JP3997338B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP3997338B2
JP3997338B2 JP02999697A JP2999697A JP3997338B2 JP 3997338 B2 JP3997338 B2 JP 3997338B2 JP 02999697 A JP02999697 A JP 02999697A JP 2999697 A JP2999697 A JP 2999697A JP 3997338 B2 JP3997338 B2 JP 3997338B2
Authority
JP
Japan
Prior art keywords
valve
port
shut
fluid
types
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP02999697A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10227368A5 (enExample
JPH10227368A (ja
Inventor
忠弘 大見
裕司 唐士
道雄 山路
林明 田中
圭志 平尾
裕司 川野
隆 廣瀬
光祐 横山
道生 倉持
雅之 波多野
信一 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP02999697A priority Critical patent/JP3997338B2/ja
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to TW087102012A priority patent/TW372328B/zh
Priority to DE69822689T priority patent/DE69822689T2/de
Priority to KR10-1998-0004289A priority patent/KR100517424B1/ko
Priority to EP98102554A priority patent/EP0859155B1/en
Priority to CA002229476A priority patent/CA2229476C/en
Priority to US09/023,416 priority patent/US20010003287A1/en
Priority to SG1998000329A priority patent/SG77161A1/en
Priority to IL12330598A priority patent/IL123305A/xx
Publication of JPH10227368A publication Critical patent/JPH10227368A/ja
Priority to US10/277,147 priority patent/US6615871B2/en
Publication of JPH10227368A5 publication Critical patent/JPH10227368A5/ja
Application granted granted Critical
Publication of JP3997338B2 publication Critical patent/JP3997338B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0896—Assembly of modular units using different types or sizes of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B2013/002—Modular valves, i.e. consisting of an assembly of interchangeable components
    • F15B2013/006—Modular components with multiple uses, e.g. kits for either normally-open or normally-closed valves, interchangeable or reprogrammable manifolds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Flow Control (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
JP02999697A 1997-02-14 1997-02-14 流体制御装置 Expired - Lifetime JP3997338B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置
DE69822689T DE69822689T2 (de) 1997-02-14 1998-02-13 Flüssigkeitssteuerungseinrichtung
KR10-1998-0004289A KR100517424B1 (ko) 1997-02-14 1998-02-13 유체제어장치
EP98102554A EP0859155B1 (en) 1997-02-14 1998-02-13 Fluid control apparatus
CA002229476A CA2229476C (en) 1997-02-14 1998-02-13 Fluid control apparatus
US09/023,416 US20010003287A1 (en) 1997-02-14 1998-02-13 Fluid control apparatus
TW087102012A TW372328B (en) 1997-02-14 1998-02-13 Fluid control device
SG1998000329A SG77161A1 (en) 1997-02-14 1998-02-14 Fluid control apparatus
IL12330598A IL123305A (en) 1997-02-14 1998-02-15 Fluid control apparatus
US10/277,147 US6615871B2 (en) 1997-02-14 2002-10-22 Fluid control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006274737A Division JP4395641B2 (ja) 2006-10-06 2006-10-06 流体制御装置

Publications (3)

Publication Number Publication Date
JPH10227368A JPH10227368A (ja) 1998-08-25
JPH10227368A5 JPH10227368A5 (enExample) 2005-01-06
JP3997338B2 true JP3997338B2 (ja) 2007-10-24

Family

ID=12291552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02999697A Expired - Lifetime JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Country Status (9)

Country Link
US (2) US20010003287A1 (enExample)
EP (1) EP0859155B1 (enExample)
JP (1) JP3997338B2 (enExample)
KR (1) KR100517424B1 (enExample)
CA (1) CA2229476C (enExample)
DE (1) DE69822689T2 (enExample)
IL (1) IL123305A (enExample)
SG (1) SG77161A1 (enExample)
TW (1) TW372328B (enExample)

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US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
JP4200245B2 (ja) 1998-11-11 2008-12-24 株式会社フジキン 流体継手
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JP4655423B2 (ja) * 2001-07-05 2011-03-23 株式会社フジキン 流体制御装置
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JP5127304B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
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JP5125228B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
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Also Published As

Publication number Publication date
CA2229476C (en) 2006-07-11
CA2229476A1 (en) 1998-08-14
US20030041910A1 (en) 2003-03-06
KR19980071327A (ko) 1998-10-26
JPH10227368A (ja) 1998-08-25
KR100517424B1 (ko) 2005-12-12
EP0859155A3 (en) 1999-07-28
IL123305A0 (en) 1998-09-24
IL123305A (en) 2000-10-31
EP0859155B1 (en) 2004-03-31
US6615871B2 (en) 2003-09-09
TW372328B (en) 1999-10-21
DE69822689D1 (de) 2004-05-06
SG77161A1 (en) 2000-12-19
EP0859155A2 (en) 1998-08-19
DE69822689T2 (de) 2005-02-10
US20010003287A1 (en) 2001-06-14

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