KR100485429B1 - 진공펌프 - Google Patents

진공펌프 Download PDF

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Publication number
KR100485429B1
KR100485429B1 KR10-2003-0008265A KR20030008265A KR100485429B1 KR 100485429 B1 KR100485429 B1 KR 100485429B1 KR 20030008265 A KR20030008265 A KR 20030008265A KR 100485429 B1 KR100485429 B1 KR 100485429B1
Authority
KR
South Korea
Prior art keywords
pump
main
auxiliary
vacuum pump
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2003-0008265A
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English (en)
Korean (ko)
Other versions
KR20030076257A (ko
Inventor
야마모또신야
구라모또사또루
우찌야마오사무
사또다이스께
후지와라미까
가와구찌마사히로
구와하라마모루
호시노노부아끼
고시자까료스께
Original Assignee
가부시키가이샤 도요다 지도숏키
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Application filed by 가부시키가이샤 도요다 지도숏키 filed Critical 가부시키가이샤 도요다 지도숏키
Publication of KR20030076257A publication Critical patent/KR20030076257A/ko
Application granted granted Critical
Publication of KR100485429B1 publication Critical patent/KR100485429B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR10-2003-0008265A 2002-03-20 2003-02-10 진공펌프 Expired - Fee Related KR100485429B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00079264 2002-03-20
JP2002079264 2002-03-20
JP2003000554A JP2003343469A (ja) 2002-03-20 2003-01-06 真空ポンプ
JPJP-P-2003-00000554 2003-01-06

Publications (2)

Publication Number Publication Date
KR20030076257A KR20030076257A (ko) 2003-09-26
KR100485429B1 true KR100485429B1 (ko) 2005-04-27

Family

ID=27791043

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-0008265A Expired - Fee Related KR100485429B1 (ko) 2002-03-20 2003-02-10 진공펌프

Country Status (7)

Country Link
US (1) US7140846B2 (enExample)
EP (1) EP1347176B1 (enExample)
JP (1) JP2003343469A (enExample)
KR (1) KR100485429B1 (enExample)
CN (1) CN100516532C (enExample)
DE (1) DE60314930T2 (enExample)
TW (1) TW585975B (enExample)

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* Cited by examiner, † Cited by third party
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JP3673743B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 スクリュー式真空ポンプ
NZ588600A (en) * 2004-07-13 2012-03-30 Delaval Holding Ab A controllable vacuum source having first and second vacuum pumps and an associated control system
US7722332B2 (en) * 2004-10-01 2010-05-25 Lot Vacuum Co., Ltd. Composite dry vacuum pump having roots rotor and screw rotor
DE102006016317A1 (de) 2006-04-06 2007-10-11 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Verdichteranordnung mit einer Ventileinheit im Ansaugbereich
GB0705971D0 (en) * 2007-03-28 2007-05-09 Boc Group Plc Vacuum pump
WO2011078207A1 (ja) * 2009-12-24 2011-06-30 住友精化株式会社 二連型真空ポンプ装置、およびそれを備えるガス精製システム、 ならびに二連型真空ポンプ装置における排ガス振動抑制装置
JP5284940B2 (ja) * 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
US9074524B2 (en) * 2011-12-09 2015-07-07 Eaton Corporation Air supply system with two-stage roots blower
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
CN106704191A (zh) * 2017-03-07 2017-05-24 东莞市风能工业设备有限公司 一种凸轮多级压缩机
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
KR102301459B1 (ko) * 2017-05-30 2021-09-13 가부시키가이샤 아루박 진공 펌프
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
EP4182561B1 (en) * 2020-07-14 2025-06-11 Pierburg Pump Technology GmbH Motor vehicle vacuum pump
DE102021111297A1 (de) * 2021-04-30 2022-11-03 CompAir Drucklufttechnik - Zweigniederlassung der Gardner Denver Deutschland GmbH Antriebssystem für einen mehrstufiger Schraubenverdichter
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
CN115355170A (zh) * 2022-07-29 2022-11-18 迈科微真空技术(苏州)有限公司 一种高度集成的真空泵泵体
CN116447139B (zh) * 2023-04-24 2024-05-17 北京通嘉宏瑞科技有限公司 定子及真空泵

