JP2005353999A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 102
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 102
- 239000010703 silicon Substances 0.000 claims abstract description 102
- 239000011737 fluorine Substances 0.000 claims abstract description 100
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 100
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 96
- 239000000758 substrate Substances 0.000 claims abstract description 80
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 48
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 14
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims abstract description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000001301 oxygen Substances 0.000 claims abstract description 8
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 97
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 67
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 67
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 22
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 22
- 230000007423 decrease Effects 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 20
- 238000013459 approach Methods 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 14
- 229910004129 HfSiO Inorganic materials 0.000 claims description 11
- 238000002955 isolation Methods 0.000 claims description 10
- 238000005121 nitriding Methods 0.000 claims description 10
- 229910003855 HfAlO Inorganic materials 0.000 claims description 5
- 238000011282 treatment Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 19
- 229910052796 boron Inorganic materials 0.000 abstract description 19
- DYCJFJRCWPVDHY-LSCFUAHRSA-N NBMPR Chemical compound O[C@@H]1[C@H](O)[C@@H](CO)O[C@H]1N1C2=NC=NC(SCC=3C=CC(=CC=3)[N+]([O-])=O)=C2N=C1 DYCJFJRCWPVDHY-LSCFUAHRSA-N 0.000 abstract description 10
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 3
- 230000035515 penetration Effects 0.000 description 16
- 239000012535 impurity Substances 0.000 description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 8
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 230000008030 elimination Effects 0.000 description 4
- 238000003379 elimination reaction Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- -1 hafnium aluminate Chemical class 0.000 description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 3
- 125000001475 halogen functional group Chemical group 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Abstract
【解決手段】 シリコン基板1の上には、ゲート絶縁膜12とゲート電極8とが形成されていて、ゲート絶縁膜12は、少なくともハフニウム、酸素、フッ素および窒素を含む。そして、フッ素の濃度は、シリコン基板1との界面付近で高くてゲート電極8に近づくほど漸次減少し、窒素の濃度は、ゲート電極8との界面付近で高くてシリコン基板1に近づくほど漸次減少する。ここで、シリコン基板1との界面付近におけるフッ素の濃度は1×1019cm−3以上であることが好ましい。また、ゲート電極8との界面付近における窒素の濃度は1×1020cm−3以上であることが好ましい。
【選択図】 図1
Description
図1は、本実施の形態にかかる半導体装置の断面図の一例である。図に示すように、シリコン基板1の上には、ゲート絶縁膜12とゲート電極8とが形成されている。そして、本発明では、ゲート絶縁膜12が、少なくともハフニウム、酸素、フッ素および窒素を含み、フッ素の濃度は、シリコン基板1との界面付近で高くてゲート電極8に近づくほど漸次減少し、窒素の濃度は、ゲート電極8との界面付近で高くてシリコン基板12に近づくほど漸次減少することを特徴としている。
図14は、本実施の形態にかかる半導体装置の断面図の一例である。図に示すように、シリコン基板21の上には、ゲート絶縁膜28とゲート電極27とが形成されている。そして、実施の形態1と同様に、ゲート絶縁膜28が、少なくともハフニウム、酸素、フッ素および窒素を含み、フッ素の濃度は、シリコン基板21との界面付近で高くてゲート電極27に近づくほど漸次減少し、窒素の濃度は、ゲート電極27との界面付近で高くてシリコン基板21に近づくほど漸次減少することを特徴としている。尚、本実施の形態においてはシリコン酸化膜26はなくてもよい。
2,22 素子分離領域
3,23,26 シリコン酸化膜
4,29 フッ素含有シリコン酸化膜
5,24 High−k膜
6 窒化シリコン膜
7,25 多結晶シリコン膜
8,27 ゲート電極
9,30 エクステンション領域
10,31 サイドウォール
11,32 ソース・ドレイン拡散層
12,28 ゲート絶縁膜
Claims (10)
- シリコン基板上に形成されたゲート絶縁膜と、該ゲート絶縁膜の上に形成されたゲート電極とを有する半導体装置において、
前記ゲート絶縁膜は、少なくともハフニウム、酸素、フッ素および窒素を含み、
前記フッ素の濃度は、前記シリコン基板との界面付近で高くて前記ゲート電極に近づくほど漸次減少し、前記窒素の濃度は、前記ゲート電極との界面付近で高くて前記シリコン基板に近づくほど漸次減少することを特徴とする半導体装置。 - 前記シリコン基板との界面付近における前記フッ素の濃度は1×1019cm−3以上である請求項1に記載の半導体装置。
- 前記ゲート電極との界面付近における前記窒素の濃度は1×1020cm−3以上である請求項1または2に記載の半導体装置。
- シリコン基板に素子分離領域を形成する工程と、
前記シリコン基板にフッ素をイオン注入する工程と、
前記シリコン基板を熱酸化して、前記シリコン基板の表面にフッ素含有シリコン酸化膜を形成する工程と、
前記フッ素含有シリコン酸化膜の上に高誘電率絶縁膜を形成する工程と、
前記高誘電率絶縁膜の上に窒化シリコン膜を形成する工程と、
前記窒化シリコン膜の上にシリコン膜を形成する工程と、
前記シリコン膜を加工してゲート電極を形成する工程とを有することを特徴とする半導体装置の製造方法。 - 前記ゲート電極を形成する工程の後、前記ゲート電極をマスクとして前記窒化シリコン膜、前記高誘電率絶縁膜および前記フッ素含有シリコン酸化膜を加工し、ゲート絶縁膜を形成する工程をさらに有する請求項4に記載の半導体装置の製造方法。
- シリコン基板に素子分離領域を形成する工程と、
前記シリコン基板を熱酸化して、前記シリコン基板の表面にシリコン酸化膜を形成する工程と、
前記シリコン酸化膜の上に高誘電率絶縁膜を形成する工程と、
前記高誘電率絶縁膜の表面をプラズマ窒化処理する工程と、
前記プラズマ窒化処理後の前記高誘電率絶縁膜の上にシリコン膜を形成する工程と、
前記シリコン膜を加工してゲート電極を形成する工程と、
前記ゲート電極をマスクとして、前記シリコン基板にフッ素をイオン注入する工程と、
前記シリコン基板を熱処理して前記フッ素を拡散させ、前記シリコン酸化膜をフッ素含有シリコン酸化膜にする工程とを有することを特徴とする半導体装置の製造方法。 - 前記シリコン膜を形成する工程の後、さらに前記シリコン膜の上にシリコン酸化膜を形成する工程を有し、前記ゲート電極を形成する工程は、該シリコン酸化膜と前記シリコン膜とを加工する工程である請求項5に記載の半導体装置の製造方法。
- 前記ゲート電極を形成する工程の後、前記ゲート電極をマスクとして前記高誘電率絶縁膜および前記シリコン酸化膜を加工し、ゲート絶縁膜を形成する工程をさらに有する請求項6または7に記載の半導体装置の製造方法。
- 前記フッ素をイオン注入する際のドーズ量は1×1012cm−2〜1×1016cm−2の範囲内である請求項4〜8に記載の半導体装置の製造方法。
- 前記高誘電率絶縁膜は、HfO2膜、HfAlOx膜およびHfSiOx膜よりなる群から選ばれるいずれか1の膜である請求項4〜9に記載の半導体装置の製造方法。
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