KR100472924B1 - 화상표시장치의 제조방법 및 제조장치 - Google Patents

화상표시장치의 제조방법 및 제조장치 Download PDF

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Publication number
KR100472924B1
KR100472924B1 KR10-2001-0015119A KR20010015119A KR100472924B1 KR 100472924 B1 KR100472924 B1 KR 100472924B1 KR 20010015119 A KR20010015119 A KR 20010015119A KR 100472924 B1 KR100472924 B1 KR 100472924B1
Authority
KR
South Korea
Prior art keywords
chamber
getter
processing chamber
manufacturing
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2001-0015119A
Other languages
English (en)
Korean (ko)
Other versions
KR20010090524A (ko
Inventor
카네코테츠야
나카타코해이
미야자키토시히코
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20010090524A publication Critical patent/KR20010090524A/ko
Application granted granted Critical
Publication of KR100472924B1 publication Critical patent/KR100472924B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/017—Cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/38—Control of maintenance of pressure in the vessel
    • H01J2209/385—Gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/864—Spacing members characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/8645—Spacing members with coatings on the lateral surfaces thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/865—Connection of the spacing members to the substrates or electrodes
    • H01J2329/8655—Conductive or resistive layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/865—Connection of the spacing members to the substrates or electrodes
    • H01J2329/866—Adhesives

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR10-2001-0015119A 2000-03-23 2001-03-23 화상표시장치의 제조방법 및 제조장치 Expired - Fee Related KR100472924B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000-081482 2000-03-23
JP2000081482 2000-03-23
JP2000298028A JP3754883B2 (ja) 2000-03-23 2000-09-29 画像表示装置の製造法
JP2000-298028 2000-09-29

Publications (2)

Publication Number Publication Date
KR20010090524A KR20010090524A (ko) 2001-10-18
KR100472924B1 true KR100472924B1 (ko) 2005-03-08

Family

ID=26588138

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0015119A Expired - Fee Related KR100472924B1 (ko) 2000-03-23 2001-03-23 화상표시장치의 제조방법 및 제조장치

Country Status (7)

Country Link
US (2) US6634916B2 (https=)
EP (1) EP1139376B1 (https=)
JP (1) JP3754883B2 (https=)
KR (1) KR100472924B1 (https=)
AT (1) ATE468600T1 (https=)
DE (1) DE60142144D1 (https=)
TW (1) TW503447B (https=)

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* Cited by examiner, † Cited by third party
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KR100491913B1 (ko) * 1999-03-31 2005-05-27 가부시끼가이샤 도시바 평판형 화상 표시 장치의 제조 방법 및 평판형 화상 표시장치
JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US6848961B2 (en) * 2000-03-16 2005-02-01 Canon Kabushiki Kaisha Method and apparatus for manufacturing image displaying apparatus
CN1213389C (zh) 2001-08-31 2005-08-03 佳能株式会社 图像显示装置及其制造方法
US7052354B2 (en) * 2002-08-01 2006-05-30 Canon Kabushiki Kaisha Method for producing spacer and spacer
US20050130546A1 (en) * 2002-08-05 2005-06-16 Masakuni Osoegawa Manufacturing method and manufacturing apparatus for image display device
JPWO2004013886A1 (ja) * 2002-08-05 2006-09-21 株式会社東芝 画像表示装置の製造方法および製造装置
TWI292350B (en) * 2004-02-10 2008-01-11 Sharp Kk Cleaning device of board and cleaning method, flat display panel, mounting equipment of electronic parts and mounting method
KR101176056B1 (ko) * 2004-12-01 2012-08-24 엘리노 인더스트리에-오펜바우 게엠바하 평면 모니터 등을 제작하기 위한 유닛을 제조하는 방법 및 장치, 및 이러한 유닛 내부의 중간 공간을 진공화?충전하는 장치
US7530875B2 (en) * 2005-11-28 2009-05-12 Motorola, Inc. In situ cleaning process for field effect device spacers
US8002602B2 (en) * 2008-01-31 2011-08-23 Canon Kabushiki Kaisha Manufacturing method of vacuum airtight container
TWI471790B (zh) * 2010-02-03 2015-02-01 Wintek Corp 電容式觸控感應器及其製造方法及電容式觸控面板

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KR970071952A (ko) * 1997-06-24 1997-11-07 이종덕 전계방출형 디스플레이용 초고진공 실장방법 및 장치
JPH1040818A (ja) * 1996-07-19 1998-02-13 Dainippon Printing Co Ltd プラズマディスプレイパネル及びその製造方法
KR19990053755A (ko) * 1997-12-24 1999-07-15 김영환 플라즈마 디스플레이 패널의 제조장치 및 이를 이용한 플라즈마 디스플레이 패널의 제조 방법
KR19990065843A (ko) * 1998-01-17 1999-08-05 구자홍 Fed제조 공정중 진공 페키징 방법 및 그에 따른 패널 구조
KR20000059971A (ko) * 1999-03-10 2000-10-16 구자홍 플라즈마 디스플레이 패널의 프론트/리어 패널 결합방법

