JP2005526613A - 工作物のプラズマ処理方法および装置 - Google Patents
工作物のプラズマ処理方法および装置 Download PDFInfo
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Abstract
Description
さらに本発明は、工作物を受容するための少なくとも1つの真空化可能なプラズマチャンバーを有し、プラズマチャンバーが処理ステーションの領域に配置され、該プラズマチャンバーがチャンバー底部とチャンバーカバーと側部のチャンバー壁とによって画成されている、工作物をプラズマ処理するための装置にも関わる。
同様に、プラズマチャンバーの十分な密封を保証するため、チャンバー壁をチャンバーカバーに対し密封させてもよい。
図1はプラズマモジュール(1)を示している。プラズマモジュール(1)は回転するプラズマホイール(2)を備えている。プラズマホイール(2)の周囲に沿って多数のプラズマステーション(3)が配置されている。プラズマステーション(3)は処理対象である工作物(5)を受容するためのキャビティまたはプラズマチャンバー(17)を備えている。
処理対象である工作物(5)は筒状のチャンバー壁(18)の下方に図示されている。プラズマチャンバー(17)の下部部分は図を簡潔にするために図示していない。
Claims (50)
- 工作物を処理ステーションの少なくとも部分的に真空化可能なチャンバーのなかへ挿入し、工作物の操作を補助するため、処理ステーションの少なくとも一部を少なくとも1つの他の部分に対し相対的に移動させるようにした工作物をプラズマ処理するための方法において、
スリーブ状のチャンバー壁(18)をチャンバー底部(29)とチャンバーカバー(31)とに対し相対的に位置決めすることを特徴とする方法。 - 位置決めを鉛直方向において行なうことを特徴とする、請求項1に記載の方法。
- チャンバー底部(29)とチャンバーカバー(31)とをプラズマステーション(3)のステーションフレーム(16)に対し静力学的位置決めで放置することを特徴とする、請求項1または2に記載の方法。
- プラズマステーション(3)のキャビティ(4)の真空化をチャンバー底部(29)を通じて行なうことを特徴とする、請求項1から3までのいずれか一つに記載の方法。
- チャンバー底部(29)を通じて処理ガスを供給することを特徴とする、請求項1から4までのいずれか一つに記載の方法。
- 処理ガスを長棒(36)を通じて工作物(5)の内部空間のなかへ供給することを特徴とする、請求項1から5までのいずれか一つに記載の方法。
- チャンバー壁(18)をチャンバー底部(29)に対し密封させることを特徴とする、請求項1から6までのいずれか一つに記載の方法。
- 密封をチャンバー壁(18)と結合されているパッキン(35)により行なうことを特徴とする、請求項7に記載の方法。
- チャンバー壁(18)をチャンバーカバー(31)に対し密封させることを特徴とする、請求項1から8までのいずれか一つに記載の方法。
- 密封をチャンバーカバー(31)の領域に配置したパッキン(33)により行なうことを特徴とする、請求項9に記載の方法。
- 密封をチャンバー壁(18)の内側フランジ(14)とチャンバーカバー(31)のフランジ(32)との間で行なうことを特徴とする、請求項9または10に記載の方法。
- チャンバーカバー(31)の領域において、マイクロ波発生器(19)により発生させたマイクロ波をキャビティ(4)内へ導入させることを特徴とする、請求項1から11までのいずれか一つに記載の方法。
- マイクロ波発生器(19)を連結管路(27)によりキャビティ(4)の内部空間と連結させることを特徴とする、請求項1から12までのいずれか一つに記載の方法。
- 熱可塑性プラスチックから成る工作物(5)を処理することを特徴とする、請求項1から13までのいずれか一つに記載の方法。
- 中空体状の工作物(5)の内部空間を処理することを特徴とする、請求項1から14までのいずれか一つに記載の方法。
- 工作物(5)として容器を処理することを特徴とする、請求項1から15までのいずれか一つに記載の方法。
- 工作物(5)として飲料物のボトルを処理することを特徴とする、請求項1から16までのいずれか一つに記載の方法。
- 少なくとも1つのプラズマステーション(3)を回転するプラズマホイール(2)により供給位置から排出位置へ受け渡すことを特徴とする、請求項1から17までのいずれか一つに記載の方法。
- プラズマステーション(3)により複数のキャビティ(4)を準備することを特徴とする、請求項1から18までのいずれか一つに記載の方法。
