SG11201700344QA - WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER - Google Patents

WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER

Info

Publication number
SG11201700344QA
SG11201700344QA SG11201700344QA SG11201700344QA SG11201700344QA SG 11201700344Q A SG11201700344Q A SG 11201700344QA SG 11201700344Q A SG11201700344Q A SG 11201700344QA SG 11201700344Q A SG11201700344Q A SG 11201700344QA SG 11201700344Q A SG11201700344Q A SG 11201700344QA
Authority
SG
Singapore
Prior art keywords
reactive
water
film
alloy spray
spray film
Prior art date
Application number
SG11201700344QA
Inventor
Ryouta Nakamura
Tadashi Morita
Katsuhiko Mushiake
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of SG11201700344QA publication Critical patent/SG11201700344QA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C22C21/02—Alloys based on aluminium with silicon as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
SG11201700344QA 2014-09-05 2015-08-24 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER SG11201700344QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014181685 2014-09-05
PCT/JP2015/073761 WO2016035599A1 (en) 2014-09-05 2015-08-24 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER

Publications (1)

Publication Number Publication Date
SG11201700344QA true SG11201700344QA (en) 2017-03-30

Family

ID=55439665

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201700344QA SG11201700344QA (en) 2014-09-05 2015-08-24 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER

Country Status (7)

Country Link
JP (1) JP5899387B1 (en)
KR (1) KR101702282B1 (en)
CN (1) CN106232854B (en)
MY (1) MY166240A (en)
SG (1) SG11201700344QA (en)
TW (1) TW201615856A (en)
WO (1) WO2016035599A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7417367B2 (en) * 2019-05-27 2024-01-18 アルバックテクノ株式会社 Parts for film deposition equipment and film deposition equipment equipped with the same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3974055A (en) * 1974-12-23 1976-08-10 The Dow Chemical Company Aluminum alloy anode composition
JPH1030896A (en) * 1996-07-17 1998-02-03 Furukawa Electric Co Ltd:The Manufacture of high corrosion-resistant aluminum tube and high corrosion-resistant aluminum tube manufactured based on the same method
JP4653406B2 (en) * 2004-03-10 2011-03-16 株式会社アルバック Water-disintegrating Al composite material, water-disintegrating Al sprayed film, method for producing water-disintegrating Al powder, film forming chamber component, and method for recovering film forming material
JP5327759B2 (en) 2008-04-30 2013-10-30 株式会社アルバック Water-reactive Al composite material for thermal spraying, water-reactive Al thermal-sprayed film, method for producing this Al-sprayed film, and component for film formation chamber
MY152678A (en) 2008-04-30 2014-10-31 Ulvac Inc Water-reactive al composite material for thermal spray, water-reactive thermally sprayed al film, process for the production of the thermally sprayed al film, and constituent member for film-forming chamber
KR101502253B1 (en) * 2010-08-27 2015-03-12 가부시키가이샤 알박 Water-reactive al composite material, water-reactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber

Also Published As

Publication number Publication date
JP5899387B1 (en) 2016-04-06
TWI561640B (en) 2016-12-11
CN106232854A (en) 2016-12-14
CN106232854B (en) 2017-10-13
TW201615856A (en) 2016-05-01
JPWO2016035599A1 (en) 2017-04-27
MY166240A (en) 2018-06-22
KR20160130322A (en) 2016-11-10
WO2016035599A1 (en) 2016-03-10
KR101702282B1 (en) 2017-02-03

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