JP2005539375A - 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル - Google Patents

共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Download PDF

Info

Publication number
JP2005539375A
JP2005539375A JP2004531639A JP2004531639A JP2005539375A JP 2005539375 A JP2005539375 A JP 2005539375A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2005539375 A JP2005539375 A JP 2005539375A
Authority
JP
Japan
Prior art keywords
substrate
manifold
port
channel
ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004531639A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005539375A5 (enExample
Inventor
ブ，キム・ンゴク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Celerity Inc
Original Assignee
Celerity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Celerity Inc filed Critical Celerity Inc
Publication of JP2005539375A publication Critical patent/JP2005539375A/ja
Publication of JP2005539375A5 publication Critical patent/JP2005539375A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Valve Housings (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
JP2004531639A 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Pending JP2005539375A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
PCT/US2003/026979 WO2004021412A2 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Publications (2)

Publication Number Publication Date
JP2005539375A true JP2005539375A (ja) 2005-12-22
JP2005539375A5 JP2005539375A5 (enExample) 2006-10-12

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004531639A Pending JP2005539375A (ja) 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル

Country Status (8)

Country Link
US (2) US7334605B2 (enExample)
EP (1) EP1543544A2 (enExample)
JP (1) JP2005539375A (enExample)
KR (1) KR20060017577A (enExample)
CN (1) CN100396980C (enExample)
AU (1) AU2003262953A1 (enExample)
TW (1) TWI244669B (enExample)
WO (1) WO2004021412A2 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009138837A (ja) * 2007-12-05 2009-06-25 Kitz Sct:Kk 容器用ブロックバルブ
JP2011149554A (ja) * 2011-03-29 2011-08-04 Fujikin Inc 流体制御装置用継手
KR20130037187A (ko) * 2011-10-05 2013-04-15 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
JPWO2018168559A1 (ja) * 2017-03-15 2020-01-16 株式会社フジキン 継手および流体制御装置

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
CA2507589A1 (en) * 2002-11-26 2004-06-10 Swagelok Company Modular surface mount fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
CN1887029A (zh) * 2003-11-07 2006-12-27 迅捷公司 表面安装的加热器
EP1744131A1 (en) * 2005-07-15 2007-01-17 Indufil B.V. Module for a gas system
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
JP4755498B2 (ja) * 2006-01-06 2011-08-24 東京エレクトロン株式会社 加熱装置及び加熱方法
US7575616B2 (en) 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US7806143B2 (en) * 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
KR101229775B1 (ko) * 2008-12-26 2013-02-06 엘지디스플레이 주식회사 기판 세정장치
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
TWI534922B (zh) * 2009-06-10 2016-05-21 威士塔戴爾泰克有限責任公司 極端流量和／或高溫流體輸送基板
KR101097509B1 (ko) * 2009-07-17 2011-12-22 주식회사 엠엠티 기판 세정장치
US8336573B2 (en) 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
WO2011112515A2 (en) * 2010-03-10 2011-09-15 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8327879B2 (en) 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US9074686B2 (en) 2010-12-06 2015-07-07 Microflex Technologies Llc Ring seal retainer assembly and methods
US9114788B2 (en) * 2011-01-27 2015-08-25 Wabtec Holding Corp. Manifold joint seal
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9091397B2 (en) 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
KR102544885B1 (ko) 2014-04-07 2023-06-16 램 리써치 코포레이션 구성 독립된 가스 전달 시스템
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
CN120473408A (zh) * 2019-04-15 2025-08-12 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10227368A (ja) * 1997-02-14 1998-08-25 Tadahiro Omi 流体制御装置
WO1999059392A2 (en) * 1998-05-18 1999-11-25 The Swagelok Company Modular surface mount manifold assemblies