- 少なくとも2つのキャビティ(4)を準備するために設けられたチャンバー壁(18)を位置決めすることを特徴とする、請求項1から19までのいずれか一つに記載の方法。
- プラズマ処理としてプラズマコーティングを実施することを特徴とする、請求項1から20までのいずれか一つに記載の方法。
- プラズマ処理を低圧プラズマを利用して実施することを特徴とする、請求項1から21までのいずれか一つに記載の方法。
- プラズマ重合処理を実施することを特徴とする、請求項1から22までのいずれか一つに記載の方法。
- プラズマにより少なくとも部分的に有機物質を析出させることを特徴とする、請求項1から23までのいずれか一つに記載の方法。
- プラズマにより少なくとも部分的に非有機物質を析出させることを特徴とする、請求項1から23までのいずれか一つに記載の方法。
- プラズマにより工作物(5)のバリヤー特性を改善させる物質を析出させることを特徴とする、請求項1から25までのいずれか一つに記載の方法。
- 工作物(5)の表面上での物質の付着力を改善させる結合剤を付加的に析出させることを特徴とする、請求項26に記載の方法。
- 1つの共通のキャビティ(4)で少なくとも2つの工作物(5)を同時に処理することを特徴とする、請求項1から27までのいずれか一つに記載の方法。
- プラズマ処理としてプラズマ殺菌を実施することを特徴とする、請求項1から20までのいずれか一つに記載の方法。
- プラズマ処理として工作物(5)の表面活性処理を実施することを特徴とする、請求項1から20までのいずれか一つに記載の方法。
- 工作物を受容するための少なくとも1つの真空化可能なプラズマチャンバーを有し、プラズマチャンバーが処理ステーションの領域に配置され、該プラズマチャンバーがチャンバー底部とチャンバーカバーと側部のチャンバー壁とによって画成されている、工作物をプラズマ処理するための装置において、
チャンバー壁(18)がスリーブ状に形成され、チャンバー底部(29)に対してもチャンバーカバー(31)に対しても相対的に位置決め可能に配置されていることを特徴とする装置。 - チャンバーチャンバー(18)が鉛直方向に位置決め可能であることを特徴とする、請求項31に記載の装置。
- チャンバー底部(29)とチャンバーカバー(31)とがプラズマステーション(3)のステーションフレーム(16)に対し静力学的な位置決めで配置されていることを特徴とする、請求項31または32に記載の装置。
- プラズマステーション(3)のキャビティ(4)を真空にするため、チャンバー底部(29)に少なくとも1つの真空管路が配置されていることを特徴とする、請求項31から33までのいずれか一つに記載の装置。
- チャンバー底部(29)に処理ガスを供給するための少なくとも1つの管路が配置されていることを特徴とする、請求項31から34までのいずれか一つに記載の装置。
- 処理ガスを工作物(5)の内部空間内へ供給するため、長棒(36)がチャンバー底部(29)に対し相対的に位置決め可能に配置されていることを特徴とする、請求項31から35までのいずれか一つに記載の装置。
- チャンバー壁(18)がチャンバー底部(29)に対し密封されていることを特徴とする、請求項31から36までのいずれか一つに記載の装置。
- 密封のためチャンバー壁(18)の領域にパッキン(35)が配置されていることを特徴とする、請求項37に記載の装置。
- チャンバー壁(18)がチャンバーカバー(31)に対し密封されていることを特徴とする、請求項31から38までのいずれか一つに記載の装置。
- 密封のためチャンバーカバー(31)の領域にパッキン(33)が配置されていることを特徴とする、請求項39に記載の装置。
- パッキン(33)がチャンバー壁(18)の内側フランジ(34)とチャンバーカバー(31)のフランジ(32)との間に配置されていることを特徴とする、請求項39または40に記載の装置。
- チャンバーカバー(31)の領域にマイクロ波発生器(19)が配置されていることを特徴とする、請求項31から41までのいずれか一つに記載の装置。
- マイクロ波発生器(19)が連結管路(27)によりキャビティ(4)の内部空間と連結されていることを特徴とする、請求項31から42までのいずれか一つに記載の装置。
- 工作物(5)をコーティングするため、プラズマステーション(3)が熱可塑性プラスチックから形成されていることを特徴とする、請求項31から43までのいずれか一つに記載の装置。
- プラズマステーション(3)が容器状の工作物(5)をコーティングするために構成されていることを特徴とする、請求項31から44までのいずれか一つに記載の装置。
