JP2003503597A5 - - Google Patents

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Publication number
JP2003503597A5
JP2003503597A5 JP2001506301A JP2001506301A JP2003503597A5 JP 2003503597 A5 JP2003503597 A5 JP 2003503597A5 JP 2001506301 A JP2001506301 A JP 2001506301A JP 2001506301 A JP2001506301 A JP 2001506301A JP 2003503597 A5 JP2003503597 A5 JP 2003503597A5
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JP
Japan
Prior art keywords
nickel
coating
plating
ceramic coating
metal surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001506301A
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English (en)
Japanese (ja)
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JP4608159B2 (ja
JP2003503597A (ja
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Publication date
Priority claimed from US09/343,692 external-priority patent/US6444083B1/en
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Publication of JP2003503597A publication Critical patent/JP2003503597A/ja
Publication of JP2003503597A5 publication Critical patent/JP2003503597A5/ja
Application granted granted Critical
Publication of JP4608159B2 publication Critical patent/JP4608159B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001506301A 1999-06-30 2000-06-14 半導体処理装置の耐腐食性部材およびその製造方法 Expired - Lifetime JP4608159B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/343,692 1999-06-30
US09/343,692 US6444083B1 (en) 1999-06-30 1999-06-30 Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof
PCT/US2000/040229 WO2001000901A1 (en) 1999-06-30 2000-06-14 Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof

Publications (3)

Publication Number Publication Date
JP2003503597A JP2003503597A (ja) 2003-01-28
JP2003503597A5 true JP2003503597A5 (enExample) 2007-08-02
JP4608159B2 JP4608159B2 (ja) 2011-01-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001506301A Expired - Lifetime JP4608159B2 (ja) 1999-06-30 2000-06-14 半導体処理装置の耐腐食性部材およびその製造方法

Country Status (7)

Country Link
US (1) US6444083B1 (enExample)
JP (1) JP4608159B2 (enExample)
KR (1) KR100636076B1 (enExample)
CN (1) CN100357493C (enExample)
AU (1) AU6540700A (enExample)
TW (1) TW524885B (enExample)
WO (1) WO2001000901A1 (enExample)

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