JP2005099427A - 表示パネルの製造方法及び表示パネル - Google Patents
表示パネルの製造方法及び表示パネル Download PDFInfo
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- JP2005099427A JP2005099427A JP2003333090A JP2003333090A JP2005099427A JP 2005099427 A JP2005099427 A JP 2005099427A JP 2003333090 A JP2003333090 A JP 2003333090A JP 2003333090 A JP2003333090 A JP 2003333090A JP 2005099427 A JP2005099427 A JP 2005099427A
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- polycrystalline
- film
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- display panel
- silicon film
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Abstract
【解決手段】 線状に集光した連続発振(CW)固体レーザ光40を、集光した幅方向Sに一定速度で走査しながら大サイズ絶縁基板10の各個別の表示パネルとなる絶縁基板50上の非晶質シリコン膜に照射する。この時、レーザ光を時間変調して同一絶縁基板内の画素部51、周辺回路部52、53、54に所定の結晶状態となるパワー密度で照射し、画素部51、周辺回路部52、53、54に作り込む薄膜トランジスタ回路に必要な性能に応じた結晶状態のシリコン膜に改質する。
【選択図】 図2
Description
F.Takeuchi 等,"Performance of poly-Si TFTs fabricated by a Stable Scanning CW Laser Crystallization" AM−LCD’01(TFT4−3)。
レーザ光を線状のビームに整形して幅方向を3〜6μmとした場合、走査速度として50〜1000mm/sの範囲が適用可能であるが、安定なアニールとスループットの観点から200〜600mm/sが適している。また、走査速度300mm/sにおける横方向成長が可能なパワー密度は0.4〜1.0MW/cm2の範囲である。図6において、レーザ光の走査速度V1を一定にしてアニールした場合を考える。レーザ光のパワー密度P2では溶融と再凝固の過程を経て結晶がレーザ光の走査方向にラテラル(横方向)成長して、帯状多結晶膜、いわゆる擬似単結晶膜が得られる。この擬似単結晶膜は駆動回路を構成するトランジスタを形成するに十分な膜質であり、結晶の成長方向とこのシリコン膜に作り込む薄膜トランジスタの電流が流れる方向を一致させることにより、移動度として300〜400cm2/Vs程度が容易に得られる。更に、図3と図4で説明した棒状シリコンとなる閾値未満で、パワー密度P2より大きなパワー密度P3で照射すると、更に膜質が向上し、450cm2/Vs以上の移動度が得られる。この領域は実線と破線の間であり、図3にAで示す。
(1)1枚の表示パネル内で最も面積が広く、かつ低移動度の微細多結晶シリコン膜が要求される画素部540を低パワー密度に設定し、レーザ光の幅を広げて広範囲でレーザアニールを行う。
Claims (21)
- 表示パネルを構成する絶縁基板上に非晶質シリコン膜を形成する工程と、該非晶質シリコン膜上にレーザ光を照射して多結晶シリコン膜に変換する工程と、該多結晶シリコン膜に薄膜トランジスタを作り込む工程を含む表示パネルの製造方法であって、
前記絶縁基板内の画素領域および周辺回路領域に時間変調した連続発振レーザ光を溶融再凝固過程を経て横方向成長可能なパワー密度で、かつ同一走査速度で照射して前記走査方向に沿った横方向成長多結晶膜を形成し、
前記横方向成長多結晶膜に前記薄膜トタンジスタを作り込むことを特徴とする表示パネルの製造方法。 - 表示パネルを構成する絶縁基板上に非晶質シリコン膜を形成する工程と、該非晶質シリコン膜上にレーザ光を照射して多結晶シリコン膜に変換する工程と、該多結晶シリコン膜に薄膜トランジスタを作り込む工程を含む表示パネルの製造方法であって、
前記レーザ光が時間変調した連続発振レーザ光であり、同一の前記絶縁基板内では前記レーザ光を複数のパワー密度、かつ同一走査速度で照射し、同一の前記絶縁基板内の複数の領域にそれぞれ異なる結晶状態の多結晶シリコン膜を形成し、
前記それぞれ異なる結晶状態の多結晶シリコン膜に前記薄膜トランジスタを作り込むことを特徴とする表示パネルの製造方法。 - 表示パネルを構成する絶縁基板上に非晶質シリコン膜を形成する工程と、該非晶質シリコン膜上にレーザ光を照射して多結晶シリコン膜に変換する工程と、該多結晶シリコン膜に薄膜トランジスタを作り込む工程を含む表示パネルの製造方法であって、
