JP2003172841A - 光導波路及びその製造方法 - Google Patents
光導波路及びその製造方法Info
- Publication number
- JP2003172841A JP2003172841A JP2002232918A JP2002232918A JP2003172841A JP 2003172841 A JP2003172841 A JP 2003172841A JP 2002232918 A JP2002232918 A JP 2002232918A JP 2002232918 A JP2002232918 A JP 2002232918A JP 2003172841 A JP2003172841 A JP 2003172841A
- Authority
- JP
- Japan
- Prior art keywords
- core
- clad
- optical waveguide
- transparent resin
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12119—Bend
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002232918A JP2003172841A (ja) | 2001-09-28 | 2002-08-09 | 光導波路及びその製造方法 |
| US10/254,462 US7155103B2 (en) | 2001-09-28 | 2002-09-25 | Optical wave guide and method for producing the same |
| KR10-2002-0058354A KR100464117B1 (ko) | 2001-09-28 | 2002-09-26 | 광 도파로 및 그 제조방법 |
| CNB021444331A CN1237358C (zh) | 2001-09-28 | 2002-09-27 | 光波导及其制造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-304616 | 2001-09-28 | ||
| JP2001304616 | 2001-09-28 | ||
| JP2002232918A JP2003172841A (ja) | 2001-09-28 | 2002-08-09 | 光導波路及びその製造方法 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004182699A Division JP3781045B2 (ja) | 2001-09-28 | 2004-06-21 | 光導波路の製造方法 |
| JP2006214948A Division JP4332809B2 (ja) | 2001-09-28 | 2006-08-07 | 光導波路及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003172841A true JP2003172841A (ja) | 2003-06-20 |
| JP2003172841A5 JP2003172841A5 (enExample) | 2005-04-28 |
Family
ID=26623495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002232918A Pending JP2003172841A (ja) | 2001-09-28 | 2002-08-09 | 光導波路及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7155103B2 (enExample) |
| JP (1) | JP2003172841A (enExample) |
| KR (1) | KR100464117B1 (enExample) |
| CN (1) | CN1237358C (enExample) |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006023376A (ja) * | 2004-07-06 | 2006-01-26 | Bridgestone Corp | 光デバイスの製造方法 |
| JP2007025438A (ja) * | 2005-07-20 | 2007-02-01 | Fuji Xerox Co Ltd | 導波路デバイスの製造方法 |
| US7181121B2 (en) | 2003-05-23 | 2007-02-20 | Sanyo Electric Co., Ltd. | Optical device and method for manufacturing the same |
| JP2007052281A (ja) * | 2005-08-18 | 2007-03-01 | Sony Corp | 光通信モジュール及び光通信ネットワーク |
| JP2007183471A (ja) * | 2006-01-10 | 2007-07-19 | Omron Corp | 光導波路及びその製造方法並びに光導波路モジュール及びその製造方法 |
| JP2007193049A (ja) * | 2006-01-18 | 2007-08-02 | Sony Corp | 光導波路及び光モジュール |
| JP2007250654A (ja) * | 2006-03-14 | 2007-09-27 | Seiko Electric Co Ltd | 固体色素レーザーの製造方法 |
| JP2008058531A (ja) * | 2006-08-30 | 2008-03-13 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路を作製するための金型の作製方法 |
| JP2008058530A (ja) * | 2006-08-30 | 2008-03-13 | Nippon Telegr & Teleph Corp <Ntt> | 押し出しラミネートによる導波路作製方法および金型の作製方法 |
