JPH10227368A5 - - Google Patents

Info

Publication number
JPH10227368A5
JPH10227368A5 JP1997029996A JP2999697A JPH10227368A5 JP H10227368 A5 JPH10227368 A5 JP H10227368A5 JP 1997029996 A JP1997029996 A JP 1997029996A JP 2999697 A JP2999697 A JP 2999697A JP H10227368 A5 JPH10227368 A5 JP H10227368A5
Authority
JP
Japan
Prior art keywords
fluid
type
shutoff
inlet
fluid controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997029996A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10227368A (ja
JP3997338B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP02999697A external-priority patent/JP3997338B2/ja
Priority to JP02999697A priority Critical patent/JP3997338B2/ja
Priority to TW087102012A priority patent/TW372328B/zh
Priority to KR10-1998-0004289A priority patent/KR100517424B1/ko
Priority to EP98102554A priority patent/EP0859155B1/en
Priority to CA002229476A priority patent/CA2229476C/en
Priority to US09/023,416 priority patent/US20010003287A1/en
Priority to DE69822689T priority patent/DE69822689T2/de
Priority to SG1998000329A priority patent/SG77161A1/en
Priority to IL12330598A priority patent/IL123305A/xx
Publication of JPH10227368A publication Critical patent/JPH10227368A/ja
Priority to US10/277,147 priority patent/US6615871B2/en
Publication of JPH10227368A5 publication Critical patent/JPH10227368A5/ja
Publication of JP3997338B2 publication Critical patent/JP3997338B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP02999697A 1997-02-14 1997-02-14 流体制御装置 Expired - Lifetime JP3997338B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置
DE69822689T DE69822689T2 (de) 1997-02-14 1998-02-13 Flüssigkeitssteuerungseinrichtung
KR10-1998-0004289A KR100517424B1 (ko) 1997-02-14 1998-02-13 유체제어장치
EP98102554A EP0859155B1 (en) 1997-02-14 1998-02-13 Fluid control apparatus
CA002229476A CA2229476C (en) 1997-02-14 1998-02-13 Fluid control apparatus
US09/023,416 US20010003287A1 (en) 1997-02-14 1998-02-13 Fluid control apparatus
TW087102012A TW372328B (en) 1997-02-14 1998-02-13 Fluid control device
SG1998000329A SG77161A1 (en) 1997-02-14 1998-02-14 Fluid control apparatus
IL12330598A IL123305A (en) 1997-02-14 1998-02-15 Fluid control apparatus
US10/277,147 US6615871B2 (en) 1997-02-14 2002-10-22 Fluid control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006274737A Division JP4395641B2 (ja) 2006-10-06 2006-10-06 流体制御装置

Publications (3)

Publication Number Publication Date
JPH10227368A JPH10227368A (ja) 1998-08-25
JPH10227368A5 true JPH10227368A5 (enExample) 2005-01-06
JP3997338B2 JP3997338B2 (ja) 2007-10-24

Family

ID=12291552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02999697A Expired - Lifetime JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Country Status (9)

Country Link
US (2) US20010003287A1 (enExample)
EP (1) EP0859155B1 (enExample)
JP (1) JP3997338B2 (enExample)
KR (1) KR100517424B1 (enExample)
CA (1) CA2229476C (enExample)
DE (1) DE69822689T2 (enExample)
IL (1) IL123305A (enExample)
SG (1) SG77161A1 (enExample)
TW (1) TW372328B (enExample)

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JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
CN101438091B (zh) * 2006-06-02 2012-05-23 喜开理株式会社 气体供给单元和气体供给系统
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
WO2008030501A2 (en) * 2006-09-06 2008-03-13 Ultra Clean Holdings, Incorporated Pre-certified process chamber and method
US7607641B1 (en) * 2006-10-05 2009-10-27 Microfluidic Systems, Inc. Microfluidic valve mechanism
JP2008291941A (ja) * 2007-05-25 2008-12-04 Surpass Kogyo Kk 流体機器ユニット構造
JP5127304B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
CN101680561B (zh) 2007-05-31 2011-12-21 东京毅力科创株式会社 流体控制装置
JP5125228B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
ES1068601Y (es) * 2008-08-08 2009-02-01 Istobal Sa Panel central para control y distribucion de fluidos en instalaciones de lavado de vehiculos
US20100102261A1 (en) * 2008-10-28 2010-04-29 Microfluidic Systems, Inc. Microfluidic valve mechanism
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
SG176152A1 (en) 2009-06-10 2011-12-29 Vistadeltek Llc Extreme flow rate and/or high temperature fluid delivery substrates
DE102010043865A1 (de) * 2009-11-30 2011-07-14 Horiba Stec Co., Ltd. Fluid device
JP5573666B2 (ja) 2010-12-28 2014-08-20 東京エレクトロン株式会社 原料供給装置及び成膜装置
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
WO2013046660A1 (ja) * 2011-09-30 2013-04-04 株式会社フジキン ガス供給装置
KR101940325B1 (ko) * 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
JP5478666B2 (ja) * 2012-05-21 2014-04-23 株式会社アルバック 流体制御装置およびこれを用いたガス処理装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US9639094B2 (en) * 2014-11-12 2017-05-02 Michael D. Palmer Electronic pneumatic pressure controller
DE102015100762A1 (de) * 2015-01-20 2016-07-21 Infineon Technologies Ag Behälterschalteinrichtung und Verfahren zum Überwachen einer Fluidrate
KR20190075100A (ko) 2016-10-24 2019-06-28 가부시키가이샤 후지킨 유체제어장치 및 이 유체제어장치를 사용한 제품 제조방법
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10400332B2 (en) * 2017-03-14 2019-09-03 Eastman Kodak Company Deposition system with interlocking deposition heads
WO2018180373A1 (ja) * 2017-03-29 2018-10-04 株式会社フジキン 変換継手、その変換継手を有する集積型流体供給装置および流体用パーツの取付け方法
US20200248310A1 (en) 2017-08-31 2020-08-06 Fujikin Incorporated Joint block and manufacturing method thereof
JP7333053B2 (ja) * 2019-06-28 2023-08-24 株式会社フジキン ガス供給装置および半導体製造装置
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置

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