JP2003031611A5 - - Google Patents
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- Publication number
- JP2003031611A5 JP2003031611A5 JP2002142521A JP2002142521A JP2003031611A5 JP 2003031611 A5 JP2003031611 A5 JP 2003031611A5 JP 2002142521 A JP2002142521 A JP 2002142521A JP 2002142521 A JP2002142521 A JP 2002142521A JP 2003031611 A5 JP2003031611 A5 JP 2003031611A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- discontinuous
- integrated circuit
- metal layer
- circuit according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims 33
- 239000002184 metal Substances 0.000 claims 33
- 230000002093 peripheral effect Effects 0.000 claims 10
- 238000001465 metallisation Methods 0.000 claims 6
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 101000798109 Homo sapiens Melanotransferrin Proteins 0.000 claims 2
- 101000967073 Homo sapiens Metal regulatory transcription factor 1 Proteins 0.000 claims 2
- 101001030197 Homo sapiens Myelin transcription factor 1 Proteins 0.000 claims 2
- 102100040514 Metal regulatory transcription factor 1 Human genes 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 238000002955 isolation Methods 0.000 claims 2
- 230000003014 reinforcing effect Effects 0.000 claims 2
- 101000967087 Homo sapiens Metal-response element-binding transcription factor 2 Proteins 0.000 claims 1
- 102100040632 Metal-response element-binding transcription factor 2 Human genes 0.000 claims 1
- 101100471831 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) rpl-5 gene Proteins 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0106591A FR2824954A1 (fr) | 2001-05-18 | 2001-05-18 | Plot de connexion d'un circuit integre |
| FR0106591 | 2001-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003031611A JP2003031611A (ja) | 2003-01-31 |
| JP2003031611A5 true JP2003031611A5 (https=) | 2005-09-29 |
Family
ID=8863445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002142521A Pending JP2003031611A (ja) | 2001-05-18 | 2002-05-17 | 複数の金属化レベル及び接続パッドを含む集積回路 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6822329B2 (https=) |
| EP (1) | EP1261030A1 (https=) |
| JP (1) | JP2003031611A (https=) |
| FR (1) | FR2824954A1 (https=) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6104761A (en) | 1998-08-28 | 2000-08-15 | Sicom, Inc. | Constrained-envelope digital-communications transmission system and method therefor |
| JP3779243B2 (ja) * | 2002-07-31 | 2006-05-24 | 富士通株式会社 | 半導体装置及びその製造方法 |
| US7692315B2 (en) * | 2002-08-30 | 2010-04-06 | Fujitsu Microelectronics Limited | Semiconductor device and method for manufacturing the same |
| US6864578B2 (en) * | 2003-04-03 | 2005-03-08 | International Business Machines Corporation | Internally reinforced bond pads |
| US7005369B2 (en) * | 2003-08-21 | 2006-02-28 | Intersil American Inc. | Active area bonding compatible high current structures |
| US8274160B2 (en) | 2003-08-21 | 2012-09-25 | Intersil Americas Inc. | Active area bonding compatible high current structures |
| WO2005024912A2 (en) * | 2003-09-09 | 2005-03-17 | Intel Corporation | Methods of processing thick ild layers using spray coating or lamination for c4 wafer level thick metal integrated flow |
| US6977435B2 (en) * | 2003-09-09 | 2005-12-20 | Intel Corporation | Thick metal layer integrated process flow to improve power delivery and mechanical buffering |
| JP2005142553A (ja) * | 2003-10-15 | 2005-06-02 | Toshiba Corp | 半導体装置 |
| JP2005142351A (ja) * | 2003-11-06 | 2005-06-02 | Nec Electronics Corp | 半導体装置およびその製造方法 |
| US7629689B2 (en) * | 2004-01-22 | 2009-12-08 | Kawasaki Microelectronics, Inc. | Semiconductor integrated circuit having connection pads over active elements |
| JP4242336B2 (ja) * | 2004-02-05 | 2009-03-25 | パナソニック株式会社 | 半導体装置 |
| JP4517843B2 (ja) * | 2004-12-10 | 2010-08-04 | エルピーダメモリ株式会社 | 半導体装置 |
| JP2006245076A (ja) * | 2005-03-01 | 2006-09-14 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| US7323784B2 (en) * | 2005-03-17 | 2008-01-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Top via pattern for bond pad structure |
| US20060244156A1 (en) * | 2005-04-18 | 2006-11-02 | Tao Cheng | Bond pad structures and semiconductor devices using the same |
| JP4671814B2 (ja) | 2005-09-02 | 2011-04-20 | パナソニック株式会社 | 半導体装置 |
| US7626268B2 (en) | 2005-10-12 | 2009-12-01 | Infineon Technologies Ag | Support structures for semiconductor devices |
| FR2894716A1 (fr) * | 2005-12-09 | 2007-06-15 | St Microelectronics Sa | Puce de circuits integres a plots externes et procede de fabrication d'une telle puce |
