TW503447B - Manufacturing method and manufacturing apparatus of image displaying apparatus - Google Patents
Manufacturing method and manufacturing apparatus of image displaying apparatus Download PDFInfo
- Publication number
- TW503447B TW503447B TW090106790A TW90106790A TW503447B TW 503447 B TW503447 B TW 503447B TW 090106790 A TW090106790 A TW 090106790A TW 90106790 A TW90106790 A TW 90106790A TW 503447 B TW503447 B TW 503447B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- image display
- display device
- processing chamber
- scope
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title description 133
- 230000000593 degrading effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 97
- 238000004140 cleaning Methods 0.000 description 70
- 239000003566 sealing material Substances 0.000 description 54
- 238000001816 cooling Methods 0.000 description 39
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 33
- 230000007246 mechanism Effects 0.000 description 32
- 239000000758 substrate Substances 0.000 description 29
- 238000002844 melting Methods 0.000 description 24
- 230000008018 melting Effects 0.000 description 24
- 230000005284 excitation Effects 0.000 description 22
- 230000001678 irradiating effect Effects 0.000 description 22
- 238000010438 heat treatment Methods 0.000 description 20
- 229910052698 phosphorus Inorganic materials 0.000 description 18
- 239000011574 phosphorus Substances 0.000 description 18
- 238000005247 gettering Methods 0.000 description 13
- 230000002079 cooperative effect Effects 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 238000007789 sealing Methods 0.000 description 9
- 230000006837 decompression Effects 0.000 description 8
- 239000005373 porous glass Substances 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 6
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 6
- 229910001092 metal group alloy Inorganic materials 0.000 description 6
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000003434 inspiratory effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 241000272201 Columbiformes Species 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010875 treated wood Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/46—Machines having sequentially arranged operating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/46—Machines having sequentially arranged operating stations
- H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/01—Generalised techniques
- H01J2209/017—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/38—Control of maintenance of pressure in the vessel
- H01J2209/385—Gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/86—Vessels
- H01J2329/8625—Spacing members
- H01J2329/864—Spacing members characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/86—Vessels
- H01J2329/8625—Spacing members
- H01J2329/8645—Spacing members with coatings on the lateral surfaces thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/86—Vessels
- H01J2329/8625—Spacing members
- H01J2329/865—Connection of the spacing members to the substrates or electrodes
- H01J2329/8655—Conductive or resistive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/86—Vessels
- H01J2329/8625—Spacing members
- H01J2329/865—Connection of the spacing members to the substrates or electrodes
- H01J2329/866—Adhesives
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Spinning Or Twisting Of Yarns (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000081482 | 2000-03-23 | ||