| WO2008032724A1 (fr) | 2006-09-14 | 2008-03-20 | Toray Industries, Inc. | Film À guide d'ondes optique |
| JP2008070648A (ja) * | 2006-09-14 | 2008-03-27 | Fujitsu Ltd | 導波路型光デバイス及びその製造方法 |
| JP2008083205A (ja) * | 2006-09-26 | 2008-04-10 | Nippon Telegr & Teleph Corp <Ntt> | 積層導波路およびその作製方法 |
| JPWO2007026843A1 (ja) * | 2005-08-31 | 2009-03-12 | ミツミ電機株式会社 | 導波路装置 |
| JP2009192955A (ja) * | 2008-02-15 | 2009-08-27 | Tokyo Keiki Inc | 光機能素子及びその製造方法 |
| WO2009148010A1 (ja) * | 2008-06-04 | 2009-12-10 | 株式会社日本触媒 | 光導波路の製造方法およびそれに用いる型 |
| JP2010152194A (ja) * | 2008-12-26 | 2010-07-08 | Sumitomo Bakelite Co Ltd | 光導波路、光配線、光電気混載基板および電子機器 |
| JP2011007886A (ja) * | 2009-06-23 | 2011-01-13 | Nippon Shokubai Co Ltd | 光導波路の製造方法およびそれに用いる型 |
| JP2017134318A (ja) * | 2016-01-29 | 2017-08-03 | パナソニックIpマネジメント株式会社 | 光導波路の製造方法 |
| JP2018054863A (ja) * | 2016-09-29 | 2018-04-05 | 京セラ株式会社 | 光回路基板と接続端子との接続方法 |
| JP2019113703A (ja) * | 2017-12-22 | 2019-07-11 | 住友ベークライト株式会社 | 光導波路、光配線部品および電子機器 |
| JP2025010573A (ja) * | 2018-10-16 | 2025-01-22 | マジック リープ, インコーポレイテッド | ポリマー製品を鋳造するための方法および装置 |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003172841A (ja) | 2001-09-28 | 2003-06-20 | Omron Corp | 光導波路及びその製造方法 |
| US7020365B2 (en) * | 2002-08-29 | 2006-03-28 | Micron Technology, Inc. | Resistive heater for thermo optic device |
| US7120336B2 (en) | 2002-08-29 | 2006-10-10 | Micron Technology, Inc. | Resonator for thermo optic device |
| US7006746B2 (en) * | 2002-08-29 | 2006-02-28 | Micron Technology, Inc. | Waveguide for thermo optic device |
| KR100943561B1 (ko) * | 2003-06-03 | 2010-02-22 | 엘지전자 주식회사 | 파장 필터 제조 방법 |
| EP1760502B1 (en) * | 2004-06-25 | 2012-01-11 | Omron Corporation | Method for manufacture of a film optical waveguide |
| KR100682868B1 (ko) * | 2004-10-05 | 2007-02-15 | 삼성전기주식회사 | 마이크로 미러 및 그 제조방법 |
| JP2009500668A (ja) * | 2005-07-07 | 2009-01-08 | ノキア コーポレイション | ロール掛けによって溝をエンボス加工することによる光導波路の製造 |
| JP4812555B2 (ja) * | 2006-08-08 | 2011-11-09 | 富士通コンポーネント株式会社 | 光コネクタ |
| US20090004840A1 (en) * | 2007-06-27 | 2009-01-01 | Farinelli Matthew J | Method of Creating Molds of Variable Solder Volumes for Flip Attach |
| JP2010266475A (ja) * | 2009-05-12 | 2010-11-25 | Nitto Denko Corp | 光導波路の製造方法 |
| US8331750B2 (en) * | 2010-02-01 | 2012-12-11 | Enlighting Inc | Optical fibers having a surface light field emulation (s-LiFE) segment and method of making the same |
| JP2014052525A (ja) * | 2012-09-07 | 2014-03-20 | Nitto Denko Corp | ポリマー光導波路の製造方法 |
| CN106291106B (zh) * | 2015-05-20 | 2017-10-27 | 北京理工大学 | 多通道幅相测试系统 |
| JP6712718B2 (ja) * | 2016-03-17 | 2020-06-24 | 日東電工株式会社 | 光導波路 |
| DE102017104108B4 (de) | 2017-02-28 | 2023-12-21 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches bauelement mit laserdiode |
