JP2003048780A5 - - Google Patents

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Publication number
JP2003048780A5
JP2003048780A5 JP2001233369A JP2001233369A JP2003048780A5 JP 2003048780 A5 JP2003048780 A5 JP 2003048780A5 JP 2001233369 A JP2001233369 A JP 2001233369A JP 2001233369 A JP2001233369 A JP 2001233369A JP 2003048780 A5 JP2003048780 A5 JP 2003048780A5
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JP
Japan
Prior art keywords
dielectric constant
heat treatment
aluminum nitride
porosity
thermal conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001233369A
Other languages
English (en)
Japanese (ja)
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JP2003048780A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001233369A priority Critical patent/JP2003048780A/ja
Priority claimed from JP2001233369A external-priority patent/JP2003048780A/ja
Publication of JP2003048780A publication Critical patent/JP2003048780A/ja
Publication of JP2003048780A5 publication Critical patent/JP2003048780A5/ja
Pending legal-status Critical Current

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JP2001233369A 2001-08-01 2001-08-01 多孔質窒化アルミニウム Pending JP2003048780A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001233369A JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001233369A JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Publications (2)

Publication Number Publication Date
JP2003048780A JP2003048780A (ja) 2003-02-21
JP2003048780A5 true JP2003048780A5 (enExample) 2008-09-25

Family

ID=19065152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001233369A Pending JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Country Status (1)

Country Link
JP (1) JP2003048780A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4937738B2 (ja) * 2004-06-21 2012-05-23 株式会社トクヤマ 窒化物焼結体、及びその製造方法
JP6697363B2 (ja) * 2015-10-30 2020-05-20 日本碍子株式会社 半導体製造装置用部材、その製法及びシャフト付きヒータ
CN114477988B (zh) * 2022-03-28 2023-03-24 天通控股股份有限公司 一种易成型、高强度铁氧体材料及其制备方法
CN115141022A (zh) * 2022-07-28 2022-10-04 江苏正力新能电池技术有限公司 一种多孔陶瓷底托板的制备方法、多孔陶瓷底托板及电池

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270210A (ja) * 1985-09-24 1987-03-31 Natl Inst For Res In Inorg Mater 窒化アルミニウム−炭化けい素複合微粉末の製造法
JP2730941B2 (ja) * 1988-12-27 1998-03-25 イビデン株式会社 窒化アルミニウム焼結体の製造方法
JPH046161A (ja) * 1990-04-23 1992-01-10 Kawasaki Steel Corp ＡｌＮ焼結体の製造方法
JP3003000B2 (ja) * 1990-08-29 2000-01-24 京セラ株式会社 窒化アルミニウムポリタイプ焼結体及びその製法

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