Family Cites Families (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1625306B1 (de) * 1967-10-24 1971-02-25 Daimler Benz Ag Steckmutter für eine schraubverbindung
US4067531A (en) * 1976-07-22 1978-01-10 Derre & Company Vibration isolation and sealing gasket
US4082324A (en) * 1976-10-04 1978-04-04 Obrecht Robert E Connection arrangement for manifold blocks
US4490083A (en) * 1980-01-10 1984-12-25 Russell, Burdsall, & Ward Corporation Sealing capped nut and bolt therefor
US4524807A (en) 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
IT8422711U1 (it) * 1984-07-27 1986-01-27 Migliori Luciano Sottobase per l'alimentazione ed il sostegno di valvole di comando.
DE3522955A1 (de) * 1985-06-27 1987-01-08 Festo Kg Anordnung von ventilgehaeusen
US4681476A (en) 1986-05-01 1987-07-21 Motorola, Inc. Flex-lock dovetail mounting apparatus for radio transceivers and accessories
US5440477A (en) 1991-05-20 1995-08-08 Creative Pathways, Inc. Modular bottle-mounted gas management system
US5368062A (en) 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
US5275074A (en) * 1992-08-25 1994-01-04 Taylor Christopher L Miter slider
EP0770212A1 (en) * 1994-07-11 1997-05-02 Tekmar Company Modular vial autosampler
DE9411684U1 (de) 1994-07-19 1994-09-15 Elco Klöckner Heiztechnik GmbH, 72379 Hechingen Steuervorrichtung für einen Wärme- oder Kältekreislauf
US5605179A (en) 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3661040B2 (ja) 1995-05-31 2005-06-15 忠弘 大見 流体制御装置
JP3546275B2 (ja) 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
KR100232112B1 (ko) 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
DE19600629A1 (de) * 1996-01-10 1997-07-17 Meuleman Andre Spezialschraube zum Verbinden von beschichteten Blechteilen
JP3726168B2 (ja) 1996-05-10 2005-12-14 忠弘 大見 流体制御装置
US5662143A (en) 1996-05-16 1997-09-02 Gasonics International Modular gas box system
US5915409A (en) 1996-06-13 1999-06-29 Ckd Corporation Manifold
JP3650859B2 (ja) 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US5794645A (en) 1996-07-15 1998-08-18 Creative Pathways, Inc. Method for supplying industrial gases using integrated bottle controllers
JP3122386B2 (ja) 1996-07-16 2001-01-09 シーケーディ株式会社 ガスケット保持具
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
JP4022696B2 (ja) 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JP3997337B2 (ja) 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
US6302141B1 (en) 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
JPH10220698A (ja) 1996-12-03 1998-08-21 Nippon Aera Kk 流体制御装置
US5836355A (en) 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
JPH10300000A (ja) 1997-02-28 1998-11-13 Benkan Corp 集積化ガス制御装置
JP3814704B2 (ja) 1997-05-08 2006-08-30 忠弘 大見 流体制御器用継手
JP3774800B2 (ja) 1997-09-24 2006-05-17 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP3737869B2 (ja) 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
US6152175A (en) 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
US5860676A (en) 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components
JP3876351B2 (ja) 1997-06-18 2007-01-31 忠弘 大見 管継手
JP4235759B2 (ja) 1997-08-05 2009-03-11 忠弘 大見 流体制御装置
JP4378553B2 (ja) 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
US5975590A (en) 1998-02-17 1999-11-02 Applied Materials, Inc. High pressure fitting
AU2988099A (en) 1998-03-05 1999-09-20 Swagelok Company, The Modular surface mount manifold
US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
JP3780096B2 (ja) 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
JP4288629B2 (ja) * 1998-06-05 2009-07-01 日立金属株式会社 集積形流体制御装置
US6260581B1 (en) 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
US6085783A (en) 1998-09-02 2000-07-11 Hollingshead; J. Gregory Unified modular multi-directional flow chemical distribution block
JP4110304B2 (ja) 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
JP3921565B2 (ja) 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
JP2000145979A (ja) 1998-11-16 2000-05-26 Fujikin Inc 下段部材の固定装置およびこれを備えた流体制御装置
EP1096351A4 (en) 1999-04-16 2004-12-15 Fujikin Kk FLUID SUPPLY DEVICE OF THE PARALLEL BYPASS TYPE, AND METHOD AND DEVICE FOR CONTROLLING THE FLOW OF A VARIABLE FLUID TYPE PRESSURE SYSTEM USED IN SAID DEVICE
US6363958B1 (en) 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
US6186177B1 (en) 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
AU6620600A (en) * 1999-09-01 2001-03-26 Silicon Valley Group, Inc. Layered block fluid delivery system
US6729353B2 (en) 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
US6125887A (en) 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
EP1222402A1 (en) 1999-10-20 2002-07-17 Parker Hannifin Plc Fluid control system
US6546960B1 (en) 2000-03-03 2003-04-15 Creative Pathways, Inc. Self-aligning SmartStrate™
TW500891B (en) 2000-03-10 2002-09-01 Tokyo Electron Ltd A fluid control device
US6523570B2 (en) 2000-05-04 2003-02-25 Parker-Hannifin Corp. Manifold for valve assembly
US6349744B1 (en) 2000-10-13 2002-02-26 Mks Instruments, Inc. Manifold for modular gas box system
JP3564115B2 (ja) 2001-12-06 2004-09-08 シーケーディ株式会社 ガス供給ユニット
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
US20050005981A1 (en) 2003-03-26 2005-01-13 Paul Eidsmore Modular fluid components and assembly
US6874538B2 (en) 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7178556B2 (en) 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10227368A (ja) * 1997-02-14 1998-08-25 Tadahiro Omi 流体制御装置
WO1999059392A2 (en) * 1998-05-18 1999-11-25 The Swagelok Company Modular surface mount manifold assemblies

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009138837A (ja) * 2007-12-05 2009-06-25 Kitz Sct:Kk 容器用ブロックバルブ
JP2011149554A (ja) * 2011-03-29 2011-08-04 Fujikin Inc 流体制御装置用継手
KR20130037187A (ko) * 2011-10-05 2013-04-15 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
KR101940325B1 (ko) 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
CN109891138A (zh) * 2016-10-24 2019-06-14 株式会社富士金 流体控制装置和使用该流体控制装置的制品制造方法
JPWO2018079288A1 (ja) * 2016-10-24 2019-09-12 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
CN109891138B (zh) * 2016-10-24 2020-07-07 株式会社富士金 流体控制装置和使用该流体控制装置的制品制造方法
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
JPWO2018168559A1 (ja) * 2017-03-15 2020-01-16 株式会社フジキン 継手および流体制御装置
JP7061808B2 (ja) 2017-03-15 2022-05-02 株式会社フジキン 継手および流体制御装置

Also Published As

Publication number Publication date
AU2003262953A8 (en) 2004-03-19
WO2004021412A3 (en) 2004-09-02
TW200419630A (en) 2004-10-01
US7334605B2 (en) 2008-02-26
CN1682054A (zh) 2005-10-12
CN100396980C (zh) 2008-06-25
US20040129324A1 (en) 2004-07-08
US7225835B2 (en) 2007-06-05
AU2003262953A1 (en) 2004-03-19
WO2004021412A2 (en) 2004-03-11
KR20060017577A (ko) 2006-02-24
EP1543544A2 (en) 2005-06-22
TWI244669B (en) 2005-12-01
US20060011247A1 (en) 2006-01-19

Similar Documents

Publication Publication Date Title
JP2005539375A (ja) 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
KR100538130B1 (ko) 모듈형 표면 실장 매니폴드
US7686041B2 (en) Modular surface mount manifold assemblies
US6039360A (en) Couplings for fluid controllers
JP2005539375A5 (enExample)
US7213618B2 (en) Gas-panel assembly
US6629546B2 (en) Modular surface mount manifold assemblies
US7036528B2 (en) Modular surface mount manifold assemblies
JP2002372181A (ja) モジュール式流体配管装置
JP4780555B2 (ja) 流体制御装置
US7458397B2 (en) Modular fluid distribution system
WO1999059392A9 (en) Modular surface mount manifold assemblies
CN100422569C (zh) 模块化表面安装的流体系统
WO2005008107A2 (en) Modular fluid distribution system
EP1471296B1 (en) Modular surface mount manifold assemblies

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060811

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060811

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100803

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110105