WO2009133837A1 - 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 - Google Patents
水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 Download PDFInfo
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- WO2009133837A1 WO2009133837A1 PCT/JP2009/058256 JP2009058256W WO2009133837A1 WO 2009133837 A1 WO2009133837 A1 WO 2009133837A1 JP 2009058256 W JP2009058256 W JP 2009058256W WO 2009133837 A1 WO2009133837 A1 WO 2009133837A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
- C22C21/02—Alloys based on aluminium with silicon as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
Abstract
Description
Al溶射膜は、In及びSiがAl中に一様に分散したAl-In-Si複合材料を用いて、溶射法に従って所定の雰囲気中で被処理基材の表面に成膜することにより製造される。得られたAl-In-Si溶射膜は、Al結晶粒の中にIn結晶粒(粒径10nm以下)が均一に高度に分散した状態で含まれている。
4NAl、In及びSiを用意し、このAlに対して、2~5wt%のIn、及び4NAl中の不純物Si量を勘案し、不純物Si量との合計で0.04~0.6wt%、好ましくは0.04~0.2wt%となる量のSiを配合し、Al中にIn及びSiを均一溶解させて、ロッド又はワイヤー形状に加工した物を溶射材料として用い、例えばフレーム溶射法により、成膜装置の防着板等の成膜室用構成部材のような基材の表面に吹き付けて急冷凝固させ、被覆することにより所望の水反応性Al溶射膜を備えた基材を製造することができる。かくして得られた溶射膜は、上記したように、Al結晶粒中にInが均一に高度に分散した状態で存在している膜である。
(比較例1)
Alとして3NAl、4NAl及び5NAlを用い、以下のAl-In組成におけるAl純度とIn濃度と得られた溶射膜の溶解性との関係を比較検討した。Inの添加量は、Al重量基準である。
・3NAl-3wt%In
・3NAl-4wt%In
・4NAl-2wt%In
・4NAl-3wt%In
・4NAl-5wt%In
・5NAl-1.5wt%In
・5NAl-2.5wt%In
・5NAl-3.5wt%In
・4NAl-3wt%In-0.05wt%Si(このうち、不純物Si:90ppm)
・4NAl-3wt%In-0.1wt%Si(このうち、不純物Si:100ppm)
・4NAl-3wt%In-0.2wt%Si(このうち、不純物Si:100ppm)
・4NAl-2.6wt%In-0.5wt%Si(このうち、不純物Si:100ppm)
・4NAl-3wt%In-0.1wt%Si(このうち、不純物Si:100ppm)
・4NAl-4wt%In-0.5wt%Si(このうち、不純物Si:100ppm)
・5NAl-1.5wt%In-0.05wt%Si(このうち、不純物Si:100ppm)
・5NAl-2.6wt%In-0.1wt%Si(このうち、不純物Si:100ppm)
・5NAl-3.5wt%In-0.5wt%Si(このうち、不純物Si:100ppm)
Claims (5)
- 4NAl又は5NAlに、Al基準で、2~5wt%のIn及びAl中に存在する不純物Si量との合計で0.04~0.6wt%となる量のSiを添加してなることを特徴とする水反応性Al複合材料。
- 4NAl又は5NAlに、Al基準で、2~5wt%のIn及びAl中に存在する不純物Si量との合計で0.04~0.6wt%となる量のSiを添加した材料を組成が均一になるように溶融し、この溶融材料を、基材表面に対して溶射して急冷凝固させることにより成膜することを特徴とする水反応性Al膜の製造方法。
- 請求項1記載の水反応性Al複合材料からなることを特徴とする水反応性Al膜。
- 請求項1記載の水反応性Al複合材料からなる水反応性Al膜又は請求項2記載の方法により製造された水反応性Al膜を表面に備えたことを特徴とする成膜装置の成膜室用構成部材。
- 前記構成部材が、防着板、シャッター又はマスクであることを特徴とする請求項4記載の成膜室用構成部材。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/990,141 US8715404B2 (en) | 2008-04-30 | 2009-04-27 | Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber |
KR1020107026603A KR101303386B1 (ko) | 2008-04-30 | 2009-04-27 | 수 반응성 Al 복합 재료, 수 반응성 Al 막, 이 Al 막의 제조 방법, 및 성막실용 구성 부재 |
EP09738774.0A EP2281915B1 (en) | 2008-04-30 | 2009-04-27 | Water-reactive al composite material, water-reactive al film, process for production of the al film, and constituent member for film deposition chamber |
CN2009801154080A CN102027152B (zh) | 2008-04-30 | 2009-04-27 | 水反应性Al复合材料、水反应性Al膜、该Al膜的制造方法、及成膜室用构成部件 |
JP2010510107A JP5327758B2 (ja) | 2008-04-30 | 2009-04-27 | 溶射用水反応性Al複合材料、水反応性Al溶射膜、このAl溶射膜の製造方法、及び成膜室用構成部材 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008118852 | 2008-04-30 | ||
JP2008-118852 | 2008-04-30 |
Publications (1)
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WO2009133837A1 true WO2009133837A1 (ja) | 2009-11-05 |
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PCT/JP2009/058256 WO2009133837A1 (ja) | 2008-04-30 | 2009-04-27 | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
Country Status (9)
Country | Link |
---|---|
US (1) | US8715404B2 (ja) |
EP (1) | EP2281915B1 (ja) |
JP (1) | JP5327758B2 (ja) |
KR (1) | KR101303386B1 (ja) |
CN (1) | CN102027152B (ja) |
MY (1) | MY152964A (ja) |
RU (1) | RU2466205C2 (ja) |
TW (1) | TWI445825B (ja) |
