IN2014CN02652A - - Google Patents
Info
- Publication number
- IN2014CN02652A IN2014CN02652A IN2652CHN2014A IN2014CN02652A IN 2014CN02652 A IN2014CN02652 A IN 2014CN02652A IN 2652CHN2014 A IN2652CHN2014 A IN 2652CHN2014A IN 2014CN02652 A IN2014CN02652 A IN 2014CN02652A
- Authority
- IN
- India
- Prior art keywords
- wafer
- slots
- bonding
- substrates
- singulation
- Prior art date
Links
- 235000012431 wafers Nutrition 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0054—Processes for devices with an active region comprising only group IV elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Device Packages (AREA)
- Led Devices (AREA)
- Dicing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161549772P | 2011-10-21 | 2011-10-21 | |
PCT/IB2012/055357 WO2013057617A1 (fr) | 2011-10-21 | 2012-10-05 | Liaison de tranches à faible déformation par l'utilisation de substrats à fentes |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014CN02652A true IN2014CN02652A (fr) | 2015-06-26 |
Family
ID=47324211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN2652CHN2014 IN2014CN02652A (fr) | 2011-10-21 | 2012-10-05 |
Country Status (8)
Country | Link |
---|---|
US (2) | US9583676B2 (fr) |
EP (1) | EP2769406B1 (fr) |
JP (1) | JP6100789B2 (fr) |
KR (1) | KR102020001B1 (fr) |
CN (1) | CN103907175B (fr) |
IN (1) | IN2014CN02652A (fr) |
TW (1) | TWI553746B (fr) |
WO (1) | WO2013057617A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6100789B2 (ja) | 2011-10-21 | 2017-03-22 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | スロット付き基板を用いることによる低い反りのウエハ接合 |
CN107248546B (zh) * | 2016-08-18 | 2019-01-18 | 长春希达电子技术有限公司 | 表面平整一致的集成封装显示模组及其制造方法 |
CN108807201B (zh) * | 2017-05-03 | 2023-04-14 | 叶秀慧 | 用于防止印刷电路板及晶圆对接时因热膨胀产生扭曲的方法及结构 |
JP6922788B2 (ja) * | 2018-03-05 | 2021-08-18 | 三菱電機株式会社 | 半導体圧力センサ |
CN110600416A (zh) * | 2018-06-12 | 2019-12-20 | 上海新微技术研发中心有限公司 | 一种薄片基板的加工方法 |
US11421316B2 (en) * | 2018-10-26 | 2022-08-23 | Applied Materials, Inc. | Methods and apparatus for controlling warpage in wafer level packaging processes |
CN113380614B (zh) * | 2021-06-10 | 2023-04-07 | 东莞安晟半导体技术有限公司 | 一种晶圆减薄方法 |
Family Cites Families (39)
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JPS5852846A (ja) * | 1981-09-25 | 1983-03-29 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
JP3376656B2 (ja) * | 1993-12-01 | 2003-02-10 | 昭和電工株式会社 | ヘテロ接合ホール素子 |
US5506753A (en) | 1994-09-26 | 1996-04-09 | International Business Machines Corporation | Method and apparatus for a stress relieved electronic module |
JPH08236615A (ja) * | 1995-03-01 | 1996-09-13 | Ube Ind Ltd | 誘電体分離基板及びその製造方法 |
JPH10244706A (ja) * | 1997-03-06 | 1998-09-14 | Oki Data:Kk | Ledヘッド |
JPH1126960A (ja) * | 1997-07-04 | 1999-01-29 | Toshiba Corp | 基板取付装置 |
JP4456234B2 (ja) * | 2000-07-04 | 2010-04-28 | パナソニック株式会社 | バンプ形成方法 |
JP2002026069A (ja) | 2000-06-30 | 2002-01-25 | Matsushita Electric Ind Co Ltd | 半導体素子の実装方法 |
JP3772816B2 (ja) * | 2002-09-24 | 2006-05-10 | 昭和電工株式会社 | 窒化ガリウム結晶基板、その製造方法、窒化ガリウム系半導体素子および発光ダイオード |
