IL296295B1 - Grabbing device, transportation vehicle and transportation method - Google Patents

Grabbing device, transportation vehicle and transportation method

Info

Publication number
IL296295B1
IL296295B1 IL296295A IL29629522A IL296295B1 IL 296295 B1 IL296295 B1 IL 296295B1 IL 296295 A IL296295 A IL 296295A IL 29629522 A IL29629522 A IL 29629522A IL 296295 B1 IL296295 B1 IL 296295B1
Authority
IL
Israel
Prior art keywords
pair
portions
engaging
engaging portions
gripper device
Prior art date
Application number
IL296295A
Other languages
English (en)
Hebrew (he)
Other versions
IL296295A (en
Inventor
Kobayashi Makoto
Original Assignee
Murata Machinery Ltd
Kobayashi Makoto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd, Kobayashi Makoto filed Critical Murata Machinery Ltd
Publication of IL296295A publication Critical patent/IL296295A/en
Publication of IL296295B1 publication Critical patent/IL296295B1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
    • B66C1/22—Rigid members, e.g. L-shaped members, with parts engaging the under surface of the loads; Crane hooks
    • B66C1/28—Duplicate, e.g. pivoted, members engaging the loads from two sides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1918—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2811/00—Indexing codes relating to common features for more than one conveyor kind or type
    • B65G2811/09—Driving means for the conveyors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Manipulator (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
IL296295A 2020-03-13 2021-01-27 Grabbing device, transportation vehicle and transportation method IL296295B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020044629 2020-03-13
PCT/JP2021/002788 WO2021181923A1 (ja) 2020-03-13 2021-01-27 グリッパ装置、搬送車、及び搬送方法

Publications (2)

Publication Number Publication Date
IL296295A IL296295A (en) 2022-11-01
IL296295B1 true IL296295B1 (en) 2026-02-01

Family

ID=77671362

Family Applications (1)

Application Number Title Priority Date Filing Date
IL296295A IL296295B1 (en) 2020-03-13 2021-01-27 Grabbing device, transportation vehicle and transportation method

Country Status (8)

Country Link
US (1) US12139176B2 (https=)
EP (1) EP4109502A4 (https=)
JP (1) JP7367845B2 (https=)
KR (1) KR102700084B1 (https=)
CN (1) CN115280482B (https=)
IL (1) IL296295B1 (https=)
TW (1) TWI836195B (https=)
WO (1) WO2021181923A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023070578A (ja) * 2021-11-09 2023-05-19 ゴールド工業株式会社 基板収納容器
TWI797040B (zh) * 2022-02-17 2023-03-21 盟立自動化股份有限公司 高空走行式無人搬運車的搬運系統及無人搬運車
JP7480797B2 (ja) * 2022-03-14 2024-05-10 村田機械株式会社 天井搬送車システム
JP7745522B2 (ja) * 2022-08-30 2025-09-29 株式会社ダイフク 搬送車
JP2024150068A (ja) * 2023-04-10 2024-10-23 株式会社ダイフク 搬送車
KR102907269B1 (ko) * 2023-04-24 2026-01-05 한국항공우주산업 주식회사 Agv를 이용하여 조립체를 이송하는 방법 및 시스템

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6468021B1 (en) * 1998-12-18 2002-10-22 Asyst Technologies, Inc. Integrated intra-bay transfer, storage, and delivery system
US20150063963A1 (en) * 2013-08-30 2015-03-05 Daifuku Co., Ltd. Transport Device
US20150287623A1 (en) * 2014-04-07 2015-10-08 Daifuku Co., Ltd. Article Transport Vehicle
US20170323817A1 (en) * 2016-05-09 2017-11-09 Murata Machinery, Ltd. Transport device
JP2018093123A (ja) * 2016-12-07 2018-06-14 株式会社ダイフク 移載機

