DE60314930T2 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
DE60314930T2
DE60314930T2 DE60314930T DE60314930T DE60314930T2 DE 60314930 T2 DE60314930 T2 DE 60314930T2 DE 60314930 T DE60314930 T DE 60314930T DE 60314930 T DE60314930 T DE 60314930T DE 60314930 T2 DE60314930 T2 DE 60314930T2
Authority
DE
Germany
Prior art keywords
pump
main
gas
rotating shaft
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60314930T
Other languages
German (de)
English (en)
Other versions
DE60314930D1 (de
Inventor
Shinya Kariya-shi Yamamoto
Satoru Kariya-shi Kuramoto
Osamu Kariya-shi Uchiyama
Daisuke Kariya-shi Sato
Mika Kariya-shi Fujiwara
Masahiro Kariya-shi Kawaguchi
Mamoru Kariya-shi Kuwahara
Nobuaki Kariya-shi Hoshino
Ryosuke Kariya-shi Koshizaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Application granted granted Critical
Publication of DE60314930D1 publication Critical patent/DE60314930D1/de
Publication of DE60314930T2 publication Critical patent/DE60314930T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
DE60314930T 2002-03-20 2003-03-19 Vakuumpumpe Expired - Lifetime DE60314930T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002079264 2002-03-20
JP2002079264 2002-03-20
JP2003000554A JP2003343469A (ja) 2002-03-20 2003-01-06 真空ポンプ
JP2003000554 2003-01-06

Publications (2)

Publication Number Publication Date
DE60314930D1 DE60314930D1 (de) 2007-08-30
DE60314930T2 true DE60314930T2 (de) 2008-04-03

Family

ID=27791043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60314930T Expired - Lifetime DE60314930T2 (de) 2002-03-20 2003-03-19 Vakuumpumpe

Country Status (7)

Country Link
US (1) US7140846B2 (enExample)
EP (1) EP1347176B1 (enExample)
JP (1) JP2003343469A (enExample)
KR (1) KR100485429B1 (enExample)
CN (1) CN100516532C (enExample)
DE (1) DE60314930T2 (enExample)
TW (1) TW585975B (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3673743B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 スクリュー式真空ポンプ
NZ588600A (en) * 2004-07-13 2012-03-30 Delaval Holding Ab A controllable vacuum source having first and second vacuum pumps and an associated control system
US7722332B2 (en) * 2004-10-01 2010-05-25 Lot Vacuum Co., Ltd. Composite dry vacuum pump having roots rotor and screw rotor
DE102006016317A1 (de) 2006-04-06 2007-10-11 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Verdichteranordnung mit einer Ventileinheit im Ansaugbereich
GB0705971D0 (en) * 2007-03-28 2007-05-09 Boc Group Plc Vacuum pump
WO2011078207A1 (ja) * 2009-12-24 2011-06-30 住友精化株式会社 二連型真空ポンプ装置、およびそれを備えるガス精製システム、 ならびに二連型真空ポンプ装置における排ガス振動抑制装置
JP5284940B2 (ja) * 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
US9074524B2 (en) * 2011-12-09 2015-07-07 Eaton Corporation Air supply system with two-stage roots blower
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
CN106704191A (zh) * 2017-03-07 2017-05-24 东莞市风能工业设备有限公司 一种凸轮多级压缩机
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
KR102301459B1 (ko) * 2017-05-30 2021-09-13 가부시키가이샤 아루박 진공 펌프
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
EP4182561B1 (en) * 2020-07-14 2025-06-11 Pierburg Pump Technology GmbH Motor vehicle vacuum pump
DE102021111297A1 (de) * 2021-04-30 2022-11-03 CompAir Drucklufttechnik - Zweigniederlassung der Gardner Denver Deutschland GmbH Antriebssystem für einen mehrstufiger Schraubenverdichter
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
CN115355170A (zh) * 2022-07-29 2022-11-18 迈科微真空技术(苏州)有限公司 一种高度集成的真空泵泵体
CN116447139B (zh) * 2023-04-24 2024-05-17 北京通嘉宏瑞科技有限公司 定子及真空泵

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2389918A (en) * 1939-07-21 1945-11-27 Barr & Stroud Ltd Reciprocating pump
US2368013A (en) * 1942-12-16 1945-01-23 Ford Reginald Clarence Pump or compressor
DE1184447B (de) 1963-04-18 1964-12-31 Erich Becker Membran-Pumpe
US4291547A (en) * 1978-04-10 1981-09-29 Hughes Aircraft Company Screw compressor-expander cryogenic system
JPS6097395A (ja) 1983-11-01 1985-05-31 セイコーインスツルメンツ株式会社 行列型液晶表示パネル
JPS60247075A (ja) * 1984-05-21 1985-12-06 Hitachi Ltd 真空ポンプ装置
DE3446952A1 (de) * 1984-12-21 1986-07-10 Lewa Herbert Ott Gmbh + Co, 7250 Leonberg Membranpumpe mit umlaufspuelung
JPH0240875B2 (ja) 1985-10-30 1990-09-13 Daia Shinku Giken Kk Fukugogatadoraishinkuhonpu
JPS62243982A (ja) 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
EP0281654B1 (de) * 1987-03-11 1991-04-17 Leybold Aktiengesellschaft Zweiwellenmaschine
DE3710782A1 (de) 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
FR2647853A1 (fr) 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH0658278A (ja) * 1992-08-05 1994-03-01 Ebara Corp 多段スクリュー式真空ポンプ
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
JP3723987B2 (ja) 1992-09-03 2005-12-07 松下電器産業株式会社 真空排気装置及び方法
DE4232119A1 (de) 1992-09-25 1994-03-31 Mes Und Regeltechnik Geraeteba Regelung einer Wälzkolbenpumpe
EP0626516B1 (de) * 1993-04-15 1997-06-04 KNF Neuberger GmbH Schmiermittelfreie Vakuum-Pumpeinrichtung
DE4409994A1 (de) * 1994-03-23 1995-09-28 Prominent Dosiertechnik Gmbh Verdrängerkolbenpumpe
DE4443387C1 (de) 1994-12-06 1996-01-18 Saskia Hochvakuum Und Labortec Zweistufige mechanische Vakuumpumpanordnung
EP1101943B1 (en) 1995-02-28 2003-12-03 Anest Iwata Corporation Control of a two-stage vacuum pump
DE19519247C2 (de) * 1995-05-25 2000-08-31 Guenter Kirsten Schraubenverdichter
JP4000611B2 (ja) 1996-12-26 2007-10-31 松下電器産業株式会社 真空排気システム
JP3806859B2 (ja) * 1999-09-24 2006-08-09 応研精工株式会社 ダイヤフラムポンプ
CN100371595C (zh) * 1999-11-12 2008-02-27 日机装株式会社 膜片型往复泵
JP2001207984A (ja) 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
JP2002070776A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 複合型真空ポンプ
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption

Also Published As

Publication number Publication date
US7140846B2 (en) 2006-11-28
TW200306387A (en) 2003-11-16
CN100516532C (zh) 2009-07-22
TW585975B (en) 2004-05-01
KR20030076257A (ko) 2003-09-26
EP1347176A3 (en) 2003-11-05
KR100485429B1 (ko) 2005-04-27
DE60314930D1 (de) 2007-08-30
CN1445459A (zh) 2003-10-01
EP1347176A2 (en) 2003-09-24
US20030180153A1 (en) 2003-09-25
JP2003343469A (ja) 2003-12-03
EP1347176B1 (en) 2007-07-18

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Legal Events

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8364 No opposition during term of opposition