JP2004193497A (ja) * | 2002-12-13 | 2004-07-08 | Nec Electronics Corp | チップサイズパッケージおよびその製造方法 |
KR100495215B1 (ko) | 2002-12-27 | 2005-06-14 | 삼성전기주식회사 | 수직구조 갈륨나이트라이드 발광다이오드 및 그 제조방법 |
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US7170167B2 (en) * | 2004-09-24 | 2007-01-30 | United Microelectronics Corp. | Method for manufacturing wafer level chip scale package structure |
CN100345251C (zh) | 2005-10-11 | 2007-10-24 | 中国电子科技集团公司第二十四研究所 | 在具有深槽图形的硅基衬底上制作硅薄膜的方法 |
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JP2007158133A (ja) * | 2005-12-06 | 2007-06-21 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体素子の製造方法 |
JP4315174B2 (ja) * | 2006-02-16 | 2009-08-19 | セイコーエプソン株式会社 | ラム波型高周波デバイスの製造方法 |
JP2008147608A (ja) * | 2006-10-27 | 2008-06-26 | Canon Inc | Ledアレイの製造方法とledアレイ、及びledプリンタ |
US8232564B2 (en) * | 2007-01-22 | 2012-07-31 | Cree, Inc. | Wafer level phosphor coating technique for warm light emitting diodes |
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JP2009071251A (ja) | 2007-09-18 | 2009-04-02 | Yokogawa Electric Corp | フリップチップbga基板 |
US8878219B2 (en) * | 2008-01-11 | 2014-11-04 | Cree, Inc. | Flip-chip phosphor coating method and devices fabricated utilizing method |
US8664747B2 (en) * | 2008-04-28 | 2014-03-04 | Toshiba Techno Center Inc. | Trenched substrate for crystal growth and wafer bonding |
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US8240875B2 (en) * | 2008-06-25 | 2012-08-14 | Cree, Inc. | Solid state linear array modules for general illumination |
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US8901578B2 (en) * | 2011-05-10 | 2014-12-02 | Rohm Co., Ltd. | LED module having LED chips as light source |
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JP6100789B2 (ja) | 2011-10-21 | 2017-03-22 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | スロット付き基板を用いることによる低い反りのウエハ接合 |
-
2012
- 2012-10-05 JP JP2014536361A patent/JP6100789B2/ja active Active
- 2012-10-05 US US14/352,698 patent/US9583676B2/en active Active
- 2012-10-05 WO PCT/IB2012/055357 patent/WO2013057617A1/fr active Application Filing
- 2012-10-05 CN CN201280051691.7A patent/CN103907175B/zh active Active
- 2012-10-05 KR KR1020147013450A patent/KR102020001B1/ko active IP Right Grant
- 2012-10-05 EP EP12798371.6A patent/EP2769406B1/fr active Active
- 2012-10-05 IN IN2652CHN2014 patent/IN2014CN02652A/en unknown
- 2012-10-19 TW TW101138781A patent/TWI553746B/zh active
-
2017
- 2017-02-21 US US15/438,592 patent/US10084110B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2769406A1 (fr) | 2014-08-27 |
CN103907175A (zh) | 2014-07-02 |
US9583676B2 (en) | 2017-02-28 |
EP2769406B1 (fr) | 2022-03-09 |
KR102020001B1 (ko) | 2019-09-09 |
TW201320203A (zh) | 2013-05-16 |
US20140252405A1 (en) | 2014-09-11 |
US10084110B2 (en) | 2018-09-25 |
WO2013057617A1 (fr) | 2013-04-25 |
US20170200853A1 (en) | 2017-07-13 |
JP6100789B2 (ja) | 2017-03-22 |
JP2015501536A (ja) | 2015-01-15 |
KR20140079499A (ko) | 2014-06-26 |
TWI553746B (zh) | 2016-10-11 |
CN103907175B (zh) | 2018-01-23 |
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