JP2002299591A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JP2002299591A
JP2002299591A JP2001101514A JP2001101514A JP2002299591A JP 2002299591 A JP2002299591 A JP 2002299591A JP 2001101514 A JP2001101514 A JP 2001101514A JP 2001101514 A JP2001101514 A JP 2001101514A JP 2002299591 A JP2002299591 A JP 2002299591A
Authority
JP
Japan
Prior art keywords
buried
insulating film
substrate
region
buried insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001101514A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002299591A5 (enExample
Inventor
Katsu Egashira
克 江頭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2001101514A priority Critical patent/JP2002299591A/ja
Priority to TW091105637A priority patent/TW533554B/zh
Priority to KR1020020016777A priority patent/KR100579780B1/ko
Priority to EP02252283A priority patent/EP1246248A3/en
Priority to CNB021180431A priority patent/CN1260804C/zh
Priority to US10/108,648 priority patent/US6593627B2/en
Publication of JP2002299591A publication Critical patent/JP2002299591A/ja
Publication of JP2002299591A5 publication Critical patent/JP2002299591A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76243—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using silicon implanted buried insulating layers, e.g. oxide layers, i.e. SIMOX techniques
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
JP2001101514A 2001-03-30 2001-03-30 半導体装置 Pending JP2002299591A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2001101514A JP2002299591A (ja) 2001-03-30 2001-03-30 半導体装置
TW091105637A TW533554B (en) 2001-03-30 2002-03-22 Semiconductor wafer and its manufacturing method, semiconductor device and its manufacturing method
KR1020020016777A KR100579780B1 (ko) 2001-03-30 2002-03-27 반도제장치 및 그 제조방법
EP02252283A EP1246248A3 (en) 2001-03-30 2002-03-28 SOI semiconductor wafer and semiconductor device formed therein
CNB021180431A CN1260804C (zh) 2001-03-30 2002-03-29 半导体晶片及其制造方法以及半导体器件及其制造方法
US10/108,648 US6593627B2 (en) 2001-03-30 2002-03-29 SOI semiconductor wafer having different thickness active layers and semiconductor device formed therein

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001101514A JP2002299591A (ja) 2001-03-30 2001-03-30 半導体装置

Publications (2)

Publication Number Publication Date
JP2002299591A true JP2002299591A (ja) 2002-10-11
JP2002299591A5 JP2002299591A5 (enExample) 2005-07-14

Family

ID=18954811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001101514A Pending JP2002299591A (ja) 2001-03-30 2001-03-30 半導体装置

Country Status (6)

Country Link
US (1) US6593627B2 (enExample)
EP (1) EP1246248A3 (enExample)
JP (1) JP2002299591A (enExample)
KR (1) KR100579780B1 (enExample)
CN (1) CN1260804C (enExample)
TW (1) TW533554B (enExample)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007060895A1 (ja) * 2005-11-24 2007-05-31 Sony Corporation 半導体基板、半導体装置および半導体基板の製造方法
US7294539B2 (en) 2005-03-29 2007-11-13 Seiko Epson Corporation Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device
US7316943B2 (en) 2005-07-13 2008-01-08 Seiko Epson Corporation Method for manufacturing semiconductor apparatus having drain/source on insulator
US7351616B2 (en) 2004-07-30 2008-04-01 Seiko Epson Corporation Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
US7368340B2 (en) 2005-03-08 2008-05-06 Seiko Epson Corporation Semiconductor device and method of making semiconductor devices
JP2008521229A (ja) * 2004-11-18 2008-06-19 インターナショナル・ビジネス・マシーンズ・コーポレーション ＳＯＩ基板材料、及び互いに異なる配向をもつＳｉ含有ＳＯＩと下部基板とを形成する方法
US7425484B2 (en) 2005-03-09 2008-09-16 Seiko Epson Corporation Method of manufacturing semiconductor device
US7425495B2 (en) 2005-12-15 2008-09-16 Seiko Epson Corporation Method of manufacturing semiconductor substrate and semiconductor device
US7465641B2 (en) 2005-03-29 2008-12-16 Seiko Epson Corporation Method for manufacturing a semiconductor device
US7541258B2 (en) 2004-12-01 2009-06-02 Seiko Epson Corporation Method of manufacturing semiconductor substrate and method of manufacturing semiconductor device
US7638845B2 (en) 2005-10-03 2009-12-29 Seiko Epson Corporation Semiconductor device with buried conductive layer
JP2010141244A (ja) * 2008-12-15 2010-06-24 Mitsumi Electric Co Ltd 半導体装置
US7847352B2 (en) 2006-01-18 2010-12-07 Seiko Epson Corporation Semiconductor device and method for manufacturing the same
JP2013042106A (ja) * 2011-08-12 2013-02-28 Samsung Electronics Co Ltd 光電集積回路基板及びその製造方法

