JP2004538648A - トレンチゲート電極を有するｍｉｓデバイス及びその製造方法 - Google Patents

トレンチゲート電極を有するｍｉｓデバイス及びその製造方法 Download PDF

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Publication number
JP2004538648A
JP2004538648A JP2003520004A JP2003520004A JP2004538648A JP 2004538648 A JP2004538648 A JP 2004538648A JP 2003520004 A JP2003520004 A JP 2003520004A JP 2003520004 A JP2003520004 A JP 2003520004A JP 2004538648 A JP2004538648 A JP 2004538648A
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Prior art keywords
insulating layer
trench
region
adjacent
gate
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Pending
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JP2003520004A
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Japanese (ja)
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JP2004538648A5 (https=
Inventor
ダーウィッシュ，モハメド，エヌ．
ジャイルズ，フレデリック，ピー．
ホン ルイ，カム
チェン，クオ−イン
テリル，カイル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vishay Siliconix Inc
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Siliconix Inc
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Publication date
Application filed by Siliconix Inc filed Critical Siliconix Inc
Publication of JP2004538648A publication Critical patent/JP2004538648A/ja
Publication of JP2004538648A5 publication Critical patent/JP2004538648A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P10/00—Bonding of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/028—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
    • H10D30/0291—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of vertical DMOS [VDMOS] FETs
    • H10D30/0297—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of vertical DMOS [VDMOS] FETs using recessing of the gate electrodes, e.g. to form trench gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/441—Vertical IGBTs
    • H10D12/461—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H10D18/40—Thyristors with turn-on by field effect 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H10D62/156—Drain regions of DMOS transistors
    • H10D62/157—Impurity concentrations or distributions

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  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP2003520004A 2001-08-10 2002-07-19 トレンチゲート電極を有するｍｉｓデバイス及びその製造方法 Pending JP2004538648A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/927,320 US6882000B2 (en) 2001-08-10 2001-08-10 Trench MIS device with reduced gate-to-drain capacitance
PCT/US2002/022937 WO2003015179A2 (en) 2001-08-10 2002-07-19 Mis device having a trench gate electrode and method of making the same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009175470A Division JP5500898B2 (ja) 2001-08-10 2009-07-28 トレンチゲート電極を有する金属−絶縁体−半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2004538648A true JP2004538648A (ja) 2004-12-24
JP2004538648A5 JP2004538648A5 (https=) 2006-01-05

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Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003520004A Pending JP2004538648A (ja) 2001-08-10 2002-07-19 トレンチゲート電極を有するｍｉｓデバイス及びその製造方法
JP2009175470A Expired - Lifetime JP5500898B2 (ja) 2001-08-10 2009-07-28 トレンチゲート電極を有する金属−絶縁体−半導体デバイスの製造方法

Family Applications After (1)

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JP2009175470A Expired - Lifetime JP5500898B2 (ja) 2001-08-10 2009-07-28 トレンチゲート電極を有する金属−絶縁体−半導体デバイスの製造方法

Country Status (6)

Country Link
US (2) US6882000B2 (https=)
EP (1) EP1417717A2 (https=)
JP (2) JP2004538648A (https=)
KR (1) KR100624683B1 (https=)
TW (1) TW552680B (https=)
WO (1) WO2003015179A2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007207935A (ja) * 2006-01-31 2007-08-16 Fuji Electric Holdings Co Ltd 炭化珪素半導体素子の製造方法
JP2009283969A (ja) * 2001-08-10 2009-12-03 Siliconix Inc トレンチゲート電極を有する金属−絶縁体−半導体デバイスの製造方法
JP2012033937A (ja) * 2010-08-02 2012-02-16 O2 Micro Inc トレンチ型金属酸化膜半導体電界効果トランジスタを作製する方法

