IL230235A - מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה - Google Patents

מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה

Info

Publication number
IL230235A
IL230235A IL230235A IL23023513A IL230235A IL 230235 A IL230235 A IL 230235A IL 230235 A IL230235 A IL 230235A IL 23023513 A IL23023513 A IL 23023513A IL 230235 A IL230235 A IL 230235A
Authority
IL
Israel
Prior art keywords
data
systems
methods
combination
utilizing design
Prior art date
Application number
IL230235A
Other languages
English (en)
Inventor
Ashok Kulkarni
Brian Duffy
Kais Maayah
Gordon Rouse
Original Assignee
Kla Tencor Tech Corp
Ashok Kulkarni
Brian Duffy
Kais Maayah
Gordon Rouse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/561,735 external-priority patent/US7676077B2/en
Priority claimed from US11/561,659 external-priority patent/US7570796B2/en
Application filed by Kla Tencor Tech Corp, Ashok Kulkarni, Brian Duffy, Kais Maayah, Gordon Rouse filed Critical Kla Tencor Tech Corp
Publication of IL230235A publication Critical patent/IL230235A/he

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00Information retrieval; Database structures therefor; File system structures therefor
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/31718Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30148Semiconductor; IC; Wafer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Quality & Reliability (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Data Mining & Analysis (AREA)
  • Databases & Information Systems (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
IL230235A 2005-11-18 2013-12-29 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה IL230235A (he)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US73829005P 2005-11-18 2005-11-18
US73794705P 2005-11-18 2005-11-18
US11/561,735 US7676077B2 (en) 2005-11-18 2006-11-20 Methods and systems for utilizing design data in combination with inspection data
PCT/US2006/061113 WO2007120280A2 (en) 2005-11-18 2006-11-20 Methods and systems for utilizing design data in combination with inspection data
US11/561,659 US7570796B2 (en) 2005-11-18 2006-11-20 Methods and systems for utilizing design data in combination with inspection data

Publications (1)

Publication Number Publication Date
IL230235A true IL230235A (he) 2015-05-31

Family

ID=38610775

Family Applications (14)

Application Number Title Priority Date Filing Date
IL191527A IL191527A (he) 2005-11-18 2008-05-18 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL230235A IL230235A (he) 2005-11-18 2013-12-29 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL230260A IL230260A (he) 2005-11-18 2013-12-31 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234289A IL234289A (he) 2005-11-18 2014-08-25 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234290A IL234290A (he) 2005-11-18 2014-08-25 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234318A IL234318A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234316A IL234316A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234319A IL234319A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234317A IL234317A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234343A IL234343A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234346A IL234346A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234345A IL234345A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234344A IL234344A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL253189A IL253189B (he) 2005-11-18 2017-06-27 מערכת ושיטה לשיוך דירוג לפגמים שנמצאו במצע לייצור שבבים

Family Applications Before (1)

Application Number Title Priority Date Filing Date
IL191527A IL191527A (he) 2005-11-18 2008-05-18 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה

Family Applications After (12)

Application Number Title Priority Date Filing Date
IL230260A IL230260A (he) 2005-11-18 2013-12-31 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234289A IL234289A (he) 2005-11-18 2014-08-25 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234290A IL234290A (he) 2005-11-18 2014-08-25 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234318A IL234318A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234316A IL234316A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234319A IL234319A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234317A IL234317A (he) 2005-11-18 2014-08-26 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234343A IL234343A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234346A IL234346A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234345A IL234345A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL234344A IL234344A (he) 2005-11-18 2014-08-27 מערכות ושיטות לשימוש במידע תכנוני ביחד עם מידע של בדיקה
IL253189A IL253189B (he) 2005-11-18 2017-06-27 מערכת ושיטה לשיוך דירוג לפגמים שנמצאו במצע לייצור שבבים

Country Status (5)

Country Link
EP (1) EP1955225A4 (he)
JP (12) JP5465880B2 (he)
KR (11) KR101885585B1 (he)
IL (14) IL191527A (he)
WO (2) WO2007120279A2 (he)

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