Family Cites Families (30)

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US2389918A (en) * 1939-07-21 1945-11-27 Barr & Stroud Ltd Reciprocating pump
US2368013A (en) * 1942-12-16 1945-01-23 Ford Reginald Clarence Pump or compressor
DE1184447B (de) 1963-04-18 1964-12-31 Erich Becker Membran-Pumpe
US4291547A (en) * 1978-04-10 1981-09-29 Hughes Aircraft Company Screw compressor-expander cryogenic system
JPS6097395A (ja) 1983-11-01 1985-05-31 セイコーインスツルメンツ株式会社 行列型液晶表示パネル
JPS60247075A (ja) * 1984-05-21 1985-12-06 Hitachi Ltd 真空ポンプ装置
DE3446952A1 (de) * 1984-12-21 1986-07-10 Lewa Herbert Ott Gmbh + Co, 7250 Leonberg Membranpumpe mit umlaufspuelung
JPH0240875B2 (ja) 1985-10-30 1990-09-13 Daia Shinku Giken Kk Fukugogatadoraishinkuhonpu
JPS62243982A (ja) 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
EP0281654B1 (de) * 1987-03-11 1991-04-17 Leybold Aktiengesellschaft Zweiwellenmaschine
DE3710782A1 (de) 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
FR2647853A1 (fr) 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH0658278A (ja) * 1992-08-05 1994-03-01 Ebara Corp 多段スクリュー式真空ポンプ
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
JP3723987B2 (ja) 1992-09-03 2005-12-07 松下電器産業株式会社 真空排気装置及び方法
DE4232119A1 (de) 1992-09-25 1994-03-31 Mes Und Regeltechnik Geraeteba Regelung einer Wälzkolbenpumpe
EP0626516B1 (de) * 1993-04-15 1997-06-04 KNF Neuberger GmbH Schmiermittelfreie Vakuum-Pumpeinrichtung
DE4409994A1 (de) * 1994-03-23 1995-09-28 Prominent Dosiertechnik Gmbh Verdrängerkolbenpumpe
DE4443387C1 (de) 1994-12-06 1996-01-18 Saskia Hochvakuum Und Labortec Zweistufige mechanische Vakuumpumpanordnung
EP1101943B1 (en) 1995-02-28 2003-12-03 Anest Iwata Corporation Control of a two-stage vacuum pump
DE19519247C2 (de) * 1995-05-25 2000-08-31 Guenter Kirsten Schraubenverdichter
JP4000611B2 (ja) 1996-12-26 2007-10-31 松下電器産業株式会社 真空排気システム
JP3806859B2 (ja) * 1999-09-24 2006-08-09 応研精工株式会社 ダイヤフラムポンプ
CN100371595C (zh) * 1999-11-12 2008-02-27 日机装株式会社 膜片型往复泵
JP2001207984A (ja) 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
JP2002070776A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 複合型真空ポンプ
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption

Also Published As

Publication number Publication date
DE60314930T2 (de) 2008-04-03
US7140846B2 (en) 2006-11-28
TW200306387A (en) 2003-11-16
CN100516532C (zh) 2009-07-22
TW585975B (en) 2004-05-01
KR20030076257A (ko) 2003-09-26
EP1347176A3 (en) 2003-11-05
DE60314930D1 (de) 2007-08-30
CN1445459A (zh) 2003-10-01
EP1347176A2 (en) 2003-09-24
US20030180153A1 (en) 2003-09-25
JP2003343469A (ja) 2003-12-03
EP1347176B1 (en) 2007-07-18

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