapure water that ultrapure water output device 400 produced can let in ultrapure water tank 100 in buffer memory, perhaps directly let in ultrapure water user equipment through outlet conduit 220, and then make this application more nimble to the mode of carrying of ultrapure water.
In one possible implementation, a recycle valve 230 is also included. A recirculation valve 230 is provided at the junction of the inlet conduit 210 and the outlet conduit 220. By setting the circulation valve 230, the ultrapure water produced by the ultrapure water production device 400 is controlled to be introduced into the ultrapure water tank 100 or the water outlet pipe.
In one possible implementation, the CLEAN PVC conduit further includes a first conduit 240. One end of the first pipeline 240 is communicated with the water outlet end of the first delivery pump 310, and the other end of the first pipeline 240 is communicated with the water outlet pipeline 220 through a tee joint, so that the ultrapure water in the ultrapure water tank 100 can pass through the first delivery pump 310 and the first pipeline 240 and is introduced into the water outlet pipeline 220 to be used by ultrapure water using equipment, the whole structure is simple, and the production cost is effectively reduced.
In one possible implementation, a second transfer pump 320 is also included, and the CLEAN PVC conduit also includes a second conduit 250. One end of the second pipe 250 is communicated with the water outlet end of the second delivery pump 320, and the other end of the second pipe 250 is communicated with the water outlet pipe 220 through a tee. The ultrapure water in the ultrapure water tank 100 can be introduced into the water outlet pipeline 220 through the second delivery pump 320 and the second pipeline 250 for the ultrapure water using equipment, so that the whole structure is simple, and the production cost is effectively reduced.
In one possible implementation, a third transfer pump 330 is also included, and the clear PVC piping also includes a third piping 260. One end of the third pipe 260 is communicated with the water outlet end of the third delivery pump 330, and the other end of the third pipe 260 is communicated with the water outlet pipe 220 through a tee. The ultrapure water in the ultrapure water tank 100 can be introduced into the water outlet pipeline 220 through the third delivery pump 330 and the third pipeline 260 for the ultrapure water using equipment, so that the whole structure is simple, and the production cost is effectively reduced.
In one possible implementation, the CLEAN PVC conduit further comprises a fourth conduit. The water outlet of the ultrapure water tank 100 is respectively communicated with the first delivery pump 310, the second delivery pump 320 and the third delivery pump 330 through a fourth pipeline. Overall structure is comparatively simple, the effectual manufacturing cost that has reduced.
In a possible implementation, the system further comprises a first delivery valve. A first delivery valve is provided on the first pipe 240 to control communication and closing of the first pipe 240.
Here, it should be noted that the first pipe 240, the second pipe 250, and the third pipe 260 are respectively provided with a first delivery valve, a second delivery valve, and a third delivery valve, and the control valve of the pipe in which the delivery pump that is not operating is closed, so that the other operating delivery valves can deliver the ultrapure water to the water outlet pipe 220 and introduce the ultrapure water into the ultrapure water usage equipment.
In one possible implementation, the ultrapure water tank 100 is also provided with an ultraviolet germicidal lamp. The ultraviolet germicidal lamp is located in the inner cavity of the ultra-pure water tank 100 and is arranged close to the water inlet. The ultraviolet germicidal lamp is located in the inner cavity of the ultra-pure water tank 100 and is arranged close to the water inlet. The ultra-pure water stored in the ultra-pure water tank 100 is subjected to ultra-violet sterilization by providing an ultra-violet sterilization lamp.
In a possible implementation, the ultrapure water tank 100 is also provided with a pressure detection device. The detection section of the pressure detection device is positioned in the inner cavity of the ultrapure water tank 100. Through setting up pressure measurement, realize detecting the pressure in ultrapure water tank 100, guarantee ultrapure water tank 100's normal work.
Having described embodiments of the present application, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein was chosen in order to best explain the principles of the embodiments, the practical application, or improvements to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. An ultrapure water supply line characterized by comprising:
the system comprises an ultra-pure water tank, a CLEAN PVC pipeline and a first delivery pump;
the ultrapure water tank is suitable for storing ultrapure water, and is provided with a water inlet and a water outlet, wherein the water inlet is suitable for being communicated with the pure water output device and introducing ultrapure water;
the number of the CLEAN PVC pipelines is more than two, and the CLEAN PVC pipelines are communicated through welding;
one end of one CLEAN PVC pipeline is communicated with the water outlet, and one end of the other CLEAN PVC pipeline is communicated with the first delivery pump.
2. The ultrapure water delivery line of claim 1 wherein the CLEAN PVC conduit comprises an inlet conduit and an outlet conduit;
one end of the water inlet pipeline is suitable for being communicated with the ultrapure water production device, the other end of the water inlet pipeline is communicated with one end of the water outlet pipeline in a welding mode, and a water inlet of the ultrapure water tank is communicated with the water inlet pipeline through a tee joint;
the other end of the water outlet pipeline is suitable for being communicated with ultrapure water using equipment.
3. The ultrapure water supply line of claim 2 further comprising a recycle valve;
the circulating valve is arranged at the joint of the water inlet pipeline and the water outlet pipeline.
4. The ultrapure water supply line of claim 2, wherein the CLEAN PVC conduit further comprises a first conduit;
one end of the first pipeline is communicated with the water outlet end of the first conveying pump, and the other end of the first pipeline is communicated with the water outlet pipeline through a tee joint.
5. The ultrapure water delivery line of claim 4 further comprising a second delivery pump, the CLEAN PVC conduit further comprising a second conduit;
one end of the second pipeline is communicated with the water outlet end of the second delivery pump, and the other end of the second pipeline is communicated with the water outlet pipeline through a tee joint.
6. The ultrapure water delivery line of claim 5 further comprising a third delivery pump, the CLEAN PVC conduit further comprising a third conduit;
one end of the third pipeline is communicated with the water outlet end of the third delivery pump, and the other end of the third pipeline is communicated with the water outlet pipeline through a tee joint.
7. The ultrapure water supply line of claim 6, wherein the CLEAN PVC conduit further comprises a fourth conduit;
the water outlet of the ultrapure water tank is respectively communicated with the first delivery pump, the second delivery pump and the third delivery pump through the fourth pipeline.
8. The ultrapure water supply line of claim 4, further comprising a first supply valve;
the first delivery valve is arranged on the first pipeline.
9. The ultrapure water supply line according to any one of claims 1 to 8, wherein the ultrapure water tank is further provided with an ultraviolet germicidal lamp;
the ultraviolet germicidal lamp is located in the inner cavity of the ultra-pure water tank and is close to the water inlet.
10. The ultrapure water supply line of claim 9, wherein the ultrapure water tank is further provided with a pressure detection device;
the detection section of the pressure detection device is positioned in the inner cavity of the ultrapure water tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221469376.3U CN217816228U (en) | 2022-06-13 | 2022-06-13 | Ultrapure water delivery pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221469376.3U CN217816228U (en) | 2022-06-13 | 2022-06-13 | Ultrapure water delivery pipeline |
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| Publication Number | Publication Date |
|---|---|
| CN217816228U true CN217816228U (en) | 2022-11-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221469376.3U Active CN217816228U (en) | 2022-06-13 | 2022-06-13 | Ultrapure water delivery pipeline |
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| CN (1) | CN217816228U (en) |
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- 2022-06-13 CN CN202221469376.3U patent/CN217816228U/en active Active
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