JP2003048780A - 多孔質窒化アルミニウム - Google Patents

多孔質窒化アルミニウム

Info

Publication number
JP2003048780A
JP2003048780A JP2001233369A JP2001233369A JP2003048780A JP 2003048780 A JP2003048780 A JP 2003048780A JP 2001233369 A JP2001233369 A JP 2001233369A JP 2001233369 A JP2001233369 A JP 2001233369A JP 2003048780 A JP2003048780 A JP 2003048780A
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JP
Japan
Prior art keywords
aln
aluminum nitride
heat treatment
porous aluminum
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001233369A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003048780A5 (enExample
Inventor
Katsutoshi Yoneya
勝利 米屋
Takeji Meguro
竹司 目黒
Junichi Tadami
純一 多々見
Masanori Abe
昌則 阿部
Akihiko Tsuge
章彦 柘植
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fine Ceramics Research Association
Original Assignee
Fine Ceramics Research Association
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fine Ceramics Research Association filed Critical Fine Ceramics Research Association
Priority to JP2001233369A priority Critical patent/JP2003048780A/ja
Publication of JP2003048780A publication Critical patent/JP2003048780A/ja
Publication of JP2003048780A5 publication Critical patent/JP2003048780A5/ja
Pending legal-status Critical Current

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  • Ceramic Products (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
JP2001233369A 2001-08-01 2001-08-01 多孔質窒化アルミニウム Pending JP2003048780A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001233369A JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001233369A JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Publications (2)

Publication Number Publication Date
JP2003048780A true JP2003048780A (ja) 2003-02-21
JP2003048780A5 JP2003048780A5 (enExample) 2008-09-25

Family

ID=19065152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001233369A Pending JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

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Country Link
JP (1) JP2003048780A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7876053B2 (en) 2004-06-21 2011-01-25 Tokuyama Corporation Nitride sintered body and method for manufacturing thereof
CN106653652A (zh) * 2015-10-30 2017-05-10 日本碍子株式会社 半导体制造装置用部件、其制法以及附带有轴的加热器
CN114477988A (zh) * 2022-03-28 2022-05-13 天通控股股份有限公司 一种易成型、高强度铁氧体材料及其制备方法
CN115141022A (zh) * 2022-07-28 2022-10-04 江苏正力新能电池技术有限公司 一种多孔陶瓷底托板的制备方法、多孔陶瓷底托板及电池

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270210A (ja) * 1985-09-24 1987-03-31 Natl Inst For Res In Inorg Mater 窒化アルミニウム−炭化けい素複合微粉末の製造法
JPH02175666A (ja) * 1988-12-27 1990-07-06 Ibiden Co Ltd 窒化アルミニウム焼結体の製造方法
JPH046161A (ja) * 1990-04-23 1992-01-10 Kawasaki Steel Corp ＡｌＮ焼結体の製造方法
JPH04108668A (ja) * 1990-08-29 1992-04-09 Kyocera Corp 窒化アルミニウムポリタイプ焼結体及びその製法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270210A (ja) * 1985-09-24 1987-03-31 Natl Inst For Res In Inorg Mater 窒化アルミニウム−炭化けい素複合微粉末の製造法
JPH02175666A (ja) * 1988-12-27 1990-07-06 Ibiden Co Ltd 窒化アルミニウム焼結体の製造方法
JPH046161A (ja) * 1990-04-23 1992-01-10 Kawasaki Steel Corp ＡｌＮ焼結体の製造方法
JPH04108668A (ja) * 1990-08-29 1992-04-09 Kyocera Corp 窒化アルミニウムポリタイプ焼結体及びその製法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7876053B2 (en) 2004-06-21 2011-01-25 Tokuyama Corporation Nitride sintered body and method for manufacturing thereof
US7973481B2 (en) 2004-06-21 2011-07-05 Tokuyama Corporation Nitride sintered body and method for manufacturing thereof
JP2012025660A (ja) * 2004-06-21 2012-02-09 Tokuyama Corp 窒化物焼結体、及びその製造方法
JP4937738B2 (ja) * 2004-06-21 2012-05-23 株式会社トクヤマ 窒化物焼結体、及びその製造方法
EP2420482A3 (en) * 2004-06-21 2012-08-01 Tokuyama Corporation Nitride sintered body and method for manufacturing thereof
CN106653652A (zh) * 2015-10-30 2017-05-10 日本碍子株式会社 半导体制造装置用部件、其制法以及附带有轴的加热器
KR20170051310A (ko) * 2015-10-30 2017-05-11 엔지케이 인슐레이터 엘티디 반도체 제조 장치용 부재, 그 제법 및 샤프트를 갖는 히터
CN106653652B (zh) * 2015-10-30 2021-11-26 日本碍子株式会社 半导体制造装置用部件、其制法以及附带有轴的加热器
KR102461566B1 (ko) 2015-10-30 2022-10-31 엔지케이 인슐레이터 엘티디 반도체 제조 장치용 부재, 그 제법 및 샤프트를 갖는 히터
CN114477988A (zh) * 2022-03-28 2022-05-13 天通控股股份有限公司 一种易成型、高强度铁氧体材料及其制备方法
CN115141022A (zh) * 2022-07-28 2022-10-04 江苏正力新能电池技术有限公司 一种多孔陶瓷底托板的制备方法、多孔陶瓷底托板及电池

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