JP2003172841A - 光導波路及びその製造方法 - Google Patents

光導波路及びその製造方法

Info

Publication number
JP2003172841A
JP2003172841A JP2002232918A JP2002232918A JP2003172841A JP 2003172841 A JP2003172841 A JP 2003172841A JP 2002232918 A JP2002232918 A JP 2002232918A JP 2002232918 A JP2002232918 A JP 2002232918A JP 2003172841 A JP2003172841 A JP 2003172841A
Authority
JP
Japan
Prior art keywords
core
clad
optical waveguide
transparent resin
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002232918A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003172841A5 (enExample
Inventor
Masayoshi Higuchi
誠良 樋口
Toshiyuki Takahashi
敏幸 高橋
Hiromi Totani
浩巳 戸谷
Shigeru Yasuda
成留 安田
Hayami Hosokawa
速美 細川
Fumihiko Sato
文彦 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2002232918A priority Critical patent/JP2003172841A/ja
Priority to US10/254,462 priority patent/US7155103B2/en
Priority to KR10-2002-0058354A priority patent/KR100464117B1/ko
Priority to CNB021444331A priority patent/CN1237358C/zh
Publication of JP2003172841A publication Critical patent/JP2003172841A/ja
Publication of JP2003172841A5 publication Critical patent/JP2003172841A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/138Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1221Basic optical elements, e.g. light-guiding paths made from organic materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12119Bend
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133Functions
    • G02B2006/1215Splitter
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4246Bidirectionally operating package structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4249Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/43Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP2002232918A 2001-09-28 2002-08-09 光導波路及びその製造方法 Pending JP2003172841A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002232918A JP2003172841A (ja) 2001-09-28 2002-08-09 光導波路及びその製造方法
US10/254,462 US7155103B2 (en) 2001-09-28 2002-09-25 Optical wave guide and method for producing the same
KR10-2002-0058354A KR100464117B1 (ko) 2001-09-28 2002-09-26 광 도파로 및 그 제조방법
CNB021444331A CN1237358C (zh) 2001-09-28 2002-09-27 光波导及其制造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-304616 2001-09-28
JP2001304616 2001-09-28
JP2002232918A JP2003172841A (ja) 2001-09-28 2002-08-09 光導波路及びその製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2004182699A Division JP3781045B2 (ja) 2001-09-28 2004-06-21 光導波路の製造方法
JP2006214948A Division JP4332809B2 (ja) 2001-09-28 2006-08-07 光導波路及びその製造方法

Publications (2)

Publication Number Publication Date
JP2003172841A true JP2003172841A (ja) 2003-06-20
JP2003172841A5 JP2003172841A5 (enExample) 2005-04-28

Family

ID=26623495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002232918A Pending JP2003172841A (ja) 2001-09-28 2002-08-09 光導波路及びその製造方法

Country Status (4)