- プラズマステーション(3)が中空体状の工作物(5)をコーティングするために構成されていることを特徴とする、請求項31から45までのいずれか一つに記載の装置。
- プラズマステーション(3)が飲料物のボトルの形態の工作物(5)をコーティングするために構成されていることを特徴とする、請求項31から46までのいずれか一つに記載の装置。
- 少なくとも1つのプラズマステーション(3)が回転するプラズマホイール(2)によって担持されていることを特徴とする、請求項31から47までのいずれか一つに記載の装置。
- プラズマステーション(3)の領域に複数個のキャビティ(4)が配置されていることを特徴とする、請求項31から48までのいずれか一つに記載の装置。
- 少なくとも2つのキャビティ(4)を提供するために設けられるチャンバー壁(18)が位置決め可能に配置されていることを特徴とする、請求項31から49までのいずれか一つに記載の装置。
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DE10224395.6 | 2002-06-01 | ||
PCT/DE2003/001501 WO2003100115A1 (de) | 2002-05-24 | 2003-05-09 | Verfahren und vorrichtung zur plasmabehandlung von werkstücken |
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2002
- 2002-05-31 DE DE10224547.9A patent/DE10224547B4/de not_active Expired - Lifetime
- 2002-05-31 DE DE10224546A patent/DE10224546A1/de not_active Ceased
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- 2002-06-20 DE DE10227637A patent/DE10227637A1/de not_active Withdrawn
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2003
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Cited By (5)
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JP2005350145A (ja) * | 2004-06-11 | 2005-12-22 | Schott Ag | 回転設備内で基材を処理する方法および装置 |
WO2009144814A1 (ja) * | 2008-05-30 | 2009-12-03 | 東洋製罐株式会社 | 蒸着装置 |
JP4798288B2 (ja) * | 2008-05-30 | 2011-10-19 | 東洋製罐株式会社 | 蒸着装置 |
CN113428570A (zh) * | 2021-07-30 | 2021-09-24 | 耐落螺丝(昆山)有限公司 | 扣件自动投料系统 |
CN113428570B (zh) * | 2021-07-30 | 2024-06-04 | 耐落螺丝(昆山)有限公司 | 扣件自动投料系统 |
Also Published As
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ZA200409486B (en) | 2006-02-22 |
DE10225985A1 (de) | 2003-12-04 |
JP4889073B2 (ja) | 2012-02-29 |
DE10224395A1 (de) | 2003-12-04 |
DE10310470A1 (de) | 2003-12-18 |
DE10224547A1 (de) | 2003-12-04 |
DE10227637A1 (de) | 2004-01-15 |
DE10224546A1 (de) | 2003-12-04 |
DE10229529A1 (de) | 2003-12-04 |
DE10224547B4 (de) | 2020-06-25 |
DE10225607A1 (de) | 2003-12-04 |
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