| US9995881B1 (en) * | 2017-06-28 | 2018-06-12 | Cisco Technology, Inc. | TSV compatible fiber array coupler for silicon photonics |
| CN113885154A (zh) * | 2021-09-26 | 2022-01-04 | 武汉光迅科技股份有限公司 | 一种光学滤片组件及制作方法 |
| JP2023062614A (ja) * | 2021-10-21 | 2023-05-08 | 富士通オプティカルコンポーネンツ株式会社 | 光導波路素子および光変調器 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02131202A (ja) | 1988-11-11 | 1990-05-21 | Omron Tateisi Electron Co | 光導波路の製造方法 |
| US5265184A (en) * | 1992-05-28 | 1993-11-23 | Motorola, Inc. | Molded waveguide and method for making same |
| JPH06250034A (ja) | 1993-02-24 | 1994-09-09 | Furukawa Electric Co Ltd:The | 光導波路チップ用母板および光導波路チップの製造方法 |
| US5540799A (en) * | 1994-10-31 | 1996-07-30 | Motorola | Method of fabricating optical waveguide from a laminate |
| JP3433586B2 (ja) | 1995-10-06 | 2003-08-04 | 日立電線株式会社 | 光導波路及びその製造方法 |
| JPH09281351A (ja) | 1996-04-18 | 1997-10-31 | Sharp Corp | 高分子光導波路の製造方法 |
| SE511000C2 (sv) * | 1996-09-06 | 1999-07-19 | Ericsson Telefon Ab L M | Förfarande och anordning för att anordna ett vågledarmönster i en donkropp |
| JP3456685B2 (ja) | 1996-09-13 | 2003-10-14 | 日本電信電話株式会社 | 導波路型光学素子の作製法 |
| DE19721721B4 (de) | 1997-05-23 | 2007-08-30 | Robert Bosch Gmbh | Verfahren zur Herstellung thermooptischer Schaltelemente |
| JPH11305055A (ja) | 1998-04-22 | 1999-11-05 | Sharp Corp | 光導波路の製造方法及び光導波路製造のためのマスタ原板の製造方法 |
| JP2000019337A (ja) | 1998-06-29 | 2000-01-21 | Matsushita Electric Ind Co Ltd | 光導波路及びその製造方法 |
| JP2000258649A (ja) | 1999-03-05 | 2000-09-22 | Hoya Corp | 光導波路及びその製造方法 |
| JP2000321459A (ja) | 1999-05-11 | 2000-11-24 | Hitachi Cable Ltd | 光導波路およびその製造方法 |
| JP3229871B2 (ja) * | 1999-07-13 | 2001-11-19 | 松下電器産業株式会社 | 微細形状転写方法および光学部品の製造方法 |
| JP2001042150A (ja) | 1999-07-30 | 2001-02-16 | Canon Inc | 光導波路、その作製方法、およびこれを用いた光インタコネクション装置 |
| US6517995B1 (en) * | 1999-09-14 | 2003-02-11 | Massachusetts Institute Of Technology | Fabrication of finely featured devices by liquid embossing |
| JP2001133650A (ja) | 1999-11-09 | 2001-05-18 | Matsushita Electric Ind Co Ltd | 光導波路基板、光導波路基板の製造方法、光導波路部品、及び光導波路部品の製造方法 |
| US6500603B1 (en) * | 1999-11-11 | 2002-12-31 | Mitsui Chemicals, Inc. | Method for manufacturing polymer optical waveguide |
| JP2001154052A (ja) | 1999-11-29 | 2001-06-08 | Oki Printed Circuit Kk | 光導波路の製造方法 |
| JP2001235646A (ja) | 2000-02-25 | 2001-08-31 | Matsushita Electric Ind Co Ltd | 微細パターン形成方法、光学素子の製造方法、光学素子および光伝送装置 |
| JP2001337239A (ja) | 2000-05-30 | 2001-12-07 | Matsushita Electric Ind Co Ltd | 光導波路およびその製造方法 |
| JP2003172841A (ja) | 2001-09-28 | 2003-06-20 | Omron Corp | 光導波路及びその製造方法 |
-
2002
- 2002-08-09 JP JP2002232918A patent/JP2003172841A/ja active Pending
- 2002-09-25 US US10/254,462 patent/US7155103B2/en not_active Expired - Fee Related
- 2002-09-26 KR KR10-2002-0058354A patent/KR100464117B1/ko not_active Expired - Fee Related
