IL123305A - Fluid control apparatus - Google Patents

Fluid control apparatus

Info

Publication number
IL123305A
IL123305A IL12330598A IL12330598A IL123305A IL 123305 A IL123305 A IL 123305A IL 12330598 A IL12330598 A IL 12330598A IL 12330598 A IL12330598 A IL 12330598A IL 123305 A IL123305 A IL 123305A
Authority
IL
Israel
Prior art keywords
control apparatus
fluid control
fluid
control
Prior art date
Application number
IL12330598A
Other languages
English (en)
Other versions
IL123305A0 (en
Original Assignee
Ohmi Tadahiro
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohmi Tadahiro, Fujikin Kk filed Critical Ohmi Tadahiro
Publication of IL123305A0 publication Critical patent/IL123305A0/xx
Publication of IL123305A publication Critical patent/IL123305A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0896—Assembly of modular units using different types or sizes of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B2013/002—Modular valves, i.e. consisting of an assembly of interchangeable components
    • F15B2013/006—Modular components with multiple uses, e.g. kits for either normally-open or normally-closed valves, interchangeable or reprogrammable manifolds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Flow Control (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
IL12330598A 1997-02-14 1998-02-15 Fluid control apparatus IL123305A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Publications (2)

Publication Number Publication Date
IL123305A0 IL123305A0 (en) 1998-09-24
IL123305A true IL123305A (en) 2000-10-31

Family

ID=12291552

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12330598A IL123305A (en) 1997-02-14 1998-02-15 Fluid control apparatus

Country Status (9)

Country Link
US (2) US20010003287A1 (enExample)
EP (1) EP0859155B1 (enExample)
JP (1) JP3997338B2 (enExample)
KR (1) KR100517424B1 (enExample)
CA (1) CA2229476C (enExample)
DE (1) DE69822689T2 (enExample)
IL (1) IL123305A (enExample)
SG (1) SG77161A1 (enExample)
TW (1) TW372328B (enExample)

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US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
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JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
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US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
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JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
WO2006115084A1 (ja) 2005-04-21 2006-11-02 Fujikin Incorporated 流体制御装置
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US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
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US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
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US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
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JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
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JP5127304B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
CN101680561B (zh) 2007-05-31 2011-12-21 东京毅力科创株式会社 流体控制装置
JP5125228B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
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US20100102261A1 (en) * 2008-10-28 2010-04-29 Microfluidic Systems, Inc. Microfluidic valve mechanism
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DE102010043865A1 (de) * 2009-11-30 2011-07-14 Horiba Stec Co., Ltd. Fluid device
JP5573666B2 (ja) 2010-12-28 2014-08-20 東京エレクトロン株式会社 原料供給装置及び成膜装置
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JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
WO2013046660A1 (ja) * 2011-09-30 2013-04-04 株式会社フジキン ガス供給装置
KR101940325B1 (ko) * 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
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Also Published As

Publication number Publication date
CA2229476C (en) 2006-07-11
CA2229476A1 (en) 1998-08-14
US20030041910A1 (en) 2003-03-06
KR19980071327A (ko) 1998-10-26
JPH10227368A (ja) 1998-08-25
KR100517424B1 (ko) 2005-12-12
EP0859155A3 (en) 1999-07-28
IL123305A0 (en) 1998-09-24
JP3997338B2 (ja) 2007-10-24
EP0859155B1 (en) 2004-03-31
US6615871B2 (en) 2003-09-09
TW372328B (en) 1999-10-21
DE69822689D1 (de) 2004-05-06
SG77161A1 (en) 2000-12-19
EP0859155A2 (en) 1998-08-19
DE69822689T2 (de) 2005-02-10
US20010003287A1 (en) 2001-06-14

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