| JP2000298028A JP3754883B2 (ja) | 2000-03-23 | 2000-09-29 | 画像表示装置の製造法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW503447B true TW503447B (en) | 2002-09-21 |
Family
ID=26588138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090106790A TW503447B (en) | 2000-03-23 | 2001-03-22 | Manufacturing method and manufacturing apparatus of image displaying apparatus |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US6634916B2 (https=) |
| EP (1) | EP1139376B1 (https=) |
| JP (1) | JP3754883B2 (https=) |
| KR (1) | KR100472924B1 (https=) |
| AT (1) | ATE468600T1 (https=) |
| DE (1) | DE60142144D1 (https=) |
| TW (1) | TW503447B (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100491913B1 (ko) * | 1999-03-31 | 2005-05-27 | 가부시끼가이샤 도시바 | 평판형 화상 표시 장치의 제조 방법 및 평판형 화상 표시장치 |
| JP3754859B2 (ja) * | 2000-02-16 | 2006-03-15 | キヤノン株式会社 | 画像表示装置の製造法 |
| US6848961B2 (en) * | 2000-03-16 | 2005-02-01 | Canon Kabushiki Kaisha | Method and apparatus for manufacturing image displaying apparatus |
| CN1213389C (zh) | 2001-08-31 | 2005-08-03 | 佳能株式会社 | 图像显示装置及其制造方法 |
| US7052354B2 (en) * | 2002-08-01 | 2006-05-30 | Canon Kabushiki Kaisha | Method for producing spacer and spacer |
| US20050130546A1 (en) * | 2002-08-05 | 2005-06-16 | Masakuni Osoegawa | Manufacturing method and manufacturing apparatus for image display device |
| JPWO2004013886A1 (ja) * | 2002-08-05 | 2006-09-21 | 株式会社東芝 | 画像表示装置の製造方法および製造装置 |
| TWI292350B (en) * | 2004-02-10 | 2008-01-11 | Sharp Kk | Cleaning device of board and cleaning method, flat display panel, mounting equipment of electronic parts and mounting method |
| KR101176056B1 (ko) * | 2004-12-01 | 2012-08-24 | 엘리노 인더스트리에-오펜바우 게엠바하 | 평면 모니터 등을 제작하기 위한 유닛을 제조하는 방법 및 장치, 및 이러한 유닛 내부의 중간 공간을 진공화?충전하는 장치 |
| US7530875B2 (en) * | 2005-11-28 | 2009-05-12 | Motorola, Inc. | In situ cleaning process for field effect device spacers |
| US8002602B2 (en) * | 2008-01-31 | 2011-08-23 | Canon Kabushiki Kaisha | Manufacturing method of vacuum airtight container |
| TWI471790B (zh) * | 2010-02-03 | 2015-02-01 | Wintek Corp | 電容式觸控感應器及其製造方法及電容式觸控面板 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4607593A (en) * | 1983-12-23 | 1986-08-26 | U.S. Philips Corporation | Apparatus for processing articles in a controlled environment |
| JPS6171533A (ja) * | 1984-09-12 | 1986-04-12 | Futaba Corp | 表示管の製造方法 |
| US4904895A (en) | 1987-05-06 | 1990-02-27 | Canon Kabushiki Kaisha | Electron emission device |
| EP0299461B1 (en) | 1987-07-15 | 1995-05-10 | Canon Kabushiki Kaisha | Electron-emitting device |
| US5872541A (en) | 1987-07-15 | 1999-02-16 | Canon Kabushiki Kaisha | Method for displaying images with electron emitting device |
| FR2705163B1 (fr) * | 1993-05-12 | 1995-07-28 | Pixel Int Sa | Procede de mise en vide et de scellement d'ecrans plats de visualisation. |
| CA2137721C (en) | 1993-12-14 | 2000-10-17 | Hidetoshi Suzuki | Electron source and production thereof, and image-forming apparatus and production thereof |
| JP3062990B2 (ja) * | 1994-07-12 | 2000-07-12 | キヤノン株式会社 | 電子放出素子及びそれを用いた電子源並びに画像形成装置の製造方法と、電子放出素子の活性化装置 |
| EP0738420B1 (fr) * | 1994-11-09 | 1997-12-17 | Pixel International S.A. | PROCEDE et installation d'ASSEMBLAGE D'UN ECRAN PLAT DE VISUALISATION |
| US5653838A (en) * | 1995-08-24 | 1997-08-05 | Texas Instruments Incorporated | Glass heating and sealing system |
