JP2001338578A5 - - Google Patents

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Publication number
JP2001338578A5
JP2001338578A5 JP2000298028A JP2000298028A JP2001338578A5 JP 2001338578 A5 JP2001338578 A5 JP 2001338578A5 JP 2000298028 A JP2000298028 A JP 2000298028A JP 2000298028 A JP2000298028 A JP 2000298028A JP 2001338578 A5 JP2001338578 A5 JP 2001338578A5
Authority
JP
Japan
Prior art keywords
chamber
panel
vacuum atmosphere
processing chamber
image display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000298028A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001338578A (ja
JP3754883B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2000298028A external-priority patent/JP3754883B2/ja
Priority to JP2000298028A priority Critical patent/JP3754883B2/ja
Priority to US09/813,138 priority patent/US6634916B2/en
Priority to DE60142144T priority patent/DE60142144D1/de
Priority to TW090106790A priority patent/TW503447B/zh
Priority to AT01302674T priority patent/ATE468600T1/de
Priority to EP01302674A priority patent/EP1139376B1/en
Priority to KR10-2001-0015119A priority patent/KR100472924B1/ko
Publication of JP2001338578A publication Critical patent/JP2001338578A/ja
Priority to US10/345,492 priority patent/US6672928B2/en
Publication of JP2001338578A5 publication Critical patent/JP2001338578A5/ja
Publication of JP3754883B2 publication Critical patent/JP3754883B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000298028A 2000-03-23 2000-09-29 画像表示装置の製造法 Expired - Fee Related JP3754883B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2000298028A JP3754883B2 (ja) 2000-03-23 2000-09-29 画像表示装置の製造法
US09/813,138 US6634916B2 (en) 2000-03-23 2001-03-21 Manufacturing method and manufacturing apparatus of image displaying apparatus
DE60142144T DE60142144D1 (de) 2000-03-23 2001-03-22 Verfahren und Vorrichtung zur Herstellung eines Bildanzeigegerätes
TW090106790A TW503447B (en) 2000-03-23 2001-03-22 Manufacturing method and manufacturing apparatus of image displaying apparatus
AT01302674T ATE468600T1 (de) 2000-03-23 2001-03-22 Verfahren und vorrichtung zur herstellung eines bildanzeigegerätes
EP01302674A EP1139376B1 (en) 2000-03-23 2001-03-22 Manufacturing method and manufacturing apparatus of image displaying apparatus
KR10-2001-0015119A KR100472924B1 (ko) 2000-03-23 2001-03-23 화상표시장치의 제조방법 및 제조장치
US10/345,492 US6672928B2 (en) 2000-03-23 2003-01-17 Manufacturing method and manufacturing apparatus of image displaying apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-81482 2000-03-23
JP2000081482 2000-03-23
JP2000298028A JP3754883B2 (ja) 2000-03-23 2000-09-29 画像表示装置の製造法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005315796A Division JP4408110B2 (ja) 2000-03-23 2005-10-31 画像表示装置の製造方法

Publications (3)

Publication Number Publication Date
JP2001338578A JP2001338578A (ja) 2001-12-07
JP2001338578A5 true JP2001338578A5 (https=) 2005-03-17
JP3754883B2 JP3754883B2 (ja) 2006-03-15

Family

ID=26588138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000298028A Expired - Fee Related JP3754883B2 (ja) 2000-03-23 2000-09-29 画像表示装置の製造法

Country Status (7)

Country Link
US (2) US6634916B2 (https=)
EP (1) EP1139376B1 (https=)
JP (1) JP3754883B2 (https=)
KR (1) KR100472924B1 (https=)
AT (1) ATE468600T1 (https=)
DE (1) DE60142144D1 (https=)
TW (1) TW503447B (https=)

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JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US6848961B2 (en) * 2000-03-16 2005-02-01 Canon Kabushiki Kaisha Method and apparatus for manufacturing image displaying apparatus
CN1213389C (zh) 2001-08-31 2005-08-03 佳能株式会社 图像显示装置及其制造方法
US7052354B2 (en) * 2002-08-01 2006-05-30 Canon Kabushiki Kaisha Method for producing spacer and spacer
US20050130546A1 (en) * 2002-08-05 2005-06-16 Masakuni Osoegawa Manufacturing method and manufacturing apparatus for image display device
JPWO2004013886A1 (ja) * 2002-08-05 2006-09-21 株式会社東芝 画像表示装置の製造方法および製造装置
TWI292350B (en) * 2004-02-10 2008-01-11 Sharp Kk Cleaning device of board and cleaning method, flat display panel, mounting equipment of electronic parts and mounting method
KR101176056B1 (ko) * 2004-12-01 2012-08-24 엘리노 인더스트리에-오펜바우 게엠바하 평면 모니터 등을 제작하기 위한 유닛을 제조하는 방법 및 장치, 및 이러한 유닛 내부의 중간 공간을 진공화?충전하는 장치
US7530875B2 (en) * 2005-11-28 2009-05-12 Motorola, Inc. In situ cleaning process for field effect device spacers
US8002602B2 (en) * 2008-01-31 2011-08-23 Canon Kabushiki Kaisha Manufacturing method of vacuum airtight container
TWI471790B (zh) * 2010-02-03 2015-02-01 Wintek Corp 電容式觸控感應器及其製造方法及電容式觸控面板

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FR2705163B1 (fr) * 1993-05-12 1995-07-28 Pixel Int Sa Procede de mise en vide et de scellement d'ecrans plats de visualisation.
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US6309272B1 (en) * 1997-12-26 2001-10-30 Canon Kabushiki Kaisha Method of making an image forming apparatus
KR100465733B1 (ko) * 1998-01-17 2005-05-27 엘지전자 주식회사 Fed제조 공정중 진공 페키징 방법 및 그에 따른 패널 구조
JP3323853B2 (ja) * 1999-02-25 2002-09-09 キヤノン株式会社 電子放出素子、電子源及び画像形成装置の製造方法
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KR100491913B1 (ko) * 1999-03-31 2005-05-27 가부시끼가이샤 도시바 평판형 화상 표시 장치의 제조 방법 및 평판형 화상 표시장치
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JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法

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