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US3438510A (en) * 1967-09-26 1969-04-15 Joseph E Fawell Wheel handling apparatus
DE19806231C1 (de) * 1998-02-16 1999-07-22 Jenoptik Jena Gmbh Einrichtung zum Greifen eines Objektes
JP4277182B2 (ja) * 2003-06-30 2009-06-10 オリエンタル工業株式会社 シリコンウェハー用洗浄装置
JP2005026594A (ja) * 2003-06-30 2005-01-27 Resuka:Kk 基板上に付着あるいは埋め込まれた固体試料の剥離試験方法
JP2006008355A (ja) * 2004-06-28 2006-01-12 Murata Mach Ltd 天井走行車
JP2007096140A (ja) * 2005-09-30 2007-04-12 Asyst Shinko Inc 懸垂式昇降搬送台車における物品の授受方法並びに装置
JP2007123673A (ja) * 2005-10-31 2007-05-17 Asyst Shinko Inc 物品収納用容器の防振機構
JP2011035022A (ja) 2009-07-30 2011-02-17 Murata Machinery Ltd 天井搬送車
CN104960820B (zh) * 2009-11-27 2017-05-31 株式会社大福 顶棚输送车
KR101169734B1 (ko) * 2010-01-04 2012-07-30 삼성전기주식회사 기판이송장치
KR20120003368A (ko) * 2010-07-02 2012-01-10 무라텍 오토메이션 가부시키가이샤 천정 반송차의 그리퍼 장치 및 천정 반송차
JP5750926B2 (ja) * 2011-02-15 2015-07-22 村田機械株式会社 天井搬送車
CN103534798B (zh) * 2011-05-17 2016-01-06 村田机械株式会社 空中搬运车
CH705297A1 (de) * 2011-07-21 2013-01-31 Tecan Trading Ag Greiferzange mit austauschbaren Greiferfingern.
JP2013045964A (ja) * 2011-08-25 2013-03-04 Sharp Corp 被処理基板の浸漬処理方法及び浸漬処理装置
JP5590420B2 (ja) * 2011-12-21 2014-09-17 株式会社ダイフク 物品搬送設備
JP5567095B2 (ja) * 2012-10-12 2014-08-06 東芝エレベータ株式会社 エレベータ装置
JP6179406B2 (ja) * 2014-01-10 2017-08-16 株式会社ダイフク 搬送装置
JP6171984B2 (ja) * 2014-03-07 2017-08-02 株式会社ダイフク 物品支持装置
JP6327124B2 (ja) * 2014-11-12 2018-05-23 株式会社ダイフク 物品搬送車
JP6702106B2 (ja) * 2016-09-09 2020-05-27 株式会社ダイフク 物品搬送装置
JP6801476B2 (ja) * 2017-02-01 2020-12-16 村田機械株式会社 天井搬送車
CN110612258B (zh) * 2017-05-11 2021-06-15 村田机械株式会社 输送系统以及输送方法
EP3670389B1 (en) * 2017-08-16 2024-05-15 Murata Machinery, Ltd. Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle
WO2019146276A1 (ja) * 2018-01-24 2019-08-01 村田機械株式会社 搬送車

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6468021B1 (en) * 1998-12-18 2002-10-22 Asyst Technologies, Inc. Integrated intra-bay transfer, storage, and delivery system
US20150063963A1 (en) * 2013-08-30 2015-03-05 Daifuku Co., Ltd. Transport Device
US20150287623A1 (en) * 2014-04-07 2015-10-08 Daifuku Co., Ltd. Article Transport Vehicle
US20170323817A1 (en) * 2016-05-09 2017-11-09 Murata Machinery, Ltd. Transport device
JP2018093123A (ja) * 2016-12-07 2018-06-14 株式会社ダイフク 移載機

Also Published As

Publication number Publication date
CN115280482B (zh) 2025-07-04
TW202139338A (zh) 2021-10-16
TWI836195B (zh) 2024-03-21
JPWO2021181923A1 (https=) 2021-09-16
KR102700084B1 (ko) 2024-08-27
IL296295A (en) 2022-11-01
KR20220150967A (ko) 2022-11-11
EP4109502A1 (en) 2022-12-28
WO2021181923A1 (ja) 2021-09-16
US12139176B2 (en) 2024-11-12
US20230134312A1 (en) 2023-05-04
CN115280482A (zh) 2022-11-01
JP7367845B2 (ja) 2023-10-24
EP4109502A4 (en) 2024-05-01

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