JP5663999B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP5663999B2 JP5663999B2 JP2010168431A JP2010168431A JP5663999B2 JP 5663999 B2 JP5663999 B2 JP 5663999B2 JP 2010168431 A JP2010168431 A JP 2010168431A JP 2010168431 A JP2010168431 A JP 2010168431A JP 5663999 B2 JP5663999 B2 JP 5663999B2
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- active element
- semiconductor device
- mounting surface
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- metal layer
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- 239000004065 semiconductor Substances 0.000 title claims description 90
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims description 74
- 229910052751 metal Inorganic materials 0.000 claims description 48
- 239000002184 metal Substances 0.000 claims description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 45
- 229910052710 silicon Inorganic materials 0.000 claims description 45
- 239000010703 silicon Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 25
- 150000004767 nitrides Chemical class 0.000 claims description 11
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000017525 heat dissipation Effects 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/141—Analog devices
- H01L2924/1423—Monolithic Microwave Integrated Circuit [MMIC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30107—Inductance
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
Description
Claims (8)
- 搭載面と該搭載面に対向する主面とを有し、前記主面から前記搭載面まで延びるビアホールが形成されたシリコン基板と、
前記ビアホール内に設けられた金属層と、
前記金属層に接する第1の部分、及び前記第1の部分の両側の部分であって前記搭載面上に設けられた第2の部分を有する半導体基板、並びに、該半導体基板上に設けられた窒化物半導体層を有する能動素子と、
を備える半導体装置。 - 前記半導体基板はSiC基板又はGaN基板である、請求項1に記載の半導体装置。
- 前記能動素子の全周縁が、前記搭載面上に設けられている、請求項1又は2に記載の半導体装置。
- 半導体装置を製造する方法であって、
半導体基板上に窒化物半導体層を有する能動素子を準備する工程と、
シリコン基板の搭載面上に前記能動素子を搭載する工程と、
前記搭載面と対向する前記シリコン基板の主面から前記搭載面まで、前記能動素子の前記半導体基板の一部分のみに達するビアホールを形成する工程と、
前記ビアホール内に前記半導体基板の前記一部分に接するよう金属層を形成する工程と、
を含む方法。 - 半導体装置を製造する方法であって、
半導体基板上に窒化物半導体層を有する能動素子を準備する工程と、
シリコン基板に、該シリコン基板の搭載面から該搭載面に対向する該シリコン基板の主面まで延びるビアホールを形成する工程と、
前記ビアホール内に金属層を形成する工程と、
前記半導体基板の第1の部分が前記金属層に接し、前記第1の部分の両側の前記半導体基板の第2の部分が前記搭載面上に設けられるよう前記能動素子を搭載する工程と、
を含む方法。 - 前記半導体基板はSiC基板又はGaN基板である、請求項4又は5に記載の方法。
- 前記能動素子の全周縁が、前記搭載面上に設けられる、請求項4〜6の何れか一項に記載の方法。
- 前記能動素子を搭載する工程の後に、前記シリコン基板の前記搭載面上に配置された伝送線路と前記能動素子とを接続する配線を形成することを特徴とする請求項4〜7の何れか一項に記載の方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010168431A JP5663999B2 (ja) | 2010-07-27 | 2010-07-27 | 半導体装置及びその製造方法 |
US13/189,957 US8592825B2 (en) | 2010-07-27 | 2011-07-25 | Semiconductor device having Si-substrate and process to form the same |
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JP2010168431A JP5663999B2 (ja) | 2010-07-27 | 2010-07-27 | 半導体装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012028693A JP2012028693A (ja) | 2012-02-09 |
JP5663999B2 true JP5663999B2 (ja) | 2015-02-04 |
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Application Number | Title | Priority Date | Filing Date |
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JP2010168431A Active JP5663999B2 (ja) | 2010-07-27 | 2010-07-27 | 半導体装置及びその製造方法 |
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JP (1) | JP5663999B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015176924A (ja) * | 2014-03-13 | 2015-10-05 | 株式会社東芝 | 半導体装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3039463B2 (ja) * | 1997-07-29 | 2000-05-08 | 日本電気株式会社 | 半導体装置及びその製造方法 |
JP2002319658A (ja) * | 2001-04-20 | 2002-10-31 | Matsushita Electric Ind Co Ltd | 半導体装置 |
US8431973B2 (en) * | 2008-12-10 | 2013-04-30 | Kabushiki Kaisha Toshiba | High frequency semiconductor device |
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- 2010-07-27 JP JP2010168431A patent/JP5663999B2/ja active Active
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