CN1674242A - 半导体芯片、半导体装置、半导体装置的制造方法 - Google Patents

半导体芯片、半导体装置、半导体装置的制造方法 Download PDF

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Publication number
CN1674242A
CN1674242A CNA2005100590688A CN200510059068A CN1674242A CN 1674242 A CN1674242 A CN 1674242A CN A2005100590688 A CNA2005100590688 A CN A2005100590688A CN 200510059068 A CN200510059068 A CN 200510059068A CN 1674242 A CN1674242 A CN 1674242A
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conductive layer
semiconductor device
semiconductor chip
auxiliary
conductive
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Chinese (zh)
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今井英生
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Seiko Epson Corp
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Seiko Epson Corp
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CNA2005100590688A 2004-03-26 2005-03-22 半导体芯片、半导体装置、半导体装置的制造方法 Pending CN1674242A (zh)

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CN102074511A (zh) * 2009-11-13 2011-05-25 三星电子株式会社 倒装芯片封装件和制造该倒装芯片封装件的方法
CN103107156A (zh) * 2011-11-11 2013-05-15 讯忆科技股份有限公司 晶圆焊垫的凸块结构及其制造方法
CN105826206A (zh) * 2015-01-05 2016-08-03 旭景科技股份有限公司 用于形成堆栈金属接点与半导体晶圆内铝线电连通的方法
CN104145329B (zh) * 2012-03-05 2017-04-12 迪睿合电子材料有限公司 使用各向异性导电材料的连接方法及各向异性导电接合体

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JP2005191541A (ja) * 2003-12-05 2005-07-14 Seiko Epson Corp 半導体装置、半導体チップ、半導体装置の製造方法及び電子機器
JP4750586B2 (ja) * 2006-02-28 2011-08-17 住友電工デバイス・イノベーション株式会社 半導体装置および電子装置並びにその製造方法
JP5520425B2 (ja) * 2009-01-10 2014-06-11 宛伶 兪 半導体部材のメタルバンプと密封を形成する方法
JP2013140902A (ja) * 2012-01-06 2013-07-18 Enrei Yu 半導体パッケージ及びその製造方法
JP6333624B2 (ja) * 2013-05-22 2018-05-30 積水化学工業株式会社 接続構造体
US9331033B1 (en) * 2014-12-23 2016-05-03 Sunasic Technologies Inc. Method for forming stacked metal contact in electrical communication with aluminum wiring in semiconductor wafer of integrated circuit

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JPS63128734A (ja) * 1986-11-19 1988-06-01 Seiko Epson Corp 半導体装置
JP2000286299A (ja) * 1999-03-30 2000-10-13 Matsushita Electric Ind Co Ltd 半導体装置の接続方法
JP3348681B2 (ja) * 1999-04-08 2002-11-20 日本電気株式会社 集積回路の端子構造
JP3968554B2 (ja) * 2000-05-01 2007-08-29 セイコーエプソン株式会社 バンプの形成方法及び半導体装置の製造方法
JP2003282616A (ja) * 2002-03-20 2003-10-03 Seiko Epson Corp バンプの形成方法及び半導体装置の製造方法
JP2003282615A (ja) * 2002-03-20 2003-10-03 Seiko Epson Corp バンプの構造、バンプの形成方法、半導体装置およびその製造方法並びに電子機器

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102074511A (zh) * 2009-11-13 2011-05-25 三星电子株式会社 倒装芯片封装件和制造该倒装芯片封装件的方法
CN103107156A (zh) * 2011-11-11 2013-05-15 讯忆科技股份有限公司 晶圆焊垫的凸块结构及其制造方法
CN103107156B (zh) * 2011-11-11 2016-02-10 讯忆科技股份有限公司 晶圆焊垫的凸块结构及其制造方法
CN104145329B (zh) * 2012-03-05 2017-04-12 迪睿合电子材料有限公司 使用各向异性导电材料的连接方法及各向异性导电接合体
CN105826206A (zh) * 2015-01-05 2016-08-03 旭景科技股份有限公司 用于形成堆栈金属接点与半导体晶圆内铝线电连通的方法
CN105826206B (zh) * 2015-01-05 2018-07-24 旭景科技股份有限公司 用于形成堆栈金属接点与半导体晶圆内铝线电连通的方法

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