Country Link
US (1) US7155103B2 (enExample)
JP (1) JP2003172841A (enExample)
KR (1) KR100464117B1 (enExample)
CN (1) CN1237358C (enExample)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023376A (ja) * 2004-07-06 2006-01-26 Bridgestone Corp 光デバイスの製造方法
JP2007025438A (ja) * 2005-07-20 2007-02-01 Fuji Xerox Co Ltd 導波路デバイスの製造方法
US7181121B2 (en) 2003-05-23 2007-02-20 Sanyo Electric Co., Ltd. Optical device and method for manufacturing the same
JP2007052281A (ja) * 2005-08-18 2007-03-01 Sony Corp 光通信モジュール及び光通信ネットワーク
JP2007183471A (ja) * 2006-01-10 2007-07-19 Omron Corp 光導波路及びその製造方法並びに光導波路モジュール及びその製造方法
JP2007193049A (ja) * 2006-01-18 2007-08-02 Sony Corp 光導波路及び光モジュール
JP2007250654A (ja) * 2006-03-14 2007-09-27 Seiko Electric Co Ltd 固体色素レーザーの製造方法
JP2008058531A (ja) * 2006-08-30 2008-03-13 Nippon Telegr & Teleph Corp <Ntt> 光導波路を作製するための金型の作製方法
JP2008058530A (ja) * 2006-08-30 2008-03-13 Nippon Telegr & Teleph Corp <Ntt> 押し出しラミネートによる導波路作製方法および金型の作製方法
WO2008032724A1 (fr) 2006-09-14 2008-03-20 Toray Industries, Inc. Film À guide d'ondes optique
JP2008070648A (ja) * 2006-09-14 2008-03-27 Fujitsu Ltd 導波路型光デバイス及びその製造方法
JP2008083205A (ja) * 2006-09-26 2008-04-10 Nippon Telegr & Teleph Corp <Ntt> 積層導波路およびその作製方法
JPWO2007026843A1 (ja) * 2005-08-31 2009-03-12 ミツミ電機株式会社 導波路装置
JP2009192955A (ja) * 2008-02-15 2009-08-27 Tokyo Keiki Inc 光機能素子及びその製造方法
WO2009148010A1 (ja) * 2008-06-04 2009-12-10 株式会社日本触媒 光導波路の製造方法およびそれに用いる型
JP2010152194A (ja) * 2008-12-26 2010-07-08 Sumitomo Bakelite Co Ltd 光導波路、光配線、光電気混載基板および電子機器
JP2011007886A (ja) * 2009-06-23 2011-01-13 Nippon Shokubai Co Ltd 光導波路の製造方法およびそれに用いる型
JP2017134318A (ja) * 2016-01-29 2017-08-03 パナソニックIpマネジメント株式会社 光導波路の製造方法
JP2018054863A (ja) * 2016-09-29 2018-04-05 京セラ株式会社 光回路基板と接続端子との接続方法
JP2019113703A (ja) * 2017-12-22 2019-07-11 住友ベークライト株式会社 光導波路、光配線部品および電子機器
JP2025010573A (ja) * 2018-10-16 2025-01-22 マジック リープ, インコーポレイテッド ポリマー製品を鋳造するための方法および装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
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JP2003172841A (ja) 2001-09-28 2003-06-20 Omron Corp 光導波路及びその製造方法
US7020365B2 (en) * 2002-08-29 2006-03-28 Micron Technology, Inc. Resistive heater for thermo optic device
US7120336B2 (en) 2002-08-29 2006-10-10 Micron Technology, Inc. Resonator for thermo optic device
US7006746B2 (en) * 2002-08-29 2006-02-28 Micron Technology, Inc. Waveguide for thermo optic device
KR100943561B1 (ko) * 2003-06-03 2010-02-22 엘지전자 주식회사 파장 필터 제조 방법
EP1760502B1 (en) * 2004-06-25 2012-01-11 Omron Corporation Method for manufacture of a film optical waveguide
KR100682868B1 (ko) * 2004-10-05 2007-02-15 삼성전기주식회사 마이크로 미러 및 그 제조방법
JP2009500668A (ja) * 2005-07-07 2009-01-08 ノキア コーポレイション ロール掛けによって溝をエンボス加工することによる光導波路の製造
JP4812555B2 (ja) * 2006-08-08 2011-11-09 富士通コンポーネント株式会社 光コネクタ
US20090004840A1 (en) * 2007-06-27 2009-01-01 Farinelli Matthew J Method of Creating Molds of Variable Solder Volumes for Flip Attach
JP2010266475A (ja) * 2009-05-12 2010-11-25 Nitto Denko Corp 光導波路の製造方法
US8331750B2 (en) * 2010-02-01 2012-12-11 Enlighting Inc Optical fibers having a surface light field emulation (s-LiFE) segment and method of making the same
JP2014052525A (ja) * 2012-09-07 2014-03-20 Nitto Denko Corp ポリマー光導波路の製造方法
CN106291106B (zh) * 2015-05-20 2017-10-27 北京理工大学 多通道幅相测试系统
JP6712718B2 (ja) * 2016-03-17 2020-06-24 日東電工株式会社 光導波路
DE102017104108B4 (de) 2017-02-28 2023-12-21 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronisches bauelement mit laserdiode
US9995881B1 (en) * 2017-06-28 2018-06-12 Cisco Technology, Inc. TSV compatible fiber array coupler for silicon photonics
CN113885154A (zh) * 2021-09-26 2022-01-04 武汉光迅科技股份有限公司 一种光学滤片组件及制作方法
JP2023062614A (ja) * 2021-10-21 2023-05-08 富士通オプティカルコンポーネンツ株式会社 光導波路素子および光変調器

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JP3456685B2 (ja) 1996-09-13 2003-10-14 日本電信電話株式会社 導波路型光学素子の作製法
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JPH11305055A (ja) 1998-04-22 1999-11-05 Sharp Corp 光導波路の製造方法及び光導波路製造のためのマスタ原板の製造方法
JP2000019337A (ja) 1998-06-29 2000-01-21 Matsushita Electric Ind Co Ltd 光導波路及びその製造方法
JP2000258649A (ja) 1999-03-05 2000-09-22 Hoya Corp 光導波路及びその製造方法
JP2000321459A (ja) 1999-05-11 2000-11-24 Hitachi Cable Ltd 光導波路およびその製造方法
JP3229871B2 (ja) * 1999-07-13 2001-11-19 松下電器産業株式会社 微細形状転写方法および光学部品の製造方法
JP2001042150A (ja) 1999-07-30 2001-02-16 Canon Inc 光導波路、その作製方法、およびこれを用いた光インタコネクション装置
US6517995B1 (en) * 1999-09-14 2003-02-11 Massachusetts Institute Of Technology Fabrication of finely featured devices by liquid embossing
JP2001133650A (ja) 1999-11-09 2001-05-18 Matsushita Electric Ind Co Ltd 光導波路基板、光導波路基板の製造方法、光導波路部品、及び光導波路部品の製造方法
US6500603B1 (en) * 1999-11-11 2002-12-31 Mitsui Chemicals, Inc. Method for manufacturing polymer optical waveguide
JP2001154052A (ja) 1999-11-29 2001-06-08 Oki Printed Circuit Kk 光導波路の製造方法
JP2001235646A (ja) 2000-02-25 2001-08-31 Matsushita Electric Ind Co Ltd 微細パターン形成方法、光学素子の製造方法、光学素子および光伝送装置
JP2001337239A (ja) 2000-05-30 2001-12-07 Matsushita Electric Ind Co Ltd 光導波路およびその製造方法
JP2003172841A (ja) 2001-09-28 2003-06-20 Omron Corp 光導波路及びその製造方法

