TWI257676B - Semiconductor chip, semiconductor device, method for producing semiconductor device, and electronic equipment - Google Patents
Semiconductor chip, semiconductor device, method for producing semiconductor device, and electronic equipment Download PDFInfo
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- TWI257676B TWI257676B TW094105056A TW94105056A TWI257676B TW I257676 B TWI257676 B TW I257676B TW 094105056 A TW094105056 A TW 094105056A TW 94105056 A TW94105056 A TW 94105056A TW I257676 B TWI257676 B TW I257676B
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- conductive layer
- semiconductor device
- conductive
- semiconductor wafer
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- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03F—SEWERS; CESSPOOLS
- E03F5/00—Sewerage structures
- E03F5/10—Collecting-tanks; Equalising-tanks for regulating the run-off; Laying-up basins
- E03F5/105—Accessories, e.g. flow regulators or cleaning devices
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- C—CHEMISTRY; METALLURGY
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- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F3/00—Biological treatment of water, waste water, or sewage
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- H01L2224/29438—Coating material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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- H01L2224/73201—Location after the connecting process on the same surface
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- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
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- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
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- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
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- H—ELECTRICITY
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- H01L2924/3011—Impedance
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Structural Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Hydrology & Water Resources (AREA)
- Manufacturing & Machinery (AREA)
- Microbiology (AREA)
- Biodiversity & Conservation Biology (AREA)
- Environmental & Geological Engineering (AREA)
- Civil Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004091171 | 2004-03-26 | ||
| JP2004319480A JP2005311293A (ja) | 2004-03-26 | 2004-11-02 | 半導体チップ、半導体装置、半導体装置の製造方法及び電子機器 |
Publications (2)
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| TW200532831A TW200532831A (en) | 2005-10-01 |
| TWI257676B true TWI257676B (en) | 2006-07-01 |
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| JP (1) | JP2005311293A (enExample) |
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|---|---|---|---|---|
| JP2005191541A (ja) * | 2003-12-05 | 2005-07-14 | Seiko Epson Corp | 半導体装置、半導体チップ、半導体装置の製造方法及び電子機器 |
| JP4750586B2 (ja) * | 2006-02-28 | 2011-08-17 | 住友電工デバイス・イノベーション株式会社 | 半導体装置および電子装置並びにその製造方法 |
| JP5520425B2 (ja) * | 2009-01-10 | 2014-06-11 | 宛伶 兪 | 半導体部材のメタルバンプと密封を形成する方法 |
| KR20110052880A (ko) * | 2009-11-13 | 2011-05-19 | 삼성전자주식회사 | 플립 칩 패키지 및 그의 제조 방법 |
| CN103107156B (zh) * | 2011-11-11 | 2016-02-10 | 讯忆科技股份有限公司 | 晶圆焊垫的凸块结构及其制造方法 |
| JP2013140902A (ja) * | 2012-01-06 | 2013-07-18 | Enrei Yu | 半導体パッケージ及びその製造方法 |
| JP6057521B2 (ja) * | 2012-03-05 | 2017-01-11 | デクセリアルズ株式会社 | 異方性導電材料を用いた接続方法及び異方性導電接合体 |
| JP6333624B2 (ja) * | 2013-05-22 | 2018-05-30 | 積水化学工業株式会社 | 接続構造体 |
| US9331033B1 (en) * | 2014-12-23 | 2016-05-03 | Sunasic Technologies Inc. | Method for forming stacked metal contact in electrical communication with aluminum wiring in semiconductor wafer of integrated circuit |
| CN105826206B (zh) * | 2015-01-05 | 2018-07-24 | 旭景科技股份有限公司 | 用于形成堆栈金属接点与半导体晶圆内铝线电连通的方法 |
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| JPS63128734A (ja) * | 1986-11-19 | 1988-06-01 | Seiko Epson Corp | 半導体装置 |
| JP2000286299A (ja) * | 1999-03-30 | 2000-10-13 | Matsushita Electric Ind Co Ltd | 半導体装置の接続方法 |
| JP3348681B2 (ja) * | 1999-04-08 | 2002-11-20 | 日本電気株式会社 | 集積回路の端子構造 |
| JP3968554B2 (ja) * | 2000-05-01 | 2007-08-29 | セイコーエプソン株式会社 | バンプの形成方法及び半導体装置の製造方法 |
| JP2003282616A (ja) * | 2002-03-20 | 2003-10-03 | Seiko Epson Corp | バンプの形成方法及び半導体装置の製造方法 |
| JP2003282615A (ja) * | 2002-03-20 | 2003-10-03 | Seiko Epson Corp | バンプの構造、バンプの形成方法、半導体装置およびその製造方法並びに電子機器 |
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| TW200532831A (en) | 2005-10-01 |
| US20050212130A1 (en) | 2005-09-29 |
| KR100659447B1 (ko) | 2006-12-19 |
| KR20060044669A (ko) | 2006-05-16 |
| JP2005311293A (ja) | 2005-11-04 |
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