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US9063191B2 (en) * 2012-02-24 2015-06-23 Power Probe, Inc. Electrical test device and method
US6291298B1 (en) * 1999-05-25 2001-09-18 Advanced Analogic Technologies, Inc. Process of manufacturing Trench gate semiconductor device having gate oxide layer with multiple thicknesses
EP1435115B1 (en) * 2001-08-10 2017-10-04 SILICONIX Incorporated Mis device having a trench gate electrode and method of making the same
US6781196B2 (en) * 2002-03-11 2004-08-24 General Semiconductor, Inc. Trench DMOS transistor having improved trench structure
US6838722B2 (en) * 2002-03-22 2005-01-04 Siliconix Incorporated Structures of and methods of fabricating trench-gated MIS devices
US8629019B2 (en) 2002-09-24 2014-01-14 Vishay-Siliconix Method of forming self aligned contacts for a power MOSFET
US8080459B2 (en) * 2002-09-24 2011-12-20 Vishay-Siliconix Self aligned contact in a semiconductor device and method of fabricating the same
US7279743B2 (en) 2003-12-02 2007-10-09 Vishay-Siliconix Closed cell trench metal-oxide-semiconductor field effect transistor
US8183629B2 (en) * 2004-05-13 2012-05-22 Vishay-Siliconix Stacked trench metal-oxide-semiconductor field effect transistor device
JP2006030318A (ja) * 2004-07-12 2006-02-02 Sanyo Electric Co Ltd 表示装置
US7494876B1 (en) 2005-04-21 2009-02-24 Vishay Siliconix Trench-gated MIS device having thick polysilicon insulation layer at trench bottom and method of fabricating the same
EP1742257B1 (en) * 2005-07-08 2012-09-05 STMicroelectronics Srl Method of manufacturing a semiconductor power device
US7544545B2 (en) 2005-12-28 2009-06-09 Vishay-Siliconix Trench polysilicon diode
TWI435430B (zh) * 2006-01-18 2014-04-21 維雪 希里康尼克斯公司 具高靜電放電性能之低電壓輸出驅動器
US8471390B2 (en) 2006-05-12 2013-06-25 Vishay-Siliconix Power MOSFET contact metallization
KR100909777B1 (ko) * 2006-07-28 2009-07-29 주식회사 하이닉스반도체 반도체 소자의 제조 방법
US9437729B2 (en) 2007-01-08 2016-09-06 Vishay-Siliconix High-density power MOSFET with planarized metalization
US9947770B2 (en) 2007-04-03 2018-04-17 Vishay-Siliconix Self-aligned trench MOSFET and method of manufacture
US8368126B2 (en) 2007-04-19 2013-02-05 Vishay-Siliconix Trench metal oxide semiconductor with recessed trench material and remote contacts
US9484451B2 (en) 2007-10-05 2016-11-01 Vishay-Siliconix MOSFET active area and edge termination area charge balance
US10600902B2 (en) 2008-02-13 2020-03-24 Vishay SIliconix, LLC Self-repairing field effect transisitor
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US8426275B2 (en) 2009-01-09 2013-04-23 Niko Semiconductor Co., Ltd. Fabrication method of trenched power MOSFET
TWI435447B (zh) * 2009-01-09 2014-04-21 Niko Semiconductor Co Ltd 功率金氧半導體場效電晶體及其製造方法
US9443974B2 (en) * 2009-08-27 2016-09-13 Vishay-Siliconix Super junction trench power MOSFET device fabrication
US9230810B2 (en) 2009-09-03 2016-01-05 Vishay-Siliconix System and method for substrate wafer back side and edge cross section seals
US8105903B2 (en) * 2009-09-21 2012-01-31 Force Mos Technology Co., Ltd. Method for making a trench MOSFET with shallow trench structures
US9425305B2 (en) 2009-10-20 2016-08-23 Vishay-Siliconix Structures of and methods of fabricating split gate MIS devices