- 2002-09-27 CN CNB021444331A patent/CN1237358C/zh not_active Expired - Fee Related
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7181121B2 (en) | 2003-05-23 | 2007-02-20 | Sanyo Electric Co., Ltd. | Optical device and method for manufacturing the same |
| JP2006023376A (ja) * | 2004-07-06 | 2006-01-26 | Bridgestone Corp | 光デバイスの製造方法 |
| JP2007025438A (ja) * | 2005-07-20 | 2007-02-01 | Fuji Xerox Co Ltd | 導波路デバイスの製造方法 |
| JP2007052281A (ja) * | 2005-08-18 | 2007-03-01 | Sony Corp | 光通信モジュール及び光通信ネットワーク |
| JPWO2007026843A1 (ja) * | 2005-08-31 | 2009-03-12 | ミツミ電機株式会社 | 導波路装置 |
| JP4582145B2 (ja) * | 2005-08-31 | 2010-11-17 | ミツミ電機株式会社 | 導波路装置 |
| JP2007183471A (ja) * | 2006-01-10 | 2007-07-19 | Omron Corp | 光導波路及びその製造方法並びに光導波路モジュール及びその製造方法 |
| JP2007193049A (ja) * | 2006-01-18 | 2007-08-02 | Sony Corp | 光導波路及び光モジュール |
| JP2007250654A (ja) * | 2006-03-14 | 2007-09-27 | Seiko Electric Co Ltd | 固体色素レーザーの製造方法 |
| JP2008058531A (ja) * | 2006-08-30 | 2008-03-13 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路を作製するための金型の作製方法 |
| JP2008058530A (ja) * | 2006-08-30 | 2008-03-13 | Nippon Telegr & Teleph Corp <Ntt> | 押し出しラミネートによる導波路作製方法および金型の作製方法 |
| JP2008070648A (ja) * | 2006-09-14 | 2008-03-27 | Fujitsu Ltd | 導波路型光デバイス及びその製造方法 |
| WO2008032724A1 (fr) | 2006-09-14 | 2008-03-20 | Toray Industries, Inc. | Film À guide d'ondes optique |
| JP2008083205A (ja) * | 2006-09-26 | 2008-04-10 | Nippon Telegr & Teleph Corp <Ntt> | 積層導波路およびその作製方法 |
| JP2009192955A (ja) * | 2008-02-15 | 2009-08-27 | Tokyo Keiki Inc | 光機能素子及びその製造方法 |
| JPWO2009148010A1 (ja) * | 2008-06-04 | 2011-10-27 | 株式会社日本触媒 | 光導波路の製造方法およびそれに用いる型 |
| WO2009148010A1 (ja) * | 2008-06-04 | 2009-12-10 | 株式会社日本触媒 | 光導波路の製造方法およびそれに用いる型 |
| JP2010152194A (ja) * | 2008-12-26 | 2010-07-08 | Sumitomo Bakelite Co Ltd | 光導波路、光配線、光電気混載基板および電子機器 |
| JP2011007886A (ja) * | 2009-06-23 | 2011-01-13 | Nippon Shokubai Co Ltd | 光導波路の製造方法およびそれに用いる型 |
| JP2017134318A (ja) * | 2016-01-29 | 2017-08-03 | パナソニックIpマネジメント株式会社 | 光導波路の製造方法 |
| JP2018054863A (ja) * | 2016-09-29 | 2018-04-05 | 京セラ株式会社 | 光回路基板と接続端子との接続方法 |
| JP2019113703A (ja) * | 2017-12-22 | 2019-07-11 | 住友ベークライト株式会社 | 光導波路、光配線部品および電子機器 |
| JP2025010573A (ja) * | 2018-10-16 | 2025-01-22 | マジック リープ, インコーポレイテッド | ポリマー製品を鋳造するための方法および装置 |
| JP7854020B2 (ja) | 2018-10-16 | 2026-04-30 | マジック リープ, インコーポレイテッド | ポリマー製品を鋳造するための方法および装置 |
Also Published As
| Publication number | Publication date |
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| CN1410786A (zh) | 2003-04-16 |
| KR100464117B1 (ko) | 2005-01-03 |
| US7155103B2 (en) | 2006-12-26 |
| KR20030028398A (ko) | 2003-04-08 |
| CN1237358C (zh) | 2006-01-18 |
| US20030061836A1 (en) | 2003-04-03 |
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