WO (1) | WO2009133837A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012026349A1 (ja) * | 2010-08-27 | 2012-03-01 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al溶射膜、このAl溶射膜の製造方法、及び成膜室用構成部材 |
WO2012090774A1 (ja) * | 2010-12-27 | 2012-07-05 | シャープ株式会社 | 蒸着装置および回収装置 |
JP2019001674A (ja) * | 2017-06-14 | 2019-01-10 | 株式会社アルバック | 水素発生材料製造方法、燃料電池、水素発生方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8808619B2 (en) * | 2008-04-30 | 2014-08-19 | Ulvac, Inc. | Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber |
KR101496628B1 (ko) | 2013-02-19 | 2015-02-26 | 허정도 | 새로운 고점탄성 개질제 및 중온 개질제의 조성물과 그 제조방법 그리고 중온 개질 신규 및 재생 아스팔트콘크리트 혼합물의 조성물과 그 제조방법 |
ITBA20130034A1 (it) * | 2013-04-30 | 2014-10-31 | Mrs S R L | Metodo per la pulizia di superfici in apparati di deposizione di film sottili da fase vapore e per il recupero del materiale rimosso |
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SG189755A1 (en) * | 2008-04-30 | 2013-05-31 | Ulvac Inc | Method for the production of water-reactive al film and constituent member for film-forming chamber |
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2009
- 2009-04-27 US US12/990,141 patent/US8715404B2/en active Active
- 2009-04-27 RU RU2010148778/02A patent/RU2466205C2/ru active
- 2009-04-27 CN CN2009801154080A patent/CN102027152B/zh active Active
- 2009-04-27 WO PCT/JP2009/058256 patent/WO2009133837A1/ja active Application Filing
- 2009-04-27 KR KR1020107026603A patent/KR101303386B1/ko active IP Right Grant
- 2009-04-27 EP EP09738774.0A patent/EP2281915B1/en active Active
- 2009-04-27 MY MYPI20104886 patent/MY152964A/en unknown
- 2009-04-27 JP JP2010510107A patent/JP5327758B2/ja active Active
- 2009-04-29 TW TW098114182A patent/TWI445825B/zh active
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2012026349A1 (ja) * | 2010-08-27 | 2012-03-01 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al溶射膜、このAl溶射膜の製造方法、及び成膜室用構成部材 |
CN103228814A (zh) * | 2010-08-27 | 2013-07-31 | 株式会社爱发科 | 水反应性Al复合材料、水反应性Al喷镀膜、该Al喷镀膜的制造方法及成膜室用构成构件 |
JP5517371B2 (ja) * | 2010-08-27 | 2014-06-11 | 株式会社アルバック | 水反応性Al溶射膜、このAl溶射膜の製造方法、及び成膜室用構成部材 |
US8945296B2 (en) | 2010-08-27 | 2015-02-03 | Ulvac, Inc. | Water-reactive Al-based composite material, water-reactive Al-based thermally sprayed film, process for production of such Al-based thermally sprayed film, and constituent member for film-forming chamber |
TWI473885B (zh) * | 2010-08-27 | 2015-02-21 | Ulvac Inc | A water-reactive aluminum composite material, a water-reactive aluminum melt film, a method for producing the water-reactive aluminum melt film, and a constituent member for a film forming chamber |
KR101502253B1 (ko) * | 2010-08-27 | 2015-03-12 | 가부시키가이샤 알박 | 수 반응성 Al 복합 재료, 수 반응성 Al 용사막, 이 Al 용사막의 제조 방법, 및 성막실용 구성 부재 |
WO2012090774A1 (ja) * | 2010-12-27 | 2012-07-05 | シャープ株式会社 | 蒸着装置および回収装置 |
US9365927B2 (en) | 2010-12-27 | 2016-06-14 | Sharp Kabushiki Kaisha | Deposition method and collection method |
JP2019001674A (ja) * | 2017-06-14 | 2019-01-10 | 株式会社アルバック | 水素発生材料製造方法、燃料電池、水素発生方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102027152A (zh) | 2011-04-20 |
US20110036267A1 (en) | 2011-02-17 |
CN102027152B (zh) | 2012-09-12 |
MY152964A (en) | 2014-12-15 |
EP2281915A1 (en) | 2011-02-09 |
TW200948982A (en) | 2009-12-01 |
US8715404B2 (en) | 2014-05-06 |
JPWO2009133837A1 (ja) | 2011-09-01 |
KR101303386B1 (ko) | 2013-09-03 |
RU2010148778A (ru) | 2012-06-10 |
RU2466205C2 (ru) | 2012-11-10 |
KR20100135322A (ko) | 2010-12-24 |
EP2281915B1 (en) | 2014-04-16 |
TWI445825B (zh) | 2014-07-21 |
EP2281915A4 (en) | 2011-04-20 |
JP5327758B2 (ja) | 2013-10-30 |
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