JP2005353740A - 半導体素子及び半導体装置 - Google Patents

半導体素子及び半導体装置 Download PDF

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Publication number
JP2005353740A
JP2005353740A JP2004171215A JP2004171215A JP2005353740A JP 2005353740 A JP2005353740 A JP 2005353740A JP 2004171215 A JP2004171215 A JP 2004171215A JP 2004171215 A JP2004171215 A JP 2004171215A JP 2005353740 A JP2005353740 A JP 2005353740A
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Japan
Prior art keywords
semiconductor element
groove
adhesive
semiconductor
substrate
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JP2004171215A
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English (en)
Japanese (ja)
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JP2005353740A5 (enExample
Inventor
Tetsuo Nozu
哲郎 野津
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Toshiba Corp
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Toshiba Corp
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Priority to JP2004171215A priority Critical patent/JP2005353740A/ja
Priority to US10/975,385 priority patent/US7215013B2/en
Publication of JP2005353740A publication Critical patent/JP2005353740A/ja
Publication of JP2005353740A5 publication Critical patent/JP2005353740A5/ja
Pending legal-status Critical Current

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JP2004171215A 2004-06-09 2004-06-09 半導体素子及び半導体装置 Pending JP2005353740A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004171215A JP2005353740A (ja) 2004-06-09 2004-06-09 半導体素子及び半導体装置
US10/975,385 US7215013B2 (en) 2004-06-09 2004-10-29 Semiconductor device and semiconductor apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004171215A JP2005353740A (ja) 2004-06-09 2004-06-09 半導体素子及び半導体装置

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JP2005353740A true JP2005353740A (ja) 2005-12-22
JP2005353740A5 JP2005353740A5 (enExample) 2007-07-05

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JP2007114126A (ja) * 2005-10-21 2007-05-10 Fujitsu Ltd 半導体装置及びその製造方法
JP2011187518A (ja) * 2010-03-05 2011-09-22 Nippon Telegr & Teleph Corp <Ntt> 半導体装置およびその製造方法
JPWO2021038712A1 (enExample) * 2019-08-27 2021-03-04
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