JP4653406B2 - 水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 - Google Patents
水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 Download PDFInfo
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- JP4653406B2 JP4653406B2 JP2004067829A JP2004067829A JP4653406B2 JP 4653406 B2 JP4653406 B2 JP 4653406B2 JP 2004067829 A JP2004067829 A JP 2004067829A JP 2004067829 A JP2004067829 A JP 2004067829A JP 4653406 B2 JP4653406 B2 JP 4653406B2
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- 238000000034 method Methods 0.000 title claims description 31
- 239000002131 composite material Substances 0.000 title claims description 24
- 239000000843 powder Substances 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229910052738 indium Inorganic materials 0.000 claims description 56
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 47
- 229910052718 tin Inorganic materials 0.000 claims description 44
- 239000000956 alloy Substances 0.000 claims description 29
- 229910045601 alloy Inorganic materials 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 238000000151 deposition Methods 0.000 claims description 22
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- 239000000758 substrate Substances 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 17
- 229910000838 Al alloy Inorganic materials 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
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- 238000005507 spraying Methods 0.000 claims description 10
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- 239000007864 aqueous solution Substances 0.000 claims description 7
- 230000002378 acidificating effect Effects 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 230000007935 neutral effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 135
- 230000008021 deposition Effects 0.000 description 21
- 229910018117 Al-In Inorganic materials 0.000 description 19
- 229910018456 Al—In Inorganic materials 0.000 description 19
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 15
- 238000005204 segregation Methods 0.000 description 15
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- 239000000126 substance Substances 0.000 description 12
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- 230000000694 effects Effects 0.000 description 8
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
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- 239000011248 coating agent Substances 0.000 description 3
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- 238000005868 electrolysis reaction Methods 0.000 description 3
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
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- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
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- 150000002736 metal compounds Chemical class 0.000 description 2
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- 229910018140 Al-Sn Inorganic materials 0.000 description 1
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- 101000608750 Arachis hypogaea Alpha-methyl-mannoside-specific lectin Proteins 0.000 description 1
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- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
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Images
Classifications
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/17—Metallic particles coated with metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
- C23C4/185—Separation of the coating from the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T428/12014—All metal or with adjacent metals having metal particles
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- Y10T428/12063—Nonparticulate metal component
