JP2003343469A - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JP2003343469A
JP2003343469A JP2003000554A JP2003000554A JP2003343469A JP 2003343469 A JP2003343469 A JP 2003343469A JP 2003000554 A JP2003000554 A JP 2003000554A JP 2003000554 A JP2003000554 A JP 2003000554A JP 2003343469 A JP2003343469 A JP 2003343469A
Authority
JP
Japan
Prior art keywords
pump
main
auxiliary
rotors
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003000554A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003343469A5 (enExample
Inventor
Shinya Yamamoto
真也 山本
Masahiro Kawaguchi
真広 川口
Mamoru Kuwabara
衛 桑原
Nobuaki Hoshino
伸明 星野
Satoru Kuramoto
覚 藏本
Osamu Uchiyama
理 内山
Daisuke Sato
大輔 佐藤
Mitsuyoshi Fujiwara
三佳 藤原
Ryosuke Koshizaka
亮介 越坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Priority to JP2003000554A priority Critical patent/JP2003343469A/ja
Priority to KR10-2003-0008265A priority patent/KR100485429B1/ko
Priority to TW092105854A priority patent/TW585975B/zh
Priority to EP03006088A priority patent/EP1347176B1/en
Priority to DE60314930T priority patent/DE60314930T2/de
Priority to CNB031286305A priority patent/CN100516532C/zh
Priority to US10/391,904 priority patent/US7140846B2/en
Publication of JP2003343469A publication Critical patent/JP2003343469A/ja
Publication of JP2003343469A5 publication Critical patent/JP2003343469A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
JP2003000554A 2002-03-20 2003-01-06 真空ポンプ Pending JP2003343469A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2003000554A JP2003343469A (ja) 2002-03-20 2003-01-06 真空ポンプ
KR10-2003-0008265A KR100485429B1 (ko) 2002-03-20 2003-02-10 진공펌프
TW092105854A TW585975B (en) 2002-03-20 2003-03-18 Vacuum pump
EP03006088A EP1347176B1 (en) 2002-03-20 2003-03-19 Vacuum pump
DE60314930T DE60314930T2 (de) 2002-03-20 2003-03-19 Vakuumpumpe
CNB031286305A CN100516532C (zh) 2002-03-20 2003-03-19 真空泵
US10/391,904 US7140846B2 (en) 2002-03-20 2003-03-19 Vacuum pump having main and sub pumps

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002-79264 2002-03-20
JP2002079264 2002-03-20
JP2003000554A JP2003343469A (ja) 2002-03-20 2003-01-06 真空ポンプ

Publications (2)

Publication Number Publication Date
JP2003343469A true JP2003343469A (ja) 2003-12-03
JP2003343469A5 JP2003343469A5 (enExample) 2005-09-29

Family

ID=27791043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003000554A Pending JP2003343469A (ja) 2002-03-20 2003-01-06 真空ポンプ

Country Status (7)

Country Link
US (1) US7140846B2 (enExample)
EP (1) EP1347176B1 (enExample)
JP (1) JP2003343469A (enExample)
KR (1) KR100485429B1 (enExample)
CN (1) CN100516532C (enExample)
DE (1) DE60314930T2 (enExample)
TW (1) TW585975B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132483A (ko) * 2017-04-07 2019-11-27 파이퍼 배큠 펌핑 유닛 및 용도
JP2022526413A (ja) * 2019-04-05 2022-05-24 ファイファー バキユーム ドライ真空ポンプおよびポンプ設備
WO2023275773A1 (en) * 2021-06-29 2023-01-05 Edwards Korea Limited Stator assembly for a roots vacuum pump