| US7456479B2 (en) * | 2005-12-15 | 2008-11-25 | United Microelectronics Corp. | Method for fabricating a probing pad of an integrated circuit chip |
| US7592710B2 (en) * | 2006-03-03 | 2009-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bond pad structure for wire bonding |
| US7459792B2 (en) * | 2006-06-19 | 2008-12-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Via layout with via groups placed in interlocked arrangement |
| DE102006046182B4 (de) * | 2006-09-29 | 2010-11-11 | Infineon Technologies Ag | Halbleiterelement mit einer Stützstruktur sowie Herstellungsverfahren |
| US7573115B2 (en) * | 2006-11-13 | 2009-08-11 | International Business Machines Corporation | Structure and method for enhancing resistance to fracture of bonding pads |
| US7749885B2 (en) | 2006-12-15 | 2010-07-06 | Micron Technology, Inc. | Semiconductor processing methods, methods of forming contact pads, and methods of forming electrical connections between metal-containing layers |
| DE102007011126B4 (de) * | 2007-03-07 | 2009-08-27 | Austriamicrosystems Ag | Halbleiterbauelement mit Anschlusskontaktfläche |
| US9103884B2 (en) * | 2008-03-05 | 2015-08-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | De-embedding on-wafer devices |
| US8148797B2 (en) | 2008-06-26 | 2012-04-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chip pad resistant to antenna effect and method |
| US8581423B2 (en) | 2008-11-17 | 2013-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Double solid metal pad with reduced area |
| JP2011146563A (ja) * | 2010-01-15 | 2011-07-28 | Panasonic Corp | 半導体装置 |
| US8381139B2 (en) | 2010-11-30 | 2013-02-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for metal correlated via split for double patterning |
| IT1404587B1 (it) | 2010-12-20 | 2013-11-22 | St Microelectronics Srl | Struttura di connessione induttiva per uso in un circuito integrato |
| IT1403475B1 (it) | 2010-12-20 | 2013-10-17 | St Microelectronics Srl | Struttura di connessione per un circuito integrato con funzione capacitiva |
| JP5485132B2 (ja) * | 2010-12-28 | 2014-05-07 | パナソニック株式会社 | 半導体装置 |
| CN102593069A (zh) * | 2011-01-13 | 2012-07-18 | 奇景光电股份有限公司 | 接合垫结构以及集成电路芯片 |
| US8923357B2 (en) | 2011-09-13 | 2014-12-30 | Seagate Technology Llc | Semiconductor laser with cathode metal layer disposed in trench region |
| US8532156B2 (en) | 2011-09-13 | 2013-09-10 | Seagate Technology Llc | Semiconductor laser with test pads |
| CN102869189B (zh) * | 2012-09-18 | 2016-03-30 | 上海华勤通讯技术有限公司 | 焊盘加固pcb板 |
| CN103857181A (zh) * | 2012-12-06 | 2014-06-11 | 华为终端有限公司 | Pcb板以及具有该pcb板的电子设备 |
| US9773732B2 (en) * | 2013-03-06 | 2017-09-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for packaging pad structure |
| US9768221B2 (en) * | 2013-06-27 | 2017-09-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pad structure layout for semiconductor device |
| CN104952822A (zh) * | 2014-03-25 | 2015-09-30 | 中芯国际集成电路制造(上海)有限公司 | 一种焊盘结构 |
| US9269723B2 (en) * | 2014-04-09 | 2016-02-23 | Eastman Kodak Company | Printing electronic circuitry logic |
| JP2016139711A (ja) * | 2015-01-28 | 2016-08-04 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| TWI559465B (zh) * | 2015-08-14 | 2016-11-21 | 恆勁科技股份有限公司 | 封裝基板及其製作方法 |
| US9922947B2 (en) * | 2016-04-28 | 2018-03-20 | Stmicroelectronics S.R.L. | Bonding pad structure over active circuitry |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08213422A (ja) * | 1995-02-07 | 1996-08-20 | Mitsubishi Electric Corp | 半導体装置およびそのボンディングパッド構造 |
| JP3482779B2 (ja) * | 1996-08-20 | 2004-01-06 | セイコーエプソン株式会社 | 半導体装置およびその製造方法 |
| US6143396A (en) * | 1997-05-01 | 2000-11-07 | Texas Instruments Incorporated | System and method for reinforcing a bond pad |
| JP2974022B1 (ja) * | 1998-10-01 | 1999-11-08 | ヤマハ株式会社 | 半導体装置のボンディングパッド構造 |
| JP2000195896A (ja) * | 1998-12-25 | 2000-07-14 | Nec Corp | 半導体装置 |
| TW430935B (en) * | 1999-03-19 | 2001-04-21 | Ind Tech Res Inst | Frame type bonding pad structure having a low parasitic capacitance |
| US6198170B1 (en) * | 1999-12-16 | 2001-03-06 | Conexant Systems, Inc. | Bonding pad and support structure and method for their fabrication |
-
2001
- 2001-05-18 FR FR0106591A patent/FR2824954A1/fr active Pending
-
2002
- 2002-05-06 EP EP02291127A patent/EP1261030A1/fr not_active Withdrawn
- 2002-05-14 US US10/145,388 patent/US6822329B2/en not_active Expired - Lifetime
- 2002-05-17 JP JP2002142521A patent/JP2003031611A/ja active Pending
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