IL178450A - Manufacture of cadmium mercury telluride - Google Patents

Manufacture of cadmium mercury telluride

Info

Publication number
IL178450A
IL178450A IL178450A IL17845006A IL178450A IL 178450 A IL178450 A IL 178450A IL 178450 A IL178450 A IL 178450A IL 17845006 A IL17845006 A IL 17845006A IL 178450 A IL178450 A IL 178450A
Authority
IL
Israel
Prior art keywords
growing
layer
telluride
cadmium
cadmium mercury
Prior art date
Application number
IL178450A
Other languages
English (en)
Other versions
IL178450A0 (en
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of IL178450A0 publication Critical patent/IL178450A0/en
Publication of IL178450A publication Critical patent/IL178450A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/46Sulfur-, selenium- or tellurium-containing compounds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/221Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
    • H10F30/2212Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction the devices comprising active layers made of only Group II-VI materials, e.g. HgCdTe infrared photodiodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • H10F71/1253The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe comprising at least three elements, e.g. HgCdTe

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Light Receiving Elements (AREA)
  • Led Devices (AREA)
IL178450A 2004-04-06 2006-10-04 Manufacture of cadmium mercury telluride IL178450A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0407804.4A GB0407804D0 (en) 2004-04-06 2004-04-06 Manufacture of cadmium mercury telluride
PCT/GB2005/001322 WO2005098097A1 (en) 2004-04-06 2005-04-05 Manufacture of cadmium mercury telluride

Publications (2)

Publication Number Publication Date
IL178450A0 IL178450A0 (en) 2007-02-11
IL178450A true IL178450A (en) 2012-05-31

Family

ID=32320443

Family Applications (1)

Application Number Title Priority Date Filing Date
IL178450A IL178450A (en) 2004-04-06 2006-10-04 Manufacture of cadmium mercury telluride

Country Status (10)

Country Link
US (1) US8021914B2 (https=)
EP (1) EP1740742A1 (https=)
JP (1) JP2007532007A (https=)
KR (1) KR101110592B1 (https=)
CN (1) CN1965111B (https=)
CA (1) CA2561648A1 (https=)
GB (1) GB0407804D0 (https=)
IL (1) IL178450A (https=)
TW (1) TW200539320A (https=)
WO (1) WO2005098097A1 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2649322C (en) * 2008-09-30 2011-02-01 5N Plus Inc. Cadmium telluride production process
US8912428B2 (en) * 2008-10-22 2014-12-16 Epir Technologies, Inc. High efficiency multijunction II-VI photovoltaic solar cells
GB0918720D0 (en) 2009-10-23 2009-12-09 Qinetiq Ltd Identification device
GB0921053D0 (en) 2009-12-01 2010-01-13 Selex Sensors & Airborne Sys Infra red detectors and methods of manufacture
US9837563B2 (en) * 2009-12-17 2017-12-05 Epir Technologies, Inc. MBE growth technique for group II-VI inverted multijunction solar cells
US8541256B2 (en) * 2011-04-17 2013-09-24 Chang-Feng Wan Method of cadmium molecular beam based anneals for manufacture of HgCdTe photodiode arrays
US20130032810A1 (en) * 2011-08-03 2013-02-07 Bridgelux, Inc. Led on silicon substrate using zinc-sulfide as buffer layer
FR2983351B1 (fr) * 2011-11-28 2014-01-24 Commissariat Energie Atomique Diode p/n a heterostructure controlee autopositionnee sur hgcdte pour imageurs infrarouges
FR2997965B1 (fr) * 2012-11-12 2019-11-22 Electricite De France Enceinte pour le traitement thermique d'un materiau reactif, notamment pour la realisation de depot de couches sur un substrat, et procede de traitement thermique dans une telle enceinte
CN103074677A (zh) * 2013-01-17 2013-05-01 山东大学 一种碲化锌同质外延层的制备方法
FR3021807B1 (fr) 2014-05-27 2017-09-29 Commissariat A L Energie Atomique Et Aux Energies Alternatives Matrice de photodiodes mesa a ftm amelioree
DE112017004005B4 (de) 2016-08-10 2024-07-18 Sumco Corporation Verfahren zur herstellung von siliziumepitaxialwafern
US11121302B2 (en) 2018-10-11 2021-09-14 SeeQC, Inc. System and method for superconducting multi-chip module
US11519095B2 (en) * 2019-04-22 2022-12-06 Peng DU MBE system with direct evaporation pump to cold panel
WO2021022558A1 (en) * 2019-08-08 2021-02-11 China Triumph International Engineering Co., Ltd. A method to deposit thin film high quality absorber layer
CN120519960B (zh) * 2025-07-25 2025-09-16 浙江拓感科技有限公司 基于图形化蓝宝石衬底的碲镉汞材料液相外延方法