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3673743B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 スクリュー式真空ポンプ
NZ588600A (en) * 2004-07-13 2012-03-30 Delaval Holding Ab A controllable vacuum source having first and second vacuum pumps and an associated control system
US7722332B2 (en) * 2004-10-01 2010-05-25 Lot Vacuum Co., Ltd. Composite dry vacuum pump having roots rotor and screw rotor
DE102006016317A1 (de) 2006-04-06 2007-10-11 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Verdichteranordnung mit einer Ventileinheit im Ansaugbereich
GB0705971D0 (en) * 2007-03-28 2007-05-09 Boc Group Plc Vacuum pump
WO2011078207A1 (ja) * 2009-12-24 2011-06-30 住友精化株式会社 二連型真空ポンプ装置、およびそれを備えるガス精製システム、 ならびに二連型真空ポンプ装置における排ガス振動抑制装置
JP5284940B2 (ja) * 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
US9074524B2 (en) * 2011-12-09 2015-07-07 Eaton Corporation Air supply system with two-stage roots blower
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
CN106704191A (zh) * 2017-03-07 2017-05-24 东莞市风能工业设备有限公司 一种凸轮多级压缩机
KR102301459B1 (ko) * 2017-05-30 2021-09-13 가부시키가이샤 아루박 진공 펌프
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
EP4182561B1 (en) * 2020-07-14 2025-06-11 Pierburg Pump Technology GmbH Motor vehicle vacuum pump
DE102021111297A1 (de) * 2021-04-30 2022-11-03 CompAir Drucklufttechnik - Zweigniederlassung der Gardner Denver Deutschland GmbH Antriebssystem für einen mehrstufiger Schraubenverdichter
CN115355170A (zh) * 2022-07-29 2022-11-18 迈科微真空技术(苏州)有限公司 一种高度集成的真空泵泵体
CN116447139B (zh) * 2023-04-24 2024-05-17 北京通嘉宏瑞科技有限公司 定子及真空泵

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US2368013A (en) * 1942-12-16 1945-01-23 Ford Reginald Clarence Pump or compressor
DE1184447B (de) 1963-04-18 1964-12-31 Erich Becker Membran-Pumpe
US4291547A (en) * 1978-04-10 1981-09-29 Hughes Aircraft Company Screw compressor-expander cryogenic system
JPS6097395A (ja) 1983-11-01 1985-05-31 セイコーインスツルメンツ株式会社 行列型液晶表示パネル
JPS60247075A (ja) * 1984-05-21 1985-12-06 Hitachi Ltd 真空ポンプ装置
DE3446952A1 (de) * 1984-12-21 1986-07-10 Lewa Herbert Ott Gmbh + Co, 7250 Leonberg Membranpumpe mit umlaufspuelung
JPH0240875B2 (ja) 1985-10-30 1990-09-13 Daia Shinku Giken Kk Fukugogatadoraishinkuhonpu
JPS62243982A (ja) 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
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DE3710782A1 (de) 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
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JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH0658278A (ja) * 1992-08-05 1994-03-01 Ebara Corp 多段スクリュー式真空ポンプ
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
JP3723987B2 (ja) 1992-09-03 2005-12-07 松下電器産業株式会社 真空排気装置及び方法
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JP4000611B2 (ja) 1996-12-26 2007-10-31 松下電器産業株式会社 真空排気システム
JP3806859B2 (ja) * 1999-09-24 2006-08-09 応研精工株式会社 ダイヤフラムポンプ
CN100371595C (zh) * 1999-11-12 2008-02-27 日机装株式会社 膜片型往复泵
JP2001207984A (ja) 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
JP2002070776A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 複合型真空ポンプ
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132483A (ko) * 2017-04-07 2019-11-27 파이퍼 배큠 펌핑 유닛 및 용도
JP2020513088A (ja) * 2017-04-07 2020-04-30 ファイファー バキユーム 吸排気ユニットおよびその使用
KR102561996B1 (ko) * 2017-04-07 2023-07-31 파이퍼 배큠 펌핑 유닛 및 용도
JP2022526413A (ja) * 2019-04-05 2022-05-24 ファイファー バキユーム ドライ真空ポンプおよびポンプ設備
JP7396561B2 (ja) 2019-04-05 2023-12-12 ファイファー バキユーム ドライ真空ポンプおよびポンプ設備
WO2023275773A1 (en) * 2021-06-29 2023-01-05 Edwards Korea Limited Stator assembly for a roots vacuum pump

Also Published As

Publication number Publication date
DE60314930T2 (de) 2008-04-03
US7140846B2 (en) 2006-11-28
TW200306387A (en) 2003-11-16
CN100516532C (zh) 2009-07-22
TW585975B (en) 2004-05-01
KR20030076257A (ko) 2003-09-26
EP1347176A3 (en) 2003-11-05
KR100485429B1 (ko) 2005-04-27
DE60314930D1 (de) 2007-08-30
CN1445459A (zh) 2003-10-01
EP1347176A2 (en) 2003-09-24
US20030180153A1 (en) 2003-09-25
EP1347176B1 (en) 2007-07-18

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