KR100517424B1 - 유체제어장치 - Google Patents

유체제어장치 Download PDF

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Publication number
KR100517424B1
KR100517424B1 KR10-1998-0004289A KR19980004289A KR100517424B1 KR 100517424 B1 KR100517424 B1 KR 100517424B1 KR 19980004289 A KR19980004289 A KR 19980004289A KR 100517424 B1 KR100517424 B1 KR 100517424B1
Authority
KR
South Korea
Prior art keywords
valve
port
fluid
shutoff
opener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-1998-0004289A
Other languages
English (en)
Korean (ko)
Other versions
KR19980071327A (ko
Inventor
다다히로 오미
히로시 모로코시
미치오 야마지
시게아키 다나카
게이지 히라오
유지 가와노
다카시 히로세
고스케 요코야마
미치오 구라모치
마사유키 하타노
노부카즈 이케다
Original Assignee
다다히로 오미
가부시키가이샤 후지킨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다다히로 오미, 가부시키가이샤 후지킨 filed Critical 다다히로 오미
Publication of KR19980071327A publication Critical patent/KR19980071327A/ko
Application granted granted Critical
Publication of KR100517424B1 publication Critical patent/KR100517424B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0896—Assembly of modular units using different types or sizes of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B2013/002—Modular valves, i.e. consisting of an assembly of interchangeable components
    • F15B2013/006—Modular components with multiple uses, e.g. kits for either normally-open or normally-closed valves, interchangeable or reprogrammable manifolds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Flow Control (AREA)
KR10-1998-0004289A 1997-02-14 1998-02-13 유체제어장치 Expired - Fee Related KR100517424B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP97-29996 1997-02-14
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Publications (2)

Publication Number Publication Date
KR19980071327A KR19980071327A (ko) 1998-10-26
KR100517424B1 true KR100517424B1 (ko) 2005-12-12

Family

ID=12291552

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-1998-0004289A Expired - Fee Related KR100517424B1 (ko) 1997-02-14 1998-02-13 유체제어장치

Country Status (9)

Country Link
US (2) US20010003287A1 (enExample)
EP (1) EP0859155B1 (enExample)
JP (1) JP3997338B2 (enExample)
KR (1) KR100517424B1 (enExample)
CA (1) CA2229476C (enExample)
DE (1) DE69822689T2 (enExample)
IL (1) IL123305A (enExample)
SG (1) SG77161A1 (enExample)
TW (1) TW372328B (enExample)

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US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
CN1289851C (zh) 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
JP4200245B2 (ja) * 1998-11-11 2008-12-24 株式会社フジキン 流体継手
JP2002089798A (ja) * 2000-09-11 2002-03-27 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
JP4655423B2 (ja) * 2001-07-05 2011-03-23 株式会社フジキン 流体制御装置
WO2004018909A2 (en) * 2002-08-20 2004-03-04 Applied Materials, Inc. Electronically actuated valve
KR20060017577A (ko) * 2002-08-27 2006-02-24 셀레리티 인크. 공통 평면 내에 매니폴드 연결부를 갖는 모듈형 기판 가스패널
JP3854555B2 (ja) * 2002-08-30 2006-12-06 東京エレクトロン株式会社 薄膜形成装置および薄膜形成方法
GB2431206B (en) 2002-11-26 2007-05-30 Swagelok Co Modular surface mount fluid system
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
EP1486707B1 (en) * 2003-06-11 2007-11-21 Asm International N.V. Gas supply system, valve assembly and method of forming reactant pulses by operating a valve assembly
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2006022926A (ja) * 2004-07-09 2006-01-26 Ckd Corp 集積弁用下部ブロック
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
EP1873433A1 (en) 2005-04-21 2008-01-02 Fujikin Incorporated Fluid control device
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
KR100990695B1 (ko) * 2006-06-02 2010-10-29 도쿄엘렉트론가부시키가이샤 가스공급유닛 및 가스공급시스템
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
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JP2008291941A (ja) * 2007-05-25 2008-12-04 Surpass Kogyo Kk 流体機器ユニット構造
JP5127304B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
JP5125228B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
JP5150628B2 (ja) 2007-05-31 2013-02-20 東京エレクトロン株式会社 流体制御装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
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US20100102261A1 (en) * 2008-10-28 2010-04-29 Microfluidic Systems, Inc. Microfluidic valve mechanism
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
TWI534922B (zh) 2009-06-10 2016-05-21 威士塔戴爾泰克有限責任公司 極端流量和／或高溫流體輸送基板
DE102010043865A1 (de) * 2009-11-30 2011-07-14 Horiba Stec Co., Ltd. Fluid device
JP5573666B2 (ja) 2010-12-28 2014-08-20 東京エレクトロン株式会社 原料供給装置及び成膜装置
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JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
CN103827560B (zh) * 2011-09-30 2016-06-22 株式会社富士金 气体供给装置
KR101940325B1 (ko) 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
JP5478666B2 (ja) * 2012-05-21 2014-04-23 株式会社アルバック 流体制御装置およびこれを用いたガス処理装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US9639094B2 (en) * 2014-11-12 2017-05-02 Michael D. Palmer Electronic pneumatic pressure controller
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KR20190075100A (ko) 2016-10-24 2019-06-28 가부시키가이샤 후지킨 유체제어장치 및 이 유체제어장치를 사용한 제품 제조방법
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10400332B2 (en) * 2017-03-14 2019-09-03 Eastman Kodak Company Deposition system with interlocking deposition heads
US20210125842A1 (en) * 2017-03-29 2021-04-29 Fujikin Incorporated Conversion Joint, Integrated Fluid Supply Device Having Said Conversion Joint, and Method for Mounting a Fluid Part
JP7045089B2 (ja) 2017-08-31 2022-03-31 株式会社フジキン 継手ブロックおよびその製造方法
JP7333053B2 (ja) * 2019-06-28 2023-08-24 株式会社フジキン ガス供給装置および半導体製造装置
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置

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JPH05203100A (ja) * 1992-01-29 1993-08-10 Toshiba Corp ガス供給装置
US5241987A (en) * 1989-04-26 1993-09-07 Tadahiro Ohmi Process gas supplying apparatus
JPH07122500A (ja) * 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
US5590686A (en) * 1995-05-02 1997-01-07 Dober Chemical Corp. Liquid delivery systems

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US5241987A (en) * 1989-04-26 1993-09-07 Tadahiro Ohmi Process gas supplying apparatus
US5065794A (en) * 1990-11-26 1991-11-19 Union Carbide Industrial Gases Technology Corporation Gas flow distribution system
JPH05203100A (ja) * 1992-01-29 1993-08-10 Toshiba Corp ガス供給装置
JPH07122500A (ja) * 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
US5590686A (en) * 1995-05-02 1997-01-07 Dober Chemical Corp. Liquid delivery systems

Also Published As

Publication number Publication date
IL123305A0 (en) 1998-09-24
US20010003287A1 (en) 2001-06-14
IL123305A (en) 2000-10-31
US20030041910A1 (en) 2003-03-06
CA2229476C (en) 2006-07-11
JP3997338B2 (ja) 2007-10-24
JPH10227368A (ja) 1998-08-25
CA2229476A1 (en) 1998-08-14
EP0859155A3 (en) 1999-07-28
DE69822689D1 (de) 2004-05-06
US6615871B2 (en) 2003-09-09
DE69822689T2 (de) 2005-02-10
SG77161A1 (en) 2000-12-19
TW372328B (en) 1999-10-21
EP0859155B1 (en) 2004-03-31
KR19980071327A (ko) 1998-10-26
EP0859155A2 (en) 1998-08-19

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PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

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