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JPS6171533A (ja) * 1984-09-12 1986-04-12 Futaba Corp 表示管の製造方法
US4904895A (en) 1987-05-06 1990-02-27 Canon Kabushiki Kaisha Electron emission device
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US5872541A (en) 1987-07-15 1999-02-16 Canon Kabushiki Kaisha Method for displaying images with electron emitting device
FR2705163B1 (fr) * 1993-05-12 1995-07-28 Pixel Int Sa Procede de mise en vide et de scellement d'ecrans plats de visualisation.
CA2137721C (en) 1993-12-14 2000-10-17 Hidetoshi Suzuki Electron source and production thereof, and image-forming apparatus and production thereof
JP3062990B2 (ja) * 1994-07-12 2000-07-12 キヤノン株式会社 電子放出素子及びそれを用いた電子源並びに画像形成装置の製造方法と、電子放出素子の活性化装置
EP0738420B1 (fr) * 1994-11-09 1997-12-17 Pixel International S.A. PROCEDE et installation d'ASSEMBLAGE D'UN ECRAN PLAT DE VISUALISATION
US5653838A (en) * 1995-08-24 1997-08-05 Texas Instruments Incorporated Glass heating and sealing system
US5697825A (en) * 1995-09-29 1997-12-16 Micron Display Technology, Inc. Method for evacuating and sealing field emission displays
EP0782169A1 (en) * 1995-12-29 1997-07-02 STMicroelectronics, Inc. A field emission display
US5827102A (en) * 1996-05-13 1998-10-27 Micron Technology, Inc. Low temperature method for evacuating and sealing field emission displays
US6109994A (en) * 1996-12-12 2000-08-29 Candescent Technologies Corporation Gap jumping to seal structure, typically using combination of vacuum and non-vacuum environments
US5820435A (en) * 1996-12-12 1998-10-13 Candescent Technologies Corporation Gap jumping to seal structure including tacking of structure
US6139390A (en) * 1996-12-12 2000-10-31 Candescent Technologies Corporation Local energy activation of getter typically in environment below room pressure
JPH11135018A (ja) 1997-08-29 1999-05-21 Canon Inc 画像形成装置の製造方法、製造装置および画像形成装置
JP3619024B2 (ja) * 1997-09-16 2005-02-09 キヤノン株式会社 電子源の製造方法及び画像形成装置の製造方法
DE69839966D1 (de) * 1997-10-01 2008-10-16 Complete Multilayer Solutions Anzeigevorrichtung
KR100255129B1 (ko) * 1997-12-26 2000-05-01 박호군 유리기판 사이의 접합을 이용한 전계방출표시소자 진공 실장 장치 및 방법
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JP3323853B2 (ja) * 1999-02-25 2002-09-09 キヤノン株式会社 電子放出素子、電子源及び画像形成装置の製造方法
KR100491913B1 (ko) * 1999-03-31 2005-05-27 가부시끼가이샤 도시바 평판형 화상 표시 장치의 제조 방법 및 평판형 화상 표시장치
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Publication number Priority date Publication date Assignee Title
JPH1040818A (ja) * 1996-07-19 1998-02-13 Dainippon Printing Co Ltd プラズマディスプレイパネル及びその製造方法
KR970071952A (ko) * 1997-06-24 1997-11-07 이종덕 전계방출형 디스플레이용 초고진공 실장방법 및 장치
KR19990053755A (ko) * 1997-12-24 1999-07-15 김영환 플라즈마 디스플레이 패널의 제조장치 및 이를 이용한 플라즈마 디스플레이 패널의 제조 방법
KR19990065843A (ko) * 1998-01-17 1999-08-05 구자홍 Fed제조 공정중 진공 페키징 방법 및 그에 따른 패널 구조
KR20000059971A (ko) * 1999-03-10 2000-10-16 구자홍 플라즈마 디스플레이 패널의 프론트/리어 패널 결합방법

Also Published As

Publication number Publication date
EP1139376A3 (en) 2004-03-17
EP1139376A2 (en) 2001-10-04
JP2001338578A (ja) 2001-12-07
TW503447B (en) 2002-09-21
US20030148696A1 (en) 2003-08-07
US6672928B2 (en) 2004-01-06
EP1139376B1 (en) 2010-05-19
DE60142144D1 (de) 2010-07-01
JP3754883B2 (ja) 2006-03-15
KR20010090524A (ko) 2001-10-18
ATE468600T1 (de) 2010-06-15
US20020004354A1 (en) 2002-01-10
US6634916B2 (en) 2003-10-21

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