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW536802B (en) * 2002-04-22 2003-06-11 United Microelectronics Corp Structure and fabrication method of electrostatic discharge protection circuit
FR2847077B1 (fr) * 2002-11-12 2006-02-17 Soitec Silicon On Insulator Composants semi-conducteurs, et notamment de type soi mixtes, et procede de realisation
US6815714B1 (en) 2003-02-20 2004-11-09 National Semiconductor Corporation Conductive structure in a semiconductor material
US6812486B1 (en) * 2003-02-20 2004-11-02 National Semiconductor Corporation Conductive structure and method of forming the structure
DE102004005506B4 (de) 2004-01-30 2009-11-19 Atmel Automotive Gmbh Verfahren zur Erzeugung von aktiven Halbleiterschichten verschiedener Dicke in einem SOI-Wafer
DE102004005951B4 (de) * 2004-02-02 2005-12-29 Atmel Germany Gmbh Verfahren zur Herstellung von vertikal isolierten Bauelementen auf SOI-Material unterschiedlicher Dicke
JP2006073627A (ja) * 2004-08-31 2006-03-16 Toshiba Corp 半導体集積装置
FR2881273B1 (fr) * 2005-01-21 2007-05-04 St Microelectronics Sa Procede de formation d'un substrat semi-conducteur de circuit integre
US7459367B2 (en) * 2005-07-27 2008-12-02 International Business Machines Corporation Method of forming a vertical P-N junction device
US7666721B2 (en) 2006-03-15 2010-02-23 International Business Machines Corporation SOI substrates and SOI devices, and methods for forming the same
US7285480B1 (en) * 2006-04-07 2007-10-23 International Business Machines Corporation Integrated circuit chip with FETs having mixed body thicknesses and method of manufacture thereof
US7812367B2 (en) * 2008-10-15 2010-10-12 Semiconductor Components Industries, Llc Two terminal low capacitance multi-channel ESD device
CN102986011B (zh) * 2010-08-12 2016-05-11 富士电机株式会社 半导体器件的制造方法
US10115587B2 (en) * 2012-02-23 2018-10-30 Fuji Electric Co., Ltd. Method of manufacturing semiconductor device
JP6034268B2 (ja) * 2013-09-13 2016-11-30 株式会社東芝 半導体装置
JP6173988B2 (ja) * 2014-08-28 2017-08-02 株式会社ジャパンディスプレイ 電極基板の製造方法、電極基板、表示装置および入力装置
EP3742476B1 (en) * 2019-05-20 2024-11-06 Infineon Technologies AG Method of implanting an implant species into a substrate at different depths
CN111554186B (zh) * 2020-04-29 2022-05-17 昆山国显光电有限公司 离型层结构和显示面板的制备方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102809A (en) * 1990-10-11 1992-04-07 Texas Instruments Incorporated SOI BICMOS process
JPH0685177A (ja) * 1992-08-31 1994-03-25 Hitachi Ltd 半導体集積回路装置
JP3191835B2 (ja) * 1993-05-17 2001-07-23 住友電気工業株式会社 光電子集積回路
US5364800A (en) * 1993-06-24 1994-11-15 Texas Instruments Incorporated Varying the thickness of the surface silicon layer in a silicon-on-insulator substrate
JP3139904B2 (ja) * 1993-12-28 2001-03-05 新日本製鐵株式会社 半導体基板の製造方法および製造装置
JP2806286B2 (ja) * 1995-02-07 1998-09-30 日本電気株式会社 半導体装置
US5828112A (en) * 1995-09-18 1998-10-27 Kabushiki Kaisha Toshiba Semiconductor device incorporating an output element having a current-detecting section
US5708287A (en) * 1995-11-29 1998-01-13 Kabushiki Kaisha Toshiba Power semiconductor device having an active layer
JPH11163125A (ja) * 1997-12-01 1999-06-18 Hitachi Ltd Ｓｏｉ基板及びｓｏｉ基板の製造方法
JP2000164881A (ja) * 1998-11-30 2000-06-16 Seiko Instruments Inc 半導体装置とその製造方法