| US5697825A (en) * | 1995-09-29 | 1997-12-16 | Micron Display Technology, Inc. | Method for evacuating and sealing field emission displays |
| EP0782169A1 (en) * | 1995-12-29 | 1997-07-02 | STMicroelectronics, Inc. | A field emission display |
| US5827102A (en) * | 1996-05-13 | 1998-10-27 | Micron Technology, Inc. | Low temperature method for evacuating and sealing field emission displays |
| JPH1040818A (ja) * | 1996-07-19 | 1998-02-13 | Dainippon Printing Co Ltd | プラズマディスプレイパネル及びその製造方法 |
| US6109994A (en) * | 1996-12-12 | 2000-08-29 | Candescent Technologies Corporation | Gap jumping to seal structure, typically using combination of vacuum and non-vacuum environments |
| US5820435A (en) * | 1996-12-12 | 1998-10-13 | Candescent Technologies Corporation | Gap jumping to seal structure including tacking of structure |
| US6139390A (en) * | 1996-12-12 | 2000-10-31 | Candescent Technologies Corporation | Local energy activation of getter typically in environment below room pressure |
| KR100240289B1 (ko) * | 1997-06-24 | 2000-01-15 | 이종덕 | 전계방출형 디스플레이용 초고진공 실장방법 및 장치 |
| JPH11135018A (ja) | 1997-08-29 | 1999-05-21 | Canon Inc | 画像形成装置の製造方法、製造装置および画像形成装置 |
| JP3619024B2 (ja) * | 1997-09-16 | 2005-02-09 | キヤノン株式会社 | 電子源の製造方法及び画像形成装置の製造方法 |
| DE69839966D1 (de) * | 1997-10-01 | 2008-10-16 | Complete Multilayer Solutions | Anzeigevorrichtung |
| KR19990053755A (ko) * | 1997-12-24 | 1999-07-15 | 김영환 | 플라즈마 디스플레이 패널의 제조장치 및 이를 이용한 플라즈마 디스플레이 패널의 제조 방법 |
| KR100255129B1 (ko) * | 1997-12-26 | 2000-05-01 | 박호군 | 유리기판 사이의 접합을 이용한 전계방출표시소자 진공 실장 장치 및 방법 |
| US6309272B1 (en) * | 1997-12-26 | 2001-10-30 | Canon Kabushiki Kaisha | Method of making an image forming apparatus |
| KR100465733B1 (ko) * | 1998-01-17 | 2005-05-27 | 엘지전자 주식회사 | Fed제조 공정중 진공 페키징 방법 및 그에 따른 패널 구조 |
| JP3323853B2 (ja) * | 1999-02-25 | 2002-09-09 | キヤノン株式会社 | 電子放出素子、電子源及び画像形成装置の製造方法 |
| KR100287732B1 (ko) * | 1999-03-10 | 2001-04-16 | 구자홍 | 플라즈마 디스플레이 패널의 프론트/리어 패널 결합방법 |
| KR100491913B1 (ko) * | 1999-03-31 | 2005-05-27 | 가부시끼가이샤 도시바 | 평판형 화상 표시 장치의 제조 방법 및 평판형 화상 표시장치 |
| US6049168A (en) * | 1999-06-04 | 2000-04-11 | Litton Systems, Inc. | Method and system for manufacturing microchannel plates |
| JP3754859B2 (ja) * | 2000-02-16 | 2006-03-15 | キヤノン株式会社 | 画像表示装置の製造法 |
-
2000
- 2000-09-29 JP JP2000298028A patent/JP3754883B2/ja not_active Expired - Fee Related
-
2001
- 2001-03-21 US US09/813,138 patent/US6634916B2/en not_active Expired - Fee Related
- 2001-03-22 EP EP01302674A patent/EP1139376B1/en not_active Expired - Lifetime
- 2001-03-22 DE DE60142144T patent/DE60142144D1/de not_active Expired - Lifetime
- 2001-03-22 AT AT01302674T patent/ATE468600T1/de not_active IP Right Cessation
- 2001-03-22 TW TW090106790A patent/TW503447B/zh not_active IP Right Cessation
- 2001-03-23 KR KR10-2001-0015119A patent/KR100472924B1/ko not_active Expired - Fee Related
-
2003
- 2003-01-17 US US10/345,492 patent/US6672928B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1139376A3 (en) | 2004-03-17 |
| EP1139376A2 (en) | 2001-10-04 |
| JP2001338578A (ja) | 2001-12-07 |
| US20030148696A1 (en) | 2003-08-07 |
| US6672928B2 (en) | 2004-01-06 |
| EP1139376B1 (en) | 2010-05-19 |
| DE60142144D1 (de) | 2010-07-01 |
| JP3754883B2 (ja) | 2006-03-15 |
| KR20010090524A (ko) | 2001-10-18 |
| ATE468600T1 (de) | 2010-06-15 |
| US20020004354A1 (en) | 2002-01-10 |
| US6634916B2 (en) | 2003-10-21 |
| KR100472924B1 (ko) | 2005-03-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |