DE60142144D1 - Verfahren und Vorrichtung zur Herstellung eines Bildanzeigegerätes - Google Patents

Verfahren und Vorrichtung zur Herstellung eines Bildanzeigegerätes

Info

Publication number
DE60142144D1
DE60142144D1 DE60142144T DE60142144T DE60142144D1 DE 60142144 D1 DE60142144 D1 DE 60142144D1 DE 60142144 T DE60142144 T DE 60142144T DE 60142144 T DE60142144 T DE 60142144T DE 60142144 D1 DE60142144 D1 DE 60142144D1
Authority
DE
Germany
Prior art keywords
image display
processing
producing
getter
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60142144T
Other languages
English (en)
Inventor
Tetsuya Kaneko
Kohei Nakata
Toshihiko Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60142144D1 publication Critical patent/DE60142144D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/94Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46Machines having sequentially arranged operating stations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46Machines having sequentially arranged operating stations
    • H01J9/48Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01Generalised techniques
    • H01J2209/017Cleaning
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26Sealing parts of the vessel to provide a vacuum enclosure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/38Control of maintenance of pressure in the vessel
    • H01J2209/385Gettering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/864Spacing members characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/8645Spacing members with coatings on the lateral surfaces thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/865Connection of the spacing members to the substrates or electrodes
    • H01J2329/8655Conductive or resistive layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/865Connection of the spacing members to the substrates or electrodes
    • H01J2329/866Adhesives

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
DE60142144T 2000-03-23 2001-03-22 Verfahren und Vorrichtung zur Herstellung eines Bildanzeigegerätes Expired - Lifetime DE60142144D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000081482 2000-03-23
JP2000298028A JP3754883B2 (ja) 2000-03-23 2000-09-29 画像表示装置の製造法

Publications (1)

Publication Number Publication Date
DE60142144D1 true DE60142144D1 (de) 2010-07-01

Family

ID=26588138

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60142144T Expired - Lifetime DE60142144D1 (de) 2000-03-23 2001-03-22 Verfahren und Vorrichtung zur Herstellung eines Bildanzeigegerätes

Country Status (7)

Country Link
US (2) US6634916B2 (de)
EP (1) EP1139376B1 (de)
JP (1) JP3754883B2 (de)
KR (1) KR100472924B1 (de)
AT (1) ATE468600T1 (de)
DE (1) DE60142144D1 (de)
TW (1) TW503447B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1168410A4 (de) * 1999-03-31 2006-08-02 Toshiba Kk Herstellungsverfahren einer flachen bildanzeige und flachbildanzeigevorrichtung
JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法
KR100448663B1 (ko) * 2000-03-16 2004-09-13 캐논 가부시끼가이샤 화상표시장치의 제조방법 및 제조장치
CN1213389C (zh) * 2001-08-31 2005-08-03 佳能株式会社 图像显示装置及其制造方法
US7052354B2 (en) * 2002-08-01 2006-05-30 Canon Kabushiki Kaisha Method for producing spacer and spacer
JPWO2004013886A1 (ja) * 2002-08-05 2006-09-21 株式会社東芝 画像表示装置の製造方法および製造装置
US20050130546A1 (en) * 2002-08-05 2005-06-16 Masakuni Osoegawa Manufacturing method and manufacturing apparatus for image display device
TWI292350B (en) * 2004-02-10 2008-01-11 Sharp Kk Cleaning device of board and cleaning method, flat display panel, mounting equipment of electronic parts and mounting method
KR101176056B1 (ko) * 2004-12-01 2012-08-24 엘리노 인더스트리에-오펜바우 게엠바하 평면 모니터 등을 제작하기 위한 유닛을 제조하는 방법 및 장치, 및 이러한 유닛 내부의 중간 공간을 진공화?충전하는 장치
US7530875B2 (en) * 2005-11-28 2009-05-12 Motorola, Inc. In situ cleaning process for field effect device spacers
US8002602B2 (en) * 2008-01-31 2011-08-23 Canon Kabushiki Kaisha Manufacturing method of vacuum airtight container
TWI471790B (zh) * 2010-02-03 2015-02-01 Wintek Corp 電容式觸控感應器及其製造方法及電容式觸控面板

Family Cites Families (30)