前記レーザ光が時間変調した連続発振レーザ光であり、同一の前記絶縁基板内にレーザ光を第一のパワー密度と第二のパワー密度の2段階のパワー密度で、かつ同一走査速度で照射し、
同一の前記絶縁基板の第一の領域に第一のパワー密度で第一の多結晶膜を形成し、第二の領域に第二のパワー密度で第二の多結晶膜を形成し、
前記第一の多結晶膜と前記第二の多結晶膜に前記薄膜トランジスタを作り込むことを特徴とする表示パネルの製造方法。 - 前記第一の領域が画素領域および走査線駆動回路領域で、前記第一の多結晶膜が粒状微細多結晶膜であり、
前記第二の領域が信号線駆動回路を含む領域で、前記第二の多結晶膜が横方向成長多結晶膜であることを特徴とする請求項3に記載の表示パネルの製造方法。 - 前記第一の領域が画素領域で、前記第一の多結晶膜が粒状微細多結晶膜であり、
前記第二の領域が走査線および信号線駆動回路を含む領域で、前記第二の多結晶膜が横方向成長多結晶膜であることを特徴とする請求項3に記載の表示パネルの製造方法。 - 表示パネルを構成する絶縁基板上に非晶質シリコン膜を形成する工程と、該非晶質シリコン膜上にレーザ光を照射して多結晶シリコン膜に変換する工程と、該多結晶シリコン膜に薄膜トランジスタを作り込む工程を含む表示パネルの製造方法であって、
前記レーザ光が時間変調した連続発振レーザ光であり、
同一の前記絶縁基板内に前記レーザ光を3段階のパワー密度で、かつ同一走査速度で照射し、
同一の前記絶縁基板の第一の領域に第一のパワー密度で第一の多結晶膜を形成し、第二の領域に第二のパワー密度で第二の多結晶膜を形成し、第三の領域に第三のパワー密度で第三の多結晶膜を形成し、
前記第一の多結晶膜、第二の多結晶膜、第三の多結晶膜に前記薄膜トランジスタを作り込むことを特徴とする表示パネルの製造方法。 - 前記第一の領域が画素領域で、前記第一の多結晶膜が粒状微細多結晶膜であり、
前記第二の領域が走査線駆動回路領域で、前記第二の多結晶膜が横方向成長多結晶膜であり、
前記第三の領域が信号線駆動回路を含む領域で、前記第三の多結晶膜が横方向成長多結晶膜であり、
前記第三の領域の結晶粒が前記第二の領域の結晶粒より大きいことを特徴とする請求項6に記載の表示パネルの製造方法。 - 表示パネルを構成する絶縁基板上に非晶質シリコン膜を形成する工程と、該非晶質シリコン膜上にレーザ光を照射して多結晶シリコン膜に変換する工程と、該多結晶シリコン膜に薄膜トランジスタを形成する工程を含む表示パネルの製造方法であって、
前記レーザ光が時間変調した連続発振レーザ光であり、
前記レーザ光をm種類(mは自然数)の回折光学素子によりm段階のパワー密度で線状に整形した後、前記非晶質シリコン膜に照射し、
同一の前記絶縁基板内のm種類の領域にm種類の多結晶膜を形成し、
前記m種類の領域のそれぞれに前記薄膜トランジスタを作り込むことを特徴とする表示パネルの製造方法。 - 少なくとも一種類以上の前記領域に対して、回折光学素子でn分割( nは自然数) に整形されたレーザ光を照射して多結晶膜をn個同時に形成し、
前記多結晶膜が粒状微細多結晶膜であることを特徴とする請求項8に記載の表示パネルの製造方法。 - 前記mが2のとき、
前記第一の領域が画素領域で、前記第一の多結晶膜が粒状微細多結晶膜であり、
前記第二の領域が走査線駆動回路領域および信号線駆動回路を含む領域で、前記第二の多結晶膜が横方向成長多結晶膜であることを特徴とする請求項8または9に記載の表示パネルの製造方法。 - 前記mが3のとき、
前記第一の領域が画素領域で、前記第一の多結晶膜が粒状微細多結晶膜であり、
前記第二の領域が走査線駆動回路領域で、前記第二の多結晶膜が横方向成長多結晶膜であり、
前記第三の領域が信号線駆動回路領域で、前記第三の多結晶膜が横方向成長多結晶膜であり、
前記第三の領域の結晶粒が前記第二の領域の結晶粒より大きいことを特徴とする請求項8または9に記載の表示パネルの製造方法。 - 表示パネルを構成する絶縁基板上に非晶質シリコン膜を形成する工程と、該非晶質シリコン膜上にレーザ光を照射して多結晶シリコン膜に変換する工程と、該多結晶シリコン膜に薄膜トランジスタを作り込む工程を含む表示パネルの製造方法であって、
前記レーザ光が固体パルスレーザ光と時間変調した連続発振レーザ光であり、
回折光学素子を用いて前記レーザ光を3段階のパワー密度で照射し、
第一の回折光学素子で前記固体パルスレーザ光をn分割( nは自然数) し、第一の領域に第一のパワー密度で照射して第一の多結晶膜をn個同時に形成し、
第二の回折光学素子により前記連続発振レーザ光を第二の領域に第二のパワー密度で照射して第二の多結晶膜を形成し、
第三の回折光学素子により前記連続発振レーザ光を第三の領域に第三のパワー密度で照射して第三の多結晶膜を形成することを特徴とする表示パネルの製造方法。 - 前記第一の領域が画素領域で、前記第一の多結晶膜が粒状微細多結晶膜であり、
前記第二の領域が走査線駆動回路領域で、前記第二の多結晶膜が横方向成長多結晶膜であり、
前記第三の領域が信号線駆動回路領域で、前記第三の多結晶膜が横方向成長多結晶膜であり、
