TWI257676B - Semiconductor chip, semiconductor device, method for producing semiconductor device, and electronic equipment - Google Patents

Semiconductor chip, semiconductor device, method for producing semiconductor device, and electronic equipment Download PDF

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Publication number
TWI257676B
TWI257676B TW094105056A TW94105056A TWI257676B TW I257676 B TWI257676 B TW I257676B TW 094105056 A TW094105056 A TW 094105056A TW 94105056 A TW94105056 A TW 94105056A TW I257676 B TWI257676 B TW I257676B
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Taiwan
Prior art keywords
conductive layer
semiconductor device
conductive
semiconductor wafer
layer
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TW094105056A
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English (en)
Chinese (zh)
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TW200532831A (en
Inventor
Hideo Imai
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Seiko Epson Corp
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Publication of TW200532831A publication Critical patent/TW200532831A/zh
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Publication of TWI257676B publication Critical patent/TWI257676B/zh

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    • EFIXED CONSTRUCTIONS
    • E03WATER SUPPLY; SEWERAGE
    • E03FSEWERS; CESSPOOLS
    • E03F5/00Sewerage structures
    • E03F5/10Collecting-tanks; Equalising-tanks for regulating the run-off; Laying-up basins
    • E03F5/105Accessories, e.g. flow regulators or cleaning devices
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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F3/00Biological treatment of water, waste water, or sewage
    • EFIXED CONSTRUCTIONS
    • E02HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02BHYDRAULIC ENGINEERING
    • E02B7/00Barrages or weirs; Layout, construction, methods of, or devices for, making same
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    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
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JP4750586B2 (ja) * 2006-02-28 2011-08-17 住友電工デバイス・イノベーション株式会社 半導体装置および電子装置並びにその製造方法
JP5520425B2 (ja) * 2009-01-10 2014-06-11 宛伶 兪 半導体部材のメタルバンプと密封を形成する方法
KR20110052880A (ko) * 2009-11-13 2011-05-19 삼성전자주식회사 플립 칩 패키지 및 그의 제조 방법
CN103107156B (zh) * 2011-11-11 2016-02-10 讯忆科技股份有限公司 晶圆焊垫的凸块结构及其制造方法
JP2013140902A (ja) * 2012-01-06 2013-07-18 Enrei Yu 半導体パッケージ及びその製造方法
JP6057521B2 (ja) * 2012-03-05 2017-01-11 デクセリアルズ株式会社 異方性導電材料を用いた接続方法及び異方性導電接合体
JP6333624B2 (ja) * 2013-05-22 2018-05-30 積水化学工業株式会社 接続構造体
US9331033B1 (en) * 2014-12-23 2016-05-03 Sunasic Technologies Inc. Method for forming stacked metal contact in electrical communication with aluminum wiring in semiconductor wafer of integrated circuit
CN105826206B (zh) * 2015-01-05 2018-07-24 旭景科技股份有限公司 用于形成堆栈金属接点与半导体晶圆内铝线电连通的方法

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JP3348681B2 (ja) * 1999-04-08 2002-11-20 日本電気株式会社 集積回路の端子構造
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