JP2005256063A - 水崩壊性Al複合材料、この材料からなるAl膜、Al粉及びこれらの製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 - Google Patents
水崩壊性Al複合材料、この材料からなるAl膜、Al粉及びこれらの製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 Download PDFInfo
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 49
- 239000002131 composite material Substances 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 34
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical group [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
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- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
【解決手段】Al若しくはAl合金の単一又は複数個の結晶粒から構成される小塊や粉体の外表面が、In、Sn、In及びSn、又はそれらの合金である低融点金属の皮膜で覆われている。低融点金属の含有量が複合材料全重量基準で0.1〜20wt%である。Al等に前記量の低融点金属を加えて溶融・溶解した材料を、非酸化性雰囲気中で急冷凝固させてAl複合材料を得る。前記Al複合材料からAl膜、Al溶射膜、Al粉を得る。表面に水崩壊性Al膜を備えた成膜室用構成部材。この水崩壊性Al膜を備えた成膜室用構成部材を用いて長時間成膜処理した後、成膜材料が厚く付着した構成部材から成膜材料を回収する。
【選択図】図1
Description
3 逆偏析層
Claims (10)
- Al若しくはAl合金の単一又は複数個の結晶粒から構成される小塊や粉体の外表面が、In、Sn、In及びSn、又はそれらの合金である低融点金属の皮膜で覆われていることを特徴とする水崩壊性Al複合材料。
- 前記複合材料の全重量に対する前記In、Sn、In及びSn、又はそれらの合金の含有量が0.1〜20wt%であることを特徴とする請求項1記載の水崩壊性Al複合材料。
- Al若しくはAl合金にIn、Sn、In及びSn、又はそれらの合金である低融点金属を0.1〜20wt%加えた材料を組成が均一になるように溶融又は溶解し、この材料を非酸化性雰囲気中で急冷凝固させることにより、In、Sn、In及びSn、又はそれらの合金をAl若しくはAl合金の単一又は複数個の結晶粒から構成される小塊や粉体の外表面に逆偏析させ、該外表面をIn、Sn、In及びSn、又はそれらの合金である低融点金属の皮膜で覆ったことを特徴とする水崩壊性Al複合材料の製造方法。
- 請求項1又は2記載の水崩壊性Al複合材料からなることを特徴とする水崩壊性Al膜。
- 請求項4記載の水崩壊性Al膜が溶射によって成膜されたことを特徴とする水崩壊性Al溶射膜。
- Al若しくはAl合金にIn、Sn、In及びSn、又はそれらの合金である低融点金属を0.1〜20wt%加えた材料を組成が均一になるように溶融し、この材料を非酸化性雰囲気中で基板表面に対して溶射して急冷凝固させることにより成膜することを特徴とする水崩壊性Al溶射膜の製造方法。
- 請求項1又は2記載の水崩壊性Al複合材料からなることを特徴とする水崩壊性Al粉。
- Al若しくはAl合金にIn、Sn、In及びSn、又はそれらの合金である低融点金属を0.1〜20wt%加えた材料を組成が均一になるように溶解し、この材料を非酸化性雰囲気中で噴霧して急冷凝固させることにより形成することを特徴とする水崩壊性Al粉の製造方法。
- 表面に請求項4若しくは5記載の水崩壊性Al膜又は請求項6記載の製造方法により得られた水崩壊性Al膜を備えたことを特徴とする成膜装置の成膜室用構成部材。
- 被処理物に成膜処理を行う成膜装置の成膜室用構成部材として、請求項9記載の表面に水崩壊性Al膜を備えた成膜室用構成部材を用い、長時間の成膜処理でその表面に成膜材料が厚く付着した前記成膜室用構成部材を成膜装置から取り外し、水、水蒸気、水溶液等の存在する雰囲気に曝すことにより、水崩壊性Al膜を崩壊させ、成膜材料からなる付着膜のみを前記成膜室用構成部材の表面から剥離回収することを特徴とする成膜材料の回収方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004067829A JP4653406B2 (ja) | 2004-03-10 | 2004-03-10 | 水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
TW094105946A TW200533761A (en) | 2004-03-10 | 2005-02-25 | Al composite material being crumbled with water, A1 film and A1 powder comprising the material and methods for preparation thereof, constitutional member for film-forming chamber method for recovering film-forming material |
PCT/JP2005/003714 WO2005087968A1 (ja) | 2004-03-10 | 2005-03-04 | 水崩壊性Al複合材料、この材料からなるAl膜、Al粉及びこれらの製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
US10/549,034 US7951463B2 (en) | 2004-03-10 | 2005-03-04 | Water collapsible aluminum film |
KR1020057019091A KR101235999B1 (ko) | 2004-03-10 | 2005-03-04 | 수붕괴성 Al 복합재료, 이 재료로 이루어지는 Al 막, Al 분말 및 이들의 제조방법, 그리고 막형성 챔버용 구성부재 및 막형성 재료의 회수방법 |
CNB2005800001446A CN100510154C (zh) | 2004-03-10 | 2005-03-04 | 水崩解性a1复合材料、该材料形成的a1膜、a1粉及它们的制造方法、和成膜室用构成部件及成膜材料的回收方法 |
US13/091,866 US20110200481A1 (en) | 2004-03-10 | 2011-04-21 | WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS |
US13/091,878 US20110192546A1 (en) | 2004-03-10 | 2011-04-21 | WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS |
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JP2004067829A JP4653406B2 (ja) | 2004-03-10 | 2004-03-10 | 水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
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JP2005256063A true JP2005256063A (ja) | 2005-09-22 |
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US (3) | US7951463B2 (ja) |
JP (1) | JP4653406B2 (ja) |
KR (1) | KR101235999B1 (ja) |
CN (1) | CN100510154C (ja) |
TW (1) | TW200533761A (ja) |
WO (1) | WO2005087968A1 (ja) |
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JP2007277687A (ja) * | 2006-04-11 | 2007-10-25 | Tosoh Corp | 溶射膜除去用組成物、及びそれを用いた除去方法 |
JP2009097049A (ja) * | 2007-10-18 | 2009-05-07 | Denki Kagaku Kogyo Kk | 犠牲陽極材を用いたコンクリートの電気化学的防食方法 |
WO2009133837A1 (ja) | 2008-04-30 | 2009-11-05 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
WO2009133836A1 (ja) | 2008-04-30 | 2009-11-05 | 株式会社アルバック | 水反応性Al膜の製造方法及び成膜室用構成部材 |
WO2009133838A1 (ja) | 2008-04-30 | 2009-11-05 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
WO2009133841A1 (ja) | 2008-04-30 | 2009-11-05 | 株式会社アルバック | 水反応性Al膜の製造方法及び成膜室用構成部材 |
WO2009133840A1 (ja) | 2008-04-30 | 2009-11-05 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
WO2009133839A1 (ja) | 2008-04-30 | 2009-11-05 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
JP2010010447A (ja) * | 2008-06-27 | 2010-01-14 | Disco Abrasive Syst Ltd | 半導体デバイスの電極形成方法 |
WO2011052640A1 (ja) * | 2009-10-29 | 2011-05-05 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
JP2013518177A (ja) * | 2010-01-25 | 2013-05-20 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | コーティング設備の洗浄方法 |
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WO2016035599A1 (ja) * | 2014-09-05 | 2016-03-10 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al合金溶射膜、このAl合金溶射膜の製造方法、及び成膜室用構成部材 |
JP2017203666A (ja) * | 2016-05-10 | 2017-11-16 | 株式会社アルバック | 水分検出素子製造方法、水崩壊性配線膜製造方法、水崩壊性薄膜製造方法、水分検出素子 |
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JP2009097049A (ja) * | 2007-10-18 | 2009-05-07 | Denki Kagaku Kogyo Kk | 犠牲陽極材を用いたコンクリートの電気化学的防食方法 |
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Also Published As
Publication number | Publication date |
---|---|
TW200533761A (en) | 2005-10-16 |
TWI367263B (ja) | 2012-07-01 |
WO2005087968A1 (ja) | 2005-09-22 |
US7951463B2 (en) | 2011-05-31 |
CN1764735A (zh) | 2006-04-26 |
US20110200481A1 (en) | 2011-08-18 |
CN100510154C (zh) | 2009-07-08 |
US20110192546A1 (en) | 2011-08-11 |
KR20060118319A (ko) | 2006-11-23 |
US20060240271A1 (en) | 2006-10-26 |
KR101235999B1 (ko) | 2013-02-21 |
JP4653406B2 (ja) | 2011-03-16 |
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