JP2004154928A5 - - Google Patents

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Publication number
JP2004154928A5
JP2004154928A5 JP2003321639A JP2003321639A JP2004154928A5 JP 2004154928 A5 JP2004154928 A5 JP 2004154928A5 JP 2003321639 A JP2003321639 A JP 2003321639A JP 2003321639 A JP2003321639 A JP 2003321639A JP 2004154928 A5 JP2004154928 A5 JP 2004154928A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2003321639A
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Japanese (ja)
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JP4542324B2 (ja
JP2004154928A (ja
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Priority claimed from JP2003321639A external-priority patent/JP4542324B2/ja
Priority to JP2003321639A priority Critical patent/JP4542324B2/ja
Priority to CN 200910133188 priority patent/CN101530983B/zh
Priority to KR1020057004531A priority patent/KR101011425B1/ko
Priority to US10/526,933 priority patent/US7252575B2/en
Priority to EP03758725.0A priority patent/EP1551593B1/en
Priority to PCT/JP2003/013171 priority patent/WO2004035265A1/en
Priority to TW092128804A priority patent/TWI336279B/zh
Publication of JP2004154928A publication Critical patent/JP2004154928A/ja
Publication of JP2004154928A5 publication Critical patent/JP2004154928A5/ja
Priority to US11/819,453 priority patent/US7438627B2/en
Priority to US12/230,317 priority patent/US7645181B2/en
Priority to US12/627,333 priority patent/US8342907B2/en
Publication of JP4542324B2 publication Critical patent/JP4542324B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003321639A 2002-10-17 2003-09-12 研磨状態監視装置及びポリッシング装置 Expired - Lifetime JP4542324B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2003321639A JP4542324B2 (ja) 2002-10-17 2003-09-12 研磨状態監視装置及びポリッシング装置
CN 200910133188 CN101530983B (zh) 2002-10-17 2003-10-15 抛光状态监测装置和抛光装置以及方法
KR1020057004531A KR101011425B1 (ko) 2002-10-17 2003-10-15 폴리싱 상태 모니터링 장치와 폴리싱 장치 및 방법
US10/526,933 US7252575B2 (en) 2002-10-17 2003-10-15 Polishing state monitoring apparatus and polishing apparatus and method
EP03758725.0A EP1551593B1 (en) 2002-10-17 2003-10-15 Polishing state monitoring apparatus and polishing apparatus and method
PCT/JP2003/013171 WO2004035265A1 (en) 2002-10-17 2003-10-15 Polishing state monitoring apparatus and polishing apparatus and method
TW092128804A TWI336279B (en) 2002-10-17 2003-10-17 Polishing state monitoring apparatus and polishing apparatus and method
US11/819,453 US7438627B2 (en) 2002-10-17 2007-06-27 Polishing state monitoring method
US12/230,317 US7645181B2 (en) 2002-10-17 2008-08-27 Polishing state monitoring apparatus and polishing apparatus
US12/627,333 US8342907B2 (en) 2002-10-17 2009-11-30 Polishing state monitoring method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002303628 2002-10-17
JP2003321639A JP4542324B2 (ja) 2002-10-17 2003-09-12 研磨状態監視装置及びポリッシング装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2009172232A Division JP2009233853A (ja) 2002-10-17 2009-07-23 ポリッシング装置及び研磨方法
JP2009172231A Division JP5137910B2 (ja) 2002-10-17 2009-07-23 ポリッシング装置及び研磨方法

Publications (3)

Publication Number Publication Date
JP2004154928A JP2004154928A (ja) 2004-06-03
JP2004154928A5 true JP2004154928A5 (enExample) 2006-04-20
JP4542324B2 JP4542324B2 (ja) 2010-09-15

Family

ID=32109475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003321639A Expired - Lifetime JP4542324B2 (ja) 2002-10-17 2003-09-12 研磨状態監視装置及びポリッシング装置

Country Status (6)

Country Link
US (4) US7252575B2 (enExample)
EP (1) EP1551593B1 (enExample)
JP (1) JP4542324B2 (enExample)
KR (1) KR101011425B1 (enExample)
TW (1) TWI336279B (enExample)
WO (1) WO2004035265A1 (enExample)

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