JP2005089835A5 - - Google Patents
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- Publication number
- JP2005089835A5 JP2005089835A5 JP2003325704A JP2003325704A JP2005089835A5 JP 2005089835 A5 JP2005089835 A5 JP 2005089835A5 JP 2003325704 A JP2003325704 A JP 2003325704A JP 2003325704 A JP2003325704 A JP 2003325704A JP 2005089835 A5 JP2005089835 A5 JP 2005089835A5
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- convection
- view
- top view
- forming material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 11
- 238000001704 evaporation Methods 0.000 description 10
- 238000001771 vacuum deposition Methods 0.000 description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- 239000012190 activator Substances 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003325704A JP4312555B2 (ja) | 2003-09-18 | 2003-09-18 | 真空蒸着用ルツボおよび蛍光体シート製造装置 |
| US10/943,144 US20050103273A1 (en) | 2003-09-18 | 2004-09-17 | Vacuum evaporation crucible and phosphor sheet manufacturing apparatus using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003325704A JP4312555B2 (ja) | 2003-09-18 | 2003-09-18 | 真空蒸着用ルツボおよび蛍光体シート製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005089835A JP2005089835A (ja) | 2005-04-07 |
| JP2005089835A5 true JP2005089835A5 (enExample) | 2006-06-15 |
| JP4312555B2 JP4312555B2 (ja) | 2009-08-12 |
Family
ID=34456081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003325704A Expired - Fee Related JP4312555B2 (ja) | 2003-09-18 | 2003-09-18 | 真空蒸着用ルツボおよび蛍光体シート製造装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20050103273A1 (enExample) |
| JP (1) | JP4312555B2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4726570B2 (ja) * | 2005-08-05 | 2011-07-20 | 日立造船株式会社 | 真空蒸着用蒸発装置 |
| JP4679291B2 (ja) * | 2005-08-05 | 2011-04-27 | 日立造船株式会社 | 真空蒸着用蒸発方法および装置 |
| EP1790755B1 (en) * | 2005-10-28 | 2012-12-12 | Agfa HealthCare NV | Method of vaporisation of phosphor precursor raw materials. |
| US20070098881A1 (en) * | 2005-10-28 | 2007-05-03 | Jean-Pierre Tahon | Method of preparing stabilized storage phosphor panels |
| US20070098880A1 (en) * | 2005-10-28 | 2007-05-03 | Jean-Pierre Tahon | Method of vaporization of phosphor precursor raw materials |
| US20070131866A1 (en) * | 2005-12-14 | 2007-06-14 | General Electric Company | Activated alkali metal rare earth halides and articles using same |
| JP2007297695A (ja) * | 2006-05-08 | 2007-11-15 | Fujifilm Corp | 真空蒸着用ルツボおよび真空蒸着装置 |
| EP1967605A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation tube and evaporation apparatus with adapted evaporation characteristic |
| EP1967606A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with adapted evaporation characteristic |
| EP2020454B1 (en) * | 2007-07-27 | 2012-09-05 | Applied Materials, Inc. | Evaporation apparatus with inclined crucible |
| US20090162535A1 (en) * | 2007-12-21 | 2009-06-25 | Jean-Pierre Tahon | Method of forming a phosphor or scintillator material and vapor deposition apparatus used therefor |
| JP2015001387A (ja) * | 2013-06-13 | 2015-01-05 | 株式会社東芝 | 放射線検出器の製造方法 |
| KR102722614B1 (ko) * | 2016-08-05 | 2024-10-28 | 삼성디스플레이 주식회사 | 선형 증착원 및 이를 포함하는 증착 장치 |
| JP7353191B2 (ja) * | 2020-01-14 | 2023-09-29 | キヤノン電子管デバイス株式会社 | 放射線検出モジュール、および放射線検出器 |
| EP4219787A1 (en) * | 2022-01-28 | 2023-08-02 | Essilor International | Physical vapor deposition machine with a thermal evaporator having a cup heated-up by electric current |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2793609A (en) * | 1953-01-26 | 1957-05-28 | British Dielectric Res Ltd | Means for the deposition of materials by evaporation in a vacuum |
| US2819420A (en) * | 1954-03-19 | 1958-01-07 | Gen Electric | Electroluminescent cell |
| US6202591B1 (en) * | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
| US6237529B1 (en) * | 2000-03-03 | 2001-05-29 | Eastman Kodak Company | Source for thermal physical vapor deposition of organic electroluminescent layers |
| DE10011568C1 (de) * | 2000-03-09 | 2001-06-13 | Gea Canzler Gmbh | Wärmetauscherelement |
| JP2002146516A (ja) * | 2000-11-07 | 2002-05-22 | Sony Corp | 有機薄膜の蒸着方法 |
| ITMI20010995A1 (it) * | 2001-05-15 | 2002-11-15 | Getters Spa | Dispensatori di cesio e processo per il loro uso |
| JP2003113466A (ja) * | 2001-07-31 | 2003-04-18 | Fuji Photo Film Co Ltd | 真空蒸着装置 |
| US20030168013A1 (en) * | 2002-03-08 | 2003-09-11 | Eastman Kodak Company | Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device |
| US20040000379A1 (en) * | 2002-06-27 | 2004-01-01 | Ulvac, Inc. | Evaporation container and evaporation source |
| US20040144321A1 (en) * | 2003-01-28 | 2004-07-29 | Eastman Kodak Company | Method of designing a thermal physical vapor deposition system |
| JP2005029896A (ja) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 原材料の蒸発のために使用されるるつぼのための改良されたアセンブリ |
| US7261118B2 (en) * | 2003-08-19 | 2007-08-28 | Air Products And Chemicals, Inc. | Method and vessel for the delivery of precursor materials |
-
2003
- 2003-09-18 JP JP2003325704A patent/JP4312555B2/ja not_active Expired - Fee Related
-
2004
- 2004-09-17 US US10/943,144 patent/US20050103273A1/en not_active Abandoned
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