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3168017D1 (en) * 1980-05-27 1985-02-14 Secr Defence Brit Manufacture of cadmium mercury telluride
GB8324531D0 (en) * 1983-09-13 1983-10-12 Secr Defence Cadmium mercury telluride
GB8428032D0 (en) 1984-11-06 1984-12-12 Secr Defence Growth of crystalline layers
US4804638A (en) * 1986-12-18 1989-02-14 Raytheon Company Metalorganic chemical vapor deposition growth of Group II-IV semiconductor materials having improved compositional uniformity
GB2202236B (en) 1987-03-09 1991-04-24 Philips Electronic Associated Manufacture of electronic devices comprising cadmium mercury telluride
US4970567A (en) 1987-11-23 1990-11-13 Santa Barbara Research Center Method and apparatus for detecting infrared radiation
US4910154A (en) * 1988-12-23 1990-03-20 Ford Aerospace Corporation Manufacture of monolithic infrared focal plane arrays
US4999694A (en) * 1989-08-18 1991-03-12 At&T Bell Laboratories Photodiode
JPH03171634A (ja) 1989-11-29 1991-07-25 Furukawa Electric Co Ltd:The Fet用電極形成層付エピタキシャルウェーハ
JPH04145669A (ja) * 1990-10-05 1992-05-19 Daido Steel Co Ltd 積層型HgCdTe化合物半導体
JPH04193793A (ja) 1990-11-26 1992-07-13 Mitsubishi Electric Corp 赤外線検知基材の製造方法
US5192695A (en) * 1991-07-09 1993-03-09 Fermionics Corporation Method of making an infrared detector
JP3159788B2 (ja) 1991-07-12 2001-04-23 富士通株式会社 化合物半導体の結晶成長方法
JP2795002B2 (ja) * 1991-09-19 1998-09-10 日本電気株式会社 HgCdTe薄膜の製造方法
JPH05226685A (ja) * 1992-02-14 1993-09-03 Fujitsu Ltd 光検知素子の製造方法
JPH05315580A (ja) 1992-05-06 1993-11-26 Fujitsu Ltd 半導体光検知装置およびその製造方法
JPH06177038A (ja) 1992-12-09 1994-06-24 Nec Corp 分子線エピタキシー法による水銀カドミウムテルル薄膜の形成方法およびそれに用いる基板ホルダー
US5380669A (en) 1993-02-08 1995-01-10 Santa Barbara Research Center Method of fabricating a two-color detector using LPE crystal growth
JPH06267998A (ja) 1993-03-15 1994-09-22 Fujitsu Ltd エピタキシャル結晶を備えた半導体基板
US5306386A (en) 1993-04-06 1994-04-26 Hughes Aircraft Company Arsenic passivation for epitaxial deposition of ternary chalcogenide semiconductor films onto silicon substrates
JP2513126B2 (ja) 1993-06-23 1996-07-03 日本電気株式会社 MBE法によるSi基板上CdTe成長方法
IL108589A (en) 1994-02-08 1998-06-15 Technion Res & Dev Foundation SINGLE LAYER PLANAR Hg Cd Te PHOTOVOLTAIC INFRARED DETECTOR WITH HETEROSTRUCTURE PASSIVATION AND P-ON-N HOMOJUNCTION
JPH07240374A (ja) 1994-02-28 1995-09-12 Sumitomo Chem Co Ltd 3−5族化合物半導体結晶
JPH07335929A (ja) 1994-06-03 1995-12-22 Fujitsu Ltd 半導体光検知装置
JPH08107068A (ja) 1994-10-03 1996-04-23 Nec Corp MBE法によるSi基板上CdTe成長方法
JP2570646B2 (ja) * 1994-12-13 1997-01-08 日本電気株式会社 Siベ−ス半導体結晶基板及びその製造方法
US5742089A (en) * 1995-06-07 1998-04-21 Hughes Electronics Growth of low dislocation density HGCDTE detector structures
US6045614A (en) 1996-03-14 2000-04-04 Raytheon Company Method for epitaxial growth of twin-free, (111)-oriented II-VI alloy films on silicon substrates
US5838053A (en) * 1996-09-19 1998-11-17 Raytheon Ti Systems, Inc. Method of forming a cadmium telluride/silicon structure
JP3006534B2 (ja) * 1997-03-31 2000-02-07 日本電気株式会社 半導体装置
FR2763608B1 (fr) 1997-05-21 1999-06-18 Commissariat Energie Atomique Nacelle d'epitaxie pour depot d'une couche de cdhgte par epitaxie en phase liquide sur un heterosubstrat et procede de depot de cdhgte sur un heterosubstrat utilisant cette nacelle
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Also Published As

Publication number Publication date
KR20070011449A (ko) 2007-01-24
US20070197022A1 (en) 2007-08-23
CA2561648A1 (en) 2005-10-20
JP2007532007A (ja) 2007-11-08
WO2005098097A1 (en) 2005-10-20
TW200539320A (en) 2005-12-01
EP1740742A1 (en) 2007-01-10
US8021914B2 (en) 2011-09-20
HK1102198A1 (en) 2007-11-09
KR101110592B1 (ko) 2012-02-17
CN1965111A (zh) 2007-05-16
GB0407804D0 (en) 2004-05-12
CN1965111B (zh) 2011-10-19
IL178450A0 (en) 2007-02-11

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Legal Events

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