JP2005311293A5 - - Google Patents
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- Publication number
- JP2005311293A5 JP2005311293A5 JP2004319480A JP2004319480A JP2005311293A5 JP 2005311293 A5 JP2005311293 A5 JP 2005311293A5 JP 2004319480 A JP2004319480 A JP 2004319480A JP 2004319480 A JP2004319480 A JP 2004319480A JP 2005311293 A5 JP2005311293 A5 JP 2005311293A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- external connection
- connection electrode
- semiconductor device
- bump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 25
- 239000002245 particle Substances 0.000 claims 10
- 238000002161 passivation Methods 0.000 claims 10
- 239000000463 material Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 239000011810 insulating material Substances 0.000 claims 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- 239000003054 catalyst Substances 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000007772 electroless plating Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004319480A JP2005311293A (ja) | 2004-03-26 | 2004-11-02 | 半導体チップ、半導体装置、半導体装置の製造方法及び電子機器 |
| TW094105056A TWI257676B (en) | 2004-03-26 | 2005-02-21 | Semiconductor chip, semiconductor device, method for producing semiconductor device, and electronic equipment |
| US11/064,596 US20050212130A1 (en) | 2004-03-26 | 2005-02-24 | Semiconductor chip, semiconductor device, method for producing semiconductor device, and electronic equipment |
| CNA2005100590688A CN1674242A (zh) | 2004-03-26 | 2005-03-22 | 半导体芯片、半导体装置、半导体装置的制造方法 |
| KR1020050024407A KR100659447B1 (ko) | 2004-03-26 | 2005-03-24 | 반도체 칩, 반도체 장치, 반도체 장치의 제조 방법 및전자기기 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004091171 | 2004-03-26 | ||
| JP2004319480A JP2005311293A (ja) | 2004-03-26 | 2004-11-02 | 半導体チップ、半導体装置、半導体装置の製造方法及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005311293A JP2005311293A (ja) | 2005-11-04 |
| JP2005311293A5 true JP2005311293A5 (enExample) | 2006-05-25 |
Family
ID=34988814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004319480A Pending JP2005311293A (ja) | 2004-03-26 | 2004-11-02 | 半導体チップ、半導体装置、半導体装置の製造方法及び電子機器 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20050212130A1 (enExample) |
| JP (1) | JP2005311293A (enExample) |
| KR (1) | KR100659447B1 (enExample) |
| CN (1) | CN1674242A (enExample) |
| TW (1) | TWI257676B (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005191541A (ja) * | 2003-12-05 | 2005-07-14 | Seiko Epson Corp | 半導体装置、半導体チップ、半導体装置の製造方法及び電子機器 |
| JP4750586B2 (ja) * | 2006-02-28 | 2011-08-17 | 住友電工デバイス・イノベーション株式会社 | 半導体装置および電子装置並びにその製造方法 |
| JP5520425B2 (ja) * | 2009-01-10 | 2014-06-11 | 宛伶 兪 | 半導体部材のメタルバンプと密封を形成する方法 |
| KR20110052880A (ko) * | 2009-11-13 | 2011-05-19 | 삼성전자주식회사 | 플립 칩 패키지 및 그의 제조 방법 |
| CN103107156B (zh) * | 2011-11-11 | 2016-02-10 | 讯忆科技股份有限公司 | 晶圆焊垫的凸块结构及其制造方法 |
| JP2013140902A (ja) * | 2012-01-06 | 2013-07-18 | Enrei Yu | 半導体パッケージ及びその製造方法 |
| JP6057521B2 (ja) * | 2012-03-05 | 2017-01-11 | デクセリアルズ株式会社 | 異方性導電材料を用いた接続方法及び異方性導電接合体 |
| JP6333624B2 (ja) * | 2013-05-22 | 2018-05-30 | 積水化学工業株式会社 | 接続構造体 |
| US9331033B1 (en) * | 2014-12-23 | 2016-05-03 | Sunasic Technologies Inc. | Method for forming stacked metal contact in electrical communication with aluminum wiring in semiconductor wafer of integrated circuit |
| CN105826206B (zh) * | 2015-01-05 | 2018-07-24 | 旭景科技股份有限公司 | 用于形成堆栈金属接点与半导体晶圆内铝线电连通的方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63128734A (ja) * | 1986-11-19 | 1988-06-01 | Seiko Epson Corp | 半導体装置 |
| JP2000286299A (ja) * | 1999-03-30 | 2000-10-13 | Matsushita Electric Ind Co Ltd | 半導体装置の接続方法 |
| JP3348681B2 (ja) * | 1999-04-08 | 2002-11-20 | 日本電気株式会社 | 集積回路の端子構造 |
| JP3968554B2 (ja) * | 2000-05-01 | 2007-08-29 | セイコーエプソン株式会社 | バンプの形成方法及び半導体装置の製造方法 |
| JP2003282616A (ja) * | 2002-03-20 | 2003-10-03 | Seiko Epson Corp | バンプの形成方法及び半導体装置の製造方法 |
| JP2003282615A (ja) * | 2002-03-20 | 2003-10-03 | Seiko Epson Corp | バンプの構造、バンプの形成方法、半導体装置およびその製造方法並びに電子機器 |
-
2004
- 2004-11-02 JP JP2004319480A patent/JP2005311293A/ja active Pending
-
2005
- 2005-02-21 TW TW094105056A patent/TWI257676B/zh not_active IP Right Cessation
- 2005-02-24 US US11/064,596 patent/US20050212130A1/en not_active Abandoned
- 2005-03-22 CN CNA2005100590688A patent/CN1674242A/zh active Pending
- 2005-03-24 KR KR1020050024407A patent/KR100659447B1/ko not_active Expired - Fee Related
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