前記第三の領域の結晶粒が、前記第二の結晶粒よりも大きいことを特徴とする請求項12に記載の表示パネルの製造方法。 - 絶縁基板上に形成した非晶質シリコン膜をレーザ光の照射で多結晶化した多結晶シリコン膜に作り込んだ薄膜トランジスタを駆動回路部と画素部に有する表示パネルであって、
前記駆動回路部および前記画素部の薄膜トランジスタを構成する前記多結晶シリコン膜の表面粗さの最大値が、共に30nm以下であることを特徴とする表示パネル。 - 絶縁基板上に薄膜トランジスタで構成された画素部と走査線駆動回路部および信号線駆動回路部を有する表示パネルであって、
前記画素部と走査線駆動回路部および信号線駆動回路部それぞれを構成する前記薄膜トランジスタが多結晶シリコン膜に作り込まれており、
前記薄膜トランジスタを構成する多結晶シリコン膜が、少なくとも2種類の大きさの結晶粒のいずれかで構成されていることを特徴とする表示パネル。 - 前記画素部の薄膜トランジスタを構成する多結晶シリコン膜が粒状微細結晶膜であり、前記走査線駆動回路部および信号線駆動回路部の薄膜トランジスタを構成する多結晶シリコン膜が大粒径帯状多結晶膜であることを特徴とする請求項15に記載の表示パネル。
- 前記画素部と前記走査線駆動回路部の薄膜トランジスタを構成する多結晶シリコン膜が粒状微細結晶膜であり、
前記信号線駆動回路部の薄膜トランジスタを構成する多結晶シリコン膜が大粒径帯状多結晶膜であることを特徴とする請求項15に記載の表示パネル。 - 絶縁基板上に薄膜トランジスタで構成された画素部と走査線駆動回路部および信号線駆動回路部を有する表示パネルであって、
前記画素部と走査線駆動回路部および信号線駆動回路部それぞれの前記薄膜トランジスタを構成する多結晶シリコン膜が、少なくとも2種類の移動度を有する多結晶シリコン膜のいずれかで構成されていることを特徴とする表示パネル。 - 前記画素部の薄膜トランジスタを構成する多結晶シリコン膜の移動度が10〜200cm2/Vsであり、前記走査線駆動回路部および信号線駆動回路部の薄膜トランジスタを構成する多結晶シリコン膜の移動度が200cm2/Vs以上であることを特徴とする請求項18に記載の表示パネル。
- 前記画素部と前記走査線駆動回路部の薄膜トランジスタを構成する多結晶シリコン膜の移動度が10〜200cm2/Vsであり、
前記信号線駆動回路部の薄膜トランジスタを構成する多結晶シリコン膜の移動度が200cm2/Vs以上であることを特徴とする請求項18に記載の表示パネル。 - 前記画素部の薄膜トランジスタを構成する多結晶シリコン膜の移動度が10〜200cm2/Vsであり、
前記走査線駆動回路の薄膜トランジスタを構成する多結晶シリコン膜の移動度が200〜400cm2/Vsであり、
前記信号線駆動回路のトランジスタを形成する多結晶シリコン膜の移動度が400cm2/Vs以上であることを特徴とする請求項15に記載の表示装パネル。
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JP2010056433A (ja) * | 2008-08-29 | 2010-03-11 | Hitachi Displays Ltd | 平面表示装置の製造方法 |
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JP2017052103A (ja) * | 2015-09-07 | 2017-03-16 | 凸版印刷株式会社 | フィルムへのレーザー加工方法 |
US10213974B2 (en) | 2015-09-07 | 2019-02-26 | Toppan Printing Co., Ltd. | Laser processing apparatus |
TWI688445B (zh) * | 2015-09-07 | 2020-03-21 | 日商凸版印刷股份有限公司 | 對薄膜進行雷射加工之方法 |
WO2019031252A1 (ja) * | 2017-08-10 | 2019-02-14 | 株式会社ブイ・テクノロジー | レーザ照射装置、投影マスク、レーザ照射方法およびプログラム |
Also Published As
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US7183148B2 (en) | 2007-02-27 |
US20050070035A1 (en) | 2005-03-31 |
TW200512708A (en) | 2005-04-01 |
CN100552749C (zh) | 2009-10-21 |
CN1601579A (zh) | 2005-03-30 |
KR100692326B1 (ko) | 2007-03-09 |
JP4413569B2 (ja) | 2010-02-10 |
US20070131962A1 (en) | 2007-06-14 |
TWI271690B (en) | 2007-01-21 |
KR20050030532A (ko) | 2005-03-30 |
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