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7181121B2 (en) 2003-05-23 2007-02-20 Sanyo Electric Co., Ltd. Optical device and method for manufacturing the same
JP2006023376A (ja) * 2004-07-06 2006-01-26 Bridgestone Corp 光デバイスの製造方法
JP2007025438A (ja) * 2005-07-20 2007-02-01 Fuji Xerox Co Ltd 導波路デバイスの製造方法
JP2007052281A (ja) * 2005-08-18 2007-03-01 Sony Corp 光通信モジュール及び光通信ネットワーク
JPWO2007026843A1 (ja) * 2005-08-31 2009-03-12 ミツミ電機株式会社 導波路装置
JP4582145B2 (ja) * 2005-08-31 2010-11-17 ミツミ電機株式会社 導波路装置
JP2007183471A (ja) * 2006-01-10 2007-07-19 Omron Corp 光導波路及びその製造方法並びに光導波路モジュール及びその製造方法
JP2007193049A (ja) * 2006-01-18 2007-08-02 Sony Corp 光導波路及び光モジュール
JP2007250654A (ja) * 2006-03-14 2007-09-27 Seiko Electric Co Ltd 固体色素レーザーの製造方法
JP2008058531A (ja) * 2006-08-30 2008-03-13 Nippon Telegr & Teleph Corp <Ntt> 光導波路を作製するための金型の作製方法
JP2008058530A (ja) * 2006-08-30 2008-03-13 Nippon Telegr & Teleph Corp <Ntt> 押し出しラミネートによる導波路作製方法および金型の作製方法
JP2008070648A (ja) * 2006-09-14 2008-03-27 Fujitsu Ltd 導波路型光デバイス及びその製造方法
WO2008032724A1 (fr) 2006-09-14 2008-03-20 Toray Industries, Inc. Film À guide d'ondes optique
JP2008083205A (ja) * 2006-09-26 2008-04-10 Nippon Telegr & Teleph Corp <Ntt> 積層導波路およびその作製方法
JP2009192955A (ja) * 2008-02-15 2009-08-27 Tokyo Keiki Inc 光機能素子及びその製造方法
JPWO2009148010A1 (ja) * 2008-06-04 2011-10-27 株式会社日本触媒 光導波路の製造方法およびそれに用いる型
WO2009148010A1 (ja) * 2008-06-04 2009-12-10 株式会社日本触媒 光導波路の製造方法およびそれに用いる型
JP2010152194A (ja) * 2008-12-26 2010-07-08 Sumitomo Bakelite Co Ltd 光導波路、光配線、光電気混載基板および電子機器
JP2011007886A (ja) * 2009-06-23 2011-01-13 Nippon Shokubai Co Ltd 光導波路の製造方法およびそれに用いる型
JP2017134318A (ja) * 2016-01-29 2017-08-03 パナソニックIpマネジメント株式会社 光導波路の製造方法
JP2018054863A (ja) * 2016-09-29 2018-04-05 京セラ株式会社 光回路基板と接続端子との接続方法
JP2019113703A (ja) * 2017-12-22 2019-07-11 住友ベークライト株式会社 光導波路、光配線部品および電子機器
JP2025010573A (ja) * 2018-10-16 2025-01-22 マジック リープ, インコーポレイテッド ポリマー製品を鋳造するための方法および装置
JP7854020B2 (ja) 2018-10-16 2026-04-30 マジック リープ, インコーポレイテッド ポリマー製品を鋳造するための方法および装置

Also Published As

Publication number Publication date
CN1410786A (zh) 2003-04-16
KR100464117B1 (ko) 2005-01-03
US7155103B2 (en) 2006-12-26
KR20030028398A (ko) 2003-04-08
CN1237358C (zh) 2006-01-18
US20030061836A1 (en) 2003-04-03

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