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12681—Ga-, In-, Tl- or Group VA metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Coating By Spraying Or Casting (AREA)
- Powder Metallurgy (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
3 逆偏析層
Claims (5)
- Al若しくはAl合金にIn、Sn、In及びSn、又はそれらの合金である低融点金属を0.1〜20wt%加えた材料を組成が均一になるように溶融又は溶解し、この材料を非酸化性雰囲気中で急冷凝固させることにより、In、Sn、In及びSn、又はそれらの合金をAl若しくはAl合金の単一又は複数個の結晶粒から構成される小塊や粉体の外表面に逆偏析させ、該外表面をIn、Sn、In及びSn、又はそれらの合金である低融点金属の皮膜で覆ったことを特徴とする水崩壊性Al複合材料の製造方法。
- Al若しくはAl合金にIn、Sn、In及びSn、又はそれらの合金である低融点金属を0.1〜20wt%加えた材料を組成が均一になるように溶融又は溶解し、この材料を非酸化性雰囲気中で基板表面に対して溶射して急冷凝固させることにより、In、Sn、In及びSn、又はそれらの合金をAl若しくはAl合金の単一又は複数個の結晶粒から構成される小塊や粉体の外表面に逆偏析させ、該外表面を低融点金属の皮膜で覆って成膜することを特徴とする水崩壊性Al溶射膜の製造方法。
- Al若しくはAl合金にIn、Sn、In及びSn、又はそれらの合金である低融点金属を0.1〜20wt%加えた材料を組成が均一になるように溶融又は溶解し、この材料を非酸化性雰囲気中で噴霧して急冷凝固させることにより、In、Sn、In及びSn、又はそれらの合金をAl若しくはAl合金の単一又は複数個の結晶粒から構成される小塊や粉体の外表面に逆偏析させ、該外表面を低融点金属の皮膜で覆って水崩壊性Al粉を形成することを特徴とする水崩壊性Al粉の製造方法。
- 表面に請求項2記載の製造方法により得られた水崩壊性Al溶射膜を備えたことを特徴とする成膜装置の成膜室用構成部材。
- 被処理物に成膜処理を行う成膜装置の成膜室用構成部材として、請求項4記載の表面に水崩壊性Al溶射膜を備えた成膜室用構成部材を用い、長時間の成膜処理でその表面に成膜材料が厚く付着した前記成膜室用構成部材を成膜装置から取り外し、水、水蒸気、水溶液の存在する雰囲気に曝すことにより、水崩壊性Al溶射膜を崩壊させ、成膜材料からなる付着膜のみを前記成膜室用構成部材の表面から剥離回収することを特徴とする成膜材料の回収方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004067829A JP4653406B2 (ja) | 2004-03-10 | 2004-03-10 | 水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
TW094105946A TW200533761A (en) | 2004-03-10 | 2005-02-25 | Al composite material being crumbled with water, A1 film and A1 powder comprising the material and methods for preparation thereof, constitutional member for film-forming chamber method for recovering film-forming material |
CNB2005800001446A CN100510154C (zh) | 2004-03-10 | 2005-03-04 | 水崩解性a1复合材料、该材料形成的a1膜、a1粉及它们的制造方法、和成膜室用构成部件及成膜材料的回收方法 |
PCT/JP2005/003714 WO2005087968A1 (ja) | 2004-03-10 | 2005-03-04 | 水崩壊性Al複合材料、この材料からなるAl膜、Al粉及びこれらの製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
KR1020057019091A KR101235999B1 (ko) | 2004-03-10 | 2005-03-04 | 수붕괴성 Al 복합재료, 이 재료로 이루어지는 Al 막, Al 분말 및 이들의 제조방법, 그리고 막형성 챔버용 구성부재 및 막형성 재료의 회수방법 |
US10/549,034 US7951463B2 (en) | 2004-03-10 | 2005-03-04 | Water collapsible aluminum film |
US13/091,878 US20110192546A1 (en) | 2004-03-10 | 2011-04-21 | WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS |
US13/091,866 US20110200481A1 (en) | 2004-03-10 | 2011-04-21 | WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004067829A JP4653406B2 (ja) | 2004-03-10 | 2004-03-10 | 水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005256063A JP2005256063A (ja) | 2005-09-22 |
JP4653406B2 true JP4653406B2 (ja) | 2011-03-16 |
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JP2004067829A Expired - Lifetime JP4653406B2 (ja) | 2004-03-10 | 2004-03-10 | 水崩壊性Al複合材料、水崩壊性Al溶射膜、及び水崩壊性Al粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
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US (3) | US7951463B2 (ja) |
JP (1) | JP4653406B2 (ja) |
KR (1) | KR101235999B1 (ja) |
CN (1) | CN100510154C (ja) |
TW (1) | TW200533761A (ja) |
WO (1) | WO2005087968A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4882468B2 (ja) * | 2006-04-11 | 2012-02-22 | 東ソー株式会社 | 溶射膜除去用組成物、及びそれを用いた除去方法 |
JP5388435B2 (ja) * | 2007-10-18 | 2014-01-15 | 電気化学工業株式会社 | 犠牲陽極材を用いたコンクリートの電気化学的防食方法に使用される鋼材の防食用部材及びそれを用いた電気化学的防食方法 |
MY152991A (en) * | 2008-04-30 | 2014-12-31 | Ulvac Inc | Method for the production of water-reactive al film and constituent member for film-forming chamber |
EP2280091B9 (en) * | 2008-04-30 | 2013-03-27 | Ulvac, Inc. | METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER |
KR101303386B1 (ko) * | 2008-04-30 | 2013-09-03 | 가부시키가이샤 알박 | 수 반응성 Al 복합 재료, 수 반응성 Al 막, 이 Al 막의 제조 방법, 및 성막실용 구성 부재 |
KR20100136559A (ko) * | 2008-04-30 | 2010-12-28 | 가부시키가이샤 알박 | 수 반응성 Al 복합 재료, 수 반응성 Al 막, 이 Al 막의 제조 방법, 및 성막실용 구성 부재 |
SG189749A1 (en) * | 2008-04-30 | 2013-05-31 | Ulvac Inc | Water-reactive al composite material, water-reactive al film, process for the production of the al film, and constituent member for film-forming chamber |
MY152957A (en) | 2008-04-30 | 2014-12-15 | Ulvac Inc | Water-reactive al composite material for thermal spray, water-reactive thermally sprayed al film, process for the production of the thermally sprayed al film, and constituent member for film-forming chamber |
JP2010010447A (ja) * | 2008-06-27 | 2010-01-14 | Disco Abrasive Syst Ltd | 半導体デバイスの電極形成方法 |
WO2011052640A1 (ja) * | 2009-10-29 | 2011-05-05 | 株式会社アルバック | 水反応性Al複合材料、水反応性Al膜、このAl膜の製造方法、及び成膜室用構成部材 |
DE102010005762A1 (de) * | 2010-01-25 | 2011-07-28 | Oerlikon Trading Ag, Trübbach | Reinigungsverfahren für Beschichtungsanlagen |
SG188239A1 (en) | 2010-08-27 | 2013-04-30 | Ulvac Inc | Water-reactive al-based composite material, water-reactive al-based thermally sprayed film, process for production of such al-based thermally sprayed film, and constituent member for film-forming chamber |
SG11201700344QA (en) * | 2014-09-05 | 2017-03-30 | Ulvac Inc | WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER |
JP6726523B2 (ja) * | 2016-05-10 | 2020-07-22 | 株式会社アルバック | 水分検出素子製造方法、水崩壊性配線膜製造方法、水崩壊性薄膜製造方法、水分検出素子 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS632801A (ja) * | 1986-06-21 | 1988-01-07 | Ofic Co | 水素ガス生成材 |
JPH03264602A (ja) * | 1990-03-14 | 1991-11-25 | Isuzu Motors Ltd | アルミニウム焼結体 |
JPH0726373A (ja) * | 1993-07-09 | 1995-01-27 | Asahi Glass Co Ltd | 回転カソードターゲットとその製造方法および該ターゲットを用いて形成される膜 |
JPH07238331A (ja) * | 1994-02-25 | 1995-09-12 | Toyota Motor Corp | 摺動部材 |
JPH10168503A (ja) * | 1996-12-10 | 1998-06-23 | Nisshin Steel Co Ltd | 高導電性複合粉末 |
JP2004114123A (ja) * | 2002-09-27 | 2004-04-15 | Sumitomo Special Metals Co Ltd | はんだ被覆ボールおよびその製造方法、ならびに半導体接続構造の形成方法 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3399649A (en) * | 1963-12-31 | 1968-09-03 | Ibm | Apparatus for making saw blades |
US3627599A (en) * | 1969-04-25 | 1971-12-14 | Rca Corp | Method of applying an n,n{40 diallylmelamine resist to a surface |
US4040822A (en) * | 1974-01-10 | 1977-08-09 | Alloy Metals, Inc. | Aluminum base fluxless brazing alloy |
US4434541A (en) * | 1980-12-22 | 1984-03-06 | Chomerics, Inc. | Electromagnetic shielding |
GB2116215B (en) * | 1982-03-06 | 1985-09-25 | Rolls Royce | Improvements in or relating to flame sprayed coatings |
US4490184A (en) * | 1982-09-23 | 1984-12-25 | Ltv Aerospace And Defense Co. | Corrosion resistant thermal control material and process |
US4687510A (en) * | 1983-01-24 | 1987-08-18 | Gte Products Corporation | Method for making ultrafine metal powder |
JPS616421A (ja) * | 1984-06-21 | 1986-01-13 | Toyota Motor Corp | コネクテイングロツド |
JPS62218529A (ja) * | 1986-03-18 | 1987-09-25 | Yamaha Motor Co Ltd | アルミニウムの焼結方法 |
EP0248960A1 (en) * | 1986-06-03 | 1987-12-16 | Osaka Fuji Kogyo Kabushiki Kaisha | Hydrogen producing material |
DE3621184A1 (de) * | 1986-06-25 | 1988-01-07 | Glyco Metall Werke | Schichtwerkstoff sowie verfahren zu seiner herstellung durch vakuum-plasma-spritzen |
GB8704251D0 (en) * | 1987-02-24 | 1987-04-01 | Alcan Int Ltd | Welding aluminium alloys |
US4888054A (en) * | 1987-02-24 | 1989-12-19 | Pond Sr Robert B | Metal composites with fly ash incorporated therein and a process for producing the same |
JPH02302596A (ja) * | 1989-05-18 | 1990-12-14 | Furukawa Alum Co Ltd | 熱交換器用管材 |
DE4341869A1 (de) * | 1992-12-08 | 1994-06-09 | Flow Int Corp | Entfernung von harten Überzügen mit Ultrahochdruck-Flachstrahlen |
JPH08199279A (ja) * | 1995-01-20 | 1996-08-06 | Sumitomo Metal Mining Co Ltd | 溶射用アルミニウム合金 |
CN1050154C (zh) * | 1996-07-11 | 2000-03-08 | 南开大学 | 球形的储氢合金及其制造方法 |
DE19716524C1 (de) * | 1997-04-19 | 1998-08-20 | Daimler Benz Aerospace Ag | Verfahren zur Herstellung eines Körpers mit einem Hohlraum |
JP3207863B2 (ja) * | 1998-03-18 | 2001-09-10 | 大豊工業株式会社 | アルミニウム合金系摺動材料 |
US6379492B2 (en) * | 1998-10-31 | 2002-04-30 | Applied Materials, Inc. | Corrosion resistant coating |
JP2001338647A (ja) * | 2000-05-26 | 2001-12-07 | Sanyo Electric Co Ltd | リチウム二次電池 |
JP2002161325A (ja) | 2000-11-20 | 2002-06-04 | Ulvac Japan Ltd | アルミニウム合金、水素ガス発生方法、水素ガス発生器及び発電機 |
JP2003138367A (ja) * | 2001-10-29 | 2003-05-14 | Sulzer Metco (Japan) Ltd | 溶射皮膜、溶射皮膜の形成方法及び溶射原料粉末 |
US6899798B2 (en) * | 2001-12-21 | 2005-05-31 | Applied Materials, Inc. | Reusable ceramic-comprising component which includes a scrificial surface layer |
US6656535B2 (en) * | 2001-12-21 | 2003-12-02 | Applied Materials, Inc | Method of fabricating a coated process chamber component |
US7026009B2 (en) * | 2002-03-27 | 2006-04-11 | Applied Materials, Inc. | Evaluation of chamber components having textured coatings |
US6776850B2 (en) * | 2002-06-08 | 2004-08-17 | Taiwan Semiconductor Manufacturing Co., Ltd | Preventative maintenance aided tool for CVD chamber |
EP1382708A3 (en) * | 2002-07-03 | 2005-06-01 | OMC Scientific Research Limited | Surface recovery of contaminated deposition tools |
US6902628B2 (en) * | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Method of cleaning a coated process chamber component |
US20040134427A1 (en) * | 2003-01-09 | 2004-07-15 | Derderian Garo J. | Deposition chamber surface enhancement and resulting deposition chambers |
US20040195380A1 (en) * | 2003-03-17 | 2004-10-07 | Wall Michael R. | Rotatable nozzle with nonaligning fluid supply |
US7097713B2 (en) * | 2003-08-19 | 2006-08-29 | The Boc Group, Inc. | Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates |
-
2004
- 2004-03-10 JP JP2004067829A patent/JP4653406B2/ja not_active Expired - Lifetime
-
2005
- 2005-02-25 TW TW094105946A patent/TW200533761A/zh unknown
- 2005-03-04 US US10/549,034 patent/US7951463B2/en active Active
- 2005-03-04 KR KR1020057019091A patent/KR101235999B1/ko active IP Right Grant
- 2005-03-04 CN CNB2005800001446A patent/CN100510154C/zh active Active
- 2005-03-04 WO PCT/JP2005/003714 patent/WO2005087968A1/ja active Application Filing
-
2011
- 2011-04-21 US US13/091,866 patent/US20110200481A1/en not_active Abandoned
- 2011-04-21 US US13/091,878 patent/US20110192546A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS632801A (ja) * | 1986-06-21 | 1988-01-07 | Ofic Co | 水素ガス生成材 |
JPH03264602A (ja) * | 1990-03-14 | 1991-11-25 | Isuzu Motors Ltd | アルミニウム焼結体 |
JPH0726373A (ja) * | 1993-07-09 | 1995-01-27 | Asahi Glass Co Ltd | 回転カソードターゲットとその製造方法および該ターゲットを用いて形成される膜 |
JPH07238331A (ja) * | 1994-02-25 | 1995-09-12 | Toyota Motor Corp | 摺動部材 |
JPH10168503A (ja) * | 1996-12-10 | 1998-06-23 | Nisshin Steel Co Ltd | 高導電性複合粉末 |
JP2004114123A (ja) * | 2002-09-27 | 2004-04-15 | Sumitomo Special Metals Co Ltd | はんだ被覆ボールおよびその製造方法、ならびに半導体接続構造の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI367263B (ja) | 2012-07-01 |
CN100510154C (zh) | 2009-07-08 |
US20110200481A1 (en) | 2011-08-18 |
US7951463B2 (en) | 2011-05-31 |
US20060240271A1 (en) | 2006-10-26 |
US20110192546A1 (en) | 2011-08-11 |
WO2005087968A1 (ja) | 2005-09-22 |
TW200533761A (en) | 2005-10-16 |
KR101235999B1 (ko) | 2013-02-21 |
JP2005256063A (ja) | 2005-09-22 |
KR20060118319A (ko) | 2006-11-23 |
CN1764735A (zh) | 2006-04-26 |
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