JP2002343566A5 - - Google Patents

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Publication number
JP2002343566A5
JP2002343566A5 JP2001151572A JP2001151572A JP2002343566A5 JP 2002343566 A5 JP2002343566 A5 JP 2002343566A5 JP 2001151572 A JP2001151572 A JP 2001151572A JP 2001151572 A JP2001151572 A JP 2001151572A JP 2002343566 A5 JP2002343566 A5 JP 2002343566A5
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JP
Japan
Prior art keywords
organic compound
emitting device
manufacturing
composition
light
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JP2001151572A
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English (en)
Japanese (ja)
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JP2002343566A (ja
JP3969698B2 (ja
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Priority claimed from JP2001151572A external-priority patent/JP3969698B2/ja
Priority to JP2001151572A priority Critical patent/JP3969698B2/ja
Application filed filed Critical
Priority to TW091109010A priority patent/TW541727B/zh
Priority to US10/147,923 priority patent/US7179756B2/en
Priority to CNB021203024A priority patent/CN100452474C/zh
Publication of JP2002343566A publication Critical patent/JP2002343566A/ja
Publication of JP2002343566A5 publication Critical patent/JP2002343566A5/ja
Priority to US11/707,099 priority patent/US7485584B2/en
Publication of JP3969698B2 publication Critical patent/JP3969698B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001151572A 2001-05-21 2001-05-21 発光装置の作製方法 Expired - Fee Related JP3969698B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001151572A JP3969698B2 (ja) 2001-05-21 2001-05-21 発光装置の作製方法
TW091109010A TW541727B (en) 2001-05-21 2002-04-30 Light emitting device and method of manufacturing thereof
US10/147,923 US7179756B2 (en) 2001-05-21 2002-05-20 Light emitting device and method of manufacturing thereof
CNB021203024A CN100452474C (zh) 2001-05-21 2002-05-21 发光装置及其制造方法
US11/707,099 US7485584B2 (en) 2001-05-21 2007-02-16 Light emitting device and method of manufacturing thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001151572A JP3969698B2 (ja) 2001-05-21 2001-05-21 発光装置の作製方法

Publications (3)

Publication Number Publication Date
JP2002343566A JP2002343566A (ja) 2002-11-29
JP2002343566A5 true JP2002343566A5 (enExample) 2005-09-08
JP3969698B2 JP3969698B2 (ja) 2007-09-05

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Family Applications (1)

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JP2001151572A Expired - Fee Related JP3969698B2 (ja) 2001-05-21 2001-05-21 発光装置の作製方法

Country Status (4)

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US (2) US7179756B2 (enExample)
JP (1) JP3969698B2 (enExample)
CN (1) CN100452474C (enExample)
TW (1) TW541727B (enExample)

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JP6717191B2 (ja) * 2014-04-18 2020-07-01 株式会社ニコン 成膜装置、基板処理装置、および、デバイス製造方法

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