CN100396980C - 在公共平面中有歧管连接的模块式衬底配气板 - Google Patents

在公共平面中有歧管连接的模块式衬底配气板 Download PDF

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Publication number
CN100396980C
CN100396980C CNB03822366XA CN03822366A CN100396980C CN 100396980 C CN100396980 C CN 100396980C CN B03822366X A CNB03822366X A CN B03822366XA CN 03822366 A CN03822366 A CN 03822366A CN 100396980 C CN100396980 C CN 100396980C
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CN
China
Prior art keywords
manifold
substrate
port
ports
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB03822366XA
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English (en)
Chinese (zh)
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CN1682054A (zh
Inventor
基姆·恩格西·乌
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Entegris Inc
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Celerity Group Inc
Celerity Inc
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Publication of CN1682054A publication Critical patent/CN1682054A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Valve Housings (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
CNB03822366XA 2002-08-27 2003-08-26 在公共平面中有歧管连接的模块式衬底配气板 Expired - Fee Related CN100396980C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
US60/406,132 2002-08-27

Publications (2)

Publication Number Publication Date
CN1682054A CN1682054A (zh) 2005-10-12
CN100396980C true CN100396980C (zh) 2008-06-25

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ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB03822366XA Expired - Fee Related CN100396980C (zh) 2002-08-27 2003-08-26 在公共平面中有歧管连接的模块式衬底配气板

Country Status (8)

Country Link
US (2) US7334605B2 (enExample)
EP (1) EP1543544A2 (enExample)
JP (1) JP2005539375A (enExample)
KR (1) KR20060017577A (enExample)
CN (1) CN100396980C (enExample)
AU (1) AU2003262953A1 (enExample)
TW (1) TWI244669B (enExample)
WO (1) WO2004021412A2 (enExample)

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CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
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US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
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JP4755498B2 (ja) * 2006-01-06 2011-08-24 東京エレクトロン株式会社 加熱装置及び加熱方法
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KR101097509B1 (ko) * 2009-07-17 2011-12-22 주식회사 엠엠티 기판 세정장치
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WO2011112515A2 (en) * 2010-03-10 2011-09-15 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8327879B2 (en) 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
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US9114788B2 (en) * 2011-01-27 2015-08-25 Wabtec Holding Corp. Manifold joint seal
JP5277278B2 (ja) * 2011-03-29 2013-08-28 株式会社フジキン 流体制御装置用継手
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
US9091397B2 (en) 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
KR102544885B1 (ko) 2014-04-07 2023-06-16 램 리써치 코포레이션 구성 독립된 가스 전달 시스템
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
WO2018168559A1 (ja) * 2017-03-15 2018-09-20 株式会社フジキン 継手および流体制御装置
CN120473408A (zh) * 2019-04-15 2025-08-12 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus

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US4082324A (en) * 1976-10-04 1978-04-04 Obrecht Robert E Connection arrangement for manifold blocks
US4524807A (en) * 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
EP0169963A1 (en) * 1984-07-27 1986-02-05 Luciano Migliori Subbase for feeding and supporting control valves
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Also Published As

Publication number Publication date
AU2003262953A8 (en) 2004-03-19
WO2004021412A3 (en) 2004-09-02
TW200419630A (en) 2004-10-01
US7334605B2 (en) 2008-02-26
CN1682054A (zh) 2005-10-12
US20040129324A1 (en) 2004-07-08
US7225835B2 (en) 2007-06-05
AU2003262953A1 (en) 2004-03-19
WO2004021412A2 (en) 2004-03-11
KR20060017577A (ko) 2006-02-24
EP1543544A2 (en) 2005-06-22
TWI244669B (en) 2005-12-01
JP2005539375A (ja) 2005-12-22
US20060011247A1 (en) 2006-01-19

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C06 Publication
PB01 Publication
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SE01 Entry into force of request for substantive examination
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Owner name: CELERITY INC.

Free format text: FORMER OWNER: CELERITY GROUP INC.

Effective date: 20070518

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

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Address after: texas

Applicant after: Entegris Inc.

Address before: American California

Applicant before: Celerity Group Inc.

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080625

Termination date: 20090928