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7956414B2 (en) 2004-07-30 2011-06-07 Seiko Epson Corporation Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate, and method for manufacturing semiconductor device
US7351616B2 (en) 2004-07-30 2008-04-01 Seiko Epson Corporation Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
JP2008521229A (ja) * 2004-11-18 2008-06-19 インターナショナル・ビジネス・マシーンズ・コーポレーション ＳＯＩ基板材料、及び互いに異なる配向をもつＳｉ含有ＳＯＩと下部基板とを形成する方法
US7541258B2 (en) 2004-12-01 2009-06-02 Seiko Epson Corporation Method of manufacturing semiconductor substrate and method of manufacturing semiconductor device
US7368340B2 (en) 2005-03-08 2008-05-06 Seiko Epson Corporation Semiconductor device and method of making semiconductor devices
US7425484B2 (en) 2005-03-09 2008-09-16 Seiko Epson Corporation Method of manufacturing semiconductor device
US7465641B2 (en) 2005-03-29 2008-12-16 Seiko Epson Corporation Method for manufacturing a semiconductor device
US7294539B2 (en) 2005-03-29 2007-11-13 Seiko Epson Corporation Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device
US7316943B2 (en) 2005-07-13 2008-01-08 Seiko Epson Corporation Method for manufacturing semiconductor apparatus having drain/source on insulator
US7638845B2 (en) 2005-10-03 2009-12-29 Seiko Epson Corporation Semiconductor device with buried conductive layer
WO2007060895A1 (ja) * 2005-11-24 2007-05-31 Sony Corporation 半導体基板、半導体装置および半導体基板の製造方法
US7994574B2 (en) 2005-11-24 2011-08-09 Sony Corporation Semiconductor substrate, semiconductor device, and method for manufacturing the semiconductor device
US7425495B2 (en) 2005-12-15 2008-09-16 Seiko Epson Corporation Method of manufacturing semiconductor substrate and semiconductor device
US7847352B2 (en) 2006-01-18 2010-12-07 Seiko Epson Corporation Semiconductor device and method for manufacturing the same
JP2010141244A (ja) * 2008-12-15 2010-06-24 Mitsumi Electric Co Ltd 半導体装置
JP2013042106A (ja) * 2011-08-12 2013-02-28 Samsung Electronics Co Ltd 光電集積回路基板及びその製造方法

Also Published As

Publication number Publication date
EP1246248A2 (en) 2002-10-02
US6593627B2 (en) 2003-07-15
US20020142507A1 (en) 2002-10-03
TW533554B (en) 2003-05-21
CN1379464A (zh) 2002-11-13
CN1260804C (zh) 2006-06-21
EP1246248A3 (en) 2003-12-10
KR20020077158A (ko) 2002-10-11
KR100579780B1 (ko) 2006-05-15

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