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US4607593A (en) * 1983-12-23 1986-08-26 U.S. Philips Corporation Apparatus for processing articles in a controlled environment
JPS6171533A (ja) * 1984-09-12 1986-04-12 Futaba Corp 表示管の製造方法
US4904895A (en) 1987-05-06 1990-02-27 Canon Kabushiki Kaisha Electron emission device
DE3853744T2 (de) 1987-07-15 1996-01-25 Canon Kk Elektronenemittierende Vorrichtung.
US5749763A (en) 1987-07-15 1998-05-12 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulted from electrodes
FR2705163B1 (fr) * 1993-05-12 1995-07-28 Pixel Int Sa Procede de mise en vide et de scellement d'ecrans plats de visualisation.
CA2137721C (en) 1993-12-14 2000-10-17 Hidetoshi Suzuki Electron source and production thereof, and image-forming apparatus and production thereof
JP3062990B2 (ja) * 1994-07-12 2000-07-12 キヤノン株式会社 電子放出素子及びそれを用いた電子源並びに画像形成装置の製造方法と、電子放出素子の活性化装置
US5876260A (en) * 1994-11-09 1999-03-02 Pixtech Sa Method for assembling a flat display screen
US5653838A (en) * 1995-08-24 1997-08-05 Texas Instruments Incorporated Glass heating and sealing system
US5697825A (en) * 1995-09-29 1997-12-16 Micron Display Technology, Inc. Method for evacuating and sealing field emission displays
EP0782169A1 (de) * 1995-12-29 1997-07-02 STMicroelectronics, Inc. Feldemissionsanzeigevorrichtung
US5827102A (en) * 1996-05-13 1998-10-27 Micron Technology, Inc. Low temperature method for evacuating and sealing field emission displays
JPH1040818A (ja) * 1996-07-19 1998-02-13 Dainippon Printing Co Ltd プラズマディスプレイパネル及びその製造方法
US5820435A (en) * 1996-12-12 1998-10-13 Candescent Technologies Corporation Gap jumping to seal structure including tacking of structure
US6139390A (en) * 1996-12-12 2000-10-31 Candescent Technologies Corporation Local energy activation of getter typically in environment below room pressure
US6109994A (en) * 1996-12-12 2000-08-29 Candescent Technologies Corporation Gap jumping to seal structure, typically using combination of vacuum and non-vacuum environments
KR100240289B1 (ko) * 1997-06-24 2000-01-15 이종덕 전계방출형 디스플레이용 초고진공 실장방법 및 장치
JPH11135018A (ja) 1997-08-29 1999-05-21 Canon Inc 画像形成装置の製造方法、製造装置および画像形成装置
JP3619024B2 (ja) * 1997-09-16 2005-02-09 キヤノン株式会社 電子源の製造方法及び画像形成装置の製造方法
GB2346008B (en) * 1997-10-01 2002-04-10 Complete Multilayer Solutions Visual display
KR19990053755A (ko) * 1997-12-24 1999-07-15 김영환 플라즈마 디스플레이 패널의 제조장치 및 이를 이용한 플라즈마 디스플레이 패널의 제조 방법
US6309272B1 (en) * 1997-12-26 2001-10-30 Canon Kabushiki Kaisha Method of making an image forming apparatus
KR100255129B1 (ko) * 1997-12-26 2000-05-01 박호군 유리기판 사이의 접합을 이용한 전계방출표시소자 진공 실장 장치 및 방법
KR100465733B1 (ko) * 1998-01-17 2005-05-27 엘지전자 주식회사 Fed제조 공정중 진공 페키징 방법 및 그에 따른 패널 구조
EP1032013B1 (de) * 1999-02-25 2007-07-11 Canon Kabushiki Kaisha Herstellungsverfahren einer Elektronenemittierenden Vorrichtung
KR100287732B1 (ko) * 1999-03-10 2001-04-16 구자홍 플라즈마 디스플레이 패널의 프론트/리어 패널 결합방법
EP1168410A4 (de) * 1999-03-31 2006-08-02 Toshiba Kk Herstellungsverfahren einer flachen bildanzeige und flachbildanzeigevorrichtung
US6049168A (en) * 1999-06-04 2000-04-11 Litton Systems, Inc. Method and system for manufacturing microchannel plates
JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法

Also Published As

Publication number Publication date
US20020004354A1 (en) 2002-01-10
EP1139376A3 (de) 2004-03-17
KR100472924B1 (ko) 2005-03-08
JP2001338578A (ja) 2001-12-07
KR20010090524A (ko) 2001-10-18
EP1139376A2 (de) 2001-10-04
US6634916B2 (en) 2003-10-21
US6672928B2 (en) 2004-01-06
ATE468600T1 (de) 2010-06-15
EP1139376B1 (de) 2010-05-19
US20030148696A1 (en) 2003-08-07
JP3754883B2 (ja) 2006-03-15
TW503447B (en) 2002-09-21

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