JP2005175381A - 半導体素子、アレイ基板およびその製造方法 - Google Patents
半導体素子、アレイ基板およびその製造方法 Download PDFInfo
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- JP2005175381A JP2005175381A JP2003416676A JP2003416676A JP2005175381A JP 2005175381 A JP2005175381 A JP 2005175381A JP 2003416676 A JP2003416676 A JP 2003416676A JP 2003416676 A JP2003416676 A JP 2003416676A JP 2005175381 A JP2005175381 A JP 2005175381A
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- 239000000758 substrate Substances 0.000 title claims abstract description 134
- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000010410 layer Substances 0.000 claims abstract description 127
- 239000011229 interlayer Substances 0.000 claims abstract description 61
- 239000010409 thin film Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims description 21
- 238000009413 insulation Methods 0.000 claims description 7
- 239000010408 film Substances 0.000 abstract description 113
- 239000011521 glass Substances 0.000 abstract description 37
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 35
- 229920005591 polysilicon Polymers 0.000 abstract description 35
- 238000004140 cleaning Methods 0.000 abstract description 6
- 239000003990 capacitor Substances 0.000 description 23
- 239000004973 liquid crystal related substance Substances 0.000 description 23
- 239000000463 material Substances 0.000 description 12
- 238000003860 storage Methods 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 7
- 239000012530 fluid Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000011247 coating layer Substances 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】ガラス基板3の層間絶縁膜側を洗浄する前に、層間絶縁膜を介してゲート電極配線11に連通して開口するダミーホール36を各画素5の表示ドット5a,5b,5c毎に形成する。ガラス基板3の層間絶縁膜側を洗浄した際に、薄膜トランジスタ8のポリシリコン半導体層21に蓄積する電荷と同様の電荷が、ダミーホール36を介してゲート電極配線11に蓄積する。ゲート電極配線11とポリシリコン半導体層21とが略等しい電位となる。ポリシリコン半導体層21とゲート電極配線11との間での電圧差の発生を抑制できる。
【選択図】図1
Description
3 透光性基板としてのガラス基板
5 画素
5a,5b,5c 表示ドット
8 半導体素子としての薄膜トランジスタ
11 配線層としてのゲート電極配線
13 信号配線層としての画像信号配線
21 半導体層としてのポリシリコン半導体層
31 配線絶縁層としてのゲート絶縁膜
33 層間絶縁層としての層間絶縁膜
34,35 第1の開口部としてのコンタクトホール
36 第2の開口部としてのダミーホール
37 被覆層
Claims (8)
- 半導体層と、
この半導体層から離間されて設けられた配線層と、
この配線層の前記半導体層に対して反対側に設けられ、前記半導体層に連通して開口した第1の開口部および前記配線層に連通して開口した第2の開口部を有する層間絶縁層と
を具備したことを特徴とした半導体素子。 - 請求項1記載の半導体素子と、
この半導体素子の半導体層が一主面に設けられた透光性基板とを具備し、
前記半導体層と、この半導体層の一主面に配線絶縁層を介して設けられた前記半導体素子の配線層とを有する薄膜トランジスタが構成され、
前記半導体素子の層間絶縁層は、前記薄膜トランジスタの配線層の一主面に設けられている
ことを特徴としたアレイ基板。 - 透光性基板は、薄膜トランジスタがそれぞれ設けられた複数の表示ドットを有し、
第2の開口部は、前記複数の表示ドットを備えた表示部に設けられている
ことを特徴とした請求項2記載のアレイ基板。 - 透光性基板は、薄膜トランジスタがそれぞれ設けられた複数の表示ドットを有し、
第2の開口部は、1つの前記表示ドット毎に設けられている
ことを特徴とした請求項2記載のアレイ基板。 - 透光性基板は、薄膜トランジスタがそれぞれ設けられ少なくとも2以上の色単位の表示ドットを有する複数の画素を備え、
第2の開口部は、前記画素単位に設けられている
ことを特徴とした請求項2記載のアレイ基板。 - 層間絶縁層の一主面に設けられ、この層間絶縁層に設けられた第2の開口部を覆う被覆層を具備した
ことを特徴とした請求項2ないし5いずれか記載のアレイ基板。 - 層間絶縁層の一主面に設けられ各薄膜トランジスタの半導体層に電気的に接続される信号配線層を具備し、
被覆層は、前記信号配線層と同一工程で形成されている
ことを特徴とした請求項6記載のアレイ基板。 - 透光性基板の一主面に半導体層が設けられ、この半導体層の一主面に配線絶縁層を介して配線層が設けられ、この配線層の一主面に層間絶縁層が設けられたアレイ基板の製造方法であって、
このアレイ基板の前記層間絶縁層および前記配線絶縁層のそれぞれに前記半導体層に連通して開口する第1の開口部を形成するとともに、前記アレイ基板の層間絶縁層に前記配線層に連通して開口する第2の開口部を形成してから、前記アレイ基板の層間絶縁層側を洗浄する
ことを特徴としたアレイ基板の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003416676A JP2005175381A (ja) | 2003-12-15 | 2003-12-15 | 半導体素子、アレイ基板およびその製造方法 |
US10/997,934 US7095048B2 (en) | 2003-12-15 | 2004-11-29 | Semiconductor device, electronic circuit array substrate provided with the same and method of manufacturing the electronic circuit array substrate |
SG200407617A SG113002A1 (en) | 2003-12-15 | 2004-11-29 | Semiconductor device, electronic circuit array substrate provided with the same and method of manufacturing the electronic circuit array substrate |
TW093136951A TW200530664A (en) | 2003-12-15 | 2004-11-30 | Semiconductor device, semiconductor device array substrate and method of manufacturing the same |
KR1020040105284A KR100693236B1 (ko) | 2003-12-15 | 2004-12-14 | 반도체 소자 어레이 기판 및 그 제조 방법 |
CNA2004101020422A CN1629706A (zh) | 2003-12-15 | 2004-12-15 | 半导体元件、半导体元件阵列基板及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003416676A JP2005175381A (ja) | 2003-12-15 | 2003-12-15 | 半導体素子、アレイ基板およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
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JP2005175381A true JP2005175381A (ja) | 2005-06-30 |
Family
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JP2003416676A Pending JP2005175381A (ja) | 2003-12-15 | 2003-12-15 | 半導体素子、アレイ基板およびその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7095048B2 (ja) |
JP (1) | JP2005175381A (ja) |
KR (1) | KR100693236B1 (ja) |
CN (1) | CN1629706A (ja) |
SG (1) | SG113002A1 (ja) |
TW (1) | TW200530664A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8390769B2 (en) | 2009-09-25 | 2013-03-05 | Samsung Display Co., Ltd. | Liquid crystal display |
WO2014115810A1 (ja) * | 2013-01-25 | 2014-07-31 | シャープ株式会社 | 半導体装置 |
CN112713139A (zh) * | 2020-12-28 | 2021-04-27 | 上海天马有机发光显示技术有限公司 | 柔性显示面板及柔性显示装置 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005340695A (ja) * | 2004-05-31 | 2005-12-08 | Hitachi Displays Ltd | 表示装置の製造方法 |
EP1987762A1 (de) * | 2007-05-03 | 2008-11-05 | F.Hoffmann-La Roche Ag | Oximeter |
KR20130007003A (ko) | 2011-06-28 | 2013-01-18 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
KR102441560B1 (ko) * | 2015-04-07 | 2022-09-08 | 삼성디스플레이 주식회사 | 박막트랜지스터 어레이 기판 및 이를 구비한 유기 발광 표시 장치 |
US20170062456A1 (en) * | 2015-08-31 | 2017-03-02 | Cypress Semiconductor Corporation | Vertical division of three-dimensional memory device |
KR102500799B1 (ko) * | 2018-03-09 | 2023-02-20 | 삼성디스플레이 주식회사 | 트랜지스터 기판 및 이를 구비하는 표시 장치 |
JP2020009883A (ja) * | 2018-07-06 | 2020-01-16 | ソニーセミコンダクタソリューションズ株式会社 | 受光素子、測距モジュール、および、電子機器 |
TWI717972B (zh) * | 2020-01-14 | 2021-02-01 | 友達光電股份有限公司 | 主動陣列基板及其製造方法 |
CN112909020B (zh) * | 2021-01-21 | 2023-04-07 | 武汉华星光电半导体显示技术有限公司 | 显示面板及显示装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0156178B1 (ko) * | 1995-10-20 | 1998-11-16 | 구자홍 | 액정표시 소자의 제조방법 |
KR100430773B1 (ko) | 1998-07-14 | 2004-05-10 | 가부시끼가이샤 도시바 | 액티브 매트릭스형 액정표시장치 |
JP3969510B2 (ja) | 1998-08-31 | 2007-09-05 | エルジー フィリップス エルシーディー カンパニー リミテッド | 薄膜トランジスタアレイ基板および液晶表示装置 |
JP2003280020A (ja) * | 2002-03-22 | 2003-10-02 | Seiko Epson Corp | 電気光学装置及びその製造方法並びに電子機器 |
-
2003
- 2003-12-15 JP JP2003416676A patent/JP2005175381A/ja active Pending
-
2004
- 2004-11-29 SG SG200407617A patent/SG113002A1/en unknown
- 2004-11-29 US US10/997,934 patent/US7095048B2/en active Active
- 2004-11-30 TW TW093136951A patent/TW200530664A/zh unknown
- 2004-12-14 KR KR1020040105284A patent/KR100693236B1/ko not_active IP Right Cessation
- 2004-12-15 CN CNA2004101020422A patent/CN1629706A/zh active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8390769B2 (en) | 2009-09-25 | 2013-03-05 | Samsung Display Co., Ltd. | Liquid crystal display |
WO2014115810A1 (ja) * | 2013-01-25 | 2014-07-31 | シャープ株式会社 | 半導体装置 |
CN112713139A (zh) * | 2020-12-28 | 2021-04-27 | 上海天马有机发光显示技术有限公司 | 柔性显示面板及柔性显示装置 |
CN112713139B (zh) * | 2020-12-28 | 2024-04-02 | 武汉天马微电子有限公司 | 柔性显示面板及柔性显示装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI312085B (ja) | 2009-07-11 |
TW200530664A (en) | 2005-09-16 |
SG113002A1 (en) | 2005-07-28 |
KR20050060005A (ko) | 2005-06-21 |
US20050127358A1 (en) | 2005-06-16 |
US7095048B2 (en) | 2006-08-22 |
KR100693236B1 (ko) | 2007-03-12 |
CN1629706A (zh) | 2005-06-22 |
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