US9431530B2 (en) 2009-10-20 2016-08-30 Vishay-Siliconix Super-high density trench MOSFET
US9419129B2 (en) 2009-10-21 2016-08-16 Vishay-Siliconix Split gate semiconductor device with curved gate oxide profile
US9306056B2 (en) 2009-10-30 2016-04-05 Vishay-Siliconix Semiconductor device with trench-like feed-throughs
US8604525B2 (en) 2009-11-02 2013-12-10 Vishay-Siliconix Transistor structure with feed-through source-to-substrate contact
WO2011109559A2 (en) 2010-03-02 2011-09-09 Kyle Terrill Structures and methods of fabricating dual gate devices
JP5395309B2 (ja) 2011-03-23 2014-01-22 パナソニック株式会社 半導体装置およびその製造方法
WO2012158977A2 (en) 2011-05-18 2012-11-22 Vishay-Siliconix Semiconductor device
US9496357B2 (en) * 2011-07-22 2016-11-15 X-Fab Semiconductor Foundries Ag Semiconductor device
CN103247529B (zh) * 2012-02-10 2016-08-03 无锡华润上华半导体有限公司 一种沟槽场效应器件及其制作方法
US9842911B2 (en) 2012-05-30 2017-12-12 Vishay-Siliconix Adaptive charge balanced edge termination
US8802530B2 (en) * 2012-06-06 2014-08-12 Alpha And Omega Semiconductor Incorporated MOSFET with improved performance through induced net charge region in thick bottom insulator
JP5799046B2 (ja) 2013-03-22 2015-10-21 株式会社東芝 半導体装置
CN103311112B (zh) * 2013-06-14 2016-01-27 矽力杰半导体技术(杭州)有限公司 在沟槽内形成多晶硅的方法
US9887259B2 (en) 2014-06-23 2018-02-06 Vishay-Siliconix Modulated super junction power MOSFET devices
EP4565029A3 (en) 2014-08-19 2025-07-30 Vishay-Siliconix Mosfet semiconductor device
KR102098996B1 (ko) 2014-08-19 2020-04-08 비쉐이-실리코닉스 초접합 금속 산화물 반도체 전계 효과 트랜지스터
US9425304B2 (en) 2014-08-21 2016-08-23 Vishay-Siliconix Transistor structure with improved unclamped inductive switching immunity
CN109273534A (zh) * 2018-10-30 2019-01-25 贵州恒芯微电子科技有限公司 一种新型屏蔽栅功率mos的器件
US11217541B2 (en) 2019-05-08 2022-01-04 Vishay-Siliconix, LLC Transistors with electrically active chip seal ring and methods of manufacture
US11218144B2 (en) 2019-09-12 2022-01-04 Vishay-Siliconix, LLC Semiconductor device with multiple independent gates
CN110896026A (zh) 2019-11-22 2020-03-20 矽力杰半导体技术(杭州)有限公司 沟槽型mosfet结构及其制造方法
CN111129152B (zh) * 2019-12-17 2023-09-26 杭州芯迈半导体技术有限公司 沟槽mosfet结构及其制造方法
CN111554746B (zh) 2020-04-23 2022-09-16 杭州芯迈半导体技术有限公司 碳化硅mosfet器件及其制造方法
CN112735954B (zh) * 2020-12-30 2021-12-14 深圳市汇德科技有限公司 一种半导体芯片的制造方法
CN113437137A (zh) * 2021-08-09 2021-09-24 无锡新洁能股份有限公司 快恢复功率mosfet及其制造方法
CN114975126B (zh) * 2022-07-29 2022-10-25 威晟半导体科技(广州)有限公司 一种降低栅电荷的屏蔽栅沟槽型mosfet制造方法

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JP2009283969A (ja) * 2001-08-10 2009-12-03 Siliconix Inc トレンチゲート電極を有する金属−絶縁体−半導体デバイスの製造方法
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JP2012033937A (ja) * 2010-08-02 2012-02-16 O2 Micro Inc トレンチ型金属酸化膜半導体電界効果トランジスタを作製する方法

Also Published As

Publication number Publication date
WO2003015179A3 (en) 2003-12-04
US20030030092A1 (en) 2003-02-13
JP2009283969A (ja) 2009-12-03
JP5500898B2 (ja) 2014-05-21
WO2003015179A2 (en) 2003-02-20
US20030062570A1 (en) 2003-04-03
US6921697B2 (en) 2005-07-26
KR20040051584A (ko) 2004-06-18
US6882000B2 (en) 2005-04-19
KR100624683B1 (ko) 2006-09-19
EP1417717A2 (en) 2004-05-12
TW552680B (en) 2003-09-11

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