IT1298690B1 - Transistore igbt con controllo integrato - Google Patents

Transistore igbt con controllo integrato

Info

Publication number
IT1298690B1
IT1298690B1 IT96MI002384A ITMI962384A IT1298690B1 IT 1298690 B1 IT1298690 B1 IT 1298690B1 IT 96MI002384 A IT96MI002384 A IT 96MI002384A IT MI962384 A ITMI962384 A IT MI962384A IT 1298690 B1 IT1298690 B1 IT 1298690B1
Authority
IT
Italy
Prior art keywords
integrated control
igbt transistor
igbt
transistor
integrated
Prior art date
Application number
IT96MI002384A
Other languages
English (en)
Inventor
Bruno C Nadd
Niraj Ranjan
Original Assignee
Int Rectifier Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Int Rectifier Corp filed Critical Int Rectifier Corp
Publication of ITMI962384A0 publication Critical patent/ITMI962384A0/it
Publication of ITMI962384A1 publication Critical patent/ITMI962384A1/it
Application granted granted Critical
Publication of IT1298690B1 publication Critical patent/IT1298690B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
    • H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
    • H01L27/0623—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402—Field plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
IT96MI002384A 1995-11-17 1996-11-15 Transistore igbt con controllo integrato IT1298690B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/560,328 US5798538A (en) 1995-11-17 1995-11-17 IGBT with integrated control

Publications (3)

Publication Number Publication Date
ITMI962384A0 ITMI962384A0 (it) 1996-11-15
ITMI962384A1 ITMI962384A1 (it) 1998-05-15
IT1298690B1 true IT1298690B1 (it) 2000-01-12

Family

ID=24237327

Family Applications (1)

Application Number Title Priority Date Filing Date
IT96MI002384A IT1298690B1 (it) 1995-11-17 1996-11-15 Transistore igbt con controllo integrato

Country Status (9)

Country Link
US (1) US5798538A (it)
JP (1) JP3302275B2 (it)
KR (1) KR100300673B1 (it)
DE (1) DE19647398B4 (it)
FR (1) FR2741999A1 (it)
GB (1) GB2307343B (it)
IT (1) IT1298690B1 (it)
SG (1) SG69992A1 (it)
TW (1) TW308723B (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184585B1 (en) * 1997-11-13 2001-02-06 International Rectifier Corp. Co-packaged MOS-gated device and control integrated circuit
US6448587B1 (en) * 1997-11-28 2002-09-10 Hitachi, Ltd. Circuit incorporated IGBT and power conversion device using the same
US6069372A (en) * 1998-01-22 2000-05-30 Mitsubishi Denki Kabushiki Kaisha Insulated gate type semiconductor device with potential detection gate for overvoltage protection
JP4431761B2 (ja) * 1998-01-27 2010-03-17 富士電機システムズ株式会社 Ｍｏｓ型半導体装置
JP3707942B2 (ja) * 1998-12-17 2005-10-19 三菱電機株式会社 半導体装置とそれを用いた半導体回路
JP4023035B2 (ja) * 1999-07-02 2007-12-19 松下電器産業株式会社 半導体装置及びその製造方法
JPWO2002059478A1 (ja) * 2001-01-24 2004-05-27 株式会社日立製作所 内燃機関用点火装置
JP2009512994A (ja) * 2005-06-24 2009-03-26 インターナショナル レクティファイアー コーポレイション 低インダクタンスの半導体ハーフブリッジモジュール
JP5332175B2 (ja) * 2007-10-24 2013-11-06 富士電機株式会社 制御回路を備える半導体装置
JP5609087B2 (ja) * 2009-12-04 2014-10-22 富士電機株式会社 内燃機関点火装置用半導体装置
CN105103284B (zh) 2013-09-11 2017-11-14 富士电机株式会社 半导体装置
JP6275282B2 (ja) * 2015-01-13 2018-02-07 三菱電機株式会社 半導体装置、その製造方法および半導体モジュール

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618255B2 (ja) * 1984-04-04 1994-03-09 株式会社東芝 半導体装置
JPH0821678B2 (ja) * 1987-05-29 1996-03-04 日産自動車株式会社 半導体装置
US5156989A (en) * 1988-11-08 1992-10-20 Siliconix, Incorporated Complementary, isolated DMOS IC technology
JP2858404B2 (ja) * 1990-06-08 1999-02-17 株式会社デンソー 絶縁ゲート型バイポーラトランジスタおよびその製造方法
JP2973588B2 (ja) * 1991-06-10 1999-11-08 富士電機株式会社 Ｍｏｓ型半導体装置
JPH05152574A (ja) * 1991-11-29 1993-06-18 Fuji Electric Co Ltd 半導体装置
JPH05283617A (ja) * 1992-03-31 1993-10-29 Nec Kansai Ltd 半導体装置およびその製造方法
US5430314A (en) * 1992-04-23 1995-07-04 Siliconix Incorporated Power device with buffered gate shield region
DE4429903B4 (de) * 1993-09-14 2004-02-05 International Rectifier Corp., El Segundo Leistungshalbleiteranordnung mit Überlastschutzschaltung
JP3135762B2 (ja) * 1993-10-29 2001-02-19 株式会社東芝 半導体集積回路装置
JP3156487B2 (ja) * 1994-03-04 2001-04-16 富士電機株式会社 絶縁ゲート型バイポーラトランジスタ
JP3183020B2 (ja) * 1994-03-17 2001-07-03 株式会社日立製作所 保護回路を内蔵した絶縁ゲート型半導体装置
US5550701A (en) * 1994-08-30 1996-08-27 International Rectifier Corporation Power MOSFET with overcurrent and over-temperature protection and control circuit decoupled from body diode
GB9423423D0 (en) * 1994-11-14 1995-01-11 Fuji Electric Co Ltd Semiconductor device

Also Published As

Publication number Publication date
JP3302275B2 (ja) 2002-07-15
ITMI962384A0 (it) 1996-11-15
US5798538A (en) 1998-08-25
SG69992A1 (en) 2000-01-25
DE19647398A1 (de) 1997-06-12
FR2741999A1 (fr) 1997-06-06
GB2307343B (en) 2000-11-15
GB2307343A (en) 1997-05-21
TW308723B (it) 1997-06-21
KR970030879A (ko) 1997-06-26
GB9623879D0 (en) 1997-01-08
DE19647398B4 (de) 2006-03-16
ITMI962384A1 (it) 1998-05-15
JPH09181315A (ja) 1997-07-11
KR100300673B1 (ko) 2001-11-22

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