AU2003262953A1 - Modular substrate gas panel having manifold connections in a common plane - Google Patents

Modular substrate gas panel having manifold connections in a common plane

Info

Publication number
AU2003262953A1
AU2003262953A1 AU2003262953A AU2003262953A AU2003262953A1 AU 2003262953 A1 AU2003262953 A1 AU 2003262953A1 AU 2003262953 A AU2003262953 A AU 2003262953A AU 2003262953 A AU2003262953 A AU 2003262953A AU 2003262953 A1 AU2003262953 A1 AU 2003262953A1
Authority
AU
Australia
Prior art keywords
common plane
gas panel
substrate gas
modular substrate
manifold connections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003262953A
Other languages
English (en)
Other versions
AU2003262953A8 (en
Inventor
Kim Ngoc Vu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Celerity Group Inc
Original Assignee
Celerity Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Celerity Group Inc filed Critical Celerity Group Inc
Publication of AU2003262953A8 publication Critical patent/AU2003262953A8/xx
Publication of AU2003262953A1 publication Critical patent/AU2003262953A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Valve Housings (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
AU2003262953A 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane Abandoned AU2003262953A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
US60/406,132 2002-08-27
PCT/US2003/026979 WO2004021412A2 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Publications (2)

Publication Number Publication Date
AU2003262953A8 AU2003262953A8 (en) 2004-03-19
AU2003262953A1 true AU2003262953A1 (en) 2004-03-19

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003262953A Abandoned AU2003262953A1 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Country Status (8)

Country Link
US (2) US7334605B2 (enExample)
EP (1) EP1543544A2 (enExample)
JP (1) JP2005539375A (enExample)
KR (1) KR20060017577A (enExample)
CN (1) CN100396980C (enExample)
AU (1) AU2003262953A1 (enExample)
TW (1) TWI244669B (enExample)
WO (1) WO2004021412A2 (enExample)

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CA2507589A1 (en) * 2002-11-26 2004-06-10 Swagelok Company Modular surface mount fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
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JP4755498B2 (ja) * 2006-01-06 2011-08-24 東京エレクトロン株式会社 加熱装置及び加熱方法
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US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
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KR101229775B1 (ko) * 2008-12-26 2013-02-06 엘지디스플레이 주식회사 기판 세정장치
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
TWI534922B (zh) * 2009-06-10 2016-05-21 威士塔戴爾泰克有限責任公司 極端流量和／或高溫流體輸送基板
KR101097509B1 (ko) * 2009-07-17 2011-12-22 주식회사 엠엠티 기판 세정장치
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WO2011112515A2 (en) * 2010-03-10 2011-09-15 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8327879B2 (en) 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
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US9091397B2 (en) 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
KR102544885B1 (ko) 2014-04-07 2023-06-16 램 리써치 코포레이션 구성 독립된 가스 전달 시스템
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
WO2018168559A1 (ja) * 2017-03-15 2018-09-20 株式会社フジキン 継手および流体制御装置
CN120473408A (zh) * 2019-04-15 2025-08-12 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus

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Also Published As

Publication number Publication date
AU2003262953A8 (en) 2004-03-19
WO2004021412A3 (en) 2004-09-02
TW200419630A (en) 2004-10-01
US7334605B2 (en) 2008-02-26
CN1682054A (zh) 2005-10-12
CN100396980C (zh) 2008-06-25
US20040129324A1 (en) 2004-07-08
US7225835B2 (en) 2007-06-05
WO2004021412A2 (en) 2004-03-11
KR20060017577A (ko) 2006-02-24
EP1543544A2 (en) 2005-06-22
TWI244669B (en) 2005-12-01
JP2005539375A (ja) 2005-12-22
US